Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography

Level set simulation of focused ion beam sputtering of a multilayer substrate

The evolution of a multilayer sample surface during focused ion beam processing was simulated using the level set method and experimentally studied by milling a silicon dioxide layer covering a crystalline silicon substrate. The simulation took into account the redeposition of atoms simultaneously sputtered from both layers of the sample as well as the influence of backscattered ions on the milling process. Monte Carlo simulations were applied to produce tabulated data on the angular distributions of sputtered atoms and backscattered ions. Two sets of test structures including narrow trenches and rectangular boxes with different aspect ratios were experimentally prepared, and their cross sections were visualized in scanning transmission electron microscopy images. The superimposition of the calculated structure profiles onto the images showed a satisfactory agreement between simulation and experimental results. In the case of boxes that were prepared with an asymmetric cross section, the simulation can accurately predict the depth and shape of the structures, but there is some inaccuracy in reproducing the form of the left sidewall of the structure with a large amount of the redeposited material. To further validate the developed simulation approach and gain a better understanding of the sputtering process, the distribution of oxygen atoms in the redeposited layer derived from the numerical data was compared with the corresponding elemental map acquired by energy-dispersive X-ray microanalysis.

Micronano Synergetic Three-Dimensional Bioelectronics: A Revolutionary Breakthrough Platform for Cardiac Electrophysiology

Cardiovascular diseases (CVDs) are the leading cause of mortality and therefore pose a significant threat to human health. Cardiac electrophysiology plays a crucial role in the investigation and treatment of CVDs, including arrhythmia. The long-term and accurate detection of electrophysiological activity in cardiomyocytes is essential for advancing cardiology and pharmacology. Regarding the electrophysiological study of cardiac cells, many micronano bioelectric devices and systems have been developed. Such bioelectronic devices possess unique geometric structures of electrodes that enhance quality of electrophysiological signal recording. Though planar multielectrode/multitransistors are widely used for simultaneous multichannel measurement of cell electrophysiological signals, their use for extracellular electrophysiological recording exhibits low signal strength and quality. However, the integration of three-dimensional (3D) multielectrode/multitransistor arrays that use advanced penetration strategies can achieve high-quality intracellular signal recording. This review provides an overview of the manufacturing, geometric structure, and penetration paradigms of 3D micronano devices, as well as their applications for precise drug screening and biomimetic disease modeling. Furthermore, this review also summarizes the current challenges and outlines future directions for the preparation and application of micronano bioelectronic devices, with an aim to promote the development of intracellular electrophysiological platforms and thereby meet the demands of emerging clinical applications.

Plasmonic silver and gold nanoparticles: shape- and structure-modulated plasmonic functionality for point-of-caring sensing, bio-imaging and medical therapy

Silver and gold nanoparticles have found extensive biomedical applications due to their strong localized surface plasmon resonance (LSPR) and intriguing plasmonic properties. This review article focuses on the correlation among particle geometry, plasmon properties and biomedical applications. It discusses how particle shape and size are tailored via controllable synthetic approaches, and how plasmonic properties are tuned by particle shape and size, which are embodied by nanospheres, nanorods, nanocubes, nanocages, nanostars and core-shell composites. This article summarizes the design strategies for the use of silver and gold nanoparticles in plasmon-enhanced fluorescence, surface-enhanced Raman scattering (SERS), electroluminescence, and photoelectrochemistry. It especially discusses how to use plasmonic nanoparticles to construct optical probes including colorimetric, SERS and plasmonic fluorescence probes (labels/reporters). It also demonstrates the employment of Ag and Au nanoparticles in polymer- and paper-based microfluidic devices for point-of-care testing (POCT). In addition, this article highlights how to utilize plasmonic nanoparticles for in vitro and in vivo bio-imaging based on SERS, fluorescence, photoacoustic and dark-field models. Finally, this article shows perspectives in plasmon-enhanced photothermal and photodynamic therapy.

Advances in lithographic techniques for precision nanostructure fabrication in biomedical applications

Nano-fabrication techniques have demonstrated their vital importance in technological innovation. However, low-throughput, high-cost and intrinsic resolution limits pose significant restrictions, it is, therefore, paramount to continue improving existing methods as well as developing new techniques to overcome these challenges. This is particularly applicable within the area of biomedical research, which focuses on sensing, increasingly at the point-of-care, as a way to improve patient outcomes. Within this context, this review focuses on the latest advances in the main emerging patterning methods including the two-photon, stereo, electrohydrodynamic, near-field electrospinning-assisted, magneto, magnetorheological drawing, nanoimprint, capillary force, nanosphere, edge, nano transfer printing and block copolymer lithographic technologies for micro- and nanofabrication. Emerging methods enabling structural and chemical nano fabrication are categorised along with prospective chemical and physical patterning techniques. Established lithographic techniques are briefly outlined and the novel lithographic technologies are compared to these, summarising the specific advantages and shortfalls alongside the current lateral resolution limits and the amenability to mass production, evaluated in terms of process scalability and cost. Particular attention is drawn to the potential breakthrough application areas, predominantly within biomedical studies, laying the platform for the tangible paths towards the adoption of alternative developing lithographic technologies or their combination with the established patterning techniques, which depends on the needs of the end-user including, for instance, tolerance of inherent limits, fidelity and reproducibility.

Freestanding, Freeform Metamolecule Fibers Tailoring Artificial Optical Magnetism

Metamolecule clusters support various unique types of artificial electromagnetism at optical frequencies. However, the technological challenges regarding the freeform fabrication of freestanding metamolecule clusters with programmed geometries and multiple compositions remain unresolved. Here, the freeform, freestanding raspberry-like metamolecule (RMM) fibers based on the directional guidance of a femtoliter meniscus are presented, resulting in the evaporative co-assembly of silica nanoparticles and gold nanoparticles with the aid of 3D nanoprinting. This method offers a facile and universal pathway to shape RMM fibers in 3D, enabling versatile manipulation of near- and far-field characteristics. In particular, the authors demonstrate the ability to decrease the scattering of the millimeter-scale RMM fiber in visible spectrum. In addition, the influence of electric and magnetic dipole modes on the directional scattering of RMM fibers is investigated. These experiments show that the magnetic response of an individual RMM can be controlled by adjusting the filling factor of gold nanoparticles. The authors anticipate that this method will allow for unrestricted design and realization of nanophotonic structures, surpassing the limitations of conventional fabrication processes.

Micro-patterns of gold nanoparticles assembled by photovoltaic optoelectronic tweezers: application to plasmonic fluorescence enhancement

Noble metal nanostructures are well-known for their ability to increase the efficiency of different optical or physical phenomena due to their plasmonic behavior. This work presents a simple strategy to obtain Au plasmonic patterns by optically induced nanoparticle assembly and its application as fluorescence enhancement platforms. This strategy is based on the so-called photovoltaic optoelectronic tweezers (PVOT) being the first time they are used for fabricating Au periodic micro-patterns. Fringe patterns with a sub-structure of aggregates, assembled from individual spherical nanoparticles of 3.5 or 170 nm diameters, are successfully obtained. The spatial distribution of the aggregates is controlled with micrometric accuracy and the patterns can be arranged over large-scale active areas (tens of mm²). The outcome for the ultra-small (3.5 nm) particles is particularly relevant because this diameter is the smallest one manipulated by PVOT so far. Testing experiments of plasmonic fluorescence enhancement show that the 170-nm patterns present a much better plasmonic behavior. For the 170-nm platform they reveal a 10-fold enhancement factor in the fluorescence of Rhodamine-B dye molecules and a 3-fold one for tagged DNA biomolecules. Hence, the results suggest that these latter plasmonic platforms are good candidates for efficient bio-imaging and biosensing techniques, among other applications.

Biomolecule-Based Optical Metamaterials: Design and Applications

Metamaterials are broadly defined as artificial, electromagnetically homogeneous structures that exhibit unusual physical properties that are not present in nature. They possess extraordinary capabilities to bend electromagnetic waves. Their size, shape and composition can be engineered to modify their characteristics, such as iridescence, color shift, absorbance at different wavelengths, etc., and harness them as biosensors. Metamaterial construction from biological sources such as carbohydrates, proteins and nucleic acids represents a low-cost alternative, rendering high quantities and yields. In addition, the malleability of these biomaterials makes it possible to fabricate an endless number of structured materials such as composited nanoparticles, biofilms, nanofibers, quantum dots, and many others, with very specific, invaluable and tremendously useful optical characteristics. The intrinsic characteristics observed in biomaterials make them suitable for biomedical applications. This review addresses the optical characteristics of metamaterials obtained from the major macromolecules found in nature: carbohydrates, proteins and DNA, highlighting their biosensor field use, and pointing out their physical properties and production paths.

Controlled assembly of gold nanoparticles in resonant gold nanoapertures for SERS applications

The controlled assembly of plasmonic nanoparticles is vital for realizing low-cost, high efficiency plasmonic substrates with tunable resonances. Here, we present a strategy to assemble gold nanoparticles (AuNPs) in resonant gold nanoapertures (NAs) to enable coupling-mediated near-field enhancement. The NAs templates are fabricated using shadow sphere lithography on polyelectrolyte (PE) coated substrates. Subsequently, AuNPs are assembled in the resonant NA templates via a simple immersion step. The PE layer, AuNP concentration, NaCl concentration, incubation time, and template thickness are used to control the particle number per aperture and the interparticle distance of the AuNP assemblies. The fabricated AuNP-NA substrates are evaluated for their SERS potential using 4-Mercaptobenzoic acid (MBA) as a Raman reporter molecule. The SERS intensity of the AuNP-NA templates can be enhanced by ten times by controlling the AuNP and NA template parameters as compared to the bare NA templates. Numerical simulations show that the coupling between the various plasmonic modes is crucial for this SERS enhancement. The proposed strategy can be used to fabricate hybrid AuNP-NA based SERS substrates with improved sensitivity.

Enhanced Thermo-optical Response by Means of Anapole Excitation

High refractive index (HRI) dielectric nanostructures offer a versatile platform to control the light-matter interaction at the nanoscale as they can easily support electric and magnetic modes with low losses. An additional property that makes them extraordinary is that they can support low radiative modes, so-called anapole modes. In this work, we propose a spectrally tunable anapole nanoheater based on the use of a dielectric anapole resonator. We show that a gold ring nanostructure, a priori nonresonant, can be turned into a resonant unit by just filling its hole with an HRI material supporting anapole modes, resulting in a more efficient nanoheater able to amplify the photothermal response of the bare nanoring. As proof of concept, we perform a detailed study of the thermoplasmonic response of a gold nanoring used as heating source and a silicon disk, designed to support anapole modes, located in its center acting as an anapolar resonator. Furthermore, we utilize the anapole excitation to easily shift the thermal response of these structures from the shortwave infrared range to the near-infrared range.

Thermally-curable nanocomposite printing for the scalable manufacturing of dielectric metasurfaces

Metasurfaces consisting of artificially designed meta-atoms have been popularized recently due to their advantages of amplitude and phase of light control. However, the electron beam lithography method for metasurface fabrication has high cost and low throughput, which results in a limitation for the fabrication of metasurfaces. In this study, nanocomposite printing technology is used to fabricate high-efficiency metasurfaces with low cost. To demonstrate the efficiency of the proposed fabrication method, a metahologram is designed and fabricated using a nanocomposite. The metahologram exhibits conversion efficiencies of 48% and 35% at wavelengths of 532 and 635 nm, respectively. The nanocomposite is composed of polymers with nanoparticles, so durability tests are also performed to evaluate the effects of temperature and humidity on the metasurfaces. The test verifies that at temperatures below the glass transition temperature of the base resin, the nanostructures do not collapse, so the efficiency of the metasurfaces remains almost the same. The surrounding humidity does not affect the nanostructures at all. Hence, the durability of the nanocomposite metasurfaces can be further enhanced by replacing the base resin, and this nanocomposite printing method will facilitate practical metasurface use at low cost.

Three-Dimensional Plasmonic Nanocluster-Driven Light-Matter Interaction for Photoluminescence Enhancement and Picomolar-Level Biosensing

Plasmonic nanoparticle clusters promise to support unique engineered electromagnetic responses at optical frequencies, realizing a new concept of devices for nanophotonic applications. However, the technological challenges associated with the fabrication of three-dimensional nanoparticle clusters with programmed compositions remain unresolved. Here, we present a novel strategy for realizing heterogeneous structures that enable efficient near-field coupling between the plasmonic modes of gold nanoparticles and various other nanomaterials via a simple three-dimensional coassembly process. Quantum dots embedded in the plasmonic structures display ∼56 meV of a blue shift in the emission spectrum. The decay enhancement factor increases as the total contribution of radiative and nonradiative plasmonic modes increases. Furthermore, we demonstrate an ultracompact diagnostic platform to detect M13 viruses and their mutations from femtoliter volume, sub-100 pM analytes. This platform could pave the way toward an effective diagnosis of diverse pathogens, which is in high demand for handling pandemic situations.

Memory efficient constrained optimization of scanning-beam lithography

This article describes a memory efficient method for solving large-scale optimization problems that arise when planning scanning-beam lithography processes. These processes require the identification of an exposure pattern that minimizes the difference between a desired and predicted output image, subject to constraints. The number of free variables is equal to the number of pixels, which can be on the order of millions or billions in practical applications. The proposed method splits the problem domain into a number of smaller overlapping subdomains with constrained boundary conditions, which are then solved sequentially using a constrained gradient search method (L-BFGS-B). Computational time is reduced by exploiting natural sparsity in the problem and employing the fast Fourier transform for efficient gradient calculation. When it comes to the trade-off between memory usage and computational time we can make a different trade-off compared to previous methods, where the required memory is reduced by approximately the number of subdomains at the cost of more computations. In an example problem with 30 million variables, the proposed method reduces memory requirements by 67% but increases computation time by 27%. Variations of the proposed method are expected to find applications in the planning of processes such as scanning laser lithography, scanning electron beam lithography, and focused ion beam deposition, for example.

Diatom biosilica in plasmonics: applications in sensing, diagnostics and therapeutics [Invited]

Several living organisms are able to synthesize complex nanostructures provided with peculiar physical and chemical properties by means of finely-tuned, genetically controlled biomineralization processes. Frustules, in particular, are micro- and nano-structured silica shells produced by ubiquitous diatom microalgae, whose optical properties have been recently exploited in photonics, solar energy harvesting, and biosensing. Metallization of diatom biosilica, both in the shape of intact frustules or diatomite particles, can trigger plasmonic effects that in turn can find application in high-sensitive detection platforms, allowing to obtain effective nanosensors at low cost and on a large scale. The aim of the present review article is to provide a wide, complete overview on the main metallization techniques applied to diatom biosilica and on the principal applications of diatom-based plasmonic devices mainly but not exclusively in the fields of biochemical sensing, diagnostics and therapeutics.

Enhanced photoluminescence and shortened lifetime of DCJTB by photoinduced metal deposition on a ferroelectric lithography substrate

The photodeposition of metallic nanostructures onto ferroelectric surfaces could enable new applications based on the assembly of molecules and patterning local surface reactivity by enhancing surface field intensity. DCJTB (4-(dicyanomethylene)-2-t-butyl-6-(1,1,7,7-tetramethyljulolidyl-9-enyl)-4H-pyran) is an excellent fluorescent dye and dopant material with a high quantum efficiency used for OLED displays on the market. However, how to raise the photoluminescence (PL) and reduce the lifetime of DCJTB in a substrate remain extraordinary challenges for its application. Here, we demonstrate a tunable ferroelectric lithography plasmon-enhanced substrate to generate photo-reduced silver nanoparticles (AgNPs) and achieve enhanced PL with a shortened lifetime depending on the substrate's annealing time. The enhanced PL with shortened lifetimes can attribute to the localized electromagnetic (EM) wave produced by the nanotextured AgNPs layers' surface and gap plasmon resonances. The simulation is based on the three-dimensional finite element method to explain the mechanism of experimental results. Since the absorption increases, the remarkable enhanced PL of DCJTB can attain in the fabricated periodically proton exchanged (PPE) lithium niobate (LiNbO₃) substrate. Furthermore, the proposed fabrication method demonstrates to help tune the surface EM wave distribution in the substrate, which can simultaneously achieve the significantly shortened lifetime and high PL intensity of DCJTB in the substrate. Compared with the un-annealed substrate, the PL intensity of DCJTB in the assembly metallic nanostructures is enhanced 13.70 times, and the PL's lifetime is reduced by 12.50%, respectively. Thus, the fabricated substrate can be a promising candidate, verifying chemically patterned ferroelectrics' satisfaction as a PL-active substrate.

A Parabola-like Gold Nanobowtie on a Sapphire Substrate as a Nano-Cavity

Plasmonic, metallic nanostructures have attracted much interest for their ability to manipulate light on a subwavelength scale and for their related applications in various fields. In this work, a parabola-like gold nanobowtie (PGNB) on a sapphire substrate was designed as a nano-cavity for confining light waves in a nanoscale gap region. The near-field optical properties of the innovative PGNB structure were studied comprehensively, taking advantage of the time-resolved field calculation based on a finite-difference time-domain algorithm (FDTD). The calculation result showed that the resonance wavelength of the nano-cavity was quite sensitive to the geometry of the PGNB. The values that related to the scattering and absorption properties of the PGNB, such as the scattering cross section, absorption cross section, extinction cross section, scattering ratio, and also the absorption ratio, were strongly dependent on the geometrical parameters which affected the surface area of the nanobowtie. Increased sharpness of the gold tips on the parabola-like nano-wings benefited the concentration of high-density charges with opposite electric properties in the narrow gold tips with limited volume, thus, resulting in a highly enhanced electric field in the nano-cavity under illumination of the light wave. Reduction of the gap size between the two gold nano-tips, namely, the size of the nano-cavity, decreased the distance that the electric potential produced by the highly concentrated charges on the surface of each gold nano-tip had to jump across, therefore, causing a significantly enhanced field in the nano-cavity. Further, alignment of the linearly polarized electric field of the incident light wave with the symmetric axis of the PGNB efficiently enabled the free electrons in the PGNB to concentrate on the surface of the sharp gold tips with a high density, thus, strongly improving the field across the nano-cavity. The research provides a new insight for future design, nanofabrication, and characterization of PGNBs for applications in devices that relate to enhancing photons emission, improving efficiency for energy harvesting, and improving sensitivity for infrared detection.

High-precision tabletop microplotter for flexible on-demand material deposition in printed electronics and device functionalization

Microstructuring, in particular, the additive functionalization of surfaces with, e.g., conductive or bioactive materials plays a crucial role in many applications in sensing or printed electronics. Mostly, the lithography steps are made prior to assembling functionalized surfaces into the desired places of use within a bigger device as a microfluidic channel or an electronic casing. However, when this is not possible, most lithography techniques struggle with access to recessed or inclined/vertical surfaces for geometrical reasons. In particular, for "on-the-fly" printing aiming to add microstructures to already existing devices on demand and maybe even for one-time trials, e.g., in prototyping, a flexible "micropencil" allowing for direct write under direct manual control and on arbitrarily positioned surfaces would be highly desirable. Here, we present a highly flexible, micromanipulator-based setup for capillary printing of conductive and biomaterial ink formulations that can address a wide range of geometries as exemplified on vertical, recessed surfaces and stacked 3D scaffolds as models for hard to access surfaces. A wide range of feature sizes from tens to hundreds of micrometer can be obtained by the choice of capillary sizes and the on-demand in situ writing capabilities are demonstrated with completion of a circuit structure by gold line interconnects deposited with the setup.

Time for NanoNeuro

The study of electronic properties of materials at the nanoscale has unveiled physical laws and generated materials such as nanoparticles, quantum dots, nanodiamonds, nanoelectrodes, and nanoprobes. Independently, large-scale public and private neuroscience programs have been launched to develop methods to measure and manipulate neural circuits in living animals and humans. Here, we review an upcoming field, NanoNeuro, defined as the intersection of nanoscience and neuroscience, that aims to develop nanoscale methods to record and stimulate neuronal activity. Because of their unique physical properties, nanomaterials have intrinsic advantages as biosensors and actuators, and they may be applicable to humans without the need for genetic modifications. Thus, nanoscience could make major methodological contributions to the future of neuroscience and, more generally, to biomedical sciences.

Zero→Two-Dimensional Metal Nanostructures: An Overview on Methods of Preparation, Characterization, Properties, and Applications

Metal nanostructured materials, with many excellent and unique physical and mechanical properties compared to macroscopic bulk materials, have been widely used in the fields of electronics, bioimaging, sensing, photonics, biomimetic biology, information, and energy storage. It is worthy of noting that most of these applications require the use of nanostructured metals with specific controlled properties, which are significantly dependent on a series of physical parameters of its characteristic size, geometry, composition, and structure. Therefore, research on low-cost preparation of metal nanostructures and controlling of their characteristic sizes and geometric shapes are the keys to their development in different application fields. The preparation methods, physical and chemical properties, and application progress of metallic nanostructures are reviewed, and the methods for characterizing metal nanostructures are summarized. Finally, the future development of metallic nanostructure materials is explored.

Single-Entity Detection With TEM-Fabricated Nanopores

Nanopore-based single-entity detection shows immense potential in sensing and sequencing technologies. Solid-state nanopores permit unprecedented detail while preserving mechanical robustness, reusability, adjustable pore size, and stability in different physical and chemical environments. The transmission electron microscope (TEM) has evolved into a powerful tool for fabricating and characterizing nanometer-sized pores within a solid-state ultrathin membrane. By detecting differences in the ionic current signals due to single-entity translocation through the nanopore, solid-state nanopores can enable gene sequencing and single molecule/nanoparticle detection with high sensitivity, improved acquisition speed, and low cost. Here we briefly discuss the recent progress in the modification and characterization of TEM-fabricated nanopores. Moreover, we highlight some key applications of these nanopores in nucleic acids, protein, and nanoparticle detection. Additionally, we discuss the future of computer simulations in DNA and protein sequencing strategies. We also attempt to identify the challenges and discuss the future development of nanopore-detection technology aiming to promote the next-generation sequencing technology.

Fabrication of plasmonic arrays of nanodisks and nanotriangles by nanotip indentation lithography and their optical properties

Fabrication of plasmonic nanostructures in a precise and reliable manner is a topic of huge interest because their structural details significantly affect their plasmonic properties. Herein, we present nanotip indentation lithography (NTIL) based on atomic force microscopy (AFM) indentation for the patterning of plasmonic nanostructures with precisely controlled size and shape. The size of the nanostructures is controlled by varying the indentation force of AFM tips into the mask polymer; while their shapes are determined to be nanodisks (NDs) or nanotriangles (NTs) depending on the shapes of the AFM tip apex. The localized surface plasmon resonance of the NDs is tailored to cover most of the visible-wavelength regime by controlling their size. The NTs show distinct polarization-dependent plasmon modes consistent with full-wave optical simulations. For the demonstration of the light-matter interaction control capability of NTIL nanostructures, we show that photoluminescence enhancement from MoS2 layers can be deliberately controlled by tuning the size of the nanostructures. Our results pave the way for the AFM-indentation-based fabrication of plasmonic nanostructures with a highly precise size and shape controllability and reproducibility.

Route to Cost-Effective Fabrication of Wafer-Scale Nanostructure through Self-Priming Nanoimprint

Nanoimprint technology is powerful for fabricating nanostructures in a large area. However, expensive equipment, high cost, and complex process conditions hinder the application of nano-imprinting technology. Therefore, double-layer self-priming nanoimprint technology was proposed to fabricate ordered metal nanostructures uniformly on 4-inch soft and hard substrates without the aid of expensive instruments. Different nanostructure (gratings, nanoholes and nanoparticles) and different materials (metal and MoS2) were patterned, which shows wide application of double-layer self-priming nanoimprint technology. Moreover, by a double-layer system, the width and the height of metal can be adjusted through the photoresist thickness and developing condition, which provide a programmable way to fabricate different nanostructures using a single mold. The double-layer self-priming nanoimprint method can be applied in poor condition without equipment and be programmable in nanostructure parameters using a single mold, which reduces the cost of instruments and molds.

High-Fidelity 3D Nanoprinting of Plasmonic Gold Nanoantennas

The direct-write fabrication of freestanding nanoantennas for plasmonic applications is a challenging task, as demands for overall morphologies, nanoscale features, and material qualities are very high. Within the small pool of capable technologies, three-dimensional (3D) nanoprinting via focused electron beam-induced deposition (FEBID) is a promising candidate due to its design flexibility. As FEBID materials notoriously suffer from high carbon contents, the chemical postgrowth transfer into pure metals is indispensably needed, which can severely harm or even destroy FEBID-based 3D nanoarchitectures. Following this challenge, we first dissect FEBID growth characteristics and then combine individual advantages by an advanced patterning approach. This allows the direct-write fabrication of high-fidelity shapes with nanoscale features in the sub-10 nm range, which allow a shape-stable chemical transfer into plasmonically active Au nanoantennas. The here-introduced strategy is a generic approach toward more complex 3D architectures for future applications in the field of 3D plasmonics.

Structural and optical properties of monocrystalline and polycrystalline gold plasmonic nanorods

The quality of lithographically prepared structures is intimately related to the properties of the metal film from which they are fabricated. Here we compare two kinds of thin gold films on a silicon nitride membrane: a conventional polycrystalline thin film deposited by magnetron sputtering and monocrystalline gold microplates that were chemically synthesised directly on the membrane's surface for the first time. Both pristine metals were used to fabricate plasmonic nanorods using focused ion beam lithography. The structural and optical properties of the nanorods were characterized by analytical transmission electron microscopy including electron energy loss spectroscopy. The dimensions of the nanorods in both substrates reproduced well the designed size of 240×80 nm² with the deviations up to 20 nm in both length and width. The shape reproducibility was considerably improved among monocrystalline nanorods fabricated from the same microplate. Interestingly, monocrystalline nanorods featured inclined boundaries while the boundaries of the polycrystalline nanorods were upright. Q factors and peak loss probabilities of the modes in both structures are within the experimental uncertainty identical. We demonstrate that the optical response of the plasmonic nanorods is not deteriorated when the polycrystalline metal is used instead of the monocrystalline metal.

Parallel Nanoimprint Forming of One-Dimensional Chiral Semiconductor for Strain-Engineered Optical Properties

The low-dimensional, highly anisotropic geometries, and superior mechanical properties of one-dimensional (1D) nanomaterials allow the exquisite strain engineering with a broad tunability inaccessible to bulk or thin-film materials. Such capability enables unprecedented possibilities for probing intriguing physics and materials science in the 1D limit. Among the techniques for introducing controlled strains in 1D materials, nanoimprinting with embossed substrates attracts increased attention due to its capability to parallelly form nanomaterials into wrinkled structures with controlled periodicities, amplitudes, orientations at large scale with nanoscale resolutions. Here, we systematically investigated the strain-engineered anisotropic optical properties in Te nanowires through introducing a controlled strain field using a resist-free thermally assisted nanoimprinting process. The magnitude of induced strains can be tuned by adjusting the imprinting pressure, the nanowire diameter, and the patterns on the substrates. The observed Raman spectra from the chiral-chain lattice of 1D Te reveal the strong lattice vibration response under the strain. Our results suggest the potential of 1D Te as a promising candidate for flexible electronics, deformable optoelectronics, and wearable sensors. The experimental platform can also enable the exquisite mechanical control in other nanomaterials using substrate-induced, on-demand, and controlled strains.

Influence of experimental conditions on localized surface plasmon resonances measurement by electron energy loss spectroscopy

Scanning transmission electron microscopy (STEM) combined with electron energy loss spectroscopy (EELS) has become a standard technique to map localized surface plasmon resonances with a nanometer spatial and a sufficient energy resolution over the last 15 years. However, no experimental work discussing the influence of experimental conditions during the measurement has been published up to now. We present an experimental study of the influence of the primary beam energy and the collection semi-angle on the plasmon resonances measurement by STEM-EELS. To explore the influence of these two experimental parameters we study a series of gold rods and gold bow-tie and diabolo antennas. We discuss the impact on experimental characteristics which are important for successful detection of the plasmon peak in EELS, namely: the intensity of plasmonic signal, the signal to background ratio, and the signal to zero-loss peak ratio. We found that the primary beam energy should be high enough to suppress the scattering in the sample and at the same time should be low enough to avoid the appearance of relativistic effects. Consequently, the best results are obtained using a medium primary beam energy, in our case 120 keV, and an arbitrary collection semi-angle, as it is not a critical parameter at this primary beam energy. Our instructive overview will help microscopists in the field of plasmonics to arrange their experiments.

Linewidth study of pixelated aluminum nanowire gratings on polarization performance

Nowadays, nanowire gratings are widely used in various applications such as imaging sensors and high-resolution microscopes. Structure parameters are the main factors that affect the optical performance of the gratings. This work aims to present the influence of the linewidth of pixelated aluminum nanowire gratings with a fixed period on the transmittance and extinction ratio in the visible region. By controlling the exposure doses of electron beam lithography (EBL), different linewidths of pixelated aluminum nanowire gratings with a period of 170 nm were fabricated. The significant effects of linewidth difference on the polarization performance were verified by the simulations of finite-difference time-domain (FDTD) software. The simulations were divided into two parts: the discussion of the pure aluminum without considering oxidation and the discussion of the surface aluminum being oxidized into the aluminum oxide. An optical system was built to evaluate the performance of the fabricated structures. The results show that the trends of the measurement results are consistent with that of simulation. This work will give a guide to the fabrication and evaluation of the nanowire gratings.

Plasmonic-Active Nanostructured Thin Films

Plasmonic-active nanomaterials are of high interest to scientists because of their expanding applications in the field for medicine and energy. Chemical and biological sensors based on plasmonic nanomaterials are well-established and commercially available, but the role of plasmonic nanomaterials on photothermal therapeutics, solar cells, super-resolution imaging, organic synthesis, etc. is still emerging. The effectiveness of the plasmonic materials on these technologies depends on their stability and sensitivity. Preparing plasmonics-active nanostructured thin films (PANTFs) on a solid substrate improves their physical stability. More importantly, the surface plasmons of thin film and that of nanostructures can couple in PANTFs enhancing the sensitivity. A PANTF can be used as a transducer for any of the three plasmonic-based sensing techniques, namely, the propagating surface plasmon, localized surface plasmon resonance, and surface-enhanced Raman spectroscopy-based sensing techniques. Additionally, continuous nanostructured metal films have an advantage for implementing electrical controls such as simultaneous sensing using both plasmonic and electrochemical techniques. Although research and development on PANTFs have been rapidly advancing, very few reviews on synthetic methods have been published. In this review, we provide some fundamental and practical aspects of plasmonics along with the recent advances in PANTFs synthesis, focusing on the advantages and shortcomings of the fabrication techniques. We also provide an overview of different types of PANTFs and their sensitivity for biosensing.

Fourier transform plasmon resonance spectrometer using nanoslit-nanowire pair

In this paper, we present a nanoscale Fourier transform spectrometer using a plasmonic interferometer consisting of a tilt subwavelength slit-nanowire pair on a metallic surface fabricated by the focused ion beam microfabrication technique. The incident broadband light strongly couples with the surface plasmons on the gold surface, and thus, surface plasmon polaritons (SPPs) are generated. The launched SPPs interfere with the incident light and generate high contrast interference fringes in the nanoslit. The transmitted SPPs through the metal nanoslit can decouple into free space and are collected by an objective in the far field. The spectroscopic information of the incidence light is obtained by fast Fourier transform of the fringe pattern of the SPPs. In our design, there is no need for a bulky dispersive spectrometer or dispersive optical elements. The dimension of the spectrometer is around 200 μm length. Our design is based on inherent coherence of the SPP waves propagating through the subwavelength metal nanoslit structures etched into an opaque gold film.

Repeatable and metal-independent nanotransfer printing based on metal oxidation for plasmonic color filters

Many recently developed nanotransfer printing techniques have received much attention because of their simplicity and low cost. In addition, such techniques are suitable for fabricating nano/microscale sensors, optical elements, and electrical devices. However, conventional nanotransfer printing methods are time-consuming, cannot be easily used over large areas or with several different materials, and are not suitable for repeatedly transferring various materials onto the same substrate or a curved surface. Herein, a new nanotransfer printing method is introduced based on the oxidation of various metals and the formation of covalent bonds between spin- and spray-coatable adhesives and the chosen metal at low temperatures. These strong covalent bonds allow the fast transfer of the deposited materials from a polymer stamp without additional processing. A major advantage of this process is that it is metal-independent; nanowires of various metals are successfully transferred from the polymer stamp because strong covalent bonds form instantaneously between the metal and an adhesive-coated substrate. Moreover, this nanotransfer process can be used repeatedly to fabricate large-scale color filters from smaller areas of nanowires, regardless of the metal type and nanostructure orientation. Furthermore, plasmonic color filters composed of nanohole arrays can be obtained on both flat and curved surfaces.

Nanostructured metals for light-based technologies

The basic theoretical understanding of light interacting with nanostructured metals that has existed since the early 1900s has become more relevant in the last two decades, largely because of new approaches to structure metals down to the nanometer scale or smaller. Here, a broad overview of the concepts and applications of nanostructuring metals for light-based technologies is given. The theory of the response of metals to an applied oscillating field is given, including a discussion of nonlocal, nonlinear and quantum effects. Using this metal response, the guiding of electromagnetic (light) waves using metals is given, with a particular emphasis on the impact of nanostructured metals for tighter confinement and slower propagation. Similarly, the influence of metal nanostructures on light scattering by isolated metal structures, like nanoparticles and nanoantennas, is described, with basic results presented including plasmonic/circuit resonances, the single channel limit, directivity enhancement, the maximum power transfer theorem, limits on the magnetic response from kinetic inductance and the scaling of gap plasmons to the nanometer scale and smaller. A brief overview of nanofabrication approaches to creating metal nanostructures is given. Finally, existing and emerging light-based applications are presented, including those for sensing, spectroscopy (including local refractive index, Raman, IR absorption), detection (including Schottky detectors), switching (including terahertz photoconductive antennas), modulation, energy harvesting and photocatalysis, light emission (including lasers and tunneling based light emission), optical tweezing, nonlinear optics, subwavelength imaging and lithography and high density data storage.

Limits of Babinet's principle for solid and hollow plasmonic antennas

We present an experimental and theoretical study of Babinet’s principle of complementarity in plasmonics. We have used spatially-resolved electron energy loss spectroscopy and cathodoluminescence to investigate electromagnetic response of elementary plasmonic antenna: gold discs and complementary disc-shaped apertures in a gold layer. We have also calculated their response to the plane wave illumination. While the qualitative validity of Babinet’s principle has been confirmed, quantitative differences have been found related to the energy and quality factor of the resonances and the magnitude of related near fields. In particular, apertures were found to exhibit stronger interaction with the electron beam than solid antennas, which makes them a remarkable alternative of the usual plasmonic-antennas design. We also examine the possibility of magnetic near field imaging based on the Babinet’s principle.

Topographical patterning: characteristics of current processing techniques, controllable effects on material properties and co-cultured cell fate, updated applications in tissue engineering, and improvement strategies

Topographical patterning has recently attracted lots of attention in regulating cell fate, understanding the mechanism of cell–microenvironment interactions, and solving the great issues of regenerative medicine.