Versatile Nanoring Fabrication Assisted by Hole-mask Colloidal Lithography

Nanomaterials shaped as rings are interesting nanostructures with control of the materials properties at the nanoscale. Nanoring plasmonic resonators provide tunable optical resonances in the near-infrared with application in sensing. Fabrication of nanorings can be carried out via top-down approaches based on electron beam lithography with high control of the ring size parameters but at high cost. Alternatively, fabrication via self-assembly approaches has a higher speed/lower cost but at the cost of control of ring parameters. Current colloidal lithography approaches can provide nanoring fabrication over large areas but only of specific materials and a select set of rings (large ring diameters or small rings with ultrathin walls). We extend Hole-mask Colloidal Lithography to use ring shaped holes, allow the deposition of arbitrary materials, and allow the independent tuning of ring-wall thickness over a large range of values. We present a generic approach for the fabrication of nanorings formed from a range of materials including low cost (e.g., Cu, Al) and nonplasmonic (e.g., W) materials and with control of ring wall thickness and diameter allowing tuning of ring parameters and materials for applications in nanooptics and beyond.

Deep X-ray lithography on "sol-gel" processed noble metal mesoarchitectured films

Noble metal coordination xerogel films (mesostructured with block-copolymers) exhibit solubility switching with increasing X-ray irradiation. Different from other sol-gel systems, these are attributed to film deconstruction under irradiation. These materials can be used as recyclable negative tone resists for deep X-ray lithography that can be further converted into metallic nanoarchitectured films.

Block-Copolymers Enable Direct Reduction and Structuration of Noble Metal-Based Films

Noble metal nanostructured films are of great interest for various applications including electronics, photonics, catalysis, and photocatalysis. Yet, structuring and patterning noble metals, especially those of the platinum group, is challenging by conventional nanofabrication. Herein, an approach based on solution processing to obtain metal-based films (rhodium, ruthenium (Ru) or iridium in the presence of residual organic species) with nanostructuration at the 20 nm-scale is introduced. Compared to existing approaches, the dual functionality of block-copolymers acting both as structuring and as reducing agent under inert atmosphere is exploited. A set of in situ techniques has allowed for the capturing of the carbothermal reduction mechanism occurring at the hybrid organic/inorganic interface. Differently from previous literature, a two-step reduction mechanism is unveiled with the formation of a carbonyl intermediate. From a technological point of view, the materials can be solution-processed on a large scale by dip-coating as polymers and simultaneously structured and reduced into metals without requiring expensive equipment or treatments in reducing atmosphere. Importantly, the metal-based films can be patterned directly by block-copolymer lithography or by soft-nanoimprint lithography on various substrates. As proof-of-concept of application, the authors demonstrate that nanostructured Ru films can be used as efficient catalysts for H₂ generation into microfluidic reactors.

Solution-Based Micro- and Nanoscale Metal Oxide Structures Formed by Direct Patterning for Electro-Optical Applications

Due to their transparency and tunable electrical, optical, and magnetic properties, metal oxide thin films and structures have many applications in electro-optical devices. In recent years, solution processing combined with direct-patterning techniques such as micro-/nanomolding, inkjet printing, e-jet printing, e-beam writing, and photopatterning has drawn much attention because of the inexpensive and simple fabrication process that avoids using capital-intensive vacuum deposition systems and chemical etching. Furthermore, practical applications of solution direct-patterning techniques with metal oxide structures are demonstrated in thin-film transistors and biochemical sensors on a wide range of substrates. Since direct-patterning techniques enable low-cost fabrication of nanoscale metal oxide structures, these methods are expected to accelerate the development of nanoscale devices and systems based on metal oxide components in important application fields such as flexible electronics, the Internet of Things (IoT), and human health monitoring. Here, a review of the fabrication procedures, advantages, limitations, and applications of the main direct-patterning methods for making metal oxide structures is presented. The goal is to highlight the examples with the most promising perspective from the recent literature.

Tethering Luminescent Thermometry and Plasmonics: Light Manipulation to Assess Real-Time Thermal Flow in Nanoarchitectures

The past decade has seen significant progresses in the ability to fabricate new mesoporous thin films with highly controlled pore systems and emerging applications in sensing, electrical and thermal isolation, microfluidics, solar cells engineering, energy storage, and catalysis. Heat management at the micro- and nanoscale is a key issue in most of these applications, requiring a complete thermal characterization of the films that is commonly performed using electrical methods. Here, plasmonic-induced heating (through Au NPs) is combined with Tb³⁺/Eu³⁺ luminescence thermometry to measure the thermal conductivity of silica and titania mesoporous nanolayers. This innovative method yields values in accord with those measured by the evasive and destructive conventional 3ω-electrical method, simultaneously overcoming their main limitations, for example, a mandatory deposition of additional isolating and metal layers over the films and the previous knowledge of the thermal contact resistance between the heating and the mesoporous layers.

Spatially controlled positioning of coordination polymer nanoparticles onto heterogeneous nanostructured surfaces

Prussian Blue Analog (PBA) nanoparticles were formed on a heterogeneous nanostructured surface made of an ordered nanoperforated titanium oxide thin film deposited on a gold layer. The study of the nanocomposite film by grazing-incidence wide angle X-ray scattering, infrared spectroscopy, scanning electron microscopy and atomic force microscopy shows that the PBA particles are precisely positioned within all the perforations of the oxide film over very large surface areas. Further investigation on the formation of the PBA particles demonstrates a decisive role of a heterogeneous nucleation of the coordination polymer driven by well-adjusted surfaces energies and reactant concentrations in the spatial positioning of the PBA particles. Thanks to the well-controlled positioning of the particles within the ordered nanoperforations, the latter were successfully used as nano crucibles for the local transformation of PBA into the corresponding metal alloy by heat treatment. The thin film heterostructure thus obtained, made of ferromagnetic islands isolated by diamagnetic walls, opens interesting perspectives for the design of magnetic storage devices.

Effective SERS-active substrates composed of hierarchical micro/nanostructured arrays based on reactive ion etching and colloidal masks

A facile route has been proposed for the fabrication of morphology-controlled periodic SiO2 hierarchical micro/nanostructured arrays by reactive ion etching (RIE) using monolayer colloidal crystals as masks. By effectively controlling the experimental conditions of RIE, the morphology of a periodic SiO2 hierarchical micro/nanostructured array could be tuned from a dome-shaped one to a circular truncated cone, and finally to a circular cone. After coating a silver thin layer, these periodic micro/nanostructured arrays were used as surface-enhanced Raman scattering (SERS)-active substrates and demonstrated obvious SERS signals of 4-Aminothiophenol (4-ATP). In addition, the circular cone arrays displayed better SERS enhancement than those of the dome-shaped and circular truncated cone arrays due to the rougher surface caused by physical bombardment. After optimization of the circular cone arrays with different periodicities, an array with the periodicity of 350 nm exhibits much stronger SERS enhancement and possesses a low detection limit of 10(-10) M 4-ATP. This offers a practical platform to conveniently prepare SERS-active substrates.

Hard X-rays for processing hybrid organic-inorganic thick films

Hard X-rays, deriving from a synchrotron light source, have been used as an effective tool for processing hybrid organic-inorganic films and thick coatings up to several micrometres. These coatings could be directly modified, in terms of composition and properties, by controlled exposure to X-rays. The physico-chemical properties of the coatings, such as hardness, refractive index and fluorescence, can be properly tuned using the interaction of hard X-rays with the sol-gel hybrid films. The changes in the microstructure have been correlated especially with the modification of the optical and the mechanical properties. A relationship between the degradation rate of the organic groups and the rise of fluorescence from the hybrid material has been observed; nanoindentation analysis of the coatings as a function of the X-ray doses has shown a not linear dependence between thickness and film hardness.

Ultraporous nanocrystalline TiO2-based films: synthesis, patterning and application as anti-reflective, self-cleaning, superhydrophilic coatings

Crack-free, anatase-based optical coatings with a refractive index down to 1.27, a porosity up to 80 vol%, and a tunable thickness up to 1.5 μm were fabricated. The extraordinary stability of the porosity upon thermally induced crystallisation and template removal was attributed to the combined effects of the presence of 10% molar silica in the inorganic phase, a flash treatment at 500 °C, and the use of templates with different dimensions ranging from a few nanometers to 50 nm. The hierarchical porous system was directly patterned by UV lithography and used as multifunctional anti-reflective, self-cleaning coatings.

Graphene and carbon nanodots in mesoporous materials: an interactive platform for functional applications

The present review is focused on a specific class of nanocomposites obtained through integration of graphene or carbon-based nanomaterials (such as carbon nanodots) with mesoporous inorganic or hybrid materials, obtained via template assisted self-assembly. The task of integrating graphene and carbon nanodots with a self-assembly process is still very challenging and this review shows some of the solutions which have been envisaged so far. These nanocomposite materials are an ideal interactive platform for developing innovative functional applications; they have a high capability of undergoing integration into advanced devices, which well exploits the advantage of tuning the wide properties and flexibility of the soft-chemistry route. A wide range of applications have been developed so far which span from sensing to electronics up to optics and biomedicine. Even though a large number of proof-of-concepts have been reported to date, an even greater expansion of applications in the field is expected to happen in the near future.

Nanocrystal film patterning by inhibiting cation exchange via electron-beam or X-ray lithography

In this Letter we report patterning of colloidal nanocrystal films that combines direct e-beam (electron beam) writing with cation exchange. The e-beam irradiation causes cross-linking of the ligand molecules present at the nanocrystal surface, and the cross-linked molecules act as a mask for further processing. Consequently, in the following step of cation exchange, which is performed by directly dipping the substrate in a solution containing the new cations, the regions that have not been exposed to the electron beam are chemically transformed, while the exposed ones remain unchanged. This selective protection allows the design of patterns that are formed by chemically different nanocrystals, yet in a homogeneous nanocrystal film. Spatially resolved compositional analysis by energy-dispersive X-ray spectroscopy (EDS) corroborates that the selective exchange occurs only in the nonirradiated regions. We demonstrate the utility of this lithography approach by fabricating conductive wires and luminescent patterns in CdSe/CdS nanocrystal films by converting nonirradiated regions to Cu2-xSe/Cu2-xS. Furthermore, we show that X-ray irradiation too can lead to protection from cation exchange.

Combining top-down and bottom-up routes for fabrication of mesoporous titania films containing ceria nanoparticles for free radical scavenging

Nanocomposite thin films formed by mesoporous titania layers loaded with ceria nanoparticles have been obtained by combining bottom-up self-assembly synthesis of a titania matrix with top-down hard X-ray lithography of nanocrystalline cerium oxide. At first the titania mesopores have been impregnated with the ceria precursor solution and then exposed to hard X-rays, which triggered the formation of crystalline cerium oxides within the pores inducing the in situ growth of nanoparticles with average size of 4 nm. It has been observed that the type of coordinating agent in the solution plays a primary role in the formation of nanoparticles. Different patterns have been also produced through deep X-ray lithography by spatially controlling the nanoparticle growth on the micrometer scale. The radical scavenging role of the nanocomposite films has been tested using as a benchmark the UV photodegradation of rhodamine 6G. After impregnation with a rhodamine 6G solution, samples with and without ceria have shown a remarkably different response upon exposure to UV light. The dye photodegradation on the surface of nanocomposite films appears strongly slowed down because of the antioxidation effect of ceria nanoparticles.

Self-assembled titanium calcium oxide nanopatterns as versatile reactive nanomasks for dry etching lithographic transfer with high selectivity

We report the simple preparation of ultra-thin self-assembled nanoperforated titanium calcium oxide films and their use as reactive nanomasks for selective dry etching of silicon. This novel reactive nanomask is composed of TiO(2) in which up to 50% of Ti was replaced by Ca (Ca(x)Ti(1-x)O(2-x)). The system was prepared by evaporation induced self-assembly of dip-coated solution of CaCl(2), TiCl(4) and poly(butadiene-block-ethylene oxide) followed by 5 min of thermal treatment at 500 °C in air. The mask exhibits enhanced selectivity by forming a CaF(2) protective layer in the presence of a chemically reactive fluorinated plasma. In particular it is demonstrated that ordered nano-arrays of dense Si pillars, or deep cylindrical wells, with high aspect ratio i.e. lateral dimensions as small as 20 nm and height up to 200 nm, can be formed. Both wells and pillars were formed by tuning the morphology and the homogeneity of the deposited mask. The mask preparation is extremely fast and simple, low-cost and easily scalable. Its combination with reactive ion etching constitutes one of the first examples of what can be achieved when sol-gel chemistry is coupled with top-down technologies. The resulting Si nanopatterns and nanostructures are of high interest for applications in many fields of nanotechnology including electronics and optics. This work extends and diversifies the toolbox of nanofabrication methods.

X-ray lithography and small-angle X-ray scattering: a combination of techniques merging biology and materials science

The advent of micro/nanotechnology has blurred the border between biology and materials science. Miniaturization of chemical and biological assays, performed by use of micro/nanofluidics, requires both careful selection of the methods of fabrication and the development of materials designed for specific applications. This, in turn, increases the need for interdisciplinary combination of suitable microfabrication and characterisation techniques. In this review, the advantages of combining X-ray lithography, as fabrication technique, with small-angle X-ray scattering measurements will be discussed. X-ray lithography enables the limitations of small-angle X-ray scattering, specifically time resolution and sample environment, to be overcome. Small-angle X-ray scattering, on the other hand, enables investigation and, consequently, adjustment of the nanostructural morphology of microstructures and materials fabricated by X-ray lithography. Moreover, the effect of X-ray irradiation on novel materials can be determined by use of small-angle X-ray scattering. The combination of top-down and bottom-up methods to develop new functional materials and structures with potential in biology will be reported.

Hybrid materials with an increased resistance to hard X-rays using fullerenes as radical sponges

The protection of organic and hybrid organic-inorganic materials from X-ray damage is a fundamental technological issue for broadening the range of applications of these materials. In the present article it is shown that doping hybrid films with fullerenes C(60) gives a significant reduction of damage upon exposure to hard X-rays generated by a synchrotron source. At low X-ray dose the fullerene molecules act as `radical scavengers', considerably reducing the degradation of organic species triggered by radical formation. At higher doses the gradual hydroxylation of the fullerenes converts C(60) into fullerol and a bleaching of the radical sinking properties is observed.

Critical aspects in the production of periodically ordered mesoporous titania thin films

Periodically ordered mesoporous titania thin films (MTTF) present a high surface area, controlled porosity in the 2-20 nm pore diameter range and an amorphous or crystalline inorganic framework. These materials are nowadays routinely prepared by combining soft chemistry and supramolecular templating. Photocatalytic transparent coatings and titania-based solar cells are the immediate promising applications. However, a wealth of new prospective uses have emerged on the horizon, such as advanced catalysts, perm-selective membranes, optical materials based on plasmonics and photonics, metamaterials, biomaterials or new magnetic nanocomposites. Current and novel applications rely on the ultimate control of the materials features such as pore size and geometry, surface functionality and wall structure. Even if a certain control of these characteristics has been provided by the methods reported so far, the needs for the next generation of MTTF require a deeper insight in the physical and chemical processes taking place in their preparation and processing. This article presents a critical discussion of these aspects. This discussion is essential to evolve from know-how to sound knowledge, aiming at a rational materials design of these fascinating systems.

Nanocomposite mesoporous ordered films for lab-on-chip intrinsic surface enhanced Raman scattering detection

Mesoporous nanocomposite materials have been fabricated through integration of evaporation-induced self-assembly and deep X-ray lithography. Micropatterned films made using a mesoporous ordered silica matrix which contains silver nanoparticles have been obtained. The exposure of the mesoporous films to high energy X-rays, which are generated by a synchrotron source, produces several effects: the removal of the surfactant, the densification of the silica backbone and the formation of silver nanoparticles. This integrated process produces a nanocomposite material which has a 2D-hexagonal organized porosity and silver nanoparticles with a sharp size distribution around 5 nm. The patterned nanostructured films have been tested as a lab-on-chip device for intrinsic surface enhanced Raman scattering detection using a solution containing rhodamine 6G in ethanol and measuring Raman response as a function of laser power.