Recent advancements in physical and chemical MEMS sensors

Microelectromechanical systems (MEMSs) are microdevices fabricated using semiconductor-fabrication technology, especially those with moving components. This technology has become more widely used in daily life, e.g., in mobile phones, printers, and cars. In this review, MEMS sensors are largely classified as physical or chemical ones. Physical sensors include pressure, inertial force, acoustic, flow, temperature, optical, and magnetic ones. Chemical sensors include gas, odorant, ion, and biological ones. The fundamental principle of sensing is reading out either the movement or electrical-property change of microstructures caused by external stimuli. Here, sensing mechanisms of the sensors are explained using diagrams with equivalent circuits to show the similarity. Examples of multiple parameter measurement with single sensors (e.g. quantum sensors or resonant pressure and temperature sensors) and parallel sensor integration are also introduced.

10 μm thick ultrathin glass sheet to realize a highly sensitive cantilever for precise cell stiffness measurement

The micro-cantilever-based sensor platform has become a promising technique in the sensing area for physical, chemical and biological detection due to its portability, small size, label-free characteristics and good compatibility with "lab-on-a-chip" devices. However, traditional micro-cantilever methods are limited by their complicated fabrication, manipulation and detection, and low sensitivity. In this research, we proposed a 10 μm thick ultrathin, highly sensitive, and flexible glass cantilever integrated with a strain gauge sensor and presented its application for the measurement of single-cell mechanical properties. Compared to conventional methods, the proposed ultrathin glass sheet (UTGS)-based cantilever is easier to fabricate, has better physical and chemical properties, and shows a high linear relationship between resistance change and applied small force or displacement. The sensitivity of the cantilever is 15 μN μm-1 and the minimum detectable displacement at the current development stage is 500 nm, which is sufficient for cell stiffness measurement. The cantilever also possesses excellent optical transparency that supports real-time observation during measurement. We first calibrated the cantilever by measuring the Young's modulus of PDMS with known specific stiffness, and then we demonstrated the measurement of Xenopus oocytes and fertilized eggs in different statuses. By further optimizing the UTGS-based cantilever, we can extend its applicability to various measurements of different cells.

Chemical Analysis for Alkali Ion-exchanged Glass Using Atom Probe Tomography

The developing flexible ultrathin glass for use in foldable displays has attracted widespread attention as an alternative to rigid electronic smartphones. However, the detailed compositional effects of chemically strengthened glass are not well understood. Moreover, the spatially resolved chemistry and depth of the compression layer of tempered glass are far from clear. In this study, commonly used X-ray spectroscopy techniques and atom probe tomography (APT) were used comparatively to investigate the distribution of constituent elements in two representative smartphone glass samples: non- and chemically tempered. APT has enabled sub-nanoscale analyses of alkali metals (Li, Na, K, and Ca) and this demonstrates that APT can be considered as an alternative technique for imaging the chemical distribution in glass for mobile applications.

Bio-actuated microvalve in microfluidics using sensing and actuating function of Mimosa pudica

Bio-actuators and sensors are increasingly employed in microscale devices for numerous applications. Unlike other artificial devices actuated by living cells or tissues, here we introduce a microvalve system actuated by the stimuli-responsive action plant, Mimosa pudica (sleepy plant). This system realizes the control of the valve to open and close by dropping and recovering responses of Mimosa pudica branch upon external physical stimulations. The results showed that one matured single uncut Mimosa pudica branch produced average force of 15.82 ± 0.7 mN. This force was sufficient for actuating and keeping the valve open for 8.46 ± 1.33 min in a stimulation-recovering cycle of 30 min. Additionally, two separately cut Mimosa pudica branches were able to keep the valve open for 2.28 ± 0.63 min in a stimulating-recovering cycle of 20min. The pressure resistance and the response time of the valve were 4.2 kPa and 1.4 s, respectively. This demonstration of plant-microfluidics integration encourages exploiting more applications of microfluidic platforms that involve plant science and plant energy harvesting.

Development of Microdevices Combining Machine and Life Systems

A number of recent studies have exploited the sizes and functional properties of microdevices and cellular mechanical components to construct bio-microdevices. As the scale of microdevices can accommodate different cell sizes and processing capabilities, a number of efficient bioreactors and bioassay systems using cellular functions have been produced. To date, the main focus of these devices has been the analysis of cellular chemical functions. On the other hand, our concept is to use cells as components of devices for fluidic control. To date, various devices have been developed that exploit cellular mechanical functions. The working principle of these devices is novel because they only use chemical energy inputs. In this letter, the recent progress of this study and its characteristics are reviewed.

Hardware Methods for Onboard Control of Fluidically Actuated Soft Robots

Soft robots provide significant advantages over their rigid counterparts. These compliant, dexterous devices can navigate delicate environments with ease without damage to themselves or their surroundings. With many degrees of freedom, a single soft robotic actuator can achieve configurations that would be very challenging to obtain when using a rigid linkage. Because of these qualities, soft robots are well suited for human interaction. While there are many types of soft robot actuation, the most common type is fluidic actuation, where a pressurized fluid is used to inflate the device, causing bending or some other deformation. This affords advantages with regards to size, ease of manufacturing, and power delivery, but can pose issues when it comes to controlling the robot. Any device capable of complex tasks such as navigation requires multiple actuators working together. Traditionally, these have each required their own mechanism outside of the robot to control the pressure within. Beyond the limitations on autonomy that such a benchtop controller induces, the tether of tubing connecting the robot to its controller can increase stiffness, reduce reaction speed, and hinder miniaturization. Recently, a variety of techniques have been used to integrate control hardware into soft fluidic robots. These methods are varied and draw from disciplines including microfluidics, digital logic, and material science. In this review paper, we discuss the state of the art of onboard control hardware for soft fluidic robots with an emphasis on novel valve designs, including an overview of the prevailing techniques, how they differ, and how they compare to each other. We also define metrics to guide our comparison and discussion. Since the uses for soft robots can be so varied, the control system for one robot may very likely be inappropriate for use in another. We therefore wish to give an appreciation for the breadth of options available to soft roboticists today.

A simple and reversible glass-glass bonding method to construct a microfluidic device and its application for cell recovery

Compared with polymer microfluidic devices, glass microfluidic devices have advantages for diverse lab-on-a-chip applications due to their rigidity, optical transparency, thermal stability, and chemical/biological inertness. However, the bonding process to construct glass microfluidic devices usually involves treatment(s) like high temperature over 400 °C, oxygen plasma or piranha solution. Such processes require special skill, apparatus or harsh chemicals, and destroy molecules or cells in microchannels. Here, we present a simple method for glass-glass bonding to easily form microchannels. This method consists of two steps: placing water droplets on a glass substrate cleaned by neutral detergent, followed by fixing a cover glass plate on the glass substrate by binding clips for a few hours at room temperature. Surface analyses showed that the glass surface cleaned by neutral detergent had a higher ratio of SiOH over SiO than glass surfaces prepared by other cleaning steps. Thus, the suggested method could achieve stronger glass-glass bonding via dehydration condensation due to the higher density of SiOH. The pressure endurance reached over 600 kPa within 6 h of bonding, which is sufficient for practical microfluidic applications. Moreover, by exploiting the reversibility of this bonding method, cell recoveries after cultivating cells in a microchannel were demonstrated. This new bonding method can significantly improve both the productivity and the usability of glass microfluidic devices and extend the possibility of glass microfluidic applications in future.

Movement tracing and analysis of benthic sting ray (Dasyatis akajei) and electric ray (Narke japonica) toward seabed exploration

Creation of a seabed map is a significant task for various activities including safe navigation of vessels, commercial fishing and securing sea-mined resources. Conventionally, search machines including autonomous underwater vehicles or sonar systems have been used for this purpose. Here, we propose a completely different approach to improve the seabed map by using benthic (sting and electric) rays as agents which may explore the seabed by their autonomous behavior without precise control and possibly add extra information such as biota. For the first step to realize this concept, the detail behavior of the benthic rays must be analyzed. In this study, we used a system with a large water tank (10 m × 5 m × 6 m height) to measure the movement patterns of the benthic rays. We confirmed that it was feasible to optically trace the 2D and 3D movement of a sting and an electric ray and that the speed of the rays indicated whether they were skimming slowly over the bottom surface or swimming. Then, we investigated feasibility for measuring the sea bottom features using two electric rays equipped with small pingers (acoustic transmitters) and receivers on a boat. We confirmed tracing of the movements of the rays over the sea bottom for more than 90 min at 1 s time resolution. Since we can know whether rays are skimming slowly over the bottom surface or swimming in water from the speed, this would be applicable to mapping the sea bottom depth. This is the first step to investigate the feasibility of mapping the seabed using a benthic creature.

Area cooling enables thermal positioning and manipulation of single cells

Contactless particle manipulation based on a thermal field has shown great potential for biological, medical, and materials science applications. However, thermal diffusion from a high-temperature area causes thermal damage to bio-samples. Besides, the permanent bonding of a sample chamber onto microheater substrates requires that the thermal field devices be non-disposable. These limitations impede use of the thermal manipulation approach. Here, a novel manipulation platform is proposed that combines microheaters and an area cooling system to produce enough force to steer sedimentary particles or cells and to limit the thermal diffusion. It uses the one-time fabricated motherboard and an exchangeable sample chamber that provides disposable use. Sedimentary objects can be steered to the bottom center of the thermal field by combined thermal convection and thermophoresis. Single particle or cell manipulation is realized by applying multiple microheaters in the platform. Results of a cell viability test confirmed the method's compatibility in biology fields. With its advantages of biocompatibility for live cells, operability for different sizes of particles and flexibility of platform fabrication, this novel manipulation platform has a high potential to become a powerful tool for biology research.

Rapid and easy-to-use ES cell manipulation device with a small groove near culturing wells

Objective

Production of genetically modified mice including Knock-out (KO) or Knock-in (KI) mice is necessary for organism-level phenotype analysis. Embryonic stem cell (ESC)-based technologies can produce many genetically modified mice with less time without crossing. However, a complicated manual operation is required to increase the number of ESC colonies. Here, the objective of this study was to design and demonstrate a new device to easily find colonies and carry them to microwells.

Results

We developed a polydimethylsiloxane-based device for easy manipulation and isolation of ESC colonies. By introducing ESC colonies into the groove placed near culturing microwells, users can easily find, pick up and carry ESC colonies to microwells. By hydrophilic treatment using bovine serum albumin, 2-μL droplets including colonies reached the microwell bottom. Operation time using this device was shortened for both beginners (2.3-fold) and experts (1.5-fold) compared to the conventional colony picking operation. Isolated ESC colonies were confirmed to have maintained pluripotency. This device is expected to promote research by shortening the isolation procedure for ESC colonies or other large cells (e.g. eggs or embryos) and shortening training time for beginners as a simple sorter.

Pneumatically Actuated Thin Glass Microlens for On-Chip Multi-Magnification Observations

This paper presents a self-contained micro-optical system that is magnification-controlled by adjusting the positions of the microlens in the device via pneumatic air pressure. Unlike conventional dynamic microlenses made from a liquid or polydimethylsiloxane (PDMS) that change their shapes via external actuation, this system combines a fixed-curvature glass microlens, an inflatable PDMS layer, and the external pneumatic air pressure supply as an actuator. This device showed several advantages, including stable inflation, firm structure, and light weight; it achieved a larger displacement using the glass microlens structure than has been reported before. This fixed-curvature microlens was made from 120 µm-thick flat thin glass slides, and the system magnification was manipulated by the deflection of a 100 µm-thick PDMS layer to alter the distance from the microlens to the microfluidic channel. The system magnification power was proportional to the air pressure applied to the device, and with a 2.5 mbar air pressure supply, a 2.2X magnification was achieved. This optical system is ideal for combining with high resolving power microscopy for various short working distance observation tasks, and it is especially beneficial for various chip-based analyses.

Polymer-Based MEMS Electromagnetic Actuator for Biomedical Application: A Review

In this study, we present a comprehensive review of polymer-based microelectromechanical systems (MEMS) electromagnetic (EM) actuators and their implementation in the biomedical engineering field. The purpose of this review is to provide a comprehensive summary on the latest development of electromagnetically driven microactuators for biomedical application that is focused on the movable structure development made of polymers. The discussion does not only focus on the polymeric material part itself, but also covers the basic mechanism of the mechanical actuation, the state of the art of the membrane development and its application. In this review, a clear description about the scheme used to drive the micro-actuators, the concept of mechanical deformation of the movable magnetic membrane and its interaction with actuator system are described in detail. Some comparisons are made to scrutinize the advantages and disadvantages of electromagnetic MEMS actuator performance. The previous studies and explanations on the technology used to fabricate the polymer-based membrane component of the electromagnetically driven microactuators system are presented. The study on the materials and the synthesis method implemented during the fabrication process for the development of the actuators are also briefly described in this review. Furthermore, potential applications of polymer-based MEMS EM actuators in the biomedical field are also described. It is concluded that much progress has been made in the material development of the actuator. The technology trend has moved from the use of bulk magnetic material to using magnetic polymer composites. The future benefits of these compact flexible material employments will offer a wide range of potential implementation of polymer composites in wearable and portable biomedical device applications.

Flow analysis on microcasting with degassed polydimethylsiloxane micro-channels for cell patterning with cross-linked albumin

Patterned cell culturing is one of the most useful techniques for understanding the interaction between geometric conditions surrounding cells and their behaviors. The authors previously proposed a simple method for cell patterning with an agarose gel microstructure fabricated by microcasting with a degassed polydimethylsiloxane (PDMS) mold. Although the vacuum pressure produced from the degassed PDMS can drive a highly viscous agarose solution, the influence of solution viscosity on the casting process is unknown. This study investigated the influences of micro-channel dimensions or solution viscosity on the flow of the solution in a micro-channel of a PDMS mold by both experiments and numerical simulation. It was found experimentally that the degassed PDMS mold was able to drive a solution with a viscosity under 575 mPa·s. A simulation model was developed which can well estimate the flow rate in various dimensions of micro-channels. Cross-linked albumin has low viscosity (1 mPa·s) in aqueous solution and can undergo a one-way dehydration process from solution to solid that produces cellular repellency after dehydration. A microstructure of cross-linked albumin was fabricated on a cell culture dish by the microcasting method. After cells were seeded and cultivated on the cell culture dish with the microstructure for 7 days, the cellular pattern of mouse skeletal myoblast cell line C2C12 was observed. The microcasting with cross-linked albumin solution enables preparation of patterned cell culture systems more quickly in comparison with the previous agarose gel casting, which requires a gelation process before the dehydration process.

A valve powered by earthworm muscle with both electrical and 100% chemical control

Development of bio-microactuators combining microdevices and cellular mechanical functions has been an active research field owing to their desirable properties including high mechanical integrity and biocompatibility. Although various types of devices were reported, the use of as-is natural muscle tissue should be more effective. An earthworm muscle-driven valve has been created. Long-time (more than 2 min) and repeatable displacement was observed by chemical (acetylcholine) stimulation. The generated force of the muscle (1 cm × 3 cm) was 1.57 mN on average for 2 min by the acetylcholine solution (100 mM) stimulation. We demonstrated an on-chip valve that stopped the constant pressure flow by the muscle contraction. For electrical control, short pulse stimulation was used for the continuous and repeatable muscle contraction. The response time was 3 s, and the pressure resistance was 3.0 kPa. Chemical stimulation was then used for continuous muscle contraction. The response time was 42 s, and the pressure resistance was 1.5 kPa. The ON (closed) state was kept for at least 2 min. An on-chip valve was demonstrated that stopped the constant pressure flow by the muscle contraction. This is the first demonstration of the muscle-based valve that is 100% chemically actuated and controlled.

Enhancement in acoustic focusing of micro and nanoparticles by thinning a microfluidic device

The manipulation of micro/nanoparticles has become increasingly important in biological and industrial fields. As a non-contact method for particle manipulation, acoustic focusing has been applied in sorting, enrichment and analysis of particles with microfluidic devices. Although the frequency and amplitude of acoustic waves and the dimensions of microchannels have been recognized as important parameters for acoustic focusing, the thickness of microfluidic devices has not been considered so far. Here, we report that thin glass microfluidic devices enhance acoustic focusing of micro/nanoparticles. It was found that the thickness of a microfluidic device strongly influences its ability to focus particles via acoustic radiation, because the energy propagation of acoustic waves is affected by the total mass of the device. Acoustic focusing of submicrometre polystyrene beads and Escherichia coli as well as enrichment of polystyrene beads were achieved in glass microfluidic devices as thin as 0.4 mm. Modifying the thickness of a microfluidic device can thus serve as a critical parameter for acoustic focusing when conventional parameters to achieve this effect are kept unchanged. Thus, our findings enable new approaches to the design of novel microfluidic devices.

An all-glass 12 μm ultra-thin and flexible micro-fluidic chip fabricated by femtosecond laser processing

This study investigated and established a method, using femtosecond laser processing, to fabricate a 100%-glass-based 12 μm ultra-thin and flexible micro-fluidic chip. First we investigated the suitable pulse energy of the laser to fabricate ultra-thin glass sheets and then we fabricated a prototype glass micro-fluidic chip. Two 1 mm-in-diameter orifices for facilitating alignment in the bonding step and one channel with a width of 20 μm and a length of 25 mm were fabricated in a 4 μm thickness ultra-thin glass sheet using the femtosecond laser; this forms layer 2 in the completed device. Next, the glass sheet with the channel was sandwiched between another glass sheet having an inlet hole and an outlet hole (layer 1) and a base glass sheet (layer 3); the three sheets were bonded to each other, resulting in a flexible, 100%-glass micro-fluidic chip with a thickness of approximately 12 μm and a weight of 3.6 mg. The basic function of the glass micro-fluidic chip was confirmed by flowing 1 and 2 μm in-diameter bead particles through the channel. The fabrication method clearly scales down the thickness limitation of flexible glass devices and offers a possible element technology for fabricating ultra-thin glass devices that can be applied to convection-enhanced delivery, implantable medical devices, wearable devices, and high-resolution imaging of small biological objects such as bacteria and proteins in the channel.

Large-Scale Integration of All-Glass Valves on a Microfluidic Device

In this study, we developed a method for fabricating a microfluidic device with integrated large-scale all-glass valves and constructed an actuator system to control each of the valves on the device. Such a microfluidic device has advantages that allow its use in various fields, including physical, chemical, and biochemical analyses and syntheses. However, it is inefficient and difficult to integrate the large-scale all-glass valves in a microfluidic device using conventional glass fabrication methods, especially for the through-hole fabrication step. Therefore, we have developed a fabrication method for the large-scale integration of all-glass valves in a microfluidic device that contains 110 individually controllable diaphragm valve units on a 30 mm × 70 mm glass slide. This prototype device was fabricated by first sandwiching a 0.4-mm-thick glass slide that contained 110 1.5-mm-diameter shallow chambers, each with two 50-μm-diameter through-holes, between an ultra-thin glass sheet (4 μm thick) and another 0.7-mm-thick glass slide that contained etched channels. After the fusion bonding of these three layers, the large-scale microfluidic device was obtained with integrated all-glass valves consisting of 110 individual diaphragm valve units. We demonstrated its use as a pump capable of generating a flow rate of approximately 0.06–5.33 μL/min. The maximum frequency of flow switching was approximately 12 Hz.

Simple bilayer on-chip valves using reversible sealability of PDMS

Simple bilayer on-chip valves exploiting the reversible sealability of PDMS were realized by patterning the non-covalent area between two parallel microchannels.