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Wang Q, Vockenhuber M, Cui H, Wang X, Tao P, Hu Z, Zhao J, Wang J, Ekinci Y, Xu H, He X. Theoretical Insights into the Solubility Polarity Switch of Metal-Organic Nanoclusters for Nanoscale Patterning. SMALL METHODS 2023; 7:e2300309. [PMID: 37337380 DOI: 10.1002/smtd.202300309] [Citation(s) in RCA: 2] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/09/2023] [Revised: 05/30/2023] [Indexed: 06/21/2023]
Abstract
Metal-organic nanoclusters(MOCs) are being increasingly used as prospective photoresist candidates for advanced nanoscale lithography technologies. However, insight into the irradiation-induced solubility switching process remains unclear. Hereby, the theoretical study employing density functional theory (DFT) calculations of the alkene-containing zirconium oxide MOC photoresists is reported, which is rationally synthesized accordingly, to disclose the mechanism of the nanoscale patterning driven by the switch of solubility from the acid-catalyzed or electron-triggered ligand dissociation. By evaluating the dependence of MOCs' imaging process on photoacid, lithographies of photoresists with and without photoacid generators after exposure to ultraviolet (UV), electron beam, and soft X-ray, it is revealed that photoacid is essential in UV lithography, but it demonstrates little effect on exposure dose in high-energy lithography. Furthermore, theoretical studies using DFT simulations to investigate the plausible photoacid-catalyzed, electron-triggered dissociation, and accompanying radical reaction are performed, and a mechanism is demonstrated that the nanoscale patterning of this type of MOCs is driven by the solubility switch resulting from dissociation-induced strong electrostatic interaction and low-energy barrier radical polymerization with other species. This study can give insights into the chemical mechanisms of patterning, and guide the rational design of photoresists to realize high resolution and high sensitivity.
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Affiliation(s)
- Qianqian Wang
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing, 100084, China
| | | | - Hao Cui
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing, 100084, China
| | - Xiaolin Wang
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing, 100084, China
| | - Peipei Tao
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing, 100084, China
| | - Ziyu Hu
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing, 100084, China
| | - Jun Zhao
- Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai, 201210, China
| | - Jianlong Wang
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing, 100084, China
| | - Yasin Ekinci
- Paul Scherrer Institute, Villigen, 5232, Switzerland
| | - Hong Xu
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing, 100084, China
| | - Xiangming He
- Institute of Nuclear and New Energy Technology, Tsinghua University, Beijing, 100084, China
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Hu S, Chen J, Yu T, Zeng Y, Guo X, Wang S, Yang G, Li Y. Photoresists based on bisphenol A derivatives with tert-butyl ester groups for electron beam lithography. J Photochem Photobiol A Chem 2023. [DOI: 10.1016/j.jphotochem.2022.114351] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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Krohn F, Neuber C, Rössler EA, Schmidt HW. Organic Glasses of High Glass Transition Temperatures Due To Substitution with Nitrile Groups. J Phys Chem B 2019; 123:10286-10293. [PMID: 31697500 DOI: 10.1021/acs.jpcb.9b08792] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
Abstract
The glass transition temperature (Tg) of a molecular glass depends on its molar mass. However, the nature of intermolecular interactions also plays a major role in both the glass transition temperature and its glass-forming ability. In this context, we report on novel molecular glasses containing nitrile groups and investigate the influence of this highly polar group on Tg and the glass-forming ability. As reference compounds, we studied the thermal properties of synthesized molecular glasses with C-C-bonded phenyl rings. The molar mass of the studied compounds ranges from 341 to 568 g/mol. Despite their relatively low molar mass, glass transition temperatures from 347 K (74 °C) to 471 K (198 °C) were observed. Most of the compounds possess high Tg/Tmratios between 0.7 and 0.8. By introducing highly interacting nitrile groups, the dependence of the molar mass on Tg could be increased by a factor of 2-3.
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Affiliation(s)
- Felix Krohn
- Department of Macromolecular Chemistry I and Bavarian Polymer Institute , University of Bayreuth , 95440 Bayreuth , Germany
| | - Christian Neuber
- Department of Macromolecular Chemistry I and Bavarian Polymer Institute , University of Bayreuth , 95440 Bayreuth , Germany
| | - Ernst A Rössler
- Department of Inorganic Chemistry III and North Bavarian NMR Center , University of Bayreuth , 95440 Bayreuth , Germany
| | - Hans-Werner Schmidt
- Department of Macromolecular Chemistry I and Bavarian Polymer Institute , University of Bayreuth , 95440 Bayreuth , Germany
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Vij V, Bhalla V, Kumar M. Hexaarylbenzene: Evolution of Properties and Applications of Multitalented Scaffold. Chem Rev 2016; 116:9565-627. [DOI: 10.1021/acs.chemrev.6b00144] [Citation(s) in RCA: 91] [Impact Index Per Article: 11.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/26/2023]
Affiliation(s)
- Varun Vij
- Department of Chemistry,
UGC Centre for Advanced Studies, Guru Nanak Dev University, Amritsar, Punjab 143005, India
| | - Vandana Bhalla
- Department of Chemistry,
UGC Centre for Advanced Studies, Guru Nanak Dev University, Amritsar, Punjab 143005, India
| | - Manoj Kumar
- Department of Chemistry,
UGC Centre for Advanced Studies, Guru Nanak Dev University, Amritsar, Punjab 143005, India
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Zhu C, Xu H, Geng P, Lu Z. Triphenylbenzene core based dendritic benzoxazines and their heat-resistant and photoluminescent polymers. HIGH PERFORM POLYM 2014. [DOI: 10.1177/0954008314544339] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/16/2022]
Abstract
A facile and efficient synthetic route to connect 1,3,5-tri( p-hydroxyl-phenyl)benzene (TP) molecules into polymers was introduced. Specifically, a series of triphenylbenzene core based dendritic benzoxazines were synthesized via Mannich reaction using TP, paraformaldehyde, and amine derivatives including n-propylamine, cyclohexylamine, and aniline. The chemical structure of benzoxazines was characterized by nuclear magnetic resonance spectroscopy (proton and carbon nuclear magnetic resonance) and Fourier transform infrared spectroscopy. Thermally ring-opening polymerization of the dendritic benzoxazines yielded the cross-linked polymers. We found that N-substituents had the significant influence on polymerization temperature, glass transition temperature ( Tg), thermal stability, and char yield. Polybenzoxazine with the N-phenyl group exhibited the highest Tg of 276°C, char yield of 70%, and excellent thermal stability (5 and 10% weight loss temperatures at 356 and 411°C, respectively). Photoluminescent analysis indicated that the cross-linked structure did not quench the triphenylbenzene’s photoluminescence, while only the relative photoluminescent intensity of polybenzoxazines reduced compared with TP.
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Affiliation(s)
- Chunli Zhu
- Key Laboratory for Special Functional Aggregated Materials, Ministry of Education, School of Chemistry and Chemical Engineering, National Engineering Research Center for Colloidal Materials, Shandong University, Jinan, People’s Republic of China
| | - Hongli Xu
- Department of Chemical Physics, University of Science and Technology of China, Hefei, People’s Republic of China
| | - Pengfei Geng
- Key Laboratory for Special Functional Aggregated Materials, Ministry of Education, School of Chemistry and Chemical Engineering, National Engineering Research Center for Colloidal Materials, Shandong University, Jinan, People’s Republic of China
| | - Zaijun Lu
- Key Laboratory for Special Functional Aggregated Materials, Ministry of Education, School of Chemistry and Chemical Engineering, National Engineering Research Center for Colloidal Materials, Shandong University, Jinan, People’s Republic of China
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Chaumont C, Mobian P, Kyritsakas N, Henry M. Synthesis, topology and energy analysis of crystalline resorcinol-based oligophenylene molecules with various symmetries. CrystEngComm 2013. [DOI: 10.1039/c3ce40761f] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Wieberger F, Forman DC, Neuber C, Gröschel AH, Böhm M, Müller AHE, Schmidt HW, Ober CK. Tailored star-shaped statistical teroligomers viaATRP for lithographic applications. ACTA ACUST UNITED AC 2012. [DOI: 10.1039/c1jm11922b] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Yang Y, Li K, Luo S, Li Q. Self-assembly of a novel functional molecule: 1,2,4,5-tetra(p-hydroxyphenyl)benzene. J Mol Struct 2010. [DOI: 10.1016/j.molstruc.2010.01.046] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 10/19/2022]
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