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Zhang Y, Yu H, Wang L, Wu X, He J, Huang W, Ouyang C, Chen D, Keshta BE. Advanced lithography materials: From fundamentals to applications. Adv Colloid Interface Sci 2024; 329:103197. [PMID: 38781827 DOI: 10.1016/j.cis.2024.103197] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/28/2023] [Revised: 04/09/2024] [Accepted: 05/18/2024] [Indexed: 05/25/2024]
Abstract
The semiconductor industry has long been driven by advances in a nanofabrication technology known as lithography, and the fabrication of nanostructures on chips relies on an important coating, the photoresist layer. Photoresists are typically spin-coated to form a film and have a photolysis solubility transition and etch resistance that allow for rapid fabrication of nanostructures. As a result, photoresists have attracted great interest in both fundamental research and industrial applications. Currently, the semiconductor industry has entered the era of extreme ultraviolet lithography (EUVL) and expects photoresists to be able to fabricate sub-10 nm structures. In order to realize sub-10 nm nanofabrication, the development of photoresists faces several challenges in terms of sensitivity, etch resistance, and molecular size. In this paper, three types of lithographic mechanisms are reviewed to provide strategies for designing photoresists that can enable high-resolution nanofabrication. The discussion of the current state of the art in optical lithography is presented in depth. Practical applications of photoresists and related recent advances are summarized. Finally, the current achievements and remaining issues of photoresists are discussed and future research directions are envisioned.
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Affiliation(s)
- Yanhui Zhang
- State Key Laboratory of Chemical Engineering, College of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310058, PR China
| | - Haojie Yu
- State Key Laboratory of Chemical Engineering, College of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310058, PR China; Zhejiang-Russia Joint Laboratory of Photo-Electron-Megnetic Functional Materials, College of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310058, PR China.
| | - Li Wang
- State Key Laboratory of Chemical Engineering, College of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310058, PR China; Zhejiang-Russia Joint Laboratory of Photo-Electron-Megnetic Functional Materials, College of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310058, PR China
| | - Xudong Wu
- State Key Laboratory of Chemical Engineering, College of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310058, PR China
| | - Jiawen He
- State Key Laboratory of Chemical Engineering, College of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310058, PR China
| | - Wenbing Huang
- State Key Laboratory of Chemical Engineering, College of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310058, PR China
| | - Chengaung Ouyang
- State Key Laboratory of Chemical Engineering, College of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310058, PR China
| | - Dingning Chen
- State Key Laboratory of Chemical Engineering, College of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310058, PR China
| | - Basem E Keshta
- State Key Laboratory of Chemical Engineering, College of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310058, PR China
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Ece E, Ölmez K, Hacıosmanoğlu N, Atabay M, Inci F. Advancing 3D printed microfluidics with computational methods for sweat analysis. Mikrochim Acta 2024; 191:162. [PMID: 38411762 PMCID: PMC10899357 DOI: 10.1007/s00604-024-06231-5] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/05/2023] [Accepted: 01/18/2024] [Indexed: 02/28/2024]
Abstract
The intricate tapestry of biomarkers, including proteins, lipids, carbohydrates, vesicles, and nucleic acids within sweat, exhibits a profound correlation with the ones in the bloodstream. The facile extraction of samples from sweat glands has recently positioned sweat sampling at the forefront of non-invasive health monitoring and diagnostics. While extant platforms for sweat analysis exist, the imperative for portability, cost-effectiveness, ease of manufacture, and expeditious turnaround underscores the necessity for parameters that transcend conventional considerations. In this regard, 3D printed microfluidic devices emerge as promising systems, offering a harmonious fusion of attributes such as multifunctional integration, flexibility, biocompatibility, a controlled closed environment, and a minimal requisite analyte volume-features that leverage their prominence in the realm of sweat analysis. However, formidable challenges, including high throughput demands, chemical interactions intrinsic to the printing materials, size constraints, and durability concerns, beset the landscape of 3D printed microfluidic devices. Within this paradigm, we expound upon the foundational aspects of 3D printed microfluidic devices and proffer a distinctive perspective by delving into the computational study of printing materials utilizing density functional theory (DFT) and molecular dynamics (MD) methodologies. This multifaceted approach serves manifold purposes: (i) understanding the complexity of microfluidic systems, (ii) facilitating comprehensive analyses, (iii) saving both cost and time, (iv) improving design optimization, and (v) augmenting resolution. In a nutshell, the allure of 3D printing lies in its capacity for affordable and expeditious production, offering seamless integration of diverse components into microfluidic devices-a testament to their inherent utility in the domain of sweat analysis. The synergistic fusion of computational assessment methodologies with materials science not only optimizes analysis and production processes, but also expedites their widespread accessibility, ensuring continuous biomarker monitoring from sweat for end-users.
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Affiliation(s)
- Emre Ece
- UNAM-National Nanotechnology Research Center, Bilkent University, 06800, Ankara, Turkey
- Institute of Materials Science and Nanotechnology, Bilkent University, 06800, Ankara, Turkey
| | - Kadriye Ölmez
- UNAM-National Nanotechnology Research Center, Bilkent University, 06800, Ankara, Turkey
- Institute of Materials Science and Nanotechnology, Bilkent University, 06800, Ankara, Turkey
| | - Nedim Hacıosmanoğlu
- UNAM-National Nanotechnology Research Center, Bilkent University, 06800, Ankara, Turkey
- Institute of Materials Science and Nanotechnology, Bilkent University, 06800, Ankara, Turkey
| | - Maryam Atabay
- UNAM-National Nanotechnology Research Center, Bilkent University, 06800, Ankara, Turkey
- Department of Chemistry, Hacettepe University, 06800, Ankara, Turkey
| | - Fatih Inci
- UNAM-National Nanotechnology Research Center, Bilkent University, 06800, Ankara, Turkey.
- Institute of Materials Science and Nanotechnology, Bilkent University, 06800, Ankara, Turkey.
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Microfluidics: the propellant of CRISPR-based nucleic acid detection. Trends Biotechnol 2023; 41:557-574. [PMID: 35989112 DOI: 10.1016/j.tibtech.2022.07.015] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/20/2022] [Revised: 07/18/2022] [Accepted: 07/26/2022] [Indexed: 11/24/2022]
Abstract
Since the discovery of collateral cleavage activity, clustered regularly interspaced short palindromic repeats (CRISPR)/Cas systems have become the new generation of nucleic acid detection tools. However, their widespread application remains limited. A pre-amplification step is required to improve the sensitivity of CRISPR systems, complicating the operating procedure and limiting quantitative precision. In addition, nonspecific collateral cleavage activity makes it difficult to realize multiplex detection in a one-pot CRISPR reaction with a single Cas protein. Microfluidics, which can transfer nucleic acid analysis process to a chip, has the advantages of miniaturization, integration, and automation. Microfluidics coupled with CRISPR systems improves the detection ability of CRISPR, enabling fast, high-throughput, integrated, multiplex, and digital detection, which results in the further popularization of CRISPR for a range of scenarios.
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Automated analysis of mitochondrial dimensions in mesenchymal stem cells: Current methods and future perspectives. Heliyon 2023; 9:e12987. [PMID: 36711314 PMCID: PMC9873686 DOI: 10.1016/j.heliyon.2023.e12987] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/21/2022] [Revised: 01/03/2023] [Accepted: 01/11/2023] [Indexed: 01/20/2023] Open
Abstract
As centre of energy production and key regulators of metabolic and cellular signaling pathways, the integrity of mitochondria is essential for mesenchymal stem cell function in tissue regeneration. Alterations in the size, shape and structural organization of mitochondria are correlated with the physiological state of the cell and its environment and could be used as diagnostic biomarkers. Therefore, high-throughput experimental and computational techniques are crucial to ensure adequate correlations between mitochondrial function and disease phenotypes. The emerge of microfluidic technologies can address the shortcomings of traditional methods to determine mitochondrial dimensions for diagnostic and therapeutic use. This review discusses optical detection methods compatible with microfluidics to measure mitochondrial dynamics and their potential for clinical stem cell research targeting mitochondrial dysfunction.
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Fongsamootr T, Thawon I, Tippayawong N, Tippayawong KY, Suttakul P. Effect of print parameters on additive manufacturing of metallic parts: performance and sustainability aspects. Sci Rep 2022; 12:19292. [PMID: 36369254 PMCID: PMC9650670 DOI: 10.1038/s41598-022-22613-2] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/29/2022] [Accepted: 10/17/2022] [Indexed: 11/13/2022] Open
Abstract
In this study, the effects of print parameters on the mechanical properties of additively manufactured metallic parts were investigated using a tensile test. The 17-4 PH stainless steel specimens with two print parameters, including infill density and pattern orientation, were fabricated by additive manufacturing (AM) using the bound metal deposition (BMD) technique. The mechanical properties considered in this study are the Young's modulus and ultimate tensile strength. The results demonstrate that the pattern orientations do not affect the Young's modulus of the infill specimen with the triangular pattern. In contrast, the ultimate strength significantly varies depending on the pattern orientations, where the samples with the pattern orientation of zero degrees yield the best ultimate strength. In fact, the mechanical properties of infill specimens increase with their infill density. However, when operating cost and time are considered, an index for estimating performance and sustainability is consequently established. The relationship between the normalized ultimate strength of an infill specimen and the relative density is defined as the weight efficiency. The index for assessing a sustainable product is characterized by the weight efficiency versus sustainable parameter(s). The index can help end users select an appropriate infill density for AM products by considering the operating cost and time. Different cost models, including material-only costs, direct costs, and total costs, can be included in the index model to assess a sustainable product in a particular cost context.
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Affiliation(s)
- Thongchai Fongsamootr
- grid.7132.70000 0000 9039 7662Department of Mechanical Engineering, Faculty of Engineering, Chiang Mai University, Chiang Mai, 50200 Thailand
| | - Itthidet Thawon
- grid.7132.70000 0000 9039 7662Department of Mechanical Engineering, Faculty of Engineering, Chiang Mai University, Chiang Mai, 50200 Thailand
| | - Nakorn Tippayawong
- grid.7132.70000 0000 9039 7662Department of Mechanical Engineering, Faculty of Engineering, Chiang Mai University, Chiang Mai, 50200 Thailand
| | - Korrakot Yaibuathet Tippayawong
- grid.7132.70000 0000 9039 7662Department of Industrial Engineering, Faculty of Engineering, Chiang Mai University, Chiang Mai, 50200 Thailand ,grid.7132.70000 0000 9039 7662Supply Chain and Engineering Management Research Unit, Chiang Mai University, Chiang Mai, 50200 Thailand
| | - Pana Suttakul
- grid.7132.70000 0000 9039 7662Department of Mechanical Engineering, Faculty of Engineering, Chiang Mai University, Chiang Mai, 50200 Thailand
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Dutta S, Cohn D. Dually responsive biodegradable drug releasing
3D
printed structures. J Appl Polym Sci 2022. [DOI: 10.1002/app.53137] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
Affiliation(s)
- Sujan Dutta
- Casali Center of Applied Chemistry, Institute of Chemistry The Hebrew University of Jerusalem Jerusalem Israel
| | - Daniel Cohn
- Casali Center of Applied Chemistry, Institute of Chemistry The Hebrew University of Jerusalem Jerusalem Israel
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