Fabrication and testing of polymer-based capacitive micromachined ultrasound transducers for medical imaging

Design, Fabrication, and Characterization of Capacitive Micromachined Ultrasonic Transducers for Transcranial, Multifocus Neurostimulation

In a recent study using 3-D fullwave simulations, it was shown for a nonhuman primate model that a helmet-shaped 3D array of 128 transducer elements can be assembled for neurostimulation in an optimized configuration with the accommodation of an imaging aperture. Considering all acoustic losses, according to this study, for a nonhuman primate skull, the assembly of the proposed transducers was projected to produce sufficient focusing gain in two different focal positions at deep and shallow brain regions, thus providing sufficient acoustic intensity at these distinct focal points for neural stimulation. This array also has the ability to focus on multiple additional brain regions. In the work presented here, we designed and fabricated a single 15 mm diameter capacitive micromachined ultrasonic transducer (CMUT) element operating at 800 kHz central frequency with a 480 kHz 3 dB bandwidth, capable of producing a 190 kPa peak negative pressure (PNP) on the surface. The corresponding projected transcranial spatial peak pulse average intensity (ISPPA) was 28 Wcm-2, and the mechanical index (MI) value was 1.1 for an array of 128 of these elements.

Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces

Flexible pressure sensors can convert mechanical stimuli to electrical signals to interact with the surroundings, mimicking the functionality of the human skins. Piezocapacitive pressure sensors, a class of most widely used devices for artificial skins, however, often suffer from slow response-relaxation speed (tens of milliseconds) and thus fail to detect dynamic stimuli or high-frequency vibrations. Here, we show that the contact-separation behavior of the electrode-dielectric interface is an energy dissipation process that substantially determines the response-relaxation time of the sensors. We thus reduce the response and relaxation time to ~0.04 ms using a bonded microstructured interface that effectively diminishes interfacial friction and energy dissipation. The high response-relaxation speed allows the sensor to detect vibrations over 10 kHz, which enables not only dynamic force detection, but also acoustic applications. This sensor also shows negligible hysteresis to precisely track dynamic stimuli. Our work opens a path that can substantially promote the response-relaxation speed of piezocapacitive pressure sensors into submillisecond range and extend their applications in acoustic range.

Shape estimation of flexible ultrasound arrays using spatial coherence: A preliminary study

A flexible ultrasound array can potentially provide a larger field-of-view, enhanced imaging resolution, and less operator dependency compared to conventional rigid transducer arrays. However, such transducer arrays require information about relative element positions for beamforming and reconstructing geometrically accurate sonograms. In this study, we assess the potential utility of using spatial coherence of backscattered radiofrequency data to estimate transducer array shape (inverse problem). The methodology is evaluated through 1) simulation of flexible arrays and 2) blinded in vivo experiments using commercial rigid transducer arrays on various anatomical targets (shoulder, forearm, scapular, posterior calf muscles, and abdomen) and multi-purpose ultrasound phantoms. The average Euclidean error of shape estimation is below 0.1 wavelengths for simulated arrays and below 1.4 wavelengths (median: 0.58 wavelengths) for real arrays. The complex wavelet structural similarity index between the B-mode images reconstructed with estimated and ground truth array shapes is above 99 % and 96 %, for simulations and experiments, respectively. These findings suggest that optimizing for spatial coherence may be an effective way to estimate the unknown shape of conformal ultrasound arrays.

Engineering and Development of a Tissue Model for the Evaluation of Microneedle Penetration Ability, Drug Diffusion, Photothermal Activity, and Ultrasound Imaging: A Promising Surrogate to Ex Vivo and In Vivo Tissues

Driven by regulatory authorities and the ever-growing demands from industry, various artificial tissue models have been developed. Nevertheless, there is no model to date that is capable of mimicking the biomechanical properties of the skin whilst exhibiting the hydrophilicity/hydrophobicity properties of the skin layers. As a proof-of-concept study, tissue surrogates based on gel and silicone are fabricated for the evaluation of microneedle penetration, drug diffusion, photothermal activity, and ultrasound bioimaging. The silicone layer aims to imitate the stratum corneum while the gel layer aims to mimic the water-rich viable epidermis and dermis present in in vivo tissues. The diffusion of drugs across the tissue model is assessed, and the results reveal that the proposed tissue model shows similar behavior to a cancerous kidney. In place of typical in vitro aqueous solutions, this model can also be employed for evaluating the photoactivity of photothermal agents since the tissue model shows a similar heating profile to skin of mice when irradiated with near-infrared laser. In addition, the designed tissue model exhibits promising results for biomedical applications in optical coherence tomography and ultrasound imaging. Such a tissue model paves the way to reduce the use of animals testing in research whilst obviating ethical concerns.

Switch mode capacitive pressure sensors

Switch mode capacitive pressure sensors are proposed as a new class of microfabricated devices that transform pressure into a mechanically switching capacitance to form an analog-to-digital signal with zero power, high sensitivity, and a high signal-to-noise ratio. A pressure-sensitive gold membrane suspended over a capacitive cavity makes ohmic contact with patterned gold leads on the substrate, closing circuits to fixed on-chip capacitors outside the cavity and leading to significant step responses. This function is achieved by allocating the switch leads on the part of the counter electrode area, while the remaining area is used for touch mode analog capacitive sensing. The sensor microchip is prototyped through a novel design approach to surface micromachining that integrates micro-Tesla valves for vacuum sealing the sensor cavity, showing an unprecedented response to applied pressure. For a gauge pressure range of 0-120 mmHg, the sensor exhibits an increase of 13.21 pF with resultant switch events, each of which ranges from 2.53-3.96 pF every 12-38 mmHg, in addition to the touch mode linear capacitive increase between switches. The equivalent sensitivity is 80-240 fF/mmHg, which is 11-600× more than commercial and reported touch mode sensors operating in similar pressure ranges. The sensor is further demonstrated for wireless pressure tracking by creating a resonant tank with the sensor, showing a 32.5-101.6 kHz/mmHg sensitivity with frequency jumps led by the switch events. The developed sensor, with its promising performance, offers new application opportunities in a variety of device areas, including health care, robotics, industrial control, and environmental monitoring.

Dynamic self-stabilization in the electronic and nanomechanical properties of an organic polymer semiconductor

The field of organic electronics has profited from the discovery of new conjugated semiconducting polymers that have molecular backbones which exhibit resilience to conformational fluctuations, accompanied by charge carrier mobilities that routinely cross the 1 cm2/Vs benchmark. One such polymer is indacenodithiophene-co-benzothiadiazole. Previously understood to be lacking in microstructural order, we show here direct evidence of nanosized domains of high order in its thin films. We also demonstrate that its device-based high-performance electrical and thermoelectric properties are not intrinsic but undergo rapid stabilization following a burst of ambient air exposure. The polymer's nanomechanical properties equilibrate on longer timescales owing to an orthogonal mechanism; the gradual sweating-out of residual low molecular weight solvent molecules from its surface. We snapshot the quasistatic temporal evolution of the electrical, thermoelectric and nanomechanical properties of this prototypical organic semiconductor and investigate the subtleties which play on competing timescales. Our study documents the untold and often overlooked story of a polymer device's dynamic evolution toward stability.

Enhancement of the Transmission Performance of Piezoelectric Micromachined Ultrasound Transducers by Vibration Mode Optimization

Ultrasound is widely used in industry and the agricultural, biomedical, military, and other fields. As key components in ultrasonic applications, the characteristic parameters of ultrasonic transducers fundamentally determine the performance of ultrasonic systems. High-frequency ultrasonic transducers are small in size and require high precision, which puts forward higher requirements for sensor design, material selection, and processing methods. In this paper, a three-dimensional model of a high-frequency piezoelectric micromachined ultrasonic transducer (PMUT) is established based on the finite element method (FEM). This 3D model consists of a substrate, a silicon device layer, and a molybdenum-aluminum nitride-molybdenum (Mo-AlN-Mo) sandwich piezoelectric layer. The effect of the shape of the transducer’s vibrating membrane on the transmission performance was studied. Through a discussion of the parametric scanning of the key dimensions of the diaphragms of the three structures, it was concluded that the fundamental resonance frequency of the hexagonal diaphragm was higher than that of the circle and the square under the same size. Compared with the circular diaphragm, the sensitivity of the square diaphragm increased by 8.5%, and the sensitivity of the hexagonal diaphragm increased by 10.7%. The maximum emission sound-pressure level of the hexagonal diaphragm was 6.6 times higher than that of the circular diaphragm. The finite element results show that the hexagonal diaphragm design has great advantages for improving the transmission performance of the high-frequency PMUT.

MEMS ultrasonic transducers for safe, low-power and portable eye-blinking monitoring

Eye blinking is closely related to human physiology and psychology. It is an effective method of communication among people and can be used in human-machine interactions. Existing blink monitoring methods include video-oculography, electro-oculograms and infrared oculography. However, these methods suffer from uncomfortable use, safety risks, limited reliability in strong light or dark environments, and infringed informational security. In this paper, we propose an ultrasound-based portable approach for eye-blinking activity monitoring. Low-power pulse-echo ultrasound featuring biosafety is transmitted and received by microelectromechanical system (MEMS) ultrasonic transducers seamlessly integrated on glasses. The size, weight and power consumption of the transducers are 2.5 mm by 2.5 mm, 23.3 mg and 71 μW, respectively, which provides better portability than conventional methods using wearable devices. Eye-blinking activities were characterized by open and closed eye states and validated by experiments on different volunteers. Finally, real-time eye-blinking monitoring was successfully demonstrated with a response time less than 1 ms. The proposed solution paves the way for ultrasound-based wearable eye-blinking monitoring and offers miniaturization, light weight, low power consumption, high informational security and biosafety.

A Review of Transparent Sensors for Photoacoustic Imaging Applications

Photoacoustic imaging is a new type of noninvasive, nonradiation imaging modality that combines the deep penetration of ultrasonic imaging and high specificity of optical imaging. Photoacoustic imaging systems employing conventional ultrasonic sensors impose certain constraints such as obstructions in the optical path, bulky sensor size, complex system configurations, difficult optical and acoustic alignment, and degradation of signal-to-noise ratio. To overcome these drawbacks, an ultrasonic sensor in the optically transparent form has been introduced, as it enables direct delivery of excitation light through the sensors. In recent years, various types of optically transparent ultrasonic sensors have been developed for photoacoustic imaging applications, including optics-based ultrasonic sensors, piezoelectric-based ultrasonic sensors, and microelectromechanical system-based capacitive micromachined ultrasonic transducers. In this paper, the authors review representative transparent sensors for photoacoustic imaging applications. In addition, the potential challenges and future directions of the development of transparent sensors are discussed.

Frequency-Dependent Spatial Coherence in Conventional and Chirp Transmissions

The development of adaptive imaging techniques is contingent on the accurate and repeatable characterization of ultrasonic image quality. Adaptive transmit frequency selection, filtering, and frequency compounding all offer the ability to improve target conspicuity by balancing the effects of imaging resolution, the signal-to-clutter ratio, and speckle texture, but these strategies rely on the ability to capture image quality at each desired frequency. We investigate the use of broadband linear frequency-modulated transmissions, also known as chirps, to expedite the interrogation of frequency-dependent tissue spatial coherence for real-time implementations of frequency-based adaptive imaging strategies. Chirp-collected measurements of coherence are compared to those acquired by individually transmitted conventional pulses over a range of fundamental and harmonic frequencies, in order to evaluate the ability of chirps to recreate conventionally acquired coherence. Simulation and measurements in a uniform phantom free of acoustic clutter indicate that chirps replicate not only the mean coherence in a region-of-interest but also the distribution of coherence values over frequency. Results from acquisitions in porcine abdominal and human liver models show that prediction accuracy improves with chirp length. Chirps are also able to predict frequency-dependent decreases in coherence in both porcine abdominal and human liver models for fundamental and pulse inversion harmonic imaging. This work indicates that the use of chirps is a viable strategy to improve the efficiency of variable frequency coherence mapping, thus presenting an avenue for real-time implementations for frequency-based adaptive strategies.

Integrating photoacoustic tomography into a multimodal automated breast ultrasound scanner

SIGNIFICANCE

Photoacoustic tomography (PAT) is a promising emergent modality for the screening and staging of breast cancer. To minimize barriers to clinical translation, it is common to develop PAT systems based upon existing ultrasound hardware, which can entail significant design challenges in terms of light delivery. This often results in inherently non-uniform fluence within the tissue and should be accounted for during image reconstruction.

AIM

We aim to integrate PAT into an automated breast ultrasound scanner with minimal change to the existing system.

APPROACH

We designed and implemented an illuminator that directs spatially non-uniform light to the tissue near the acquisition plane of the imaging array. We developed a graphics processing unit-accelerated reconstruction method, which accounts for this illumination geometry by modeling the structure of the light in the sample. We quantified the performance of this system using a custom, modular photoacoustic phantom and graphite rods embedded in chicken breast tissue.

RESULTS

Our illuminator provides a fluence of 2.5  mJ cm  -  2 at the tissue surface, which was sufficient to attain a signal-to-noise ratio (SNR) of 8 dB at 2 cm in chicken breast tissue and image 0.25-mm features at depths of up to 3 cm in a medium with moderate optical scattering. Our reconstruction scheme is 200  ×   faster than a CPU implementation; it provides a 25% increase in SNR at 2 cm in chicken breast tissue and lowers image error by an average of 31% at imaging depths >1.5  cm compared with a method that does not account for the inhomogeneity of the illumination or the transducer directivity.

CONCLUSIONS

A fan-shaped illumination geometry is feasible for PAT; however, it is important to account for non-uniform fluence in illumination scenarios such as this. Future work will focus on increasing fluence and further optimizing the ultrasound hardware to improve SNR and overall image quality.

Ultrasound Sensing Can Improve Continuous Classification of Discrete Ambulation Modes Compared to Surface Electromyography

Clinical translation of "intelligent" lower-limb assistive technologies relies on robust control interfaces capable of accurately detecting user intent. To date, mechanical sensors and surface electromyography (EMG) have been the primary sensing modalities used to classify ambulation. Ultrasound (US) imaging can be used to detect user-intent by characterizing structural changes of muscle. Our study evaluates wearable US imaging as a new sensing modality for continuous classification of five discrete ambulation modes: level, incline, decline, stair ascent, and stair descent ambulation, and benchmarks performance relative to EMG sensing. Ten able-bodied subjects were equipped with a wearable US scanner and eight unilateral EMG sensors. Time-intensity features were recorded from US images of three thigh muscles. Features from sliding windows of EMG signals were analyzed in two configurations: one including 5 EMG sensors on muscles around the thigh, and another with 3 additional sensors placed on the shank. Linear discriminate analysis was implemented to continuously classify these phase-dependent features of each sensing modality as one of five ambulation modes. US-based sensing statistically improved mean classification accuracy to 99.8% (99.5-100% CI) compared to 8-EMG sensors (85.8%; 84.0-87.6% CI) and 5-EMG sensors (75.3%; 74.5-76.1% CI). Further, separability analyses show the importance of superficial and deep US information for stair classification relative to other modes. These results are the first to demonstrate the ability of US-based sensing to classify discrete ambulation modes, highlighting the potential for improved assistive device control using less widespread, less superficial and higher resolution sensing of skeletal muscle.

Ultrasound Features of Skeletal Muscle Can Predict Kinematics of Upcoming Lower-Limb Motion

Seamless integration of lower-limb assistive devices with the human body requires an intuitive human-machine interface, which would benefit from predicting the intent of individuals in advance of the upcoming motion. Ultrasound imaging was recently introduced as an intuitive sensing interface. The objective of the present study was to investigate the predictability of joint kinematics using ultrasound features of the rectus femoris muscle during a non-weight-bearing knee extension/flexion. Motion prediction accuracy was evaluated in 67 ms increments, up to 600 ms in time. Statistical analysis was used to evaluate the feasibility of motion prediction, and the linear mixed-effects model was used to determine a prediction time window where the joint angle prediction error is barely perceivable by the sample population, hence clinically reliable. Surprisingly, statistical tests revealed that the prediction accuracy of the joint angle was more sensitive to temporal shifts than the accuracy of the joint angular velocity prediction. Overall, predictability of the upcoming joint kinematics using ultrasound features of skeletal muscle was confirmed, and a time window for a statistically and clinically reliable prediction was found between 133 and 142 ms. A reliable prediction of user intent may provide the time needed for processing, control planning, and actuation of the assistive devices at critical points during ambulation, contributing to the intuitive behavior of lower-limb assistive devices.

Neuromodulation Management of Chronic Neuropathic Pain in The Central Nervous system

Neuromodulation is becoming one of the clinical tools for treating chronic neuropathic pain by transmitting controlled physical energy to the pre-identified neural targets in the central nervous system. Its nature of drug-free, non-addictive and improved targeting have attracted increasing attention among neuroscience research and clinical practices. This article provides a brief overview of the neuropathic pain and pharmacological routines for treatment, summarizes both the invasive and non-invasive neuromodulation modalities for pain management, and highlights an emerging brain stimulation technology, transcranial focused ultrasound (tFUS) with a focus on ultrasound transducer devices and the achieved neuromodulation effects and applications on pain management. Practical considerations of spatial guidance for tFUS are discussed for clinical applications. The safety of transcranial ultrasound neuromodulation and its future prospectives on pain management are also discussed.

Ultrasound Measurement of Skeletal Muscle Contractile Parameters Using Flexible and Wearable Single-Element Ultrasonic Sensor

Skeletal muscle is considered as a near-constant volume system, and the contractions of the muscle are related to the changes in tissue thickness. Assessment of the skeletal muscle contractile parameters such as maximum contraction thickness (Th), contraction time (Tc), contraction velocity (Vc), sustain time (Ts), and half-relaxation (Tr) provides valuable information for various medical applications. This paper presents a single-element wearable ultrasonic sensor (WUS) and a method to measure the skeletal muscle contractile parameters in A-mode ultrasonic data acquisition. The developed WUS was made of double-layer polyvinylidene fluoride (PVDF) piezoelectric polymer films with a simple and low-cost fabrication process. A flexible, lightweight, thin, and small size WUS would provide a secure attachment to the skin surface without affecting the muscle contraction dynamics of interest. The developed WUS was employed to monitor the contractions of gastrocnemius (GC) muscle of a human subject. The GC muscle contractions were evoked by the electrical muscle stimulation (EMS) at varying EMS frequencies from 2 Hz up to 30 Hz. The tissue thickness changes due to the muscle contractions were measured by utilizing a time-of-flight method in the ultrasonic through-transmission mode. The developed WUS demonstrated the capability to monitor the tissue thickness changes during the unfused and fused tetanic contractions. The tetanic progression level was quantitatively assessed using the parameter of the fusion index (FI) obtained. In addition, the contractile parameters (Th, Tc, Vc, Ts, and Tr) were successfully extracted from the measured tissue thickness changes. In addition, the unfused and fused tetanus frequencies were estimated from the obtained FI-EMS frequency curve. The WUS and ultrasonic method proposed in this study could be a valuable tool for inexpensive, non-invasive, and continuous monitoring of the skeletal muscle contractile properties.

Selective Ultrasonic Gravimetric Sensors Based on Capacitive Micromachined Ultrasound Transducer Structure-A Review

This review paper discusses the advances of the gravimetric detection devices based on capacitive micromachined ultrasound transducers structure. Principles of gravimetric operation and device modeling are reviewed through the presentation of an analytical, one-dimensional model and finite element modeling. Additionally, the most common fabrication techniques, including sacrificial release and wafer bonding, are discussed for advantages for gravimetric sensing. As functional materials are the most important part of the selective gravimetric sensing, the review of different functional material properties and coating and application methods is necessary. Particularly, absorption and desorption mechanisms of functional materials, like methylated polyethyleneimine, with examples of applications for gas sensing and using immune complexes for specific biomolecules detection are reviewed.

Transparent capacitive micromachined ultrasonic transducer (CMUT) arrays for real-time photoacoustic applications

Photoacoustic imaging has shown great potential for non-invasive high-resolution deep-tissue imaging. Minimizing the optical and acoustic paths for excitation and detection could significantly increase the signal-to-noise ratio. This could be accomplished by transparent transducers permitting through-transducer illumination. However, most ultrasound transducers are not optically transparent. Capacitive micromachined ultrasound transducer (CMUT) technology has compelling properties compared to piezoelectric transducers such as wide bandwidth and high receive sensitivity. Here, we introduce transparent CMUT linear arrays with high transparency in the visible and near-infrared range. To fabricate the devices, we used an adhesive wafer bonding technique using photosensitive benzocyclobutene (BCB) as both a structural and adhesive layer with a glass-indium-tin-oxide (ITO) substrate. Silicon nitride is used as the membrane material ensuring hermiticity and optical transparency. Our fabricated transducer arrays consist of 64 and 128 elements with immersion operation frequency of 8 MHz, enabling high-resolution imaging. ITO, along with thin metal strips, are used as a conductive layer for the top electrodes with minimal impact on device transparency. Fabricated devices have shown average transparency of 70% in the visible wavelength range that goes up to 90% in the near-infrared range. Arrays are wire-bonded to interfacing electronics and connected to a research ultrasound platform for phantom imaging. Arrays exhibited signal-to-noise (SNR) of 40 dB with 30V bias voltage and laser fluence of 13.5 mJ/cm². Arrays with 128 channels provided lateral and axial resolutions of 234 µm and 220 µm, respectively.

Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers-CMUT and PMUT

Microelectromechanical system (MEMS)-based mass sensors are proposed as potential candidates for highly sensitive chemical and gas detection applications owing to their miniaturized structure, low power consumption, and ease of integration with readout circuits. This paper presents a new approach in developing micromachined mass sensors based on capacitive and piezoelectric transducer configurations for use in low concentration level gas detection in a complex environment. These micromachined sensors operate based on a shift in their center resonant frequencies. This shift is caused by a change in the sensor’s effective mass when exposed to the target gas molecules, which is then correlated to the gas concentration level. In this work, capacitive and piezoelectric-based micromachined sensors are investigated and their principle of operation, device structures and configurations, critical design parameters and their candidate fabrication techniques are discussed in detail.

A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

In this paper, a simple fabrication process for SU-8 in-plane micro electro-mechanical systems (MEMS) structures, called "border-bulk micromachining", is introduced. It aims to enhance the potential of SU-8 MEMS structures for applications such as low-cost/disposable microsystems and wearable MEMS. The fabrication process is robust and uses only four processing steps to fabricate SU-8 in-plane MEMS structures, simplifying the fabrication flow in comparison with other reported attempts. The whole fabrication process has been implemented on copper-polyimide composites. A new processing method enables the direct, laser-based micromachining of polyimide in a practical way, bringing in extra processing safety and simplicity. After forming the polymeric in-plane MEMS structures through SU-8 lithography, a copper wet etching masked by the SU-8 structure layers is carried out. After the wet etching, fabricated in-plane MEMS structures are suspended within an open window on the substrate, similar to the final status of in-plane MEMS devices made from industrial silicon micromachining methods (such as SOIMUMPS). The last step of the fabrication flow is a magnetron sputtering of aluminum. The border-bulk micromachining process has been experimentally evaluated through the fabrication and the characterization of simple in-plane electrically actuated MEMS test structures. The characterization results of these simple test structures have verified the following process qualities: controllability, reproducibility, predictability and general robustness.

Lower Limb Motion Estimation Using Ultrasound Imaging: A Framework for Assistive Device Control

OBJECTIVE

Powered assistive devices need improved control intuitiveness to enhance their clinical adoption. Therefore, the intent of individuals should be identified and the device movement should adhere to it. Skeletal muscles contract synergistically to produce defined lower limb movements, so unique contraction patterns in lower extremity musculature may provide a means of device joint control. Ultrasound (US) imaging enables direct measurement of the local deformation of muscle segments. Hence, the objective of this study was to assess the feasibility of using US to estimate human lower limb movements.

METHODS

A novel algorithm was developed to calculate US features of the rectus femoris muscle during a non-weight-bearing knee flexion/extension experiment by nine able-bodied subjects. Five US features of the skeletal muscle tissue were studied, namely thickness, angle between aponeuroses, pennation angle, fascicle length, and echogenicity. A multiscale ridge filter was utilized to extract the structures in the image and a random sample consensus (RANSAC) model was used to segment muscle aponeuroses and fascicles. A localization scheme further guided RANSAC to enable tracking in a US image sequence. Gaussian process regression models were trained using segmented features to estimate both knee joint angle and angular velocity.

RESULTS

The proposed segmentation-estimation approach could estimate knee joint angle and angular velocity with an average root mean square error value of 7.45° and 0.262 rad/s, respectively. The average processing rate was 3-6 frames/s that is promising toward real-time implementation.

CONCLUSION

Experimental results demonstrate the feasibility of using US to estimate human lower extremity motion. The ability of the algorithm to work in real time may enable the use of US as a neural interface for lower limb applications.

SIGNIFICANCE

Intuitive intent recognition of human lower extremity movements using wearable US imaging may enable volitional assistive device control and enhance locomotor outcomes for those with mobility impairments.

Transparent capacitive micromachined ultrasonic transducers (CMUTs) for photoacoustic applications

Integration of acoustic and optical techniques prompted the need for transparent ultrasonic transducers to guide the light through the transducer and improve the signal to noise ratio. In the presented paper, capacitive micromachined ultrasound transducers (CMUTs) using glass substrate and indium-tin-oxide electrodes were fabricated by adhesive wafer bonding technique presenting a transparency of up to 82% in the visible range. A receive sensitivity of 65.5 μV/Pa was measured with noise equivalent sensitivity of 95 Pa. Capacity of the produced CMUTs for photoacoustic imaging was also demonstrated by successfully detecting the photoacoustic signal from an aluminum foil target, which was irradiated by a 532-nm pulse laser transmitted through the CMUT. The centre frequency of the detected photoacoustic signal was at 2 MHz with 52.3% -6-dB fractional bandwidth.

Advanced Micro- and Nano-Gas Sensor Technology: A Review

Micro- and nano-sensors lie at the heart of critical innovation in fields ranging from medical to environmental sciences. In recent years, there has been a significant improvement in sensor design along with the advances in micro- and nano-fabrication technology and the use of newly designed materials, leading to the development of high-performance gas sensors. Advanced micro- and nano-fabrication technology enables miniaturization of these sensors into micro-sized gas sensor arrays while maintaining the sensing performance. These capabilities facilitate the development of miniaturized integrated gas sensor arrays that enhance both sensor sensitivity and selectivity towards various analytes. In the past, several micro- and nano-gas sensors have been proposed and investigated where each type of sensor exhibits various advantages and limitations in sensing resolution, operating power, response, and recovery time. This paper presents an overview of the recent progress made in a wide range of gas-sensing technology. The sensing functionalizing materials, the advanced micro-machining fabrication methods, as well as their constraints on the sensor design, are discussed. The sensors' working mechanisms and their structures and configurations are reviewed. Finally, the future development outlook and the potential applications made feasible by each category of the sensors are discussed.

Advances in Capacitive Micromachined Ultrasonic Transducers

Capacitive micromachined ultrasonic transducer (CMUT) technology has enjoyed rapid development in the last decade. Advancements both in fabrication and integration, coupled with improved modelling, has enabled CMUTs to make their way into mainstream ultrasound imaging systems and find commercial success. In this review paper, we touch upon recent advancements in CMUT technology at all levels of abstraction; modeling, fabrication, integration, and applications. Regarding applications, we discuss future trends for CMUTs and their impact within the broad field of biomedical imaging.