O-FIB: far-field-induced near-field breakdown for direct nanowriting in an atmospheric environment

Near-Field-Regulated Ultrafast Laser Supra-Wavelength Structuring Directly on Ultrahard Metallic Glasses

The ultrafast-laser-matter interactions enable "top-down" laser surface structuring, especially for materials difficult to process, with "bottom-up" self-organizing features. The subwavelength scenarios of laser-induced structuring are improved in defects and long-range order by applying positive/negative feedbacks. It is still hardly reported for supra-wavelength laser structuring more associated with complicated thermo/hydro-dynamics. For the first time to the knowledge, the near-field-regulated ultrafast-laser lithography of self-arrayed supra-wavelength micro/nano-pores directly on ultra-hard metallic glass is developed here. The plasmonic hot spots on pre-structures, as the positive feedback, clamped the lateral geometries (i.e., position, size). Simultaneously, it drilled and self-organized into micro/nano-pore arrays by photo-dynamic plasma ablation and Marangoni removal confined under specific femtosecond-laser irradiation, as the negative feedback. The mechanisms and finite element modeling of the multi-physical transduction (based on the two-temperature model), the far-field/near-field coupling, and the polarization dependence during laser-matter interactions are studied. Large-area micro/nano-pore arrays (centimeter scale or larger)  are manufactured with tunable periods (1-5 µm) and geometries (e.g., diameters of 500 nm-6 µm using 343, 515, and 1030 lasers, respectively). Consequently, the mid/far-infrared reflectivity at 2.5-6.5 µm iss decreased from ≈80% to ≈5%. The universality of multi-physical coupling and near-field enhancements makes this approach widely applicable, or even irreplaceable, in various applications.

Laser nanofabrication inside silicon with spatial beam modulation and anisotropic seeding

Nanofabrication in silicon, arguably the most important material for modern technology, has been limited exclusively to its surface. Existing lithography methods cannot penetrate the wafer surface without altering it, whereas emerging laser-based subsurface or in-chip fabrication remains at greater than 1 μm resolution. In addition, available methods do not allow positioning or modulation with sub-micron precision deep inside the wafer. The fundamental difficulty of breaking these dimensional barriers is two-fold, i.e., complex nonlinear effects inside the wafer and the inherent diffraction limit for laser light. Here, we overcome these challenges by exploiting spatially-modulated laser beams and anisotropic feedback from preformed subsurface structures, to establish controlled nanofabrication capability inside silicon. We demonstrate buried nanostructures of feature sizes down to 100 ± 20 nm, with subwavelength and multi-dimensional control; thereby improving the state-of-the-art by an order-of-magnitude. In order to showcase the emerging capabilities, we fabricate nanophotonics elements deep inside Si, exemplified by nanogratings with record diffraction efficiency and spectral control. The reported advance is an important step towards 3D nanophotonics systems, micro/nanofluidics, and 3D electronic-photonic integrated systems.

Sub-diffraction limited nanogroove fabrication of 30 nm features on diamond films using 800 nm femtosecond laser irradiation

By controlling the 800 nm fs laser energy and applying an isopropyl alcohol environment, controlled sub-diffraction limited lithography with a characteristic structure of approximately 30 nm was achieved on the surface of diamond films, and diamond gratings with a period of 200 nm were fabricated. The fabrication of single grooves with a feature size of 30 nm demonstrates the potential for patterning periodic or nonperiodic structures, and the fabrication of 200 nm periodic grating structures demonstrates the ability of the technique to withstand laser proximity effects. This enhances the technology of diamond film nanofabrication and broadens its potential applications in areas such as optoelectronics and biology.

Laser manufacturing of spatial resolution approaching quantum limit

Atomic and close-to-atom scale manufacturing is a promising avenue toward single-photon emitters, single-electron transistors, single-atom memory, and quantum-bit devices for future communication, computation, and sensing applications. Laser manufacturing is outstanding to this end for ease of beam manipulation, batch production, and no requirement for photomasks. It is, however, suffering from optical diffraction limits. Herein, we report a spatial resolution improved to the quantum limit by exploiting a threshold tracing and lock-in method, whereby the two-order gap between atomic point defect complexes and optical diffraction limit is surpassed, and a feature size of <5 nm is realized. The underlying physics is that the uncertainty of local atom thermal motion dominates electron excitation, rather than the power density slope of the incident laser. We show that the colour centre yield in hexagonal boron nitride is transformed from stochastic to deterministic, and the emission from individual sites becomes polychromatic to monochromatic. As a result, single colour centres in the regular array are deterministically created with a unity yield and high positional accuracy, serving as a step forward for integrated quantum technological applications.

High-Transmission Biomimetics Structural Surfaces Produced via Ultrafast Laser Manufacturing

Inspired by periodically aligned micro/nanostructures on biological surfaces, researchers have been fabricating biomimetic structures with superior performance. As a promising and versatile tool, an ultrafast laser combined with other forms of processing technology has been utilized to manufacture functional structures, e.g., the biomimetic subwavelength structures to restrain the surface Fresnel reflectance. In this review paper, we interpret the biomimetic mechanism of antireflective subwavelength structures (ARSSs) for high-transmission windows. Recent advances in the fabrication of ARSSs with an ultrafast laser are summarized and introduced. The limitations and challenges of laser processing technology are discussed, and the future prospects for advancement are outlined, too.

High-sensitivity fiber optic temperature sensor based on CTFBG-FPI and Vernier effect

A novel high-sensitivity temperature sensor based on a chirped thin-core fiber Bragg grating Fabry-Perot interferometer (CTFBG-FPI) and the Vernier effect is proposed and demonstrated. With femtosecond laser direct writing technology, two CTFBG-FPIs with different interferometric cavity lengths are inscribed inside a thin-core fiber to form a Vernier effect system. The two FPIs consist of two pairs of CTFBGs with a full width at half maximum (FWHM) of 66.5 nm staggered in parallel. The interferometric cavity lengths of the two FPIs were designed to be 2 mm and 1.98 mm as the reference arm and sensing arm of the sensor, respectively. The temperature sensitivity of this sensor was measured to be -1.084 nm/°C in a range of 40-90°C. This sensor is expected to play a crucial role in precision temperature measurement applications.

Optical near fields for ablation of periodic structures

The formation mechanism of laser-induced periodic surface structures (LIPSS) has been a key to high-resolution sub-diffraction lithography or high-efficiency large-area nanotexturing. We show the evolution of LIPSS formation from a nanohole seed structure to high-spatial-frequency LIPSS by using a tightly focused and rectangular-shaped laser beam with different shape-polarization orientations. Formation of LIPSS based on light intensity distribution without invoking any long-range electromagnetic modes achieved quantitative match between modeling and experiment. Our results clearly show the entire step-like and deterministic process of LIPSS evolution based on experimental data and numerical simulations, revealing the dominant structural near-field enhancement on the ripple formation. A rectangular-shaped beam with an aspect ratio of 7:3 was used to break the symmetry of a circularly shaped focus. By azimuthally rotating the orientation of the focal spot and the polarization, it is possible to visualize the far-field effect for the initial seed structure formation and the competition between the far and near fields in the subsequent structure evolution.

Integration of cross-scale milli/microlenses by ion beam etching and femtosecond laser modification

Integrated cross-scale milli/microlenses offer irreplaceable functions in modern integrated optics with the advantage of reducing the size of the optical system to millimeters or microns. However, the technologies for fabricating millimeter-scale lenses and microlenses are always incompatible, which makes the successful fabrication of cross-scale milli/microlenses with a controlled morphology challenging. Here, ion beam etching is proposed as a means to fabricate smooth millimeter-scale lenses on various hard materials. In addition, by combining femtosecond laser modification and ion beam etching, an integrated cross-scale concave milli/microlens (27,000 microlenses on a lens with a diameter of 2.5 mm) is demonstrated on fused silica, and can be used as the template for a compound eye. The results provide a new, to the best of our knowledge, route for the flexible fabrication of cross-scale optical components for modern integrated optical systems.

Recent Developments of Femtosecond Laser Direct Writing for Meta-Optics

Micro-optics based on the artificial adjustment of physical dimensions, such as the phase, polarization, and wavelength of light, constitute the basis of contemporary information optoelectronic technology. As the main means of optical integration, it has become one of the important ways to break through the future bottleneck of microelectronic technology. Geometric phase optical components can precisely control the polarization, phase, amplitude and other properties of the light field at the sub-wavelength scale by periodically arranging nanometer-sized unit structures. It has received extensive attention in the fields of holographic imaging and polarization optics. This paper reviews the physical mechanism of micro-nano structure modification, research progress of femtosecond laser direct-writing photoresist, femtosecond laser ablation of metal thin films, femtosecond laser-induced nanograting, and other methods for preparing polarization converters and geometric phase optics. The challenges of fabricating ultrafast optical devices using femtosecond laser technology are discussed.

Nanoscale control of non-reciprocal ripple writing

Femtosecond laser-induced deep-subwavelength structures have attracted much attention as a nanoscale surface texturization technique. A better understanding of the formation conditions and period control is required. Herein, we report a method of non-reciprocal writing via a tailored optical far-field exposure, where the period of ripples varies along different scanning directions, and achieve a continuous manipulation of the period from 47 to 112 nm (±4 nm) for a 100-nm-thick indium tin oxide (ITO) on glass. A full electromagnetic model was developed to demonstrate the redistributed localized near-field at different stages of ablation with nanoscale precision. It explains the formation of ripples and the asymmetry of the focal spot determines the non-reciprocity of ripple writing. Combined with beam shaping techniques, we achieved non-reciprocal writing (regarding scanning direction) using an aperture-shaped beam. The non-reciprocal writing is expected to open new paths for precise and controllable nanoscale surface texturing.

Quantum Emitters with Narrow Band and High Debye-Waller Factor in Aluminum Nitride Written by Femtosecond Laser

Solid-state quantum emitters (QEs) are central components for photonic-based quantum information processing. Recently, bright QEs in III-nitride semiconductors, such as aluminum nitride (AlN), have attracted increasing interest because of the mature commercial application of the nitrides. However, the reported QEs in AlN suffer from broad phonon side bands (PSBs) and low Debye-Waller factors. Meanwhile, there is also a need for more reliable fabrication methods of AlN QEs for integrated quantum photonics. Here, we demonstrate that laser-induced QEs in AlN exhibit robust emission with a strong zero phonon line, narrow line width, and weak PSB. The creation yield of a single QE could be more than 50%. More importantly, they have a high Debye-Waller factor (>65%) at room temperature, which is the highest result among reported AlN QEs. Our results illustrate the potential of laser writing to create high-quality QEs for quantum technologies and provide further insight into laser writing defects in relevant materials.

Femtosecond laser regulatory focus ablation patterning of a fluorescent film up to 1/10 of the scale of the diffraction limit

Patterned quantum dots (QDs) and perovskites have attracted a great deal of attention in the fabrication of optoelectronic device arrays for transistors, image sensors and displays. However, the resolution of current patterning technologies is insufficient for nanopatterned QDs and perovskites to be integrated in advanced optoelectronic and photonic applications. Herein, we demonstrate a femtosecond laser regulatory focus ablation (FsLRFA) patterning technique of a fluorescent film involving both semiconductor core-shell QDs and perovskite up to 1/10th of the scale of the diffraction limit. Annular lines with a 200 nm-width are obtained after the irradiation of the femtosecond laser. Moreover, the combination of ablated different geometries enables the laser focal spot as brushes for FsLRFA patterning technology to fabricate delicate and programmable patterns on the fluorescent film. This technology with nanoscale resolution and patterning capability paves the road toward highly integrated applications based on QDs and perovskites.

Femtosecond Laser Ablation of Quantum Dot Films toward Physical Unclonable Multilevel Fluorescent Anticounterfeiting Labels

Femtosecond laser ablation (FsLA) technology has been demonstrated to achieve programmable ablation and removal of diverse materials with high precision. Owing to the cross-scale and digital processing characteristics, the FsLA technology has attracted increasing interest. However, the moderate repeatability of FsLA limits its application in the fabrication of advanced micro-/nanostructures due to the nonidentity of each laser pulse and fluctuation of environment. Fortunately, moderate repeatability combined with programmable ablation and high precision perfectly matches with the technical requirements of a physical unclonable fluorescent anticounterfeiting label. Herein, we applied FsLA to quantum dot (QD) films to fabricate a physical unclonable multilevel fluorescent anticounterfeiting label. Visual Jilin University logos, quick response (QR) codes, microlines, and microholes have been achieved for the multilevel anticounterfeiting functions. Of particular significance, the microholes with a macroidentical and microidentifiable geometry guarantee the physical unclonable functions (PUFs). Moreover, the fluorescent anticounterfeiting label is compatible with deep learning algorithms that facilitate authentication to be convenient and accurate. This work shows a fantastic future potential to be a core anticounterfeiting technique for commercial products and drugs.

Si-Cr Nano-Alloys Fabricated by Direct Femtosecond Laser Writing

Ultra-short 230 fs laser pulses of 515 nm wavelength were tightly focused into 700 nm focal spots and utilised in opening ∼400 nm nano-holes in a Cr etch mask that was tens-of-nm thick. The ablation threshold was found to be 2.3 nJ/pulse, double that of plain silicon. Nano-holes irradiated with pulse energies below this threshold produced nano-disks, while higher energies produced nano-rings. Both these structures were not removed by either Cr or Si etch solutions. Subtle sub-1 nJ pulse energy control was harnessed to pattern large surface areas with controlled nano-alloying of Si and Cr. This work demonstrates vacuum-free large area patterning of nanolayers by alloying them at distinct locations with sub-diffraction resolution. Such metal masks with nano-hole opening can be used for formation of random patterns of nano-needles with sub-100 nm separation when applied to dry etching of Si.

Ultralow birefringent glass waveguide fabricated by femtosecond laser direct writing

Optical waveguides prepared by femtosecond laser direct writing have birefringent properties, which can affect polarization encoding and entanglement on chips. Here, we first propose a shape-stress dual compensation fabrication scheme to decrease birefringence. Ultralow birefringent waveguides (1 × 10^-9) were obtained by controlling the cross sectional shape of the main waveguide and adjusting the position of the auxiliary lines. In addition, we prepared polarization-independent directional coupler and demonstrated the evolution of polarization-independent waveguide array with different polarized light. In the future, ultralow birefringent waveguides will be widely applied in polarization encoding and entangled quantum photonic integrated circuits.

Electronic state evolution of oxygen-doped monolayer WSe2 assisted by femtosecond laser irradiation

Electronic states are significantly correlated with chemical compositions, and the information related to these factors is especially crucial for the manipulation of the properties of matter. However, this key information is usually verified by after-validation methods, which could not be obtained during material processing, for example, in the field of femtosecond laser direct writing inside materials. Here, critical evolution stages of electronic states for monolayer tungsten diselenide (WSe₂) around the modification threshold (at a Mott density of ∼10¹³ cm^-2) are observed by broadband femtosecond transient absorption spectroscopy, which is associated with the intense femtosecond-laser-assisted oxygen-doping mechanism. First-principles calculations and control experiments on graphene-covered monolayer WSe₂ further confirm this modification mechanism. Our findings reveal a photochemical reaction for monolayer WSe₂ under the Mott density condition and provide an electronic state criterion to in situ monitor the degrees of modification in monolayer transition metal dichalcogenides during the femtosecond laser modification.

Spatially modulated light harvesting with plasmonic crescent metasurface

Harvesting light by metallic structures with sharp corners, or the so-called photonic singularities, has exhibit their potential in nanophotonics, sensing, and bio-medical applications. The high-quality light confinement of the light energy mainly relies on the precise preparation of nanoscale photonic singularities. However, the realization of massive photonic singularities still meets the challenges on integration and low-cost mask multiplexing. Here, we show an angle-dependent elevated nanosphere lithography to achieve massive photonic singularities for spatially modulated light harvesting at the near-infrared regime. The photonic geometrical singularity is constructed by the gold crescent array of plasmonic materials. The numerical simulation shows that the light can be localized at the spatially distributed singularities. This phenomenon is verified experimentally through the infrared spectral measurement. Our work provides the possibility to produce integrated light-harvesting devices for numerous optical applications in illumination, display, and enhanced nonlinear excitation.

Nanoscale Printing of Indium-Tin-Oxide by Femtosecond Laser Pulses

For constructing optical and electrical micro-devices, the deposition/printing of materials with sub-1 μm precision and size (cross-section) is required. Crystalline c-ITO (indium tin oxide) nanostructures were patterned on glass with sufficient precision to form 20-50 nm gaps between individual disks or lines of ∼250 nm diameter or width. The absorbed energy density [J/cm3] followed a second-order dependence on pulse energy. This facilitated high-resolution and precise nanoscale laser-writing at a laser wavelength of 515 nm. Patterns for optical elements such as circular gratings and micro-disks were laser-printed using ITO as a resist. Unexposed amorphous a-ITO was chemically removed in aqueous 1% vol. HF solution. This use of a-ITO as a solid resist holds promise for metamaterial and micro-optical applications.

Edge State, Localization Length, and Critical Exponent from Survival Probability in Topological Waveguides

Edge states in topological phase transitions have been observed in various platforms. To date, verification of the edge states and the associated topological invariant are mostly studied, and yet a quantitative measurement of topological phase transitions is still lacking. Here, we show the direct measurement of edge states and their localization lengths from survival probability. We employ photonic waveguide arrays to demonstrate the topological phase transitions based on the Su-Schrieffer-Heeger model. By measuring the survival probability at the lattice boundary, we show that in the long-time limit, the survival probability is P=(1-e^{-2/ξ_{loc}})^{2}, where ξ_{loc} is the localization length. This length derived from the survival probability is compared with the distance from the transition point, yielding a critical exponent of ν=0.94±0.04 at the phase boundary. Our experiment provides an alternative route to characterizing topological phase transitions and extracting their key physical quantities.

A fine single Pd microwire H2 sensor fabricated by using a femtosecond laser for a wide detection range at room temperature

We reported a fine H2 sensor based on single Pd microwires (SPMs) by femtosecond-laser-induced deposition of palladium nanoparticles (PdNPs), which exhibits excellent H2 sensing performance. The PdNPs with good dispersion were prepared by ultrasonic assisted one-step solution synthesis. The sensor has a wide detection range of 0.001-4.0% H2 sensing at room temperature. With the increase of the H2 concentration, the SPM sensor presents two sensing mechanisms, the formation of PdH x and hydrogen induced lattice expansion regulating the conductivity of SPMs. This fine hydrogen sensor is promising to be applied to human health monitoring, environmental air detection and other integrated intelligent devices.

Approximately 30 nm Nanogroove Formation on Single Crystalline Silicon Surface under Pulsed Nanosecond Laser Irradiation

Nanogrooves with a minimum feature size down to 30 nm (λ/26) can be formed directly on silicon surface by irradiation from two orthogonal polarized 1064 nm/10 ns fiber laser beams. The creation of such small nanogrooves is attributed to surface thermal stress during resolidification and supercooling with the double laser beams' irradiation. By varying the pulse number and laser fluence, the feature size of narrow grooves on silicon surface can be tuned. The experimental results and numerical calculation of surface thermal behaviors indicated that the high repetition rate of the nanosecond laser leads to the incubation effect and different silicon optical and thermal properties during laser irradiation. Resolution on this scale should be attractive in nanolithography, particularly considering that this method is available in far field and in ambient air.

Polariscopy with optical near-fields

Polarisation analysis of light-matter interactions established for propagating optical far-fields is now extended into an evanescent field as demonstrated in this study using an attenuated total reflection (ATR) setup and a synchrotron source at THz frequencies. Scalar intensity E², rather than a vector E-field, is used for absorbance analysis of the s- and p-components of the linearly polarised incident light. Absorption and phase changes induced by the sample and detected at the transmission port of the ATR accessory revealed previously non-accessible anisotropy in the absorption-dispersion properties of the sample probed by the evanescent optical near-field. Mapping of the sample's anisotropy perpendicular to its surface by the non-propagating light field is validated and the cos² θ absorbance dependence was observed for the angle θ, where θ = 0° is aligned with the sample's surface. A four-polarisation method is presented for the absorbance mapping and a complimentary retardance spectrum is retrieved from the same measurement of the angular dependence of transmittance in structurally complex poly-hydroxybutyrate (PHB) and poly-L-lactic acid (PLLA) samples with amorphous and banded-spherulite (radially isotropic) crystalline regions. A possibility of all 3D mapping of anisotropy (polarisation tomography) is outlined.

Insight on the regulation mechanism of the nanochannels in hard and brittle materials induced by sparially shaped femtosecond laser

The efficient fabrication of nanochannels on hard and brittle materials is a difficult task in the field of micro and nano processing. We have realized nanochannel arrays on silica with characteristic scales varying from 50–230 nm using a single femtosecond Bessel beam pulse of 515 nm. By characterizing the surface openings, we found that the characteristic scales of the nanopore openings are inextricably linked to the surface energy deposition effect. We achieved not only three asymmetric channel profiles by adjusting the laser-sample interaction region, but also high aspect ratio nanochannels with characteristic scales about 50 nm and aspect ratios over 100. These results on hard and brittle materials provide a broader platform and application scenarios for smart particle rectifiers, DNA molecular sequencing, biosensors, and nanofluidic devices, which are also more suitable for future practical applications due to their low cost, good durability, and high productivity.

Femtosecond Laser Processing Technology for Anti-Reflection Surfaces of Hard Materials

The anti-reflection properties of hard material surfaces are of great significance in the fields of infrared imaging, optoelectronic devices, and aerospace. Femtosecond laser processing has drawn a lot of attentions in the field of optics as an innovative, efficient, and green micro-nano processing method. The anti-reflection surface prepared on hard materials by femtosecond laser processing technology has good anti-reflection properties under a broad spectrum with all angles, effectively suppresses reflection, and improves light transmittance/absorption. In this review, the recent advances on femtosecond laser processing of anti-reflection surfaces on hard materials are summarized. The principle of anti-reflection structure and the selection of anti-reflection materials in different applications are elaborated upon. Finally, the limitations and challenges of the current anti-reflection surface are discussed, and the future development trend of the anti-reflection surface are prospected.

Photonic Nanolaser with Extreme Optical Field Confinement

We proposed a photonic approach to a lasing mode supported by low-loss oscillation of polarized bound electrons in an active nano-slit-waveguide cavity, which circumvents the confinement-loss trade-off of nanoplasmonics, and offers an optical confinement down to sub-1-nm level with a peak-to-background ratio of ∼30  dB. Experimentally, the extremely confined lasing field is realized as the dominant peak of a TE_{0}-like lasing mode around 720-nm wavelength, in 1-nm-level width slit-waveguide cavities in coupled CdSe nanowire pairs. The measured lasing characteristics agree well with the theoretical calculations. Our results may pave a way towards new regions for nanolasers and light-matter interaction.

High-quality rapid laser drilling of transparent hard materials

In this study, a hybrid method for high-quality rapid drilling of transparent hard materials which combines femtosecond laser (fs-laser) Bessel beam modifying materials and selective wet etching is presented. Using this method, micro-holes with no taper of different sizes (from 10 to 35 μm) and shapes (square, triangle, circular, and pentagram) are fabricated. Bessel beams of different lengths can be generated flexibly by loading different computer-generated holograms (CGHs) into the spatial light modulator (SLM) and the maximum length of light interacting with materials can reach 320 μm, leading to a reduction of the laser scanning time by two orders of magnitude. Moreover, a set of three-dimensional multi-layer submicron through-holes in crystal materials is also realized, with an aspect ratio of more than 1000 for each hole. These results indicate that this method has broad application potential in chip packaging, aviation manufacturing, single particle catalysis, and other fields.

Ultrafast laser stabilization by nonlinear absorption for enhanced-precision material processing

Using ultrafast lasers, sub-diffraction features can be produced thanks to the threshold-based response of materials to the local beam fluence. In practice, Gaussian beams with peak fluence near the modification threshold lead to high-resolution. However, this conflicts with reliability as the process becomes increasingly sensitive to pulse-to-pulse energy fluctuations. Using nonlinear absorption in a ZnS crystal, we demonstrate a passive extra-cavity energy stabilization method in a femtosecond laser material machining configuration. Processing precision and repeatability are enhanced as evidenced by highly reliable amorphous features produced on silicon with sizes ten times smaller than the spot size, becoming a practical solution for high-precision manufacturing applications.

Polarization-dependent Bloch oscillations in optical waveguides

Optical systems provide a new and practical platform for studying Bloch oscillations. This study investigates the fundamental-mode propagation of polarization-dependent Bloch oscillations. By using the three-dimensional properties of femtosecond laser direct writing, we fabricate a polymer-based gradient waveguide array and determine the Bloch oscillations under different polarization inputs by using the birefringence gradient and the equivalent refractive index, thus exhibiting a polarization-dependent Bloch period. Our results provide a new, to the best of our knowledge, paradigm for two-dimensional optical Bloch modes and highlight the influence of optical polarization in the same system, which provides a possibility to observe richer physics related to Bloch oscillations in one structure.

Integration of Multifocal Microlens Array on Silicon Microcantilever via Femtosecond-Laser-Assisted Etching Technology

Micro-opto-electromechanical systems (MOEMSs) are a new class of integrated and miniaturized optical systems that have significant applications in modern optics. However, the integration of micro-optical elements with complex morphologies on existing micro-electromechanical systems is difficult. Herein, we propose a femtosecond-laser-assisted dry etching technology to realize the fabrication of silicon microlenses. The size of the microlens can be controlled by the femtosecond laser pulse energy and the number of pulses. To verify the applicability of this method, multifocal microlens arrays (focal lengths of 7–9 μm) were integrated into a silicon microcantilever using this method. The proposed technology would broaden the application scope of MOEMSs in three-dimensional imaging systems.

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Femtosecond laser (fs-laser) is unfavorable in applications for the fabrication of micro-optical devices on hard materials owing to the problems of low fabrication efficiency and high surface roughness. Herein, a hybrid method combining fs-laser scanning, subsequent etching, and annealing was proposed to realize micro-optical devices with low roughness on glass. Compared to traditional laser ablation, the fabrication efficiency in this work was improved by one order of magnitude, and the surface roughness was decreased to 15 nm. Using this method, aspherical convex microlenses and spherical concave microlenses that possess excellent focusing and imaging properties are realized on photosensitive glass. The diameter and height of the microlenses were controlled by adjusting the fabrication parameters. These results indicate that the fs-laser-based hybrid method will open new opportunities for fabricating micro-optical components on hard materials.

Optimization mechanism and applications of ultrafast laser machining towards highly designable 3D micro/nano structuring

The optimization mechanism of ultrafast laser machining is introduced. The specific applications of laser processed 3D micro/nano structures in optical, electrochemical and biomedical fields are elaborated, and perspectives are presented.

Micro-/Nano-Structures Fabricated by Laser Technologies for Optoelectronic Devices

Due to unique optical and electrical properties, micro-/nano-structures have become an essential part of optoelectronic devices. Here, we summarize the recent developments in micro-/nano-structures fabricated by laser technologies for optoelectronic devices. The fabrication of micro-/nano-structures by various laser technologies is reviewed. Micro-/nano-structures in optoelectronic devices for performance improvement are reviewed. In addition, typical optoelectronic devices with micro-nano structures are also summarized. Finally, the challenges and prospects are discussed.

Nanoparticle Fragmentation Below the Melting Point Under Single Picosecond Laser Pulse Stimulation

Understanding the laser-nanomaterials interaction including nanomaterial fragmentation has important implications in nanoparticle manufacturing, energy, and biomedical sciences. So far, three mechanisms of laser-induced fragmentation have been recognized including non-thermal processes and thermomechanical force under femtosecond pulses, and the phase transitions under nanosecond pulses. Here we show that single picosecond (ps) laser pulse stimulation leads to anomalous fragmentation of gold nanoparticles that deviates from these three mechanisms. The ps laser fragmentation was weakly dependent on particle size, and it resulted in a bimodal size distribution. Importantly, ps laser stimulation fragmented particles below the whole particle melting point and below the threshold for non-thermal mechanism. We propose a framework based on near-field enhancement and nanoparticle surface melting to account for the ps laser-induced fragmentation observed here. This study reveals a new form of surface ablation that occurs under picosecond laser stimulation at low fluence.

Laser Fabrication of Nanoholes on Silica through Surface Window Assisted Nano-Drilling (SWAN)

Nano-structures have significant applications in many fields such as chip fabrications, nanorobotics, and solar cells. However, realizing nanoscale structures on hard and brittle materials is still challenging. In this paper, when processing the silica surface with a tightly focused Bessel beam, the smallest nanohole with ~20 nm diameter has been realized by precisely controlling the interior and superficial interaction of the silica material. An effective surface window assisted nano-drilling (SWAN) mechanism is proposed to explain the generation of such a deep subwavelength structure, which is supported by the simulation results of energy depositions.

Deep Subwavelength Laser-Induced Periodic Surface Structures on Silicon as a Novel Multifunctional Biosensing Platform

Strong light localization inside the nanoscale gaps provides remarkable opportunities for creation of various medical and biosensing platforms stimulating an active search for inexpensive and easily scalable fabrication at a sub-100 nm resolution. In this paper, self-organized laser-induced periodic surface structures (LIPSSs) with the shortest ever reported periodicity of 70 ± 10 nm were directly imprinted on the crystalline Si wafer upon its direct femtosecond-laser ablation in isopropanol. Appearance of such a nanoscale morphology was explained by the formation of a periodic topography on the surface of photoexcited Si driven by interference phenomena as well as subsequent down-scaling of the imprinted grating period via Rayleigh-Taylor hydrodynamic instability. The produced deep subwavelength LIPSSs demonstrate strong anisotropic anti-reflection performance, ensuring efficient delivery of the incident far-field radiation to the electromagnetic "hot spots" localized in the Si nanogaps. This allows realization of various optical biosensing platforms operating via strong interactions of quantum emitters with nanoscale light fields. The demonstrated 80-fold enhancement of spontaneous emission from the attached nanolayer of organic dye molecules and in situ optical tracing of catalytic molecular transformations substantiate bare and metal-capped deep subwavelength Si LIPSSs as a promising inexpensive multifunctional biosensing platform.

Anisotropic nanostructure generated by a spatial-temporal manipulated picosecond pulse for multidimensional optical data storage

Anisotropic nanostructures can be generated in fused silica glass by manipulating the spatiotemporal properties of a picosecond pulse. This phenomenon is attributed to laser-induced interband self-trapped excitons. The anisotropic structures exhibit birefringent properties, and thus can be employed for multi-dimensional optical data storage applications. Data voxels generated by such short laser irradiation enable on-the-fly high-speed data recording.

Resetting directional couplers for high-fidelity quantum photonic integrated chips

In this Letter, we propose a fabrication technique based on femtosecond laser secondary direct writing (FsLSDW) that allows us to statically reset the beam-splitting ratio of directional couplers. By modifying the interaction region with a second inscription, the coupling coefficient of the reconstructed devices can be indeed changed continuously within the range of 0.49-2.1 rad/mm, thus enabling a complete tunability of the reconstructed splitting ratio from zero to full power transfer between the waveguides. This powerful reconstruction capability facilitates the arbitrary reset of an imperfect device, from any initial splitting ratio to the correct one. In the future, such static control method could potentially solve the fabrication error problem in the manufacturing of high-fidelity large-scale integrated photonic quantum chips.

Femtosecond laser inscribed helical sapphire fiber Bragg gratings

This Letter reports a novel helical sapphire fiber Bragg grating (HSFBG) in a single crystal sapphire fiber with diameter of 60 µm fabricated by a 515 nm femtosecond laser. Due to the large refractive index modulation region and high structural symmetry of the HSFBGs, high-reflectivity and high-quality spectra can be prepared and additionally have good bending resistance. The spectral properties of HSFBGs with different helical diameters are studied. When the helical diameter is 30 µm, the reflectivity of HSFBG is 40%, the full width at half-maximum is 1.56 nm, and the signal-to-noise ratio is 16 dB. For the HSFBG bending test, the minimum bending radius is 5 mm, which can still maintain relatively good spectral quality. In addition, the HSFBG array with different periods has been successfully cascaded in a sapphire fiber. The experimental results of the HSFBG high-temperature test show that this HSFBG can work reliably at 1600°C, and the temperature sensitivity in the high-temperature range can reach 35.55 pm/°C. This HSFBG can be used in high-temperature and harsh environments, such as metal smelting and aeroengine structural health monitoring.

Controllable Photonic Structures on Silicon-on-Insulator Devices Fabricated Using Femtosecond Laser Lithography

The design of micro/nanostructures on silicon-on-insulator (SOI) devices has attracted widespread attention in the science and applications of integrated optics, which, however, are usually restricted by the current manufacturing technologies. Hence, in this paper, we propose a mask-free, one-step femtosecond laser lithography method for efficient fabrication of high-quality controllable planar photonic structures on SOI devices. Subwavelength gratings with high uniformity are flexibly prepared on a SOI wafer, and they can be efficiently extended for large-area fabrication with long-range uniformity. Different from the melt flow mechanism to bulk silicon, the buried SiO₂ layer of the SOI material provides substantial control over the phase change process, thereby achieving local rapid vaporization to form a high-quality structure. The optical properties of the prepared structures are measured experimentally and determined to possess powerful diffraction and light-coupling characteristics. Strikingly, active control of the SOI surface structure morphology, from the grating to the periodic silicon wire structure, can be realized through precision adjustment of the pulse injection volumes. A homogeneous silicon photonic wire is successfully generated on the SOI device, providing an alternative to the preparation of waveguides. This effective femtosecond laser lithography method for fabricating controllable photonic structures on SOI devices is expected to further promote the development of integrated optics.

Deep diamond single-photon sources prepared by a femtosecond laser

Nitrogen-vacancy color centers (NVs) in diamond have several potential applications ranging from quantum computing to data storage. However, artificial NVs are often close to the surface, which limits their spatial density and applicability. Here we demonstrate an effective and precise method for preparing deep single NVs in diamond. The method is based on a spatial-shaped femtosecond laser to overcome laser defocus in high-refractive materials, and realizes the preparation of single NVs at 95 µm. In addition, owing to the good energy distribution of the shaped laser focus, the single NVs exhibit a statistic yield of 56%±11% with excellent qualities. This processing method will contribute to the integration of color centers with emerging optical elements and high-density data storage.

Photopolymerization strategy for the preparation of small-diameter artificial blood vessels with micro-nano structures on the inner wall

Although large diameter vessels made of polyurethane materials have been widely used in clinical practice, the biocompatibility and long-term patency of small diameter artificial vessels have not been well addressed. Any technological innovation and advancement in small-diameter artificial blood vessels is of great interest to the biomedical field. Here a novel technique is used to produce artificial blood vessels with a caliber of less than 6 mm and a wall thickness of less than 0.5 mm by rotational exposure, and to form a bionic inner wall with a periodically micro-nano structure inside the tube by laser double-beam interference. The polyethylene glycol diacrylate used is a widely recognized versatile biomaterial with good hydrophilicity, biocompatibility and low cytotoxicity. The effect of the bionic structure on the growth of hepatocellular carcinoma cells and human umbilical vein endothelial cells was investigated, and it was demonstrated that the prepared vessels with the bionic structure could largely promote the endothelialization process of the cells inside them.

Nanopatterning of silicon via the near-field enhancement effect upon double-pulse femtosecond laser exposure

Utilizing the near-field enhancement effect of a polystyrene microsphere, direct ablation of nanohole arrays by a temporal-shaping femtosecond (fs) laser pulse is presented. The nanohole arrays, which are circular, regular, and free of cracks, were processed without extra post-processing, and their average diameter decreased gradually, as the double-pulse delay increased until 2500 fs. The simulated results by a plasma model and finite difference time domain solution demonstrate that the size decrease of the structure is attributed to the increase of the ablation threshold of silicon. Through fs laser near-field fabrication, the FWHM of nanoholes can be reduced to approximately 50 nm (λ/16) and even to 23 nm when using the second harmonic laser at a wavelength of 400 nm.

Sapphire-Derived Fiber Bragg Gratings for High Temperature Sensing

In this paper, a sapphire-derived fiber (SDF) with a core diameter of 10 μm and a cladding diameter of 125 μm is fabricated by the melt-in-tube method, and fiber Bragg gratings (FBGs) with reflectivity over 80% are prepared by the femtosecond laser point-by-point direct writing method. By analyzing the refractive index distribution and reflection spectral characteristics of the SDF, it can be seen that the SDF is a graded refractive index few-mode fiber. In order to study the element composition of the SDF core, the end-face element distribution of the SDF is analyzed, which indicates that element diffusion occurred between the core and the cladding materials. The temperature and stress of the SDF gratings are measured and the highest temperature is tested to 1000 °C. The temperature and strain sensitivities are 15.64 pm/°C and 1.33 pm/με, respectively, which are higher than the temperature sensitivity of the quartz single-mode fiber. As a kind of special fiber, the SDF expands the application range of sapphire fiber, and has important applications in the fields of high-temperature sensing and high-power lasers.

In-situ diagnostic of femtosecond laser probe pulses for high resolution ultrafast imaging

Ultrafast imaging is essential in physics and chemistry to investigate the femtosecond dynamics of nonuniform samples or of phenomena with strong spatial variations. It relies on observing the phenomena induced by an ultrashort laser pump pulse using an ultrashort probe pulse at a later time. Recent years have seen the emergence of very successful ultrafast imaging techniques of single non-reproducible events with extremely high frame rate, based on wavelength or spatial frequency encoding. However, further progress in ultrafast imaging towards high spatial resolution is hampered by the lack of characterization of weak probe beams. For pump-probe experiments realized within solids or liquids, because of the difference in group velocities between pump and probe, the determination of the absolute pump-probe delay depends on the sample position. In addition, pulse-front tilt is a widespread issue, unacceptable for ultrafast imaging, but which is conventionally very difficult to evaluate for the low-intensity probe pulses. Here we show that a pump-induced micro-grating generated from the electronic Kerr effect provides a detailed in-situ characterization of a weak probe pulse. It allows solving the two issues of absolute pump-probe delay determination and pulse-front tilt detection. Our approach is valid whatever the transparent medium with non-negligible Kerr index, whatever the probe pulse polarization and wavelength. Because it is nondestructive and fast to perform, this in-situ probe diagnostic can be repeated to calibrate experimental conditions, particularly in the case where complex wavelength, spatial frequency or polarization encoding is used. We anticipate that this technique will enable previously inaccessible spatiotemporal imaging in a number of fields of ultrafast science at the micro- and nanoscale.

Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review

Microactuators, which can transform external stimuli into mechanical motion at microscale, have attracted extensive attention because they can be used to construct microelectromechanical systems (MEMS) and/or microrobots, resulting in extensive applications in a large number of fields such as noninvasive surgery, targeted delivery, and biomedical machines. In contrast to classical 2D MEMS devices, 3D microactuators provide a new platform for the research of stimuli-responsive functional devices. However, traditional planar processing techniques based on photolithography are inadequate in the construction of 3D microstructures. To solve this issue, researchers have proposed many strategies, among which 3D laser printing is becoming a prospective technique to create smart devices at the microscale because of its versatility, adjustability, and flexibility. Here, we review the recent progress in stimulus-responsive 3D microactuators fabricated with 3D laser printing depending on different stimuli. Then, an outlook of the design, fabrication, control, and applications of 3D laser-printed microactuators is propounded with the goal of providing a reference for related research.

Femtosecond Laser Fabricated Apodized Fiber Bragg Gratings Based on Energy Regulation

In this paper, an energy regulation method based on the combination of a half-wave plate (HWP) and a polarization beam splitter (PBS) is proposed for the fabrication of apodized fiber gratings, which can effectively improve the side lobe suppression ratio of high-reflectivity fiber Bragg gratings (FBGs) fabricated by femtosecond laser. The apodized FBGs prepared by this method has good repeatability and flexibility. By inputting different types of apodization functions through the program, the rotation speed of the stepping motor can be adjusted synchronously, and then the position of the HWP can be accurately controlled so that the laser energy can be distributed as an apodization function along the axial direction of the fiber. By using the energy apodization method, the gratings with a reflectivity of 75% and a side lobe suppression ratio of 25 and 32 dB are fabricated in the fiber with a core diameter of 9 and 4.4 μm, respectively. The temperature and strain sensitivities of the energy-apodized fiber gratings with a core diameter of 4.4 μm are 10.36 pm/°C and 0.9 pm/με, respectively. The high-reflectivity gratings fabricated by this energy apodization method are expected to be used in high-power narrow-linewidth lasers and wavelength division multiplexing (WDM) systems.

Color Centers Enabled by Direct Femto-Second Laser Writing in Wide Bandgap Semiconductors

Color centers in silicon carbide are relevant for applications in quantum technologies as they can produce single photon sources or can be used as spin qubits and in quantum sensing applications. Here, we have applied femtosecond laser writing in silicon carbide and gallium nitride to generate vacancy-related color centers, giving rise to photoluminescence from the visible to the infrared. Using a 515 nm wavelength 230 fs pulsed laser, we produce large arrays of silicon vacancy defects in silicon carbide with a high localization within the confocal diffraction limit of 500 nm and with minimal material damage. The number of color centers formed exhibited power-law scaling with the laser fabrication energy indicating that the color centers are created by photoinduced ionization. This work highlights the simplicity and flexibility of laser fabrication of color center arrays in relevant materials for quantum applications.

Characterisation of Biological Materials at THz Frequencies by Attenuated Total Reflection: Lard

The penetration depth of an evanescent wave in Attenuated Total Reflection (ATR) is dependent on the wavelength of the radiation utilised. At THz frequencies, the penetration depth into biological tissues is in the order of 0.1 to 0.5 mm; rendered pig lard was used as a model sample in this study. A method for the direct measurement of the evanescent wave penetration depth is presented which allows for the estimation of the dispersion of the complex refractive index by using the reflection of the evanescent wave from varying sample depths. The method employs frustrated total internal reflection, and has been demonstrated by using the THz/Far-IR beamline at the Australian synchrotron, and modelled using finite difference time domain (FDTD) simulations.

Three-Dimensional Multifunctional Magnetically Responsive Liquid Manipulator Fabricated by Femtosecond Laser Writing and Soft Transfer

Nature-inspired magnetically responsive intelligent topography surfaces have attracted considerable attention owing to their controllable droplet manipulation abilities. However, it is still challenging for magnetically responsive surfaces to realize three-dimensional (3D) droplet/multidroplet transport in both horizontal and vertical directions. Additionally, the droplet horizontal propulsion speed needs to be improved. In this work, a 3D droplet/multidroplet transport strategy based on magnetically responsive microplates array (MMA) actuated by a spatially varying and periodic magnetic field is proposed. The modified superhydrophobic surface can transport droplets rapidly both in horizontal and vertical directions, and it can even realize against-gravity upslope propulsion. The rapid horizontal droplet propulsion (∼58.6 mm/s) is ascribed to the abrupt inversion of the modified surface induced by the specific magnetic field. Furthermore, the nonmagnetically responsive microplates (NMMs)/MMA composite surface is constructed to realize 3D multidroplet manipulation. The implementations of MMA in manipulation of continuous fluids and liquid metal are further demonstrated, providing a valuable platform for microfluidic applications.