Characteristics of inorganic acid emission from various generation semiconductor manufacturing factories

With advancements in semiconductor industry technology, the gas emissions per wafer have decreased, but the emission compositions have shown significant differences. This study analyzed nine semiconductor plants representing different generations of process technologies, ranging from 3 μm to 12 nm technology nodes. Stack inspections were conducted on the acid, alkali, and organic exhaust systems to understand the characteristics of inorganic acid emissions in plants in different process technologies. The analysis showed that with technological process and air pollution control equipment advancements, the emissions of inorganic acids per wafer decreased by 38% compared to the first generation. It is worth noting that both hydrofluoric acid and nitric acid are identified as the primary pollutants in traditional semiconductor process plants. At the same time, H2SO4 was instead the primary pollutant in advanced process plants. Based on these characteristics, each plant has established relevant improvement strategies. After two years of improvement, the emissions of inorganic acids per wafer in each generation of plants are evidenced to have further decreased by 15-56%. Hence, it is shown that these initiatives and studies have successfully helped to reduce air pollution emissions and promote advanced green manufacturing.

Theoretical Study on the Gas Phase and Gas-Liquid Interface Reaction Mechanism of Criegee Intermediates with Glycolic Acid Sulfate

Criegee intermediates (CIs) are important zwitterionic oxidants in the atmosphere, which affect the budget of OH radicals, amines, alcohols, organic/inorganic acids, etc. In this study, quantum chemical calculation and Born-Oppenheimer molecular dynamic (BOMD) simulation were performed to show the reaction mechanisms of C2 CIs with glycolic acid sulfate (GAS) at the gas-phase and gas-liquid interface, respectively. The results indicate that CIs can react with COOH and OSO₃H groups of GAS and generate hydroperoxide products. Intramolecular proton transfer reactions occurred in the simulations. Moreover, GAS acts as a proton donor and participates in the hydration of CIs, during which the intramolecular proton transfer also occurs. As GAS widely exists in atmospheric particulate matter, the reaction with GAS is one of the sink pathways of CIs in areas polluted by particulate matter.

Post-Transition-State Direct Dynamics Simulations on the Ozonolysis of Catechol

On-the-fly dynamics simulations are performed for the reaction of catechol + O₃. The post transition state (TS) dynamics is studied at temperatures of 400 and 500 K. The PM7 semiempirical method is employed for calculating the potential energy gradient needed for integrating Hamilton's equations of motion. This semiempirical method provides excellent agreement in terms of energy and geometry of the TSs as well as minimum energy states of the system with respect to B3LYP/6-311+G (2df, 2p) calculated results. In the dynamics, first, a peroxyacid is formed, which further dissociates to different fragments. Four major channels forming CO, CO₂, H₂O, and small carboxylic acid (SCA) fragments are seen in this reaction. Rates of each of the channels and the overall unimolecular reaction are calculated at both temperatures. Branching ratios of all these product channels are calculated and compared with experiment. The minimum energy profile of CO₂, CO, and H₂O channels are calculated. A qualitative estimate of activation energies for all the channels are obtained and compared with the explicit TS energies of three product channels, which ultimately correlate with the reaction probabilities.

An Extended Computational Study of Criegee Intermediate-Alcohol Reactions

High-level ab initio calculations (DF-LCCSD(T)-F12a//B3LYP/aug-cc-pVTZ) are performed on a range of stabilized Criegee intermediate (sCI)-alcohol reactions, computing reaction coordinate energies, leading to the formation of α-alkoxyalkyl hydroperoxides (AAAHs). These potential energy surfaces are used to model bimolecular reaction kinetics over a range of temperatures. The calculations performed in this work reproduce the complicated temperature-dependent reaction rates of CH₂OO and (CH₃)₂COO with methanol, which have previously been experimentally determined. This methodology is then extended to compute reaction rates of 22 different Criegee intermediates with methanol, including several intermediates derived from isoprene ozonolysis. In some cases, sCI-alcohol reaction rates approach those of sCI-(H₂O)₂. This suggests that in regions with elevated alcohol concentrations, such as urban Brazil, these reactions may generate significant quantities of AAAHs and may begin to compete with sCI reactions with other trace tropospheric pollutants such as SO₂. This work also demonstrates the ability of alcohols to catalyze the 1,4-H transfer unimolecular decomposition of α-methyl substituted sCIs.

The ozonolysis of cyclic monoterpenes: a computational review

Monoterpenes are prevalent organic compounds emitted to the atmosphere, via biogenic activities in various types of plants. Monoterpenes undergo atmospheric decomposition reactions derived by the potent atmospheric oxidizing agents, OH, O3, and NOx. This review critically surveys literature pertinent to the atmospheric removal of monoterpenes by ozone. In general, the ozonolysis reactions of monoterpenes occur through the so-called Criegee mechanism. These classes of reactions generate a wide array of chemical organic and inorganic low vapor pressure (LVP) species. Carbonyl oxides, commonly known as Criegee intermediates (CIs), are the main intermediates from the gas-phase ozonolysis reaction. Herein, we present mechanistic pathways, reactions rate constants, product profiles, thermodynamic, and kinetic results dictating the ozonolysis reactions of selected monoterpenes (namely carene, camphene, limonene, α-pinene, β-pinene, and sabinene). Furthermore, the unimolecular (vinyl hydroperoxide and ester channels) and bimolecular reactions (cycloaddition, insertion, and radical recombination) of the resulting CIs are fully discussed. The orientations and conformations of the resulting primary ozonides (POZs) and CIs of monoterpenes are classified to reveal their plausible effects on reported thermokinetic parameters.

Hydration and Secondary Ozonide of the Criegee Intermediate of Sabinene

A computational study of the formation of secondary ozonide (SOZ) from the Criegee intermediates (CIs) of sabinene, including hydration reactions with H₂O and 2H₂O, was performed. All of the geometries were optimized at the B3LYP and M06-2X with several basis sets. Further single-point energy calculation at the CCSD(T) was performed. Two major pathways of SOZ formation suggest that it is mainly formed from the sabinene CI and formaldehyde rather than sabina ketone and formaldehyde-oxide. However, in both pathways, the activation energies are within a range of ±5 kJ mol^-1. Furthermore, the hydration reactions of the anti-CI with H₂O and 2H₂O showed that the role of the second water molecule is a mediator (catalyst) in this reaction. The dimer hydration reaction has lower activation energies than the monomer by 60 and 69 kJ mol^-1, at the M06-2X/6-31G(d) and CCSD(T)+CF levels of the theory, respectively. A novel water-mediated vinyl hydroperoxide (VHP) channel from both the monomer and dimer has been investigated. The results indicate that the direct nonmediated VHP formation and dissociation is interestingly more possible than the water-mediated VHP. The density functional theory calculations show that the monomer is faster than the dimer by roughly 22 kJ mol^-1. Further, the infrared spectrum of sabina ketone was calculated at B3LYP/6-311+G(2d,p); the calculated carbonyl stretching of 1727 cm^-1 is in agreement with the experimental range of 1700-1800 cm^-1.

Molecular Products and Fundamentally Based Reaction Pathways in the Gas-Phase Pyrolysis of the Lignin Model Compound p-Coumaryl Alcohol

The fractional pyrolysis of lignin model compound para-coumaryl alcohol (p-CMA) containing a propanoid side chain and a phenolic OH group was studied using the System for Thermal Diagnostic Studies at temperatures from 200 to 900 °C, in order to gain mechanistic insight into the role of large substituents in high-lignin feedstocks pyrolysis. Phenol and its simple derivatives p-cresol, ethyl-, propenyl-, and propyl-phenols were found to be the major products predominantly formed at low pyrolysis temperatures (<500 °C). A cryogenic trapping technique was employed combined with EPR spectroscopy to identify the open-shell intermediates registered at pyrolysis temperatures above 500 °C. These were characterized as radical mixtures primarily consisting of oxygen-linked conjugated radicals. A comprehensive potential energy surface analysis of p-CMA and p-CMA + H atom systems was performed using various DFT protocols to examine the possible role of concerted molecular eliminations and free-radical mechanisms in the formation of major products. Other significant unimolecular concerted reactions along with formation and decomposition of primary radicals are also described and evaluated. The calculations suggest that a set of the chemically activated secondary radical channels is relevant to the low temperature product formation under fractional pyrolysis conditions.

An efficient regioselective hydrodifluoromethylation of unactivated alkenes with TMSCF2CO2Et at ambient temperature

An efficient regioselective hydrodifluoromethylation of diverse unactivated vicinal alkenes is described. The primary mechanistic investigations indicate that a CF₂COOEt radical species is involved.

Developments in Laboratory Studies of Gas-Phase Reactions for Atmospheric Chemistry with Applications to Isoprene Oxidation and Carbonyl Chemistry

Laboratory studies of gas-phase chemical processes are a key tool in understanding the chemistry of our atmosphere and hence tackling issues such as climate change and air quality. Laboratory techniques have improved considerably with greater emphasis on product detection, allowing the measurement of site-specific rate coefficients. Radical chemistry lies at the heart of atmospheric chemistry. In this review we consider issues around radical generation and recycling from the oxidation of isoprene and from the chemical reactions and photolysis of carbonyl species. Isoprene is the most globally significant hydrocarbon, but uncertainties exist about its oxidation in unpolluted environments. Recent experiments and calculations that cast light on radical generation are reviewed. Carbonyl compounds are the dominant first-generation products from hydrocarbon oxidation. Chemical oxidation can recycle radicals, or photolysis can be a net radical source. Studies have demonstrated that high-resolution and temperature-dependent studies are important for some significant species.