Laser Scanning Holographic Lithography for Flexible 3D Fabrication of Multi-Scale Integrated Nano-structures and Optical Biosensors

Effective Approach for Fabricating Highly Precise High-Curvature Structural Patterns via Air-Bubble Induction

Developing a new master mold-based patterning technology that can be used to accurately, precisely, and uniformly create large-area micropatterns while controlling the micropatterns of curved structures is essential for promoting innovative developments in various application fields. This study develops a new top-down lithographic process that can effectively produce structural patterns with high curvatures by growing isolated microbubbles in the master pattern holes. The isolated air-pocket lithography (IAL) we developed is based on the controlled behavior of micrometer-sized air pockets trapped between the grooves of the master pattern and the curable polymer. We successfully fabricated a concave array polydimethylsiloxane (PDMS) film and a convex array polymer film. In addition, the IAL mechanism was proven by confirming the expansion process of micrometer-sized air pockets trapped between the deep groove of the silicon master pattern and the PDMS coating film by using optical microscopy images. We successfully obtained complex three-dimensional structural patterns containing both 3D hollow spherical concave and ring-shaped two-dimensional convex patterns. This simple, fast, and effective high-curvature patterning technique is expected to provide innovative solutions for future applications such as nanoelectronics, optical devices, displays, and photovoltaics.

Highly Sensitive and Cost-Effective Polymeric-Sulfur-Based Mid-Wavelength Infrared Linear Polarizers with Tailored Fabry-Pérot Resonance

Inverse-vulcanized polymeric sulfur has received considerable attention for application in waste-based infrared (IR) polarizers with high polarization sensitivities, owing to its high transmittance in the IR region and thermal processability. However, there have been few reports on highly sensitive polymeric sulfur-based polarizers by replication of pre-simulated dimensions to achieve a high transmission of the transverse magnetic field (T_TM ) and extinction ratio (ER). Herein, a 400-nanometer-pitch mid-wavelength infrared bilayer linear polarizer with self-aligned metal gratings is introduced on polymeric sulfur gratings integrated with a spacer layer (SM-polarizer). The dimensions of the SM-polarizer can be closely replicated using pre-simulated dimensions via a systematic investigation of thermal nanoimprinting conditions. Spacer thickness is tailored from 40 to 5100 nm by adjusting the concentration of polymeric sulfur solution during spin-coating. A tailored spacer thickness can maximize T_TM in the broadband MWIR region by satisfying Fabry-Pérot resonance. The SM-polarizer yields T_TM of 0.65, 0.59, and 0.43 and ER of 3.12 × 10³ , 5.19 × 10³ , and 5.81 × 10³ at 4 µm for spacer thicknesses of 90, 338, and 572 nm, respectively. This demonstration of a highly sensitive and cost-effective SM-polarizer opens up exciting avenues for infrared polarimetric imaging and for applications in polarization manipulation.

Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication

Three-dimensional (3D) nanostructures have attracted widespread attention in physics, chemistry, engineering sciences, and biology devices due to excellent functionalities which planar nanostructures cannot achieve. However, the fabrication of 3D nanostructures is still challenging at present. Reliable fabrication, improved controllability, and multifunction integration are desired for further applications in commercial devices. In this review, a powerful fabrication method to realize 3D nanostructures is introduced and reviewed thoroughly, which is based on atomic layer deposition assisted 3D assembly through various sacrificial templates. The aim of this review is to provide a comprehensive overview of 3D nanofabrication based on atomic layer assembly (ALA) in multifarious sacrificial templates for 3D nanostructures and to present recent advancements, with the ultimate aim to further unlock more potential of this method for nanodevice applications.

Femtosecond Laser Fabrication of Micro and Nano-Structures on CIGS/ITO Bilayer Films for Thin-Film Solar Cells

Cu(In, Ga)Se₂ (CIGS) thin films have attracted considerable interest as potential photovoltaic solar cells. Moreover, several current studies are focusing on improving their conversion efficiency. This study proposes a method to process micro- and nanostructures onto the surface of CIGS/ITO bilayer films to broaden the field of solar cell application. The bilayer films exhibited optical characteristics different from those of a single-film during processing. Field intensities at different layer positions of the CIGS/ITO bilayer films were analyzed, and different structures were fabricated by varying a set of parameters. Ripples were obtained using a pulse energy of 0.15 μJ and scanning speeds in the range of 0.1-1 mm/s, but after increasing speed to 3-5 mm/s, ripple structures were produced that had a large period of several microns and spatial porous nanostructures. This pattern exhibited low reflectivity. Optimal structures were obtained at a scanning speed of 3.5 mm/s a pulse energy of 0.15 μJ, and a reflectivity lower than 5%. Large areas characterized by micron-sized ripple structures and accompanied by nanoscale porous structures presented high optical performance and efficiency, which can be used to broaden the application of thin film-based solar cells.

Nanophotonic color splitters for high-efficiency imaging

Standard color imaging utilizes absorptive filter arrays to achieve spectral sensitivity. However, this leads to ∼2/3 of incident light being lost to filter absorption. Instead, splitting and redirecting light into spatially separated pixels avoids these absorptive losses. Herein we investigate the inverse design and performance of a new type of splitter which can be printed from a single material directly on top of a sensor surface and are compatible with 800 nm sensor pixels, thereby providing drop-in replacements for color filters. Two-dimensional structures with as few as four layers significantly improve fully color-corrected imaging performance over standard filters, with lower complexity. Being fully dielectric, these splitters additionally allow color-correction to be foregone, increasing the photon transmission efficiency to over 80%, even for sensors with fill-factors of 0.5. Performance further increases with fully 3D structures, improving light sensitivity in color-corrected imaging by a factor of 4 when compared to filters alone.

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Color splitters focus and sort light into pixels without any absorptive losses

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New single-material splitters are designed to sit directly on a CMOS sensor surface

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Splitters with four or more layers show significant improvements over filters

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Color-corrected and nearly lossless greyscale imaging can be done with one splitter

Photonics in nature and bioinspired designs: sustainable approaches for a colourful world

Biological systems possess nanoarchitectures that have evolved for specific purposes and whose ability to modulate the flow of light creates an extraordinary diversity of natural photonic structures. In particular, the striking beauty of the structural colouration observed in nature has inspired technological innovation in many fields. Intense research has been devoted to mimicking the unique vivid colours with newly designed photonic structures presenting stimuli-responsive properties, with remarkable applications in health care, safety and security. This review highlights bioinspired photonic approaches in this context, starting by presenting many appealing examples of structural colours in nature, followed by describing the versatility of fabrication methods and designed coloured structures. A particular focus is given to optical sensing for medical diagnosis, food control and environmental monitoring, which has experienced a significant growth, especially considering the advances in obtaining inexpensive miniaturized systems, more reliability, fast responses, and the use of label-free layouts. Additionally, naturally derived biomaterials and synthetic polymers are versatile and fit many different structural designs that are underlined. Progress in bioinspired photonic polymers and their integration in novel devices is discussed since recent developments have emerged to lift the expectations of smart, flexible, wearable and portable sensors. The discussion is expanded to give emphasis on additional functionalities offered to related biomedical applications and the use of structural colours in new sustainable strategies that could meet the needs of technological development.

Thermal control of SZ2080 photopolymerization in four-beam interference lithography

Photopolymerization by four-beam interference lithography on a preheated SZ2080 sample was explored at different initial temperatures of the sample: 20 °C, 50 °C, 75 °C, 100 °C, 125 °C, and 150 °C, and at exposure times ranging from 0.5 s to 5 s. The average laser power selected was ∼100 mW for the 300 ps duration pulses at a 1 kHz repetition rate. The experimental results demonstrate that the higher initial temperature of the sample positively influences the crosslinking of the patterns. These findings will improve polymerization protocols for multi-beam interference lithography.

Rapid Fabrication of Continuous Surface Fresnel Microlens Array by Femtosecond Laser Focal Field Engineering

Femtosecond laser direct writing through two-photon polymerization has been widely used in precision fabrication of three-dimensional microstructures but is usually time consuming. In this article, we report the rapid fabrication of continuous surface Fresnel lens array through femtosecond laser three-dimensional focal field engineering. Each Fresnel lens is formed by continuous two-photon polymerization of the two-dimensional slices of the whole structure with one-dimensional scan of the corresponding two-dimensional engineered intensity distribution. Moreover, we anneal the lens array to improve its focusing and imaging performance.

Functional Micro–Nano Structure with Variable Colour: Applications for Anti-Counterfeiting

Colour patterns based on micro-nano structure have attracted enormous research interests due to unique optical switches and smart surface applications in photonic crystal, superhydrophobic surface modification, controlled adhesion, inkjet printing, biological detection, supramolecular self-assembly, anti-counterfeiting, optical device and other fields. In traditional methods, many patterns of micro-nano structure are derived from changes of refractive index or lattice parameters. Generally, the refractive index and lattice parameters of photonic crystals are processed by common solvents, salts or reactive monomers under specific electric, magnetic and stress conditions. This review focuses on the recent developments in the fabrication of micro-nano structures for patterns including styles, materials, methods and characteristics. It summarized the advantages and disadvantages of inkjet printing, angle-independent photonic crystal, self-assembled photonic crystals by magnetic field force, gravity, electric field, inverse opal photonic crystal, electron beam etching, ion beam etching, laser holographic lithography, imprinting technology and surface wrinkle technology, etc. This review will provide a summary on designing micro-nano patterns and details on patterns composed of photonic crystals by surface wrinkles technology and plasmonic micro-nano technology. In addition, colour patterns as switches are fabricated with good stability and reproducibility in anti-counterfeiting application. Finally, there will be a conclusion and an outlook on future perspectives.

Electrochemical biosensors for the detection of lung cancer biomarkers: A review

Cancer is one of the most widespread challenges and important diseases, which has the highest mortality rate. Lung cancer is the most common type of cancer, so that about 25% of all cancer deaths are related to the lung cancer. The lung cancer is classified as two different types with different treatment methodology: the small cell lung carcinoma and nonsmall cell lung carcinoma are two categories of the lung cancer. Since the lung cancer is often in the latent period in its early stages, therefore, early diagnosis of lung cancer has many challenges. Hence, there is a need for sensitive and reliable tools for preclinical diagnosis of lung cancer. Therefore, many detection methods have been employed for early detection of lung cancer. As lung cancer tumors growth in the body, the cancerous cells release numerous DNA, proteins, and metabolites as special biomarkers of the lung cancer. The levels of these biomarkers show the stages of the lung cancer. Therefore, detection of the biomarkers can be used for screening and clinical diagnosis of the lung cancer. There are numerous biomarkers for the lung cancer such as EGFR, CEA, CYFRA 21-1, ENO1, NSE, CA 19-9, CA 125 and VEGF. Nowadays, electrochemical methods are very attractive and useful in the lung cancer detections. So, in this paper, the recent advances and improvements (2010-2018) in the electrochemical detection of the lung cancer biomarkers have been reviewed.

Fast Acoustic Light Sculpting for On-Demand Maskless Lithography

Light interference is the primary enabler of a number of optical maskless techniques for the large-scale processing of materials at the nanoscale. However, methods controlling interference phenomena can be limited in speed, ease of implementation, or the selection of pattern designs. Here, an optofluidic system that employs acoustic standing waves in a liquid to produce complex interference patterns at sub-microsecond temporal resolution, faster than the pulse-to-pulse period of many commercial laser systems, is presented. By controlling the frequency of the acoustic waves and the motion of a translation stage, additive and subtractive direct-writing of tailored patterns over cm2 areas with sub-wavelength uniformity in periodicity and scalable spatial resolution, down to the nanometric range, are demonstrated. Such on-the-fly dynamic control of light enhances throughput and design flexibility of optical maskless lithography, helping to expand its application portfolio to areas as important as plasmonics, electronics, or metamaterials.

Strategies to improve the photocatalytic activity of TiO2: 3D nanostructuring and heterostructuring with graphitic carbon nanomaterials

TiO2-based photocatalysis has been considered to be one of the most promising avenues for environmental remediation including water purification. However, several technical issues such as the limited surface area of bulk TiO2, the large band gap of TiO2, and rapid charge recombination still limit the practical application of TiO2 photocatalysts. Therefore, here we focus on two structural design strategies: (i) monolithic three-dimensional (3D) nanostructuring, and (ii) heterostructuring with graphitic carbon nanomaterials. A monolithic 3D nanostructure enables maximal surface area in a given volume and efficient reuse of the photocatalyst without recollection. Heterostructuring with carbon nanomaterials helps achieve maximal utilization of the solar spectrum and charge separation and provides efficient TiO2 photocatalysts. In this review, recent progress on TiO2 photocatalysts toward the abovementioned strategies will be summarized. Further discussion and direction will provide insights into the rational design of highly efficient TiO2 photocatalysts, and help develop advanced photocatalyst models.

Engineering of Hybrid Nanoporous Anodic Alumina Photonic Crystals by Heterogeneous Pulse Anodization

In this study, we present an advanced nanofabrication approach, so-called ‘heterogeneous pulse anodization’ (HPA), in which galvanostatic stepwise and apodized sinusoidal pulse anodizations are combined in a single process. This novel anodization method enables the precise optical engineering of the characteristic photonic stopbands (PSBs) of nanoporous anodic alumina photonic crystals (NAA-PCs). The resulting structures are hybrid PCs (Hy-NAA-PCs) composed of distributed Bragg reflectors (DBRs) and apodized gradient-index filters (APO-GIFs) embedded within the same PC structure. The modification of various anodization parameters such as anodization period, relative and total anodization time, structural arrangement of PCs within Hy-NAA-PCs, and pore widening time allows the fine-tuning of the PSBs’ features (i.e. number, position and bandwidth of central wavelength) across the spectral regions. The effects of these fabrication parameters are systematically assessed, revealing that the positions of the characteristic transmission bands of Hy-NAA-PCs are highly controllable. Our study provides a comprehensive rationale towards the development of unique Hy-NAA-PCs with controllable optical properties, which could open new opportunities for a plethora of applications.

Fabrication of Nanoshell-Based 3D Periodic Structures by Templating Process using Solution-derived ZnO

Fabrication methods for a 3D periodic nanostructure with excellent and unique properties for various applications, such as photonic and phononic crystals, have attracted considerable interest. Templating processes using colloidal crystals have been proposed to create nanoshell-based 3D structures over a large area with ease. However, there are technical limitations in structural design, resulting in difficulties for structural flexibility. Here, we demonstrate a combination of proximity field nanopatterning and infiltration processes using solution-derived ZnO for a nanoshell-based 3D periodic structure with high structural flexibility and controllability. A unique process of infiltration of a solution-derived material into a polymeric template prepared by a proximity field nanopatterning process achieves the fabrication of a pre-formed layer that works as a protective layer for the template and framework for the inverse structure. Subsequently, this process shows the controllability of nanoshell thickness and significant improvement in the structure height shrinkage factor (16%) compared to those of a previous non-vacuum infiltration method (34%). The proposed method offers high controllability and flexibility in the design of structural sizes, leading to further development toward nanoshell-based 3D structures for various applications including energy devices and sensors.

Covalent bonding-assisted nanotransfer lithography for the fabrication of plasmonic nano-optical elements

Many high-resolution patterning techniques have been developed to realize nano- and microscale applications of electric devices, sensors, and transistors. However, conventional patterning methods based on photo or e-beam lithography are not employed to fabricate optical elements of high aspect ratio and a sub-100 nm scale due to the limit of resolution, high costs and low throughput. In this study, covalent bonding-assisted nanotransfer lithography (CBNL) was proposed to fabricate various structures of high resolution and high aspect ratio at low cost by a robust and fast chemical reaction. The proposed process is based on the formation of covalent bonds between silicon of adhesive layers on a substrate and oxygen of the deposited material on the polymer stamp. The covalent bond is strong enough to detach multiple layers from the stamp for a large area without defects. The obtained nanostructures can be used for direct application or as a hard mask for etching. Two nano-optical applications were demonstrated in this study, i.e., a meta-surface and a wire-grid polarizer. A perfect absorption meta-surface was generated by transferring subwavelength hole arrays onto a substrate without any post-processing procedures. In addition, a wire-grid polarizer with high aspect ratio (1 : 3) and 50 nm line width was prepared by the nano-transfer of materials, which were used as a hard mask for etching. Therefore, CBNL provides a means of achieving large-area nano-optical elements with a simple roll-to-plate process at low cost.

Simultaneous direct holographic fabrication of photonic cavity and graded photonic lattice with dual periodicity, dual basis, and dual symmetry

For the first time, to the authors' best knowledge, this paper demonstrates the digital, holographic fabrication of graded, super-basis photonic lattices with dual periodicity, dual basis, and dual symmetry. Pixel-by-pixel phase engineering of the laser beam generates the highest resolution in a programmable spatial light modulator (SLM) for the direct imaging of graded photonic super-lattices. This technique grants flexibility in designing 2-D lattices with size-graded features, differing periodicities, and differing symmetries, as well as lattices having simultaneously two periodicities and two symmetries in high resolutions. By tuning the diffraction efficiency ratio from the SLM, photonic cavities can also be generated in the graded super-lattice simultaneously through a one-exposure process. A high quality factor of over 1.56 × 10⁶ for a cavity mode in the graded photonic lattice with a large super-cell is predicted by simulations.

Bicontinuity analysis of multibeam interference three-dimensional periodic structures: volume fractions and interface areas

Bicontinuous structures are an important subset of three-dimensional periodic structures. In multibeam interference structures, the conditions for bicontinuity depend on the beam parameters and the exposure dose. As described in the present work, these conditions can be applied to establish the range of bicontinuity for any multibeam-interference-produced structure. In addition to the bicontinuity range, the analysis yields the volume fraction of the constituent materials and the normalized interface areas. This analysis has been performed for rhombohedral and woodpile lattices as well as their cubic structure limiting cases. A sphere-at-each-lattice-site model for each of the cubic cases has also been developed for comparison. The multibeam interference structures were investigated for representative media and for various incident polarizations.

PdCo/Pd-Hexacyanocobaltate Hybrid Nanoflowers: Cyanogel-Bridged One-Pot Synthesis and Their Enhanced Catalytic Performance

Elaborate architectural manipulation of nanohybrids with multi-components into controllable 3D hierarchical structures is of great significance for both fundamental scientific interest and realization of various functionalities, yet remains a great challenge because different materials with distinct physical/chemical properties could hardly be incorporated simultaneously into the synthesis process. Here, we develop a novel one-pot cyanogel-bridged synthetic approach for the generation of 3D flower-like metal/Prussian blue analogue nanohybrids, namely PdCo/Pd-hexacyanocobaltate for the first time. The judicious introduction of polyethylene glycol (PEG) and the formation of cyanogel are prerequisite for the successful fabrication of such fascinating hierarchical nanostructures. Due to the unique 3D hierarchical structure and the synergistic effect between hybrid components, the as-prepared hybrid nanoflowers exhibit a remarkable catalytic activity and durability toward the reduction of Rhodamine B (RhB) by NaBH₄. We expect that the obtained hybrid nanoflowers may hold great promises in water remediation field and beyond. Furthermore, the facile synthetic strategy presented here for synthesizing functional hybrid materials can be extendable for the synthesis of various functional hybrid nanomaterials owing to its versatility and feasibility.