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Yu Z, Li X, Jung H, Harada M, Prokhorov D, Lee T. Robust acoustic directional sensing enabled by synergy between resonator-based sensor and deep learning. Sci Rep 2024; 14:10148. [PMID: 38698130 PMCID: PMC11066120 DOI: 10.1038/s41598-024-60696-1] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/27/2023] [Accepted: 04/26/2024] [Indexed: 05/05/2024] Open
Abstract
We demonstrate enhanced acoustic sensing arising from the synergy between resonator-based acoustic sensor and deep learning. We numerically verify that both vibration amplitude and phase are enhanced and preserved at and off the resonance in our compact acoustic sensor housing three cavities. In addition, we experimentally measure the response of our sensor to single-frequency and siren signals, based on which we train convolutional neural networks (CNNs). We observe that the CNN trained by using both amplitude and phase features achieve the best accuracy on predicting the incident direction of both types of signals. This is even though the signals are broadband and affected by noise thought to be difficult for resonators. We attribute the improvement to a complementary effect between the two features enabled by the combination of resonant effect and deep learning. This observation is further supported by comparing to the CNNs trained by the features extracted from signals measured on reference sensor without resonators, whose performances fall far behind. Our results suggest the advantage of this synergetic approach to enhance the sensing performance of compact acoustic sensors on both narrow- and broad-band signals, which paves the way for the development of advanced sensing technology that has potential applications in autonomous driving systems to detect emergency vehicles.
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Affiliation(s)
- Ziqi Yu
- Toyota Research Institute of North America, Toyota Motor North America, Ann Arbor, MI, 48105, USA.
| | - Xiaopeng Li
- Toyota Research Institute of North America, Toyota Motor North America, Ann Arbor, MI, 48105, USA
| | - Hojung Jung
- Toyota Motor Corporation, 1200 Mishuku, Susono, Shizuoka, 410-1107, Japan
| | - Masahiro Harada
- Toyota Motor Corporation, 1200 Mishuku, Susono, Shizuoka, 410-1107, Japan
| | - Danil Prokhorov
- Toyota Research Institute of North America, Toyota Motor North America, Ann Arbor, MI, 48105, USA
| | - Taehwa Lee
- Toyota Research Institute of North America, Toyota Motor North America, Ann Arbor, MI, 48105, USA
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2
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Liu X, Cai C, Ji K, Hu X, Xiong L, Qi ZM. Prototype Optical Bionic Microphone with a Dual-Channel Mach-Zehnder Interferometric Transducer. SENSORS (BASEL, SWITZERLAND) 2023; 23:s23094416. [PMID: 37177620 PMCID: PMC10181713 DOI: 10.3390/s23094416] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/01/2023] [Revised: 04/11/2023] [Accepted: 04/14/2023] [Indexed: 05/15/2023]
Abstract
A prototype optical bionic microphone with a dual-channel Mach-Zehnder interferometric (MZI) transducer was designed and prepared for the first time using a silicon diaphragm made by microelectromechanical system (MEMS) technology. The MEMS diaphragm mimicked the structure of the fly Ormia Ochracea's coupling eardrum, consisting of two square wings connected through a neck that is anchored via the two torsional beams to the silicon pedestal. The vibrational displacement of each wing at its distal edge relative to the silicon pedestal is detected with one channel of the dual-channel MZI transducer. The diaphragm at rest is coplanar with the silicon pedestal, resulting in an initial phase difference of zero for each channel of the dual-channel MZI transducer and consequently offering the microphone strong temperature robustness. The two channels of the prototype microphone show good consistency in their responses to incident sound signals; they have the rocking and bending resonance frequencies of 482 Hz and 1911 Hz, and their pressure sensitivities at a lower frequency exhibit an "8"-shaped directional dependence. The comparison indicates that the dual-channel MZI transducer-based bionic microphone proposed in this work is advantageous over the Fabry-Perot interferometric transducer-based counterparts extensively reported.
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Affiliation(s)
- Xin Liu
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
- School of Electronic, Electrical, and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Chen Cai
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
| | - Kangning Ji
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
- School of Electronic, Electrical, and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Xinyu Hu
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
- School of Electronic, Electrical, and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Linsen Xiong
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
- School of Electronic, Electrical, and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
| | - Zhi-Mei Qi
- State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
- School of Electronic, Electrical, and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
- School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
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3
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Mikel-Stites MR, Salcedo MK, Socha JJ, Marek PE, Staples AE. Reconsidering tympanal-acoustic interactions leads to an improved model of auditory acuity in a parasitoid fly. BIOINSPIRATION & BIOMIMETICS 2023; 18:035007. [PMID: 36854192 DOI: 10.1088/1748-3190/acbffa] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/09/2022] [Accepted: 02/28/2023] [Indexed: 06/18/2023]
Abstract
Although most binaural organisms locate sound sources using neurological structures to amplify the sounds they hear, some animals use mechanically coupled hearing organs instead. One of these animals, the parasitoid flyOrmia ochracea(O. ochracea), has astoundingly accurate sound localization abilities. It can locate objects in the azimuthal plane with a precision of 2°, equal to that of humans, despite an intertympanal distance of only 0.5 mm, which is less than1/100th of the wavelength of the sound emitted by the crickets that it parasitizes.O. ochraceaaccomplishes this feat via mechanically coupled tympana that interact with incoming acoustic pressure waves to amplify differences in the signals received at the two ears. In 1995, Mileset aldeveloped a model of hearing mechanics inO. ochraceathat represents the tympana as flat, front-facing prosternal membranes, though they lie on a convex surface at an angle from the flies' frontal and transverse planes. The model works well for incoming sound angles less than±30∘but suffers from reduced accuracy (up to 60% error) at higher angles compared to response data acquired fromO. ochraceaspecimens. Despite this limitation, it has been the basis for bio-inspired microphone designs for decades. Here, we present critical improvements to this classic hearing model based on information from three-dimensional reconstructions ofO. ochracea's tympanal organ. We identified the orientation of the tympana with respect to a frontal plane and the azimuthal angle segment between the tympana as morphological features essential to the flies' auditory acuity, and hypothesized a differentiated mechanical response to incoming sound on the ipsi- and contralateral sides that depend on these features. We incorporated spatially-varying model coefficients representing this asymmetric response, making a new quasi-two-dimensional (q2D) model. The q2D model has high accuracy (average errors of under 10%) for all incoming sound angles. This improved biomechanical model may inform the design of new microscale directional microphones and other small-scale acoustic sensor systems.
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Affiliation(s)
- Max R Mikel-Stites
- Department of Biomedical Engineering and Mechanics, Virginia Tech, Blacksburg, VA 24061, United States of America
- Engineering Mechanics program, Virginia Tech, Blacksburg, VA 24061, United States of America
- Department of Mathematics, Virginia Tech, Blacksburg, VA 24061, United States of America
| | - Mary K Salcedo
- Department of Biomedical Engineering and Mechanics, Virginia Tech, Blacksburg, VA 24061, United States of America
| | - John J Socha
- Department of Biomedical Engineering and Mechanics, Virginia Tech, Blacksburg, VA 24061, United States of America
| | - Paul E Marek
- Department of Entomology, Virginia Tech, Blacksburg, VA 24061, United States of America
| | - Anne E Staples
- Department of Biomedical Engineering and Mechanics, Virginia Tech, Blacksburg, VA 24061, United States of America
- Engineering Mechanics program, Virginia Tech, Blacksburg, VA 24061, United States of America
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Alves F, Rabelo R, Karunasiri G. Dual Band MEMS Directional Acoustic Sensor for Near Resonance Operation. SENSORS 2022; 22:s22155635. [PMID: 35957192 PMCID: PMC9371106 DOI: 10.3390/s22155635] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/13/2022] [Revised: 07/23/2022] [Accepted: 07/26/2022] [Indexed: 02/01/2023]
Abstract
In this paper, we report on the design and characterization of a microelectromechanical systems (MEMS) directional sensor inspired by the tympana configuration of the parasitic fly Ormia ochracea. The sensor is meant to be operated at resonance and act as a natural filter for the undesirable frequency bands. By means of breaking the symmetry of a pair of coupled bridged membranes, two independent bending vibrational modes can be excited. The electronic output, obtained by the transduction of the vibration to differential capacitance and then voltage through charge amplifiers, can be manipulated to tailor the frequency response of the sensor. Four different frequency characteristics were demonstrated. The sensor exhibits, at resonance, mechanical sensitivity around 6 μm/Pa and electrical sensitivity around 13 V/Pa. The noise was thoroughly characterized, and it was found that the sensor die, rather than the fundamental vibration, induces the predominant part of the noise. The computed average signal-to-noise (SNR) ratio in the pass band is about 91 dB. This result, in combination with an accurate dipole-like directional response, indicates that this type of directional sensor can be designed to exhibit high SNR and selectable frequency responses demanded by different applications.
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Rahaman A, Kim B. An mm-sized biomimetic directional microphone array for sound source localization in three dimensions. MICROSYSTEMS & NANOENGINEERING 2022; 8:66. [PMID: 35721372 PMCID: PMC9200786 DOI: 10.1038/s41378-022-00389-9] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/26/2021] [Revised: 02/08/2022] [Accepted: 04/10/2022] [Indexed: 06/15/2023]
Abstract
Fly Ormia ochracea ears have been well-studied and mimicked to achieve subwavelength directional sensing, but their efficacy in sound source localization in three dimensions, utilizing sound from the X-, Y-, and Z-axes, has been less explored. This paper focuses on a mm-sized array of three Ormia ochracea ear-inspired piezoelectric MEMS directional microphones, where their in-plane directionality is considered a cue to demonstrate sound source localization in three dimensions. In the array, biomimetic MEMS directional microphones are positioned in a 120° angular rotation; as a result, six diaphragms out of three directional microphones keep a normal-axis relative to the sound source at six different angles in the azimuth plane starting from 0° to 360° in intervals of ±30°. In addition, the cosine-dependent horizontal component of the applied sound gives cues for Z-axis directional sensing. The whole array is first analytically simulated and then experimentally measured in an anechoic chamber. Both results are found to be compliant, and the angular resolution of sound source localization in three dimensions is found to be ±2° at the normal axis. The resolution at the azimuth plane is found to be ±1.28°, and the same array shows a ± 4.28° resolution when sound is varied from the elevation plane. Looking at the scope within this area combined with the presented results, this work provides a clear understanding of sound source localization in three dimensions.
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Affiliation(s)
- Ashiqur Rahaman
- School of Mechatronics Engineering, Korea University of Technology and Education, Cheonan, 31253 Republic of Korea
| | - Byungki Kim
- School of Mechatronics Engineering, Korea University of Technology and Education, Cheonan, 31253 Republic of Korea
- Future Convergence Engineering, Korea University of Technology and Education, Cheonan, 31253 Republic of Korea
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Dong Q, Song X, Chen JSJ, Kim A, Liu H. A bio-inspired optical directional microphone with cavity-coupled diaphragms. JASA EXPRESS LETTERS 2021; 1:072802. [PMID: 36154648 DOI: 10.1121/10.0005667] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/16/2023]
Abstract
A bio-inspired acoustic sensor for sound source localization is presented, mimicking the internally coupled ears found in many terrestrial vertebrates and insects. It consists of two aluminum diaphragms coupled by a U-shaped cavity and detected by a low-coherence fiber optic interferometer system. A large-scale prototype with a center-to-center separation of 1″ is fabricated and experimentally demonstrated to amplify the interaural phase difference by a factor of 2 to 4 for a wide frequency range (0.5-2 kHz), which agrees well with simulation. This work presents a mechanism of using cavity-coupled diaphragms to develop acoustic sensors for sound source localization.
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Affiliation(s)
- Qian Dong
- Department of Mechanical Engineering, Temple University, Philadelphia, Pennsylvania 19122, USA
| | - Xiaolei Song
- Department of Mechanical Engineering, Temple University, Philadelphia, Pennsylvania 19122, USA
| | - Jim Shih-Jiun Chen
- Department of Mechanical Engineering, Temple University, Philadelphia, Pennsylvania 19122, USA
| | - Albert Kim
- Department of Electrical and Computer Engineering, Temple University, Philadelphia, Pennsylvania 19122, USA , , , ,
| | - Haijun Liu
- Department of Mechanical Engineering, Temple University, Philadelphia, Pennsylvania 19122, USA
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7
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Shen X, Zhao L, Xu J, Yao X. Mathematical Analysis and Micro-Spacing Implementation of Acoustic Sensor Based on Bio-Inspired Intermembrane Bridge Structure. SENSORS 2021; 21:s21093168. [PMID: 34063565 PMCID: PMC8124152 DOI: 10.3390/s21093168] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/26/2021] [Revised: 04/23/2021] [Accepted: 04/26/2021] [Indexed: 11/16/2022]
Abstract
A biomimetic study on the auditory localization mechanism of Ormia ochracea was performed to improve the localization ability of small acoustic systems. We also present a microscale implementation of an acoustic localization device inspired by the auditory organ of the parasitic O. ochracea. The device consists of a pair of circular membranes coupled together with an elastic beam. The coupling serves to amplify the difference in magnitude and phase between the two membranes' responses as the incident angle of the sound changes, allowing directional information to be deduced from the coupled device response. The research results show that the intermembrane bridge structure improves the sound source localization and directional weak acoustic signal acquisition of sound detectors. The recognition rate of the phase difference and amplitude ratio was greatly improved. The theoretical resolution of the incident angle of the sound source can reach 2° at a phase difference recognition rate of 5°. The sound source's optimal identification frequency range for the coupling device based on the intermembrane bridge bionic structure is 300 Hz to 1500 Hz.
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Affiliation(s)
- Xiang Shen
- Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China; (X.S.); (J.X.); (X.Y.)
| | - Liye Zhao
- Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China; (X.S.); (J.X.); (X.Y.)
- Correspondence: ; Tel.: +86-139-0517-8308
| | - Jiawen Xu
- Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China; (X.S.); (J.X.); (X.Y.)
| | - Xuwei Yao
- Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China; (X.S.); (J.X.); (X.Y.)
- Rockchip Electronics Co., Ltd., Fuzhou 350003, China
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8
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Coupled D33 Mode-Based High Performing Bio-Inspired Piezoelectric MEMS Directional Microphone. APPLIED SCIENCES-BASEL 2021. [DOI: 10.3390/app11031305] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
Abstract
Microelectromechanical system (MEMS) directional microphones have been identified as having use in multi-projected virtual reality applications such as virtual meetings for projecting cameras. In these applications, the acoustic sensitivity plays a vital role as it biases the directional sensing, signal-to-noise ratio (SNR) and self-noise. The acoustic sensitivity is the multiplied outcome of the mechanical sensitivity and the electrical sensitivity. As the dimensions are limited in MEMS technology, the improvement of the acoustic sensitivity by reflecting the mechanical as well as electrical domains is a challenge. This paper reports on a new formation of the D33 mode, the coupled D33 mode, based on piezoelectric sensing to improve the acoustic functionalities. The unique advancement of the proposed D33 mode is that it allows multiple spans of the regular D33 mode to perform together, despite this increasing the diaphragm’s dimensions. At a reduced diaphragm size, the orientation of the coupled D33 mode realizes the maximum conversion of the mechanical deflection into electrical sensitivity. The significance of the proposed D33 mode in comparison to the regular D33 mode is simulated using COMSOL Multiphysics. Then, for a proof–of–concept, the experimental validation is carried out using a piezoelectric MEMS directional microphone inspired by the ears of the fly Ormia ochracea. In both ways, the results are found to be substantially improved in comparison with the regular approach of the D33 mode, showing the novelty of this work.
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Cheng J, Ren B, Zhao L, Yu C, Qin L, Zou X, Tan Y. Analysis of phase response of fiber Fabry-Pérot cavity microphones. THE JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA 2021; 149:1012. [PMID: 33639810 DOI: 10.1121/10.0003446] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/25/2020] [Accepted: 01/15/2021] [Indexed: 06/12/2023]
Abstract
In this paper, the phase response of fiber Fabry-Pérot cavity-based fiber optic microphones (FFPC-FOMs) is discussed through an analysis of the results of simulation and experiments. The phase difference of FFPC-FOMs mainly originates from two aspects: different phase lags of the mechanical-acoustic systems and different quadrature working points (Q*) on interference curves. The former is analyzed by an impedance-type analogous circuit, and the simulation results reveal that the change in cavity length and resonance frequency in a large range have an insignificant influence on the phase difference. The latter shows a unique effect on the phase difference and causes the phase of FFPC-FOMs to be either in or out of phase. The phase differences of four samples of FFPC-FOMs with different cavity lengths and resonance frequencies are measured in the frequency range 50 Hz-4 kHz. Experimental results of the phase difference are well consistent with simulation results. All samples of FFPC-FOMs can be divided into two groups: one is near 0° and the other is near 180°. In addition, the FFPC-FOMs in each group have good phase consistency for the array applications.
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Affiliation(s)
- Jin Cheng
- Research Center for Sensor Technology, School of Applied Sciences, Mechanical Electrical Engineering School, Beijing Information Science and Technology University, Jianxiangqiao Campus, Beijing 100101, China
| | - Baokai Ren
- Research Center for Sensor Technology, School of Applied Sciences, Mechanical Electrical Engineering School, Beijing Information Science and Technology University, Jianxiangqiao Campus, Beijing 100101, China
| | - Longjiang Zhao
- College of Engineering, Qufu Normal University, Rizhao, Shandong 276826, China
| | - Changkun Yu
- Research Center for Sensor Technology, School of Applied Sciences, Mechanical Electrical Engineering School, Beijing Information Science and Technology University, Jianxiangqiao Campus, Beijing 100101, China
| | - Lei Qin
- Research Center for Sensor Technology, School of Applied Sciences, Mechanical Electrical Engineering School, Beijing Information Science and Technology University, Jianxiangqiao Campus, Beijing 100101, China
| | - Xiaoping Zou
- Research Center for Sensor Technology, School of Applied Sciences, Mechanical Electrical Engineering School, Beijing Information Science and Technology University, Jianxiangqiao Campus, Beijing 100101, China
| | - Yidong Tan
- Department of Precision Instrument, Tsinghua University, Beijing 100084, China
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Rabelo RC, Alves FD, Karunasiri G. Electronic phase shift measurement for the determination of acoustic wave DOA using single MEMS biomimetic sensor. Sci Rep 2020; 10:12714. [PMID: 32728192 PMCID: PMC7391735 DOI: 10.1038/s41598-020-69563-1] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/02/2020] [Accepted: 06/10/2020] [Indexed: 11/17/2022] Open
Abstract
MEMS acoustic sensors have been developed to mimic the highly-accurate sound-locating system of the Ormia ochracea fly, which detects sound wavelengths much larger than its hearing organ. A typical ormia-based MEMS directional sound sensor possesses two coupled wings that vibrate in response to sound according to a superposition of its two main resonant modes, rocking and bending. Vibrations are transduced into electronic signals by interdigitated comb finger capacitors at each wing’s end along with a capacitance measuring circuitry. A sensor designed to exhibit resonant modes closely placed in frequency, enhancing their coupling, was operated with a closed cavity behind the wings. Simultaneous and independent measurements of electronic signals generated at each of the single sensor wings were used to determine incident sound direction of arrival (DOA). DOA was found proportional to the phase shift between them and to the difference over the sum of their amplitudes as well. Single sensor phase shift DOA measurement presented a resolution better than 3° for sound pressure levels of 25 mPa or greater. These results indicate that a single sensor operating in closed-cavity configuration can provide hemispherical unambiguous direction of arrival of sound waves which wavelength is much larger than the sensor size.
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Affiliation(s)
- Renato C Rabelo
- Department of Physics, Naval Postgraduate School, Monterey, CA, 93943, USA.
| | - Fabio D Alves
- Department of Physics, Naval Postgraduate School, Monterey, CA, 93943, USA
| | - Gamani Karunasiri
- Department of Physics, Naval Postgraduate School, Monterey, CA, 93943, USA
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Rahaman A, Kim B. Sound source localization by Ormia ochracea inspired low-noise piezoelectric MEMS directional microphone. Sci Rep 2020; 10:9545. [PMID: 32533073 PMCID: PMC7293328 DOI: 10.1038/s41598-020-66489-6] [Citation(s) in RCA: 15] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/12/2019] [Accepted: 05/20/2020] [Indexed: 11/09/2022] Open
Abstract
The single-tone sound source localization (SSL) by majority of fly Ormia ochracea’s ears–inspired directional microphones leaves a limited choice when an application like hearing aid (HA) demands broadband SSL. Here, a piezoelectric MEMS directional microphone using a modified mechanical model of fly’s ear has been presented with primary focus to achieve SSL in most sensitive audio bands to mitigate the constraints of traditional SSL works. In the modified model, two optimized rectangular diaphragms have been pivoted by four optimized torsional beams; while the backside of the whole structure has been etched. As a result, the SSL relative to angular rotation of the incoming sound depicts the cosine dependency as an ideal pressure–gradient sensor. At the same time, the mechanical coupling leads the magnitude difference between two diaphragms which has been accounted as SSL in frequency domain. The idea behind this work has been analytical simulated first, and with the convincing mechanical results, the designed bio–inspired directional microphone (BDM) has been fabricated using commercially available MEMSCAP based on PiezoMUMPS processes. In an anechoic chamber, the fabricated device has been excited in free-field sound, and the SSL at 1 kHz frequency, rocking frequency, bending frequency, and in-between rocking and bending frequencies has been found in full compliance with the given angle of incidence of sound. With the measured inter-aural sensitivity difference (mISD) and directionality, the developed BDM has been demonstrated as a practical SSL device, and the results have been found in a perfect match with the given angle of incidence of sound. Furthermore, to facilitate the SSL in noisy environment, the noise has been optimized in all scopes, like the geometry of the diaphragm, supportive torsional beam, and sensing. As a result, the A-weighted noise of this work has been found less than 23 dBA across the audio bands, and the equivalent-input noise (EIN) has been found to be 25.52 dB SPL at 1 kHz frequency which are the lowest ever reported by a similar device. With the developed SSL in broadband–in addition to the lowest noise–the developed device can be extended in some audio applications like an HA device.
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Affiliation(s)
- Ashiqur Rahaman
- School of Mechatronics Engineering, Korea University of Technology and Education, Cheonan, 31253, Republic of Korea
| | - Byungki Kim
- School of Mechatronics Engineering, Korea University of Technology and Education, Cheonan, 31253, Republic of Korea.
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12
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Lee T, Nomura T, Su X, Iizuka H. Fano-Like Acoustic Resonance for Subwavelength Directional Sensing: 0-360 Degree Measurement. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2020; 7:1903101. [PMID: 32195101 PMCID: PMC7080540 DOI: 10.1002/advs.201903101] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/01/2019] [Revised: 01/10/2020] [Indexed: 06/10/2023]
Abstract
Directional sound sensing plays a critical role in many applications involving the localization of a sound source. However, the sensing range limit and fabrication difficulties of current acoustic sensing technologies pose challenges in realizing compact subwavelength direction sensors. Here, a subwavelength directional sensor is demonstrated, which can detect the angle of an incident wave in a full angle range (0°∼360°). The directional sensing is realized with acoustic coupling of Helmholtz resonators each supporting a monopolar resonance, which are monitored by conventional microphones. When these resonators scatter sound into free-space acoustic modes, the scattered waves from each resonator interfere, resulting in a Fano-like resonance where the spectral responses of the constituent resonators are drastically different from each other. This work provides a critical understanding of resonant coupling as well as a viable solution for directional sensing.
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Affiliation(s)
- Taehwa Lee
- Toyota Research Institute of North AmericaToyota Motor North AmericaAnn ArborMI48105USA
| | - Tsuyoshi Nomura
- Toyota Research Institute of North AmericaToyota Motor North AmericaAnn ArborMI48105USA
| | - Xiaoshi Su
- Toyota Research Institute of North AmericaToyota Motor North AmericaAnn ArborMI48105USA
| | - Hideo Iizuka
- Toyota Research Institute of North AmericaToyota Motor North AmericaAnn ArborMI48105USA
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Gao R, Ye J, Xin X. Directional acoustic signal measurement based on the asymmetrical temperature distribution of the parallel microfiber array. OPTICS EXPRESS 2019; 27:34113-34125. [PMID: 31878467 DOI: 10.1364/oe.27.034113] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/12/2019] [Accepted: 08/18/2019] [Indexed: 06/10/2023]
Abstract
A parallel microfiber array for the measurement of directional acoustic signals is proposed and experimentally demonstrated. Two microfiber Bragg gratings (micro-FBGs) in single-mode fibers were placed on two sides of a Co2+-doped microfiber, forming an array of three parallel microfibers. The micro-FBGs can measure the temperature difference between the two sides of the Co2+-doped microfiber through interrogation of the matched FBGs. Due to the asymmetrical temperature distribution of the Co2+-doped microfiber under the applied acoustic signal, sound source localization can be realized through the acoustic particle velocity. The experimental results show that an acoustic particle velocity sensitivity of 44.2 V/(m/s) and a direction sensitivity of 0.83mV/deg can be achieved at a frequency of 1000 Hz, and the sound source localization has been realized through the orthogonal direction responses of two crossed Co2+-doped microfibers. The results demonstrate that the parallel microfiber array has the ability to recognize orientation, offering potential for directional acoustic signal detection with miniature size.
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Huang CC, Liu CH. A Biomimetic Miniaturized Microphone Array for Sound Direction Finding Applications Based on a Phase-Enhanced Electrical Coupling Network. SENSORS 2019; 19:s19163469. [PMID: 31398945 PMCID: PMC6720002 DOI: 10.3390/s19163469] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/07/2019] [Revised: 06/30/2019] [Accepted: 07/02/2019] [Indexed: 11/30/2022]
Abstract
In this research, we proposed a miniaturized two-element sensor array inspired by Ormia Ochracea for sound direction finding applications. In contrast to the convectional approach of using mechanical coupling structures for enlarging the intensity differences, we exploited an electrical coupling network circuit composed of lumped elements to enhance the phase differences and extract the optimized output power for good signal-to-noise ratio. The separation distance between two sensors could be reduced from 0.5 wavelength to 0.1 wavelength 3.43 mm at the operation frequency of 10 kHz) for determining the angle of arrivals. The main advantages of the proposed device include low power losses, flexible designs, and wide operation bandwidths. A prototype was designed, fabricated, and experiments examined within a sound anechoic chamber. It was demonstrated that the proposed device had a phase enhancement of 110° at the incident angle of 90° and the normalized power level of −2.16 dB at both output ports. The received power levels of our device were 3 dB higher than those of the transformer-type direction-finding system. In addition, our proposed device could operate in the frequency range from 8 kHz to 12 kHz with a tunable capacitor. The research results are expected to be beneficial for the compact sonar or radar systems.
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Affiliation(s)
- Chien-Chang Huang
- Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan
| | - Chien-Hao Liu
- Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan.
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Zhang M, Wu G, Ren D, Gao R, Qi ZM, Liang X. An Optical MEMS Acoustic Sensor Based on Grating Interferometer. SENSORS 2019; 19:s19071503. [PMID: 30925691 PMCID: PMC6479327 DOI: 10.3390/s19071503] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/15/2019] [Revised: 03/24/2019] [Accepted: 03/25/2019] [Indexed: 11/16/2022]
Abstract
Acoustic detection is of great significance because of its wide applications. This paper reports a Micro-Electro-Mechanical System (MEMS) acoustic sensor based on grating interferometer. In the MEMS structure, a diaphragm and a micro-grating made up the interference cavity. A short-cavity structure was designed and fabricated to reduce the impact of temperature on the cavity length in order to improve its stability against environment temperature variations. Besides this, through holes were designed in the substrate of the grating to reduce the air damping of the short-cavity structure. A silicon diaphragm with a 16.919 µm deep cavity and 2.4 µm period grating were fabricated by an improved MEMS process. The fabricated sensor chip was packaged on a conditioning circuit with a laser diode and a photodetector for acoustic detection. The output voltage signal in response to an acoustic wave is of high quality. The sensitivity of the acoustic sensor is up to -15.14 dB re 1 V/Pa @ 1 kHz. The output signal of the high-stability acoustic sensor almost unchanged as the environment temperature ranged from 5 °C to 55 °C.
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Affiliation(s)
- Mengying Zhang
- State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China.
- Science and Technology on Microwave Imaging Laboratory, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China.
| | - Gaomi Wu
- State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China.
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
| | - Dipeng Ren
- State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China.
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
| | - Ran Gao
- State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China.
| | - Zhi-Mei Qi
- State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China.
- School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
| | - Xingdong Liang
- Science and Technology on Microwave Imaging Laboratory, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China.
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Cheng J, Zhou Y, Zou X. Fabry⁻Perot Cavity Sensing Probe with High Thermal Stability for an Acoustic Sensor by Structure Compensation. SENSORS 2018; 18:s18103393. [PMID: 30309042 PMCID: PMC6210082 DOI: 10.3390/s18103393] [Citation(s) in RCA: 7] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/26/2018] [Revised: 09/27/2018] [Accepted: 10/01/2018] [Indexed: 12/02/2022]
Abstract
Fiber Fabry–Perot cavity sensing probes with high thermal stability for dynamic signal detection which are based on a new method of structure compensation by a proposed thermal expansion model, are presented here. The model reveals that the change of static cavity length with temperature only depends on the thermal expansion coefficient of the materials and the structure parameters. So, fiber Fabry–Perot cavity sensing probes with inherent temperature insensitivity can be obtained by structure compensation. To verify the method, detailed experiments were carried out. The experimental results reveal that the static cavity length of the fiber Fabry–Perot cavity sensing probe with structure compensation hardly changes in the temperature range of −20 to 60 °C and that the method is highly reproducible. Such a method provides a simple approach that allows the as-fabricated fiber Fabry–Perot cavity acoustic sensor to be used for practical applications, exhibiting the great advantages of its simple architecture and high reliability.
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Affiliation(s)
- Jin Cheng
- Research Center for Sensor Technology, Beijing Key Laboratory for Sensor, Ministry of Education Key Laboratory for Modern Measurement and Control Technology, School of Applied Sciences, Beijing Information Science and Technology University, Beijing 100101, China.
| | - Yu Zhou
- College of Underwater Acoustic Engineering, Harbin Engineering University, Harbin 150001, China.
- Third Research Institute of China Electronics Technology Group Corporation, Beijing 100015, China.
| | - Xiaoping Zou
- Research Center for Sensor Technology, Beijing Key Laboratory for Sensor, Ministry of Education Key Laboratory for Modern Measurement and Control Technology, School of Applied Sciences, Beijing Information Science and Technology University, Beijing 100101, China.
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17
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Yang M, Zhu X, Zhang Y, Ta N, Rao Z. Parameter study of time-delay magnification in a biologically inspired, mechanically coupled acoustic sensor array. THE JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA 2016; 140:3854. [PMID: 27908059 DOI: 10.1121/1.4965967] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Sound source localization uses interaural time difference (ITD) or interaural intensity difference cues, and most of the methods based on ITD are limited by the aperture of array. However, a kind of parasitoid fly called Ormia ochracea with coupled ears has a remarkable ability to localize calling of crickets regardless of the fly's small body size. The structure of fly's ear is generalized, and a multi-dimensional coupled system with an acoustic sensor array is proposed. The magnification factor of the phase difference in this system, which can be used to describe the ITD changes of signals from the coupled system, is chosen as the kernel parameter to measure the effect of coupling. The coupled system is optimized by choosing appropriate physical parameters such that the degree of magnification does not vary with angle of incidence. The simulation results demonstrate that the time delay between two signals increases by the coupled system, and the magnification factor remains stable as expected. Compared with the traditional general cross-correlation method, the localization error of the coupled system is reduced.
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Affiliation(s)
- Ming Yang
- Institute of Vibration, Shock and Noise, State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Xinlei Zhu
- Institute of Vibration, Shock and Noise, State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Yaqiong Zhang
- Institute of Vibration, Shock and Noise, State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Na Ta
- Institute of Vibration, Shock and Noise, State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
| | - Zhushi Rao
- Institute of Vibration, Shock and Noise, State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
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18
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Bio-Inspired Miniature Direction Finding Acoustic Sensor. Sci Rep 2016; 6:29957. [PMID: 27440657 PMCID: PMC4954978 DOI: 10.1038/srep29957] [Citation(s) in RCA: 38] [Impact Index Per Article: 4.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/15/2016] [Accepted: 06/28/2016] [Indexed: 12/02/2022] Open
Abstract
A narrowband MEMS direction finding sensor has been developed based on the mechanically coupled ears of the Ormia Ochracea fly. The sensor consists of two wings coupled at the middle and attached to a substrate using two legs. The sensor operates at its bending resonance frequency and has cosine directional characteristics similar to that of a pressure gradient microphone. Thus, the directional response of the sensor is symmetric about the normal axis making the determination of the direction ambiguous. To overcome this shortcoming two sensors were assembled with a canted angle similar to that employed in radar bearing locators. The outputs of two sensors were processed together allowing direction finding with no requirement of knowing the incident sound pressure level. At the bending resonant frequency of the sensors (1.69 kHz) an output voltage of about 25 V/Pa was measured. The angle uncertainty of the bearing of sound ranged from less than 0.3° close to the normal axis (0°) to 3.4° at the limits of coverage (±60°) based on the 30° canted angle used. These findings indicate the great potential to use dual MEMS direction finding sensor assemblies to locate sound sources with high accuracy.
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Abstract
Neuromorphic systems are used in variety of circumstances: as parts of sensory systems, for modeling parts of neural systems and for analog signal processing. In the sensory processing domain, neuromorphic systems can be considered in three parts: pre-transduction processing, transduction itself, and post-transduction processing. Neuromorphic systems include transducers for light, odors, and touch but so far neuromorphic applications in the sound domain have used standard microphones for transduction. We discuss why this is the case and describe what research has been done on neuromorphic approaches to transduction. We make a case for a change of direction toward systems where sound transduction itself has a neuromorphic component.
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Affiliation(s)
- Leslie S Smith
- Computing Science and Mathematics, University of Stirling Stirling, UK
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Xu H, Xu X, Jia H, Guan L, Bao M. A biomimetic coupled circuit based microphone array for sound source localization. THE JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA 2015; 138:EL270-EL275. [PMID: 26428825 DOI: 10.1121/1.4929735] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
An equivalent analog circuit is designed to mimic the coupled ears of the fly Ormia ochracea for sound source localization. This coupled circuit receives two signals with tiny phase difference from a space closed two-microphone array, and produces two signals with obvious intensity difference. The response sensitivity can be adjusted through the coupled circuit parameters. The directional characteristics of the coupled circuit have been demonstrated in the experiment. The miniature microphone array can localize the sound source with low computational burden by using the intensity difference. This system has significant advantages in various applications where the array size is limited.
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Affiliation(s)
- Huping Xu
- School of Logistics Engineering, Wuhan University of Technology, Wuhan 430063, China
| | - Xiangyuan Xu
- School of Automation, Wuhan University of Technology, Wuhan 430070, China
| | - Han Jia
- Key Laboratory of Noise and Vibration Research, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China , ,
| | - Luyang Guan
- Key Laboratory of Noise and Vibration Research, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China , ,
| | - Ming Bao
- Key Laboratory of Noise and Vibration Research, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China , ,
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21
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Enhanced acoustic sensing through wave compression and pressure amplification in anisotropic metamaterials. Nat Commun 2014; 5:5247. [PMID: 25316410 DOI: 10.1038/ncomms6247] [Citation(s) in RCA: 121] [Impact Index Per Article: 12.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/14/2014] [Accepted: 09/12/2014] [Indexed: 11/08/2022] Open
Abstract
Acoustic sensors play an important role in many areas, such as homeland security, navigation, communication, health care and industry. However, the fundamental pressure detection limit hinders the performance of current acoustic sensing technologies. Here, through analytical, numerical and experimental studies, we show that anisotropic acoustic metamaterials can be designed to have strong wave compression effect that renders direct amplification of pressure fields in metamaterials. This enables a sensing mechanism that can help overcome the detection limit of conventional acoustic sensing systems. We further demonstrate a metamaterial-enhanced acoustic sensing system that achieves more than 20 dB signal-to-noise enhancement (over an order of magnitude enhancement in detection limit). With this system, weak acoustic pulse signals overwhelmed by the noise are successfully recovered. This work opens up new vistas for the development of metamaterial-based acoustic sensors with improved performance and functionalities that are highly desirable for many applications.
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