First-generation hybrid MEMS gas chromatograph

Integrated interferometers as a new platform for low cost gas chromatography detection

Gas chromatography is a reference method for gas analysis. As part of efforts to miniaturize gas chromatography systems, the miniaturization of detectors is essential. In this work, we report a new integrated photonic platform for gas chromatography analyte detection. The fabricated silicon die integrates Mach-Zehnder interferometers into low dead volume microfluidic channels, with coherent cost-effective detection scheme with a fixed 850 nm wavelength laser. A proof of concept is demonstrated with the separation and detection of three volatile organic compounds: heptane, octane, and toluene. Peaks' widths at half height range from 1 to 5 s. Peaks are very well resolved by our system, which acquires more than 100 points per second. From a heptane dilution range, we evaluate the limit of detection of our system to be the headspace of a 0.26 % heptane concentration solution. To our knowledge, these are the first integrated Mach-Zehnder interferometers reported for gas chromatography detection. This work could open new strategies for fast low cost and low limit of detection specific gas chromatography silicon micro-detectors.

A stamped aluminium gas chromatographic column disk employing directly grown anodic aluminium oxide stationary phase for the separation of aromatic and chlorinated compounds

In this study, mesoporous anodic aluminium oxide (AAO) with moderate polarity was used as a GC stationary phase to demonstrate the applicability to various compound species. The fluidic channel measured 6 meters in length and had a cross-section area of 0.127 mm2. The column disk measured 6.2 cm in diameter and was fabricated through a stamping process on an aluminium substrate. The AAO stationary phase was directly grown on the aluminium substrate through an anodization process using oxalic acid as the electrolyte. The pore size of the AAO stationary phase was approximately 50-70 nm, with film thicknesses ranging from 6-20 μm. AAO based on oxalic acid exhibited significantly reduced surface polarity, making it suitable for separating polarizable and slightly polar compounds. The theoretical plate number for benzene had reached 1800 plates per meter, and for n-butane, it had reached 2500 plates per meter. A complex mixture of 16 compounds spanning alkanes, olefins, aromatics, and chlorinated hydrocarbons was effectively separated in 8 minutes with the temperature programmed to 200 °C.

Highly Integrated μGC Based on a Multisensing Progressive Cellular Architecture with a Valveless Sample Inlet

Microscale gas chromatographs (μGCs) promise in-field analysis of volatile organic compounds (VOCs) in environmental and industrial monitoring, healthcare, and homeland security applications. As a step toward addressing challenges with performance and manufacturability, this study reports a highly integrated monolithic chip implementing a multisensing progressive cellular architecture. This architecture incorporates three μGC cells that are customized for different ranges of analyte volatility; each cell includes a preconcentrator and separation column, two complementary capacitive detectors, and a photoionization detector (PID). An on-chip carrier gas filter scrubs ambient air for the analysis. The monolithic chip, with all 16 components, is 40.3 × 55.7 mm² in footprint. To accommodate surface adsorptive and low-volatility analytes, the architecture eliminates the commonly used inlet valve, eliminating the need for chemically inactive surfaces in the valves and pumps, allowing the use of standard parts. Representative analysis is demonstrated from a nonpolar 14-analyte mixture, a polar 12-analyte mixture, and a 3-phosphonate ester mixture, covering a wide vapor pressure range (0.005-68.5 kPa) and dielectric constant range (1.8-23.2). The three types of detectors show highly complementary responses. Quantitative analysis is shown in the tens to hundreds ppb range. With 200 mL samples, the projected detection limits reach 0.12-4.7 ppb. Limited tests performed at 80% humidity showed that the analytes with vapor pressures <12 kPa were unaffected. A typical full run takes 28 min and consumes 2.3 kJ energy for the fluidic elements (excluding electronics). By eliminating chip-to-chip fluidic interconnections and requiring just one custom-fabricated element, this work presents a path toward high-performance and highly manufacturable μGCs.

A compact gas chromatography platform for detection of multicomponent volatile organic compounds biomarkers

Some human exhaled volatile organic compounds (VOCs) can be employed to diagnose related human endogenous diseases as characteristic biomarkers, which is expected to be applied to rapid screening and grading because of their non-invasive and cost-effective advantages. In this study, we developed a compact gas chromatography (GC) platform mainly composed of an integrated silicon-based micro-column chip using micro-electromechanical system techniques and a miniaturized metal oxide semiconductor gas detector. In addition, the sampling/switching valve with related components and embedded microcontrollers was used for airflow control. The fabricated system selectively detected the five VOCs (pentane, acetone, toluene, octane, and decane) considered the typical endogenous disease biomarkers. In the experiments, the functional parameters of the system were investigated, and the optimum temperature conditions of the system for separation were determined. The results show that the system can successfully test the studied five VOCs as low as 1 ppm. In addition, the influence of interfering gas (carbon dioxide and ammonia) on the system for the VOC mixture is also investigated. Moreover, to prove the possibility of breath analysis of the fabricated system, the detection performance of isoprene and acetone at the ppb level is studied. Then, the concentration changes of the isoprene at the ppb concentration for human breath are successfully detected in the system. Therefore, we believe that the prepared compact GC system has potential applications in the human endogenous disease diagnosis for the VOC biomarkers.

A semi-packed gas chromatography column with high-density elliptic cylindrical posts

Semi-packed columns are microfabricated gas chromatography columns which have a large surface area and high aspect ratio. In this paper, a new semi-packed column with high-density elliptic cylindrical posts (SCHECP) made by a micro-electro-mechanical system (MEMS) technique was reported. Compared to a semi-packed column with cylindrical posts (SCCP) under the same effective width, the surface area and aspect ratio of SCHECP were improved by 71.19% and 76.47%, respectively. To compare the performance of these two semi-packed columns, SCHECP and SCCP were fabricated. A 10-nm thick alumina film was deposited as the stationary phase by atomic layer deposition technique to ensure the uniformity and repeatability of the stationary-phase film. A contrast experiment was conducted, and the results showed that compared with SCCP, better separation performance was realized in SCHECP due to the increase in surface area and aspect ratio. The number of theoretical plates of nonane was increased by 541.84%, and the tailing factor was decreased by 54.31%.

A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling

This paper presents the synthesis and evaluation of a carbon molecular sieve membrane (CMSM) grown inside a MEMS-fabricated μ-preconcentrator for sampling highly volatile organic compounds. An array of µ-pillars measuring 100 µm in diameter and 250 µm in height were fabricated inside a microfluidic channel to increase the attaching surface for the CMSM. The surface area of the CMSM was measured as high as 899 m2/g. A GC peak amplification factor >2 × 104 was demonstrated with gaseous ethyl acetate. Up to 1.4 L of gaseous ethanol at the 100 ppb level could be concentrated without exceeding the capacity of this microchip device. Sharp desorption chromatographic peaks (<3.5 s) were obtained while using this device directly as a GC injector. Less volatile compounds such as gaseous toluene, m-xylene, and mesitylene appeared to be adsorbed strongly on CMSM, showing a memory effect. Sampling parameters such as sample volatilities, sampling capacities, and compound residual issues were empirically determined and discussed.

Progressive Cellular Architecture in Microscale Gas Chromatography for Broad Chemical Analyses

Gas chromatography is widely used to identify and quantify volatile organic compounds for applications ranging from environmental monitoring to homeland security. We investigate a new architecture for microfabricated gas chromatography systems that can significantly improve the range, speed, and efficiency of such systems. By using a cellular approach, it performs a partial separation of analytes even as the sampling is being performed. The subsequent separation step is then rapidly performed within each cell. The cells, each of which contains a preconcentrator and separation column, are arranged in progression of retentiveness. While accommodating a wide range of analytes, this progressive cellular architecture (PCA) also provides a pathway to improving energy efficiency and lifetime by reducing the need for heating the separation columns. As a proof of concept, a three-cell subsystem (PCA3mv) has been built; it incorporates a number of microfabricated components, including preconcentrators, separation columns, valves, connectors, and a carrier gas filter. The preconcentrator and separation column of each cell are monolithically implemented as a single chip that has a footprint of 1.8 × 5.2 cm2. This subsystem also incorporates two manifold arrays of microfabricated valves, each of which has a footprint of 1.3 × 1.4 cm2. Operated together with a commercial flame ionization detector, the subsystem has been tested against polar and nonpolar analytes (including alkanes, alcohols, aromatics, and phosphonate esters) over a molecular weight range of 32-212 g/mol and a vapor pressure range of 0.005-231 mmHg. The separations require an average column temperature of 63-68 °C within a duration of 12 min, and provide separation resolutions >2 for any two homologues that differ by one methyl group.

A 3D-printed metal column for micro gas chromatography

In this work, a 3D-printed metal column was developed for micro gas chromatography (GC) applications and its properties and gas separation performances were characterized. By using a Ti6Al4V grade 23 powder, a square spiral one meter-long column (3D-column) was 3D-printed on a planar substrate of 3.4 × 3.3 × 0.2 cm and then perhydropolysilazane (PHPS) was deposited as a pre-treatment agent, followed by a coating of stationary phase (OV-1) onto the inner wall of the micro-channel. The 500 μm-diameter circular channel and two 800 μm-wide ports of the 3D-column were confirmed to be uniform by 3D X-ray microscopy without any distortion. The physical and thermal properties of the 3D-column were found to be very similar to that of the standard Ti6Al4V grade 23 alloy with near zero porosity (∼0.07%). The 3D-column with pre-treatment and stationary coating demonstrated efficient separation performance of gas mixtures containing alkanes, aromatics, alcohols, and ketones compared to a bare or only pretreated 3D-column in terms of the peak shape, broadening, and resolution (R > 1) within 2-3 min. The well-matched thermal responses to the target temperatures were demonstrated at the ramping rates of 10-20 °C min^-1 upto 200 °C with uniform heat distribution over the 3D-column. In addition, the column bleed profiles showed that the 3D-column with PHPS had a 71% lower baseline intensity at 350 °C than that without PHPS. The 3D-column was then employed to separate a gas mixture of twelve alkanes (C9-C18, C22, C24) without any significant column bleeding and peak tailing. Therefore, the thermal responses and stability of the 3D-column promise its applicability in high temperature GC applications.

Development of Open-Tubular-Type Micro Gas Chromatography Column with Bump Structures

Gas chromatography (GC) is the chemical analysis technique most widely used to separate and identify gas components, and it has been extensively applied in various gas analysis fields such as non-invasive medical diagnoses, indoor air quality monitoring, and outdoor environmental monitoring. Micro-electro-mechanical systems (MEMS)-based GC columns are essential for miniaturizing an integrated gas analysis system (Micro GC system). This study reports an open-tubular-type micro GC (μ-GC) column with internal bump structures (bump structure μ-GC column) that substantially increase the interaction between the gas mixture and a stationary phase. The developed bump structure μ-GC column, which was fabricated on a 2 cm × 2 cm μ-GC chip and coated with a non-polar stationary phase, is 1.5 m-long, 150 μm-wide, and 400 μm-deep. It has an internal microfluidic channel in which the bumps, which are 150 μm diameter half-circles, are alternatingly disposed to face each other on the surface of the microchannel. The fabricated bump structure μ-GC column yielded a height-equivalent-to-a-theoretical-plate (HETP) of 0.009 cm (11,110 plates/m) at an optimal carrier gas velocity of 17 cm/s. The mechanically robust bump structure μ-GC column proposed in this study achieved higher separation efficiency than a commercially available GC column and a typical μ-GC column with internal post structures classified as a semi-packed-type column. The experimental results demonstrate that the developed bump structure μ-GC column can separate a gas mixture completely, with excellent separation resolution for formaldehyde, benzene, toluene, ethylbenzene, and xylene mixture, under programmed operating temperatures.

A Binder Jet Printed, Stainless Steel Preconcentrator as an In-Line Injector of Volatile Organic Compounds

A conventional approach to making miniature or microscale gas chromatography (GC) components relies on silicon as a base material and MEMS fabrication as manufacturing processes. However, these devices often fail in medium-to-high temperature applications due to a lack of robust fluidic interconnects and a high-yield bonding process. This paper explores the feasibility of using metal additive manufacturing (AM), which is also known as metal 3D printing, as an alternative platform to produce small-scale microfluidic devices that can operate at a temperature higher than that which polymers can withstand. Binder jet printing (BJP), one of the metal AM processes, was utilized to make stainless steel (SS) preconcentrators (PCs) with submillimeter internal features. PCs can increase the concentration of gaseous analytes or serve as an inline injector for GC or gas sensor applications. Normally, parts printed by BJP are highly porous and thus often infiltrated with low melting point metal. By adding to SS316 powder sintering additives such as boron nitride (BN), which reduces the liquidus line temperature, we produce near full-density SS PCs at sintering temperatures much lower than the SS melting temperature, and importantly without any measurable shape distortion. Conversely, the SS PC without BN remains porous after the sintering process and unsuitable for fluidic applications. Since the SS parts, unlike Si, are compatible with machining, they can be modified to work with commercial compression fitting. The PC structures as well as the connection with the fitting are leak-free with relatively high operating pressures. A flexible membrane heater along with a resistance-temperature detector is integrated with the SS PCs for thermal desorption. The proof-of-concept experiment demonstrates that the SS PC can preconcentrate and inject 0.6% headspace toluene to enhance the detector's response.

A high-speed, high-performance, microfabricated comprehensive two-dimensional gas chromatograph

A small, consumable-free, low-power, ultra-high-speed comprehensive GC×GC system consisting of microfabricated columns, nanoelectromechanical system (NEMS) cantilever resonators for detection, and a valve-based stop-flow modulator is demonstrated. The separation of a highly polar 29-component mixture covering a boiling point range of 46 to 253 °C on a pair of microfabricated columns using a Staiger valve manifold in less than 7 seconds, and just over 4 seconds after the ensemble holdup time is demonstrated with a downstream FID. The analysis time of the second dimension was 160 ms, and peak widths in the second dimension range from 10-60 ms. A peak capacity of just over 300 was calculated for a separation of just over 6 s. Data from a continuous operation testing over 40 days and 20 000 runs of the GC×GC columns with the NEMS resonators using a 4-component test set is presented. The GC×GC-NEMS resonator system generated second-dimension peak widths as narrow as 8 ms with no discernable peak distortion due to under-sampling from the detector.

Belt-Mounted Micro-Gas-Chromatograph Prototype for Determining Personal Exposures to Volatile-Organic-Compound Mixture Components

We describe a belt-mountable prototype instrument containing a gas chromatographic microsystem (μGC) and demonstrate its capability for near-real-time recognition and quantification of volatile organic compounds (VOCs) in moderately complex mixtures at concentrations encountered in industrial workplace environments. The μGC comprises three discrete, Si/Pyrex microfabricated chips: a dual-adsorbent micropreconcentrator-focuser for VOC capture and injection; a wall-coated microcolumn with thin-metal heaters and temperature sensors for temperature-programmed separations; and an array of four microchemiresistors with thiolate-monolayer-protected-Au-nanoparticle interface films for detection and recognition-discrimination. The battery-powered μGC prototype (20 × 15 × 9 cm, ∼2.1 kg sans battery) has on-board microcontrollers and can autonomously analyze the components of a given VOC mixture several times per hour. Calibration curves bracketing the Threshold Limit Value (TLV) of each VOC yielded detection limits of 16-600 parts-per-billion for air samples of 5-10 mL, well below respective TLVs. A 2:1 injection split improved the resolution of early eluting compounds by up to 63%. Responses and response patterns were stable for 5 days. Use of retention-time windows facilitated the chemometric recognition and discrimination of the components of a 21-VOC mixture sampled and analyzed in 3.5 min. Results from a "mock" field test, in which personal exposures to time-varying concentrations of a mixture of five VOCs were measured autonomously, agreed closely with those from a reference GC. Thus, reliable, near-real-time determinations of worker exposures to multiple VOCs with this wearable μGC prototype appear feasible.

CNT Foam-Embedded Micro Gas Preconcentrator for Low-Concentration Ethane Measurements

Breath analysis has become increasingly important as a noninvasive process for the clinical diagnosis of patients suffering from various diseases. Many commercial gas preconcentration instruments are already being used to overcome the detection limits of commercial gas sensors for gas concentrations which are as low as ~100 ppb in exhaled breath. However, commercial instruments are large and expensive, and they require high power consumption and intensive maintenance. In the proposed study, a micro gas preconcentrator (μ-PC) filled with a carbon nanotube (CNT) foam as an adsorbing material was designed and fabricated for the detection of low-concentration ethane, which is known to be one of the most important biomarkers related to chronic obstructive pulmonary disease (COPD) and asthma. A comparison of the performance of two gas-adsorbing materials, i.e., the proposed CNT foam and commercial adsorbing material, was performed using the developed μ-PC. The experimental results showed that the synthesized CNT foam performs better than a commercial adsorbing material owing to its lower pressure drop and greater preconcentration efficiency in the μ-PC. The present results show that the application of CNT foam-embedded μ-PC in portable breath analysis systems holds great promise.

Microchip gas chromatography columns, interfacing and performance

Almost four decades of investigations have opened up many avenues to explore the production and utilization of planar (i.e., microchip) gas chromatographic columns. However, there remain many practical constraints that limit their widespread commercialization and use. The main challenges arise from non-ideal column geometries, dead volume issues and inadequate interfacing technologies, which all affect both column performance and range of applications. This review reflects back over the years on the extensive developments in the field, with the goal to stimulate future creative approaches and increased efforts to accelerate microchip gas chromatography development toward reaching its full potential.

Toward breath analysis on a chip for disease diagnosis using semiconductor-based chemiresistors: recent progress and future perspectives

Semiconductor gas sensors using metal oxides, carbon nanotubes, graphene-based materials, and metal chalcogenides have been reviewed from the viewpoint of the sensitive, selective, and reliable detection of exhaled biomarker gases, and perspectives/strategies to realize breath analysis on a chip for disease diagnosis are discussed based on the concurrent design of high-performance sensing materials and miniaturized pretreatment components. Carbon-based sensing materials that show relatively high responses to NO and NH₃ at low or mildly raised temperatures can be applied to the diagnosis of asthma and renal disease. Halitosis can be diagnosed by employing sensing or additive materials such as CuO and Mo that have high chemical affinities for H₂S, while catalyst-loaded metal oxide nanostructure sensors or their arrays have been used to diagnose diabetes via the selective detection of acetone or by pattern recognition of sensor signals. For the ultimate miniaturization of a breath-analysis system into a tiny chip, preconditioning that includes preconcentration, dehumidification, and flow sensing needs to be either improved through the design of gas/moisture adsorbents or removed/simplified through the design of highly sensitive sensing materials that are less impervious to interference from humidity and temperature. Moreover, an abundant sensing library needs to be provided for the diagnosis of diseases (e.g. lung cancer) that are associated with multiple biomarker gases and for finding new methods to diagnose other diseases. For this aim, p-type oxide semiconductors with high catalytic activities, as well as combinatorial approaches, can be considered for the development of sensing materials that detect less-reactive large molecules, and high-throughput screening, respectively. Selectivity for a specific biomarker gas will simplify the system further. Breath analysis on a tiny chip using semiconductor chemiresistors with ultralow power consumption that is connected to the 'Internet of Things' will pave new roads for disease diagnosis and patient monitoring.

An Easy to Manufacture Micro Gas Preconcentrator for Chemical Sensing Applications

We have developed a simple-to-manufacture microfabricated gas preconcentrator for MEMS-based chemical sensing applications. Cavities and microfluidic channels were created using a wet etch process with hydrofluoric acid, portions of which can be performed outside of a cleanroom, instead of the more common deep reactive ion etch process. The integrated heater and resistance temperature detectors (RTDs) were created with a photolithography-free technique enabled by laser etching. With only 28 V DC (0.1 A), a maximum heating rate of 17.6 °C/s was observed. Adsorption and desorption flow parameters were optimized to be 90 SCCM and 25 SCCM, respectively, for a multicomponent gas mixture. Under testing conditions using Tenax TA sorbent, the device was capable of measuring analytes down to 22 ppb with only a 2 min sample loading time using a gas chromatograph with a flame ionization detector. Two separate devices were compared by measuring the same chemical mixture; both devices yielded similar peak areas and widths (fwhm: 0.032-0.033 min), suggesting reproducibility between devices.

A miniature closed-loop gas chromatography system

This paper reports the characterization of a miniaturized circulatory column system that is capable of magnifying the effective column length by forming a circulatory loop with chip-scale columns, thus ultimately achieving high-efficiency target separation. The circulatory column system is composed of a tandem of 25 cm microcolumns and six valves for fluidic flow control in order to enable chromatographic separation in circulatory motions while requiring only 5.5 kPa of pressure, which current micropumps are currently capable of supplying. The developed column system (1) successfully demonstrated 16 times elongation of a virtual column length up to 800 cm by only utilizing two 25 cm microcolumns, which is the longest column length reported by any MEMS-scale functioning GC column, (2) achieved a high theoretical plate number of 68,696 with pentane circulating after 15.5 circulatory cycles, which corresponds to the plate number per length-pressure of 1611 plate m(-1) kPa(-1), the highest record reported yet, and (3) demonstrated successful separation of target molecules during circulation by utilizing a pentane/hexane mixture, resulting in magnification of the two corresponding peaks via circulation.

Polymer-coated micro-optofluidic ring resonator detector for a comprehensive two-dimensional gas chromatographic microsystem: μGC ×μGC-μOFRR

We describe first results from a micro-analytical subsystem that integrates a detector comprising a polymer-coated micro-optofluidic ring resonator (μOFRR) chip with a microfabricated separation module capable of performing thermally modulated comprehensive two-dimensional gas chromatographic separations (μGC ×μGC) of volatile organic compound (VOC) mixtures. The 2 × 2 cm μOFRR chip consists of a hollow, contoured SiO(x) cylinder (250 μm i.d.; 1.2 μm wall thickness) grown from a Si substrate, and integrated optical and fluidic interconnection features. By coupling to a 1550 nm tunable laser and photodetector via an optical fiber taper, whispering gallery mode (WGM) resonances were generated within the μOFRR wall, and shifts in the WGM wavelength caused by transient sorption of eluting vapors into the PDMS film lining the μOFRR cylinder were monitored. Isothermal separations of a simple alkane mixture using a PDMS coated 1st-dimension ((1)D) μcolumn and an OV-215-coated 2nd-dimension ((2)D) μcolumn confirmed that efficient μGC ×μGC-μOFRR analyses could be performed and that responses were dominated by film-swelling. Subsequent tests with more diverse VOC mixtures demonstrated that the modulated peak width and the VOC sensitivity were inversely proportional to the vapor pressure of the analyte. Modulated peaks as narrow as 120 ms and limits of detection in the low-ng range were achieved. Structured contour plots generated with the μOFRR and a reference FID were comparable.

A purge and trap integrated microGC platform for chemical identification in aqueous samples

The majority of current micro-scale gas chromatography (μGC) systems focus on air sampling to detect volatile organic compounds (VOCs). However, purging the VOCs from a water sample using microsystems is an unchartered territory. Various organic compounds used in everyday life find their way to water bodies. Some of these water organic compounds (WOCs) persist or degrade slowly, threatening not just human existence but also aquatic life. This article reports the first micro-purge extractor (μPE) chip and its integration with a micro-scale gas chromatography (μGC) system for the extraction and analysis of water organic compounds (WOCs) from aqueous samples. The 2 cm × 3 cm μPE chip contains two inlet and outlet ports and an etched cavity sealed with a Pyrex cover. The aqueous sample is introduced from the top inlet port while a pure inert gas is supplied from the side inlet to purge WOCs from the μPE chip. The outlets are assigned for draining water from the chip and for directing purged WOCs to the micro-thermal preconcentrator (μTPC). The trapped compounds are desorbed from the μTPC by resistive heating using the on-chip heater and temperature sensor, are separated by a 2 m long, 80 μm wide, and 250 μm deep polydimethylsiloxane (OV-1) coated μGC separation column, and are identified using a micro-thermal conductivity detector (μTCD) monolithically integrated with the column. Our experiments indicate that the combined system is capable of providing rapid chromatographic separation (<1.5 min) for quaternary WOCs namely toluene, tetrachloroethylene (PCE), chlorobenzene and ethylbenzene with a minimum detection concentration of 500 parts-per-billion (ppb) in aqueous samples. The proposed method is a promising development towards the future realization of a miniaturized system for sensitive, on-site and real-time field analysis of organic contaminants in water.

Through the years with on-a-chip gas chromatography: a review

In recent years, the need for measurement and detection of samples in situ or with very small volume and low concentration (low and sub-parts per billion) is a cause for miniaturizing systems via microelectromechanical system (MEMS) technology. Gas chromatography (GC) is a common technique that is widely used for separating and measuring semi-volatile and volatile compounds. Conventional GCs are bulky and cannot be used for in situ analysis, hence in the past decades many studies have been reported with the aim of designing and developing chip-based GC. The focus of this review is to follow and investigate the development and the achievements in the field of chip-based GC and its components from the beginning up to the present.

Enhanced Radio Frequency Biosensor for Food Quality Detection Using Functionalized Carbon Nanofillers

This paper outlines an improved design of inexpensive, wireless and battery free biosensors for in situ monitoring of food quality. This type of device has an additional advantage of being operated remotely. To make the device, a portion of an antenna of a passive 13.56 MHz radio frequency identification (RFID) tag was altered with a sensing element composed of conductive nanofillers/particles, a binding agent, and a polymer matrix. These novel RFID tags were exposed to biogenic amine putrescine, commonly used as a marker for food spoilage, and their response was monitored over time using a general-purpose network analyzer. The effect of conductive filler properties, including conductivity and morphology, and filler functionalization was investigated by preparing sensing composites containing carbon particles (CPs), multiwall carbon nanotubes (MWCNTs), and binding agent grafted-multiwall carbon nanotubes (g-MWCNTs), respectively. During exposure to putrescine, the amount of reflected waves, frequency at resonance, and quality factor of the novel RFID tags decreased in response. The use of MWCNTs reduced tag cutoff time (i.e., faster response time) as compared with the use of CPs, which highlighted the effectiveness of the conductive nanofiller morphology, while the addition of g-MWCNTs further accelerated the sensor response time as a result of localized binding on the conductive nanofiller surface. Microstructural investigation of the film morphology indicated a better dispersion of g-MWCNTs in the sensing composite as compared to MWCNTs and CPs, as well as a smoother texture of the surface of the resulting coating. These results demonstrated that grafting of the binding agent onto the conductive particles in the sensing composite is an effective way to further enhance the detection sensitivity of the RFID tag based sensor.

Nanoparticle-coated micro-optofluidic ring resonator as a detector for microscale gas chromatographic vapor analysis

A vapor sensor comprising a nanoparticle-coated microfabricated optofluidic ring resonator (μOFRR) is introduced. A multilayer film of polyether functionalized, thiolate-monolayer-protected gold nanoparticles (MPN) was solvent cast on the inner wall of the hollow cylindrical SiOxμOFRR resonator structure, and whispering gallery mode (WGM) resonances were generated with a 1550 nm tunable laser via an optical fiber taper. Reversible shifts in the WGM resonant wavelength upon vapor exposure were detected with a photodetector. The μOFRR chip was connected to a pair of upstream etched-Si chips containing PDMS-coated separation μcolumns and calibration curves were generated from the peak-area responses to five volatile organic compounds (VOCs). Calibration curves were linear, and the sensitivities reflected the influence of analyte volatility and analyte-MPN functional group affinity. Sorption-induced changes in film thickness apparently dominate over changes in the refractive index of the film as the determinant of responses for all VOCs. Peaks from the MPN-coated μOFRR were just 20-50% wider than those from a flame ionization detector for similar μcolumn separation conditions, reflecting the rapid response of the sensor for VOCs. The five VOCs were baseline separated in <1.67 min, with detection limits as low as 38 ng.

Ultra-high sensitivity zinc oxide nanocombs for on-chip room temperature carbon monoxide sensing

In this paper, we report an on-chip gas sensor based on novel zinc oxide (ZnO) nanocombs for carbon monoxide (CO) sensing. With ZnO gas sensing nanocombs fully integrated on a single silicon chip, the concept of low cost complementary-metal-oxide-semiconductor (CMOS) microsensor capable of on-chip gas sensing and processing is enabled. Compared with all previous implementations, the proposed ZnO nanocombs feature much larger effective sensing area and exhibit ultra-high sensitivity even at the room temperature. Specifically, at room temperature, we demonstrate peak sensitivities as high as 7.22 and 8.93 for CO concentrations of 250 ppm and 500 ppm, respectively. As a result, by operating the proposed ZnO-nanocomb-based gas sensor at the room temperature, the widely adopted power consuming heating components are completely removed. This leads to not only great power saving, but also full compatibility between the gas sensor and the on-chip circuitry in term of acceptable operating temperature. In addition, the reported fast response/recovery time of ~200 s/~50 s (250 ppm CO) makes it well suited to real-life applications.

Axial thermal gradients in microchip gas chromatography

Fabrication technologies for microelectromechanical systems (MEMS) allow miniaturization of conventional benchtop gas chromatography (GC) to portable, palm-sized microfabricated GC (μGC) devices, which are suitable for on-site chemical analysis and remote sensing. The separation performance of μGC systems, however, has not been on par with conventional GC. Column efficiency, peak symmetry and resolution are often compromised by column defects and non-ideal injections. The relatively low performance of μGC devices has impeded their further commercialization and broader application. In this work, the separation performance of μGC columns was improved by incorporating thermal gradient gas chromatography (TGGC). The analysis time was ∼20% shorter for TGGC separations compared to conventional temperature-programmed GC (TPGC) when a wide sample band was introduced into the column. Up to 50% reduction in peak tailing was observed for polar analytes, which improved their resolution. The signal-to-noise ratios (S/N) of late-eluting peaks were increased by 3-4 fold. The unique focusing effect of TGGC overcomes many of the previous shortcomings inherent in μGC analyses.

A microfabricated optofluidic ring resonator for sensitive, high-speed detection of volatile organic compounds

Advances in microanalytical systems for multi-vapor determinations to date have been impeded by limitations associated with the microsensor technologies employed. Here we introduce a microfabricated optofluidic ring resonator (μOFRR) sensor that addresses many of these limitations. The μOFRR combines vapor sensing and fluidic transport functions in a monolithic microstructure comprising a hollow, vertical SiOx cylinder (250 μm i.d., 1.2 μm wall thickness; 85 μm height) with a central quasi-toroidal mode-confinement section, grown and partially released from a Si substrate. The device also integrates on-chip fluidic-interconnection and fiber-optic probe alignment features. High-Q whispering gallery modes generated with a tunable 1550 nm laser exhibit rapid, reversible shifts in resonant wavelength arising from polymer swelling and refractive index changes as vapors partition into the ~300 nm PDMS film lining the cylinder. Steady-state sensor responses varied in proportion to concentration over a 50-fold range for the five organic vapors tested, providing calculated detection limits as low as 0.5 ppm (v/v) (for m-xylene and ethylbenzene). In dynamic exposure tests, responses to 5 μL injected m-xylene vapor pulses were 710 ms wide and were only 18% broader than those from a reference flame-ionization detector and also varied linearly with injected mass; 180 pg was measured and the calculated detection limit was 49 pg without use of preconcentration or split injection, at a flow rate compatible with efficient chromatographic separations. Coupling of this μOFRR with a micromachined gas chromatographic separation column is demonstrated.

Microfabricated gas chromatograph for rapid, trace-level determinations of gas-phase explosive marker compounds

A prototype microfabricated gas chromatograph (μGC) adapted specifically for the rapid determination of selected gas-phase marker compounds of the explosive 2,4,6-trinitrotoluene (TNT) at sub-parts-per-billion (<ppb) concentrations in complex mixtures is described. Si-microfabricated focuser, separation column, and sensor array components are integrated with a high-volume sampler of conventional construction to reduce analysis time and the limit of detection (LOD). The primary markers selected as target analytes were 2,4-dinitrotoluene (2,4-DNT, a persistent impurity of TNT) and 2,3-dimethyl-2,3-dinitrobutane (DMNB, a taggant), along with 2,6-dinitrotoluene (2,6-DNT, a less-prominent TNT impurity), which was also included in numerous tests. Selective preconcentration, on-column focusing, temperature-programmed chromatographic separation, and sensor array detection/recognition facilitated determinations of the primary markers in the presence of 20 (or more) interferences within ∼2 min under laptop control. Estimated LODs of 2.2, 0.48, and 0.86 ng were achieved for DMNB, 2,6-DNT, and 2,4-DNT, respectively, which correspond to 0.30, 0.067, and 0.12 ppb in each 1-L air sample collected.

Multiplexed detection of xylene and trichloroethylene in water by photonic crystal absorption spectroscopy

We experimentally demonstrate simultaneous selective detection of xylene and trichloroethylene (TCE) using multiplexed photonic crystal waveguides (PCWs) by near-infrared optical absorption spectroscopy on a chip. Based on the slow light effect of photonic crystal structure, the sensitivity of our device is enhanced to 1 ppb (v/v) for xylene and 10 ppb (v/v) for TCE in water. Multiplexing is enabled by multimode interference power splitters and Y-combiners that integrate multiple PCWs on a silicon chip in a silicon-on-insulator platform.

A wireless hybrid chemical sensor for detection of environmental volatile organic compounds

A hybrid sensor for monitoring volatile organic compounds (VOCs) in air is developed. The device combines two orthogonal sensing principles, selective molecular binding with a microfabricated quartz tuning fork detector and separation of analytes with a column. The tuning fork detector is functionalized with molecular imprinted polymers for selective binding to benzene, toluene, ethylbenzene, and xylenes (BTEX), and the separation column provides further discrimination of the analytes for real world complex sample analysis. The device is wireless, portable, battery-powered, and cell-phone operated, and it allows reliable detection in parts per billion (ppb) by volume-levels of BTEX in the presence of complex interferents. The hybrid device is suitable for occupational, environmental health, and epidemiological applications.

A multidimensional micro gas chromatograph employing a parallel separation multi-column chip and stop-flow μGC × μGCs configuration

A dual-chip, multidimensional micro gas chromatographic module was designed, built and evaluated. Column chips were fabricated on a silicon wafer with an etched rectangular channel 100 μm (width) × 250 μm (depth) using a deep reactive ion etching (DRIE) process. The column chip for the first GC dimension was 3 m long and was coated with polydimethylsiloxane (DB-1) as the stationary phase. The columns on the second dimensional chip were etched with the same width and depth as the first chip, but the flow channel was split into three parallel columns, 1 m long, on the same sized silicon chip (i.e., 3 cm × 3 cm). These three parallel columns on the second chip were coated with polyethylene oxide (DB-Wax), trifluoropropylpolymethylsilicone (OV-210) and cyanopropylmethylphenylmethylpolysilicone (OV-225), accordingly, in order to provide diversified chromatographic retention. These two chips were connected via a stop-flow configuration to simultaneously generate multiple two-dimensional gas chromatograms for every analysis. This stop-flow μGC × μGCs design allowed the first column to function as a pre-separator and as a sequencing injector for the second parallel-separation chip. Fifteen volatile organic compounds with boiling points that ranged from 80-131 °C with various functional groups were tested using this μGC × μGCs module. Three discrete 2-D chromatograms were generated simultaneously, which demonstrated the advantages of simultaneously combining GC × GC with parallel separation GCs in microchip chromatography. The total traveling length in the column was only 4 m for each eluted peak and fully resolved separation was achieved through the cross reference among triplet 2-D chromatograms.