Micro and Nano Interdigitated Electrode Array (IDEA)-Based MEMS/NEMS as Electrochemical Transducers: A Review

Micro and nano interdigitated electrode array (µ/n-IDEA) configurations are prominent working electrodes in the fabrication of electrochemical sensors/biosensors, as their design benefits sensor achievement. This paper reviews µ/n-IDEA as working electrodes in four-electrode electrochemical sensors in terms of two-dimensional (2D) planar IDEA and three-dimensional (3D) IDEA configurations using carbon or metal as the starting materials. In this regard, the enhancement of IDEAs-based biosensors focuses on controlling the width and gap measurements between the adjacent fingers and increases the IDEA's height. Several distinctive methods used to expand the surface area of 3D IDEAs, such as a unique 3D IDEA design, integration of mesh, microchannel, vertically aligned carbon nanotubes (VACNT), and nanoparticles, are demonstrated and discussed. More notably, the conventional four-electrode system, consisting of reference and counter electrodes will be compared to the highly novel two-electrode system that adopts IDEA's shape. Compared to the 2D planar IDEA, the expansion of the surface area in 3D IDEAs demonstrated significant changes in the performance of electrochemical sensors. Furthermore, the challenges faced by current IDEAs-based electrochemical biosensors and their potential solutions for future directions are presented herein.

An interdigitated electrode with dense carbon nanotube forests on conductive supports for electrochemical biosensors

A highly sensitive interdigitated electrode (IDE) with vertically aligned dense carbon nanotube forests directly grown on conductive supports was demonstrated by combining UV lithography and a low temperature chemical vapor deposition process (470 °C). The cyclic voltammetry (CV) measurements of K4[Fe(CN)6] showed that the redox current of the IDE with CNT forests (CNTF-IDE) reached the steady state much more quickly compared to that of conventional gold IDE (Au-IDE). The performance of the CNTF-IDE largely depended on the geometry of the electrodes (e.g. width and gap). With the optimum three-dimensional electrode structure, the anodic current was amplified by a factor of ∼18 and ∼67 in the CV and the chronoamperometry measurements, respectively. The collection efficiency, defined as the ratio of the cathodic current to the anodic current at steady state, was improved up to 97.3%. The selective detection of dopamine (DA) under the coexistence of l-ascorbic acid with high concentration (100 μM) was achieved with a linear range of 100 nM-100 μM, a sensitivity of 14.3 mA mol-1 L, and a limit of detection (LOD, S/N = 3) of 42 nM. Compared to the conventional carbon electrodes, the CNTF-IDE showed superior anti-fouling property, which is of significant importance for practical applications, with a negligible shift of the half-wave potential (ΔE1/2 < 1.4 mV) for repeated CV measurements of DA at high concentration (100 μM).

An electrochemical immunosensor based on a 3D carbon system consisting of a suspended mesh and substrate-bound interdigitated array nanoelectrodes for sensitive cardiac biomarker detection

We developed an electrochemical redox cycling-based immunosensor using a 3D carbon system consisting of a suspended mesh and substrate-bound interdigitated array (IDA) nanoelectrodes. The carbon structures were fabricated using a simple, cost-effective, and reproducible microfabrication technology known as carbon microelectromechanical systems (C-MEMS). We demonstrated that the 3D sub-micrometer-sized mesh architecture and selective modification of the suspended mesh facilitated the efficient production of large quantities of electrochemical redox species. The electrochemically active surfaces and small size of IDA nanoelectrodes with a 1:1 aspect ratio exhibited high signal amplification resulting from efficient redox cycling of electrochemical species (PAP/PQI) by a factor of ~25. The proposed selective surface modification scheme facilitated efficient redox cycling and exhibited a linear detection range of 0.001-100 ng/mL for cardiac myoglobin (cMyo). The specific detection of cMyo was also achieved in the presence of other interfering species. Moreover, the proposed 3D carbon system-based immunosensor successfully detected as low as ~0.4 pg/mL cMyo in phosphate-buffered saline and human serum.

Development of a Sensitive Electrochemical Enzymatic Reaction-Based Cholesterol Biosensor Using Nano-Sized Carbon Interdigitated Electrodes Decorated with Gold Nanoparticles

We developed a versatile and highly sensitive biosensor platform. The platform is based on electrochemical-enzymatic redox cycling induced by selective enzyme immobilization on nano-sized carbon interdigitated electrodes (IDEs) decorated with gold nanoparticles (AuNPs). Without resorting to sophisticated nanofabrication technologies, we used batch wafer-level carbon microelectromechanical systems (C-MEMS) processes to fabricate 3D carbon IDEs reproducibly, simply, and cost effectively. In addition, AuNPs were selectively electrodeposited on specific carbon nanoelectrodes; the high surface-to-volume ratio and fast electron transfer ability of AuNPs enhanced the electrochemical signal across these carbon IDEs. Gold nanoparticle characteristics such as size and morphology were reproducibly controlled by modulating the step-potential and time period in the electrodeposition processes. To detect cholesterol selectively using AuNP/carbon IDEs, cholesterol oxidase (ChOx) was selectively immobilized via the electrochemical reduction of the diazonium cation. The sensitivity of the AuNP/carbon IDE-based biosensor was ensured by efficient amplification of the redox mediators, ferricyanide and ferrocyanide, between selectively immobilized enzyme sites and both of the combs of AuNP/carbon IDEs. The presented AuNP/carbon IDE-based cholesterol biosensor exhibited a wide sensing range (0.005–10 mM) and high sensitivity (~993.91 µA mM⁻¹ cm⁻²; limit of detection (LOD) ~1.28 µM). In addition, the proposed cholesterol biosensor was found to be highly selective for the cholesterol detection.

Reduced Graphene Oxide Modified the Interdigitated Chain Electrode for an Insulin Sensor

Insulin is a key regulator in glucose homeostasis and its deficiency or alternations in the human body causes various types of diabetic disorders. In this paper, we present the development of a reduced graphene oxide (rGO) modified interdigitated chain electrode (ICE) for direct capacitive detection of insulin. The impedance properties of rGO-ICE were characterized by equivalent circuit modeling. After an electrochemical deposition of rGO on ICE, the electrode was modified with self-assembled monolayers and insulin antibodies in order to achieve insulin binding reactions. The impedance spectra and capacitances were measured with respect to the concentrations of insulin and the capacitance change (ΔC) was analyzed to quantify insulin concentration. The antibody immobilized electrode showed an increment of ΔC according to the insulin concentration in human serum ranging from 1 ng/mL to 10 µg/mL. The proposed sensor is feasible for label-free and real-time measuring of the biomarker and for point-of-care diagnosis.

Glucose sensor based on redox-cycling between selectively modified and unmodified combs of carbon interdigitated array nanoelectrodes

We present a novel electrochemical glucose sensor employing an interdigitated array (IDA) of 1:1 aspect ratio carbon nanoelectrodes for the electrochemical-enzymatic redox cycling of redox species (ferricyanide/ferrocyanide) between glucose oxidase (GOx) and the two comb-shaped nanoelectrodes of the IDA. The carbon nanoelectrodes were fabricated using a simple, cost-effective, reproducible microfabrication technology known as the carbon-microelectromechanical-systems (C-MEMS) process. One comb (comb 1) of the IDA was selectively modified with GOx via the electrochemical reduction of an aryl diazonium salt, while the other comb (comb 2) remained unmodified; this facilitates electrochemically more active surface of comb 2, resulting in sensitive glucose detection. Ferricyanide is reduced to ferrocyanide by the GOx in the presence of glucose, and ferrocyanide diffuses to both combs of the IDA where it is oxidized. The limited electrochemical current collection at the surface-modified comb 1 is counterbalanced by the efficient redox cycling between the enzyme sites at comb 1 and the bare carbon surface of comb 2. Reducing the electrode-to-electrode gap between the two combs (gap = 1.9 μm) increases the diffusion flux of redox species at comb 2 hence, enhanced the sensitivity and limit of detection of the glucose sensor by ∼2.3 and ∼295 times, respectively at comb 2 compared to comb 1. The developed IDA-based glucose sensor demonstrated good amperometric response to glucose, affording two linear ranges from 0.001 to 1 mM and from 1 to 10 mM, with limits of detection of 0.4 and 61 μM and sensitivities of 823.2 and 70.0 μA mM(-1) cm(-2), respectively.

Droplet array on local redox cycling-based electrochemical (LRC-EC) chip device

We have previously reported a local redox cycling-based electrochemical (LRC-EC) system for the incorporation of many electrochemical sensors into a small chip device. In the present study, a new type of LRC-EC chip device was fabricated for the detection of a droplet array. To detect electrochemically redox compounds in droplets, Pt pseudo-reference/counter electrodes were incorporated into the individual sensors of the LRC-EC chip device. Cyclic voltammetry for the LRC-EC chip device with internal Pt pseudo-reference electrodes indicated well-defined voltammograms based on redox cycling for the individual sensor points. The device was successfully applied to the addressable detection of alkaline phosphatase (ALP) activity of HeLa cells in single droplets on the sensor points. Therefore, the LRC-EC chip device is considered to be a useful device for the bioanalysis of droplet systems.