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He Y, Cheng L, Wang H, Zhang Y, Meade R, Vahala K, Zhang M, Li J. Chip-scale high-performance photonic microwave oscillator. SCIENCE ADVANCES 2024; 10:eado9570. [PMID: 39141728 PMCID: PMC11323879 DOI: 10.1126/sciadv.ado9570] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/05/2024] [Accepted: 07/09/2024] [Indexed: 08/16/2024]
Abstract
Optical frequency division based on bulk or fiber optics provides unprecedented spectral purity for microwave oscillators. To extend the applications of this approach, the challenges are to develop miniaturized oscillators without trading off phase noise performance. Here, we report a chip-scale high-performance photonic microwave oscillator based on integrated electro-optical frequency division. Dual distributed-feedback lasers are co-self-injection locked to a single silicon nitride spiral resonator to provide a record-high-stability, fully on-chip optical reference. An integrated electro-optical frequency comb based on a thin-film lithium niobate phase modulator chip is leveraged to perform optical-to-microwave frequency division. The resulting integrated photonic microwave oscillator achieves a record-low phase noise for chip-scale oscillators. The results represent a major advance in high-performance, integrated photonic microwave oscillators for applications including signal processing, radar, timing, and coherent communications.
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Affiliation(s)
- Yang He
- hQphotonics Inc., 2500 E Colorado Blvd Suite 330, Pasadena CA 91107, USA
| | - Long Cheng
- hQphotonics Inc., 2500 E Colorado Blvd Suite 330, Pasadena CA 91107, USA
| | - Heming Wang
- hQphotonics Inc., 2500 E Colorado Blvd Suite 330, Pasadena CA 91107, USA
| | - Yu Zhang
- HyperLight Corporation, 1 Bow Street, Suite 420, Cambridge, MA 02138, USA
| | - Roy Meade
- HyperLight Corporation, 1 Bow Street, Suite 420, Cambridge, MA 02138, USA
| | - Kerry Vahala
- T. J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA 91125, USA
| | - Mian Zhang
- HyperLight Corporation, 1 Bow Street, Suite 420, Cambridge, MA 02138, USA
| | - Jiang Li
- hQphotonics Inc., 2500 E Colorado Blvd Suite 330, Pasadena CA 91107, USA
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Lu P, Yan T, Huang J, Xing T, Liu H, Han Z, Xu X, Tao C. ITO-Induced Nonlinear Optical Response Enhancement of Titanium Nitride Thin Films. NANOMATERIALS (BASEL, SWITZERLAND) 2024; 14:1040. [PMID: 38921916 PMCID: PMC11206435 DOI: 10.3390/nano14121040] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/19/2024] [Revised: 06/10/2024] [Accepted: 06/14/2024] [Indexed: 06/27/2024]
Abstract
A series of TiN/ITO composite films with various thickness of ITO buffer layer were fabricated in this study. The enhancement of optical properties was realized in the composite thin films. The absorption spectra showed that absorption intensity in the near-infrared region was obviously enhanced with the increase of ITO thickness due to the coupling of surface plasma between TiN and ITO. The epsilon-near-zero wavelength of this composite can be tuned from 935 nm to 1895 nm by varying the thickness of ITO thin films. The nonlinear optical property investigated by Z-scan technique showed that the nonlinear absorption coefficient (β = 3.03 × 10-4 cm/W) for the composite was about 14.02 times greater than that of single-layer TiN films. The theoretical calculations performed by finite difference time domain were in good agreement with those of the experiments.
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Affiliation(s)
- Peng Lu
- Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China; (P.L.)
| | - Tingzhen Yan
- Department of Printing and Pack Aging Engineering, Shanghai Publishing and Printing College, No. 100 Shuifeng Road, Shanghai 200093, China;
| | - Jialei Huang
- Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China; (P.L.)
| | - Tian Xing
- Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China; (P.L.)
| | - Hao Liu
- Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China; (P.L.)
| | - Zhaoxia Han
- Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China; (P.L.)
| | - Xueke Xu
- Heng Mai Optics and Fine Mechanics (Hang Zhou) Co., Ltd., Hangzhou 311421, China
| | - Chunxian Tao
- Engineering Research Center of Optical Instrument and System, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China; (P.L.)
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Kudelin I, Groman W, Ji QX, Guo J, Kelleher ML, Lee D, Nakamura T, McLemore CA, Shirmohammadi P, Hanifi S, Cheng H, Jin N, Wu L, Halladay S, Luo Y, Dai Z, Jin W, Bai J, Liu Y, Zhang W, Xiang C, Chang L, Iltchenko V, Miller O, Matsko A, Bowers SM, Rakich PT, Campbell JC, Bowers JE, Vahala KJ, Quinlan F, Diddams SA. Photonic chip-based low-noise microwave oscillator. Nature 2024; 627:534-539. [PMID: 38448599 PMCID: PMC10954552 DOI: 10.1038/s41586-024-07058-z] [Citation(s) in RCA: 1] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/21/2023] [Accepted: 01/11/2024] [Indexed: 03/08/2024]
Abstract
Numerous modern technologies are reliant on the low-phase noise and exquisite timing stability of microwave signals. Substantial progress has been made in the field of microwave photonics, whereby low-noise microwave signals are generated by the down-conversion of ultrastable optical references using a frequency comb1-3. Such systems, however, are constructed with bulk or fibre optics and are difficult to further reduce in size and power consumption. In this work we address this challenge by leveraging advances in integrated photonics to demonstrate low-noise microwave generation via two-point optical frequency division4,5. Narrow-linewidth self-injection-locked integrated lasers6,7 are stabilized to a miniature Fabry-Pérot cavity8, and the frequency gap between the lasers is divided with an efficient dark soliton frequency comb9. The stabilized output of the microcomb is photodetected to produce a microwave signal at 20 GHz with phase noise of -96 dBc Hz-1 at 100 Hz offset frequency that decreases to -135 dBc Hz-1 at 10 kHz offset-values that are unprecedented for an integrated photonic system. All photonic components can be heterogeneously integrated on a single chip, providing a significant advance for the application of photonics to high-precision navigation, communication and timing systems.
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Affiliation(s)
- Igor Kudelin
- National Institute of Standards and Technology, Boulder, CO, USA.
- Department of Physics, University of Colorado Boulder, Boulder, CO, USA.
| | - William Groman
- National Institute of Standards and Technology, Boulder, CO, USA
- Department of Physics, University of Colorado Boulder, Boulder, CO, USA
| | - Qing-Xin Ji
- T. J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA, USA
| | - Joel Guo
- Department of Electrical and Computer Engineering, University of California, Santa Barbara, Santa Barbara, CA, USA
| | - Megan L Kelleher
- National Institute of Standards and Technology, Boulder, CO, USA
- Department of Physics, University of Colorado Boulder, Boulder, CO, USA
| | - Dahyeon Lee
- National Institute of Standards and Technology, Boulder, CO, USA
- Department of Physics, University of Colorado Boulder, Boulder, CO, USA
| | - Takuma Nakamura
- National Institute of Standards and Technology, Boulder, CO, USA
- Department of Physics, University of Colorado Boulder, Boulder, CO, USA
| | - Charles A McLemore
- National Institute of Standards and Technology, Boulder, CO, USA
- Department of Physics, University of Colorado Boulder, Boulder, CO, USA
| | - Pedram Shirmohammadi
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - Samin Hanifi
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - Haotian Cheng
- Department of Applied Physics, Yale University, New Haven, CT, USA
| | - Naijun Jin
- Department of Applied Physics, Yale University, New Haven, CT, USA
| | - Lue Wu
- T. J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA, USA
| | - Samuel Halladay
- Department of Applied Physics, Yale University, New Haven, CT, USA
| | - Yizhi Luo
- Department of Applied Physics, Yale University, New Haven, CT, USA
| | - Zhaowei Dai
- Department of Applied Physics, Yale University, New Haven, CT, USA
| | - Warren Jin
- Department of Electrical and Computer Engineering, University of California, Santa Barbara, Santa Barbara, CA, USA
| | - Junwu Bai
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - Yifan Liu
- National Institute of Standards and Technology, Boulder, CO, USA
- Department of Physics, University of Colorado Boulder, Boulder, CO, USA
| | - Wei Zhang
- Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, USA
| | - Chao Xiang
- Department of Electrical and Computer Engineering, University of California, Santa Barbara, Santa Barbara, CA, USA
| | - Lin Chang
- Department of Electrical and Computer Engineering, University of California, Santa Barbara, Santa Barbara, CA, USA
| | - Vladimir Iltchenko
- Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, USA
| | - Owen Miller
- Department of Applied Physics, Yale University, New Haven, CT, USA
| | - Andrey Matsko
- Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA, USA
| | - Steven M Bowers
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - Peter T Rakich
- Department of Applied Physics, Yale University, New Haven, CT, USA
| | - Joe C Campbell
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - John E Bowers
- Department of Electrical and Computer Engineering, University of California, Santa Barbara, Santa Barbara, CA, USA
| | - Kerry J Vahala
- T. J. Watson Laboratory of Applied Physics, California Institute of Technology, Pasadena, CA, USA
| | - Franklyn Quinlan
- National Institute of Standards and Technology, Boulder, CO, USA
- Electrical Computer & Energy Engineering, University of Colorado Boulder, Boulder, CO, USA
| | - Scott A Diddams
- National Institute of Standards and Technology, Boulder, CO, USA.
- Department of Physics, University of Colorado Boulder, Boulder, CO, USA.
- Electrical Computer & Energy Engineering, University of Colorado Boulder, Boulder, CO, USA.
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4
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Sun S, Wang B, Liu K, Harrington MW, Tabatabaei F, Liu R, Wang J, Hanifi S, Morgan JS, Jahanbozorgi M, Yang Z, Bowers SM, Morton PA, Nelson KD, Beling A, Blumenthal DJ, Yi X. Integrated optical frequency division for microwave and mmWave generation. Nature 2024; 627:540-545. [PMID: 38448598 PMCID: PMC10954543 DOI: 10.1038/s41586-024-07057-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/21/2023] [Accepted: 01/10/2024] [Indexed: 03/08/2024]
Abstract
The generation of ultra-low-noise microwave and mmWave in miniaturized, chip-based platforms can transform communication, radar and sensing systems1-3. Optical frequency division that leverages optical references and optical frequency combs has emerged as a powerful technique to generate microwaves with superior spectral purity than any other approaches4-7. Here we demonstrate a miniaturized optical frequency division system that can potentially transfer the approach to a complementary metal-oxide-semiconductor-compatible integrated photonic platform. Phase stability is provided by a large mode volume, planar-waveguide-based optical reference coil cavity8,9 and is divided down from optical to mmWave frequency by using soliton microcombs generated in a waveguide-coupled microresonator10-12. Besides achieving record-low phase noise for integrated photonic mmWave oscillators, these devices can be heterogeneously integrated with semiconductor lasers, amplifiers and photodiodes, holding the potential of large-volume, low-cost manufacturing for fundamental and mass-market applications13.
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Affiliation(s)
- Shuman Sun
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - Beichen Wang
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - Kaikai Liu
- Department of Electrical and Computer Engineering, University of California Santa Barbara, Santa Barbara, CA, USA
| | - Mark W Harrington
- Department of Electrical and Computer Engineering, University of California Santa Barbara, Santa Barbara, CA, USA
| | - Fatemehsadat Tabatabaei
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - Ruxuan Liu
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - Jiawei Wang
- Department of Electrical and Computer Engineering, University of California Santa Barbara, Santa Barbara, CA, USA
| | - Samin Hanifi
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - Jesse S Morgan
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - Mandana Jahanbozorgi
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - Zijiao Yang
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
- Department of Physics, University of Virginia, Charlottesville, VA, USA
| | - Steven M Bowers
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | | | | | - Andreas Beling
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA
| | - Daniel J Blumenthal
- Department of Electrical and Computer Engineering, University of California Santa Barbara, Santa Barbara, CA, USA.
| | - Xu Yi
- Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA, USA.
- Department of Physics, University of Virginia, Charlottesville, VA, USA.
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