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Shi M, Gao S, Shang L, Ma L, Wang W, Liu G, Li Z. Lab-on-Fiber Sensors with Ag/Au Nanocap Arrays Based on the Two Deposits of Polystyrene Nanospheres. Polymers (Basel) 2023; 15:4107. [PMID: 37896352 PMCID: PMC10610900 DOI: 10.3390/polym15204107] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/18/2023] [Revised: 10/12/2023] [Accepted: 10/12/2023] [Indexed: 10/29/2023] Open
Abstract
Surface-enhanced Raman spectroscopy (SERS) can boost the pristine Raman signal significantly which could be exploited for producing innovative sensing devices with advanced properties. However, the inherent complexity of SERS systems restricts their further applications in rapid detection, especially in situ detection in narrow areas. Here, we construct an efficient and flexible SERS-based Lab-on-Fiber (LOF) sensor by integrating Ag/Au nanocap arrays obtained by Ag/Au coating polystyrene nanospheres on the optical fiber face. We obtain rich "hot spots" at the nanogaps between neighboring nanocaps, and further achieve SERS performance with the assistance of laser-induced thermophoresis on the metal film that can achieve efficiency aggregation of detected molecules. We achieve a high Raman enhancement with a low detection limitation of 10-7 mol/L for the most efficient samples based on the above sensor. This sensor also exhibits good repeatability and stability under multiple detections, revealing the potential application for in situ detection based on the reflexivity of the optical fiber.
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Affiliation(s)
- Meng Shi
- School of Physical Science and Intelligent Engineering, Jining University, Qufu 273155, China
- Shandong Provincial Key Laboratory of Laser Polarization Technology, Qufu Normal University, Qufu 273165, China
| | - Shifang Gao
- Shandong Provincial Key Laboratory of Laser Polarization Technology, Qufu Normal University, Qufu 273165, China
| | - Liang Shang
- Shandong Provincial Key Laboratory of Laser Polarization Technology, Qufu Normal University, Qufu 273165, China
| | - Linan Ma
- Shandong Provincial Key Laboratory of Laser Polarization Technology, Qufu Normal University, Qufu 273165, China
| | - Wei Wang
- School of Physical Science and Intelligent Engineering, Jining University, Qufu 273155, China
| | - Guangqiang Liu
- Shandong Provincial Key Laboratory of Laser Polarization Technology, Qufu Normal University, Qufu 273165, China
| | - Zongbao Li
- Ministry of Education Key Laboratory of Textile Fiber Products, School of Materials Science and Engineering, Wuhan Textile University, Wuhan 430200, China
- School of Materials and Chemical Engineering, Tongren University, Tongren 554300, China
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2
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Zhang D, Yang S, Zhang XY, Ma N, Han B, Zhao W, Chi S, Liu Y, Yang J, Chen L. Damping resonance and refractive index effect on the layer-by-layer sputtering of Ag and Al 2O 3 on the polystyrene template. SPECTROCHIMICA ACTA. PART A, MOLECULAR AND BIOMOLECULAR SPECTROSCOPY 2020; 238:118430. [PMID: 32438291 DOI: 10.1016/j.saa.2020.118430] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/03/2020] [Revised: 04/22/2020] [Accepted: 04/27/2020] [Indexed: 06/11/2023]
Abstract
In this study, an ordered metal oxide-metal composite system was designed. By changing the thickness of film of Ag/Al2O3 nanoparticles (NPs), the red and blue shifts of local surface plasma resonance (LSPR) were realized in the proposed system and discussed by damping resonance theory and Mie's scattering theory to demonstrating the relationship between wavelength (λ) and particle diameter (D). With the increasing of sputtering time of Ag, the SPR of Ag was red shifted under the influence of damped vibration, obtaining that square of wavelength (λ2) is proportional to D. The surface plasma resonance (SPR) of Ag/Al2O3 showed an obvious blue shift, and then red shift suddenly, which is affected by the competition between damping resonance and refractive index. When the blue shift occurs, the change of wavelength (∆λ) is exponentially related to the diameter (D). The modulation of LSPR of the proposed composite nano-metal materials will have a potential application in SPR sensor and surface enhanced Raman scattering (SERS).
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Affiliation(s)
- Daxin Zhang
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, PR China; University of Chinese Academy of Sciences, Beijing 100049, PR China
| | - Shuo Yang
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, PR China; University of Chinese Academy of Sciences, Beijing 100049, PR China
| | - Xin-Yuan Zhang
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, PR China; University of Chinese Academy of Sciences, Beijing 100049, PR China
| | - Ning Ma
- Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Changchun 130103, PR China
| | - Bingbing Han
- Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Changchun 130103, PR China
| | - Wenshi Zhao
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, PR China; University of Chinese Academy of Sciences, Beijing 100049, PR China
| | - Shaohua Chi
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, PR China; University of Chinese Academy of Sciences, Beijing 100049, PR China
| | - Yang Liu
- Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Changchun 130103, PR China
| | - Jinghai Yang
- Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Changchun 130103, PR China.
| | - Lei Chen
- Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Changchun 130103, PR China.
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3
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Manipulation and Applications of Hotspots in Nanostructured Surfaces and Thin Films. NANOMATERIALS 2020; 10:nano10091667. [PMID: 32858806 PMCID: PMC7557400 DOI: 10.3390/nano10091667] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/19/2020] [Revised: 08/04/2020] [Accepted: 08/06/2020] [Indexed: 12/11/2022]
Abstract
The synthesis of nanostructured surfaces and thin films has potential applications in the field of plasmonics, including plasmon sensors, plasmon-enhanced molecular spectroscopy (PEMS), plasmon-mediated chemical reactions (PMCRs), and so on. In this article, we review various nanostructured surfaces and thin films obtained by the combination of nanosphere lithography (NSL) and physical vapor deposition. Plasmonic nanostructured surfaces and thin films can be fabricated by controlling the deposition process, etching time, transfer, fabrication routes, and their combination steps, which manipulate the formation, distribution, and evolution of hotspots. Based on these hotspots, PEMS and PMCRs can be achieved. This is especially significant for the early diagnosis of hepatocellular carcinoma (HCC) based on surface-enhanced Raman scattering (SERS) and controlling the growth locations of Ag nanoparticles (AgNPs) in nanostructured surfaces and thin films, which is expected to enhance the optical and sensing performance.
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4
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Ma N, Zhang XY, Fan W, Guo S, Zhang Y, Liu Y, Chen L, Jung YM. SERS study of Ag/FeS/4-MBA interface based on the SPR effect. SPECTROCHIMICA ACTA. PART A, MOLECULAR AND BIOMOLECULAR SPECTROSCOPY 2019; 219:147-153. [PMID: 31035124 DOI: 10.1016/j.saa.2019.04.005] [Citation(s) in RCA: 12] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/12/2019] [Revised: 04/01/2019] [Accepted: 04/04/2019] [Indexed: 06/09/2023]
Abstract
In this work, an ordered metal-semiconductor molecular system was introduced, and 4-mercaptobenzoic acid (4-MBA) was employed to study the charge transfer (CT) at the metal-semiconductor interface based on surface-enhanced Raman scattering (SERS) spectra. The thickness of the sputtered FeS was controlled so that the surface plasmon resonance (SPR) of Ag underwent a displacement change, and the contribution of the SPR to the CT was studied through surface plasmon (SP) absorption. Furthermore, SERS spectra obtained at different excitation wavelengths were used to calculate the degree of CT in the layer-by-layer sputtering system. When Ag was irradiated with incident light, the strong SPR of Ag was excited, generating an increased electromagnetic field (EM). This amplified EM generated hot electrons at the interface between the FeS and Ag, and then the hot electrons were rearranged. Therefore, we established a simple and effective method for studying the impact of SPR on interfacial CT and analyzed the SERS spectra in accordance with Lombardi's basic theory and the physical effects associated with SPR. This theory is in good agreement with the experimental results. On this basis, we also proposed a mechanism by which SPR impacts the CT, which is beneficial for studying interfacial CT and obtaining an in-depth understanding of the CT mechanism in SERS. This work also enables the expansion of the applications of the SERS technique in the field of nanomaterials.
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Affiliation(s)
- Ning Ma
- Key Laboratory of Preparation and Applications of Environmental Friendly Materials, Ministry of Education, College of Chemistry, Jilin Normal University, Changchun 130103, PR China; Key Laboratory of Functional Materials Physics and Chemistry, Ministry of Education, College of Physics, Jilin Normal University, Changchun 130103, PR China
| | - Xin-Yuan Zhang
- Key Laboratory of Functional Materials Physics and Chemistry, Ministry of Education, College of Physics, Jilin Normal University, Changchun 130103, PR China
| | - Wenyue Fan
- Key Laboratory of Preparation and Applications of Environmental Friendly Materials, Ministry of Education, College of Chemistry, Jilin Normal University, Changchun 130103, PR China
| | - Shuang Guo
- Key Laboratory of Functional Materials Physics and Chemistry, Ministry of Education, College of Physics, Jilin Normal University, Changchun 130103, PR China
| | - Yongjun Zhang
- Key Laboratory of Functional Materials Physics and Chemistry, Ministry of Education, College of Physics, Jilin Normal University, Changchun 130103, PR China
| | - Yang Liu
- Key Laboratory of Functional Materials Physics and Chemistry, Ministry of Education, College of Physics, Jilin Normal University, Changchun 130103, PR China
| | - Lei Chen
- Key Laboratory of Preparation and Applications of Environmental Friendly Materials, Ministry of Education, College of Chemistry, Jilin Normal University, Changchun 130103, PR China; Department of Chemistry, Institute for Molecular Science and Fusion Technology, Kangwon National University, Chunchon 24341, Republic of Korea.
| | - Young Mee Jung
- Department of Chemistry, Institute for Molecular Science and Fusion Technology, Kangwon National University, Chunchon 24341, Republic of Korea.
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Ma N, Zhang XY, Fan W, Han B, Jin S, Park Y, Chen L, Zhang Y, Liu Y, Yang J, Jung YM. Controllable Preparation of SERS-Active Ag-FeS Substrates by a Cosputtering Technique. Molecules 2019; 24:molecules24030551. [PMID: 30717362 PMCID: PMC6384828 DOI: 10.3390/molecules24030551] [Citation(s) in RCA: 11] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/10/2018] [Revised: 01/26/2019] [Accepted: 01/29/2019] [Indexed: 02/04/2023] Open
Abstract
In this work, we introduced an ordered metal-semiconductor molecular system and studied the resulting surface-enhanced Raman scattering (SERS) effect. Ag-FeS nanocaps with sputtered films of different thicknesses were obtained by changing the sputtering power of FeS while the sputtering power of Ag and the deposition time remained constant. When metallic Ag and the semiconductor FeS are cosputtered, the Ag film separates into Ag islands partially covered by FeS and strong coupling occurs among the Ag islands isolated by FeS, which contributes to the SERS phenomenon. We also investigated the SERS enhancement mechanism by decorating the nanocap arrays produced with different FeS sputtering powers with methylene blue (MB) probe molecules. As the FeS sputtering power increased, the SERS signal first increased and then decreased. The experimental results show that the SERS enhancement can mainly be attributed to the surface plasmon resonance (SPR) of the Ag nanoparticles. The coupling between FeS and Ag and the SPR displacement of Ag vary with different sputtering powers, resulting in changes in the intensity of the SERS spectra. These results demonstrate the high sensitivity of SERS substrates consisting of Ag-FeS nanocap arrays.
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Affiliation(s)
- Ning Ma
- Key Laboratory of Preparation and Applications of Environmental Friendly Materials, Ministry of Education, College of Chemistry, Jilin Normal University, Changchun 130103, China.
| | - Xin-Yuan Zhang
- Key Laboratory of Functional Materials Physics and Chemistry, Ministry of Education, College of Physics, Jilin Normal University, Changchun 130103, China.
| | - Wenyue Fan
- Key Laboratory of Preparation and Applications of Environmental Friendly Materials, Ministry of Education, College of Chemistry, Jilin Normal University, Changchun 130103, China.
| | - Bingbing Han
- Key Laboratory of Preparation and Applications of Environmental Friendly Materials, Ministry of Education, College of Chemistry, Jilin Normal University, Changchun 130103, China.
| | - Sila Jin
- Department of Chemistry, Institute for Molecular Science and Fusion Technology, Kangwon National University, Chunchon 24341, Korea.
| | - Yeonju Park
- Department of Chemistry, Institute for Molecular Science and Fusion Technology, Kangwon National University, Chunchon 24341, Korea.
| | - Lei Chen
- Key Laboratory of Preparation and Applications of Environmental Friendly Materials, Ministry of Education, College of Chemistry, Jilin Normal University, Changchun 130103, China.
| | - Yongjun Zhang
- Key Laboratory of Functional Materials Physics and Chemistry, Ministry of Education, College of Physics, Jilin Normal University, Changchun 130103, China.
| | - Yang Liu
- Key Laboratory of Functional Materials Physics and Chemistry, Ministry of Education, College of Physics, Jilin Normal University, Changchun 130103, China.
| | - Jinghai Yang
- Key Laboratory of Functional Materials Physics and Chemistry, Ministry of Education, College of Physics, Jilin Normal University, Changchun 130103, China.
| | - Young Mee Jung
- Department of Chemistry, Institute for Molecular Science and Fusion Technology, Kangwon National University, Chunchon 24341, Korea.
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Zhang XY, Chen L, Wang Y, Zhang Y, Yang J, Choi HC, Jung YM. Design of tunable ultraviolet (UV) absorbance by controlling the AgAl co-sputtering deposition. SPECTROCHIMICA ACTA. PART A, MOLECULAR AND BIOMOLECULAR SPECTROSCOPY 2018; 197:37-42. [PMID: 29277479 DOI: 10.1016/j.saa.2017.12.056] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/03/2017] [Revised: 12/14/2017] [Accepted: 12/19/2017] [Indexed: 06/07/2023]
Abstract
Changing the structure and composition of a material can alter its properties; hence, the controlled fabrication of metal nanostructures plays a key role in a wide range of applications. In this study, the structure of AgAl ordered arrays fabricated by co-sputtering deposition onto a monolayer colloidal crystal significantly increased its ultraviolet (UV) absorbance owing to a tunable localized surface plasmon resonance (LSPR) effect. By increasing the spacing between two nanospheres and the content of aluminum, absorbance in the UV region could be changed from UVA (320-400nm) to UVC (200-275nm), and the LSPR peak in the visible region gradually shifted to the UV region. This provides the potential for surface-enhanced Raman scattering (SERS) in both the UV and visible regions.
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Affiliation(s)
- Xin-Yuan Zhang
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, PR China; University of Chinese Academy of Sciences, Beijing 100049, PR China
| | - Lei Chen
- Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Changchun 130103, PR China; Department of Chemistry, Institute for Molecular Science and Fusion Technology, Kangwon National University, Chuncheon 24341, Republic of Korea
| | - Yaxin Wang
- Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Changchun 130103, PR China
| | - Yongjun Zhang
- Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Changchun 130103, PR China
| | - Jinghai Yang
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, PR China; University of Chinese Academy of Sciences, Beijing 100049, PR China; Key Laboratory of Functional Materials Physics and Chemistry of the Ministry of Education, Jilin Normal University, Changchun 130103, PR China.
| | - Hyun Chul Choi
- Department of Chemistry, Chonnam National University, Gwangju 61186, Republic of Korea
| | - Young Mee Jung
- Department of Chemistry, Institute for Molecular Science and Fusion Technology, Kangwon National University, Chuncheon 24341, Republic of Korea.
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Sun H, Chen L, Wang Y, Hua Z, Liu Y, Zhang Y, Yang J. Increasing local field by interfacial coupling in nanobowl arrays. RSC Adv 2017. [DOI: 10.1039/c7ra09690a] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/02/2023] Open
Abstract
An increased local field is crucial to create hotspots when applied in detections, which usually means the fabrication of nanostructure arrays with strong electromagnetic couplings.
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Affiliation(s)
- Huanhuan Sun
- Key Laboratory of Functional Materials Physics and Chemistry
- Ministry of Education
- College of Physics
- Jilin Normal University
- Changchun 130103
| | - Lei Chen
- Key Laboratory of Functional Materials Physics and Chemistry
- Ministry of Education
- College of Physics
- Jilin Normal University
- Changchun 130103
| | - Yaxin Wang
- Key Laboratory of Functional Materials Physics and Chemistry
- Ministry of Education
- College of Physics
- Jilin Normal University
- Changchun 130103
| | - Zhong Hua
- Key Laboratory of Functional Materials Physics and Chemistry
- Ministry of Education
- College of Physics
- Jilin Normal University
- Changchun 130103
| | - Yang Liu
- Key Laboratory of Functional Materials Physics and Chemistry
- Ministry of Education
- College of Physics
- Jilin Normal University
- Changchun 130103
| | - Yongjun Zhang
- Key Laboratory of Functional Materials Physics and Chemistry
- Ministry of Education
- College of Physics
- Jilin Normal University
- Changchun 130103
| | - Jinghai Yang
- Key Laboratory of Functional Materials Physics and Chemistry
- Ministry of Education
- College of Physics
- Jilin Normal University
- Changchun 130103
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Li T, Vongehr S, Tang S, Dai Y, Huang X, Meng X. Scalable Synthesis of Ag Networks with Optimized Sub-monolayer Au-Pd Nanoparticle Covering for Highly Enhanced SERS Detection and Catalysis. Sci Rep 2016; 6:37092. [PMID: 27845400 PMCID: PMC5109471 DOI: 10.1038/srep37092] [Citation(s) in RCA: 18] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/28/2016] [Accepted: 10/25/2016] [Indexed: 12/28/2022] Open
Abstract
Highly porous tri-metallic AgxAuyPdz networks with a sub-monolayer bimetallic Au-Pd nanoparticle coating were synthesized via a designed galvanic replacement reaction of Ag nanosponges suspended in mixed solutions of HAuCl4 and K2PdCl4. The resulting networks’ ligaments have a rough surface with bimetallic nanoparticles and nanopores due to removal of Ag. The surface morphology and composition are adjustable by the temperature and mixed solutions’ concentration. Very low combined Au and Pd atomic percentage (1−x) where x is atomic percentage of Ag leads to sub-monolayer nanoparticle coverings allowing a large number of active boundaries, nanopores, and metal-metal interfaces to be accessible. Optimization of the Au/Pd atomic ratio y/z obtains large surface-enhanced Raman scattering detection sensitivity (at y/z = 5.06) and a higher catalytic activity (at y/z = 3.55) toward reduction reactions as benchmarked with 4-nitrophenol than for most bimetallic catalysts. Subsequent optimization of x (at fixed y/z) further increases the catalytic activity to obtain a superior tri-metallic catalyst, which is mainly attributed to the synergy of several aspects including the large porosity, increased surface roughness, accessible interfaces, and hydrogen absorption capacity of nanosized Pd. This work provides a new concept for scalable synthesis and performance optimization of tri-metallic nanostructures.
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Affiliation(s)
- Tianyu Li
- National Laboratory of Solid State Microstructures, Collaborative Innovation Center of Advanced Microstructures, College of Engineering and Applied Sciences, and Institute of Materials Engineering, Nanjing University, Jiangsu, P. R. China
| | - Sascha Vongehr
- National Laboratory of Solid State Microstructures, Collaborative Innovation Center of Advanced Microstructures, College of Engineering and Applied Sciences, and Institute of Materials Engineering, Nanjing University, Jiangsu, P. R. China
| | - Shaochun Tang
- National Laboratory of Solid State Microstructures, Collaborative Innovation Center of Advanced Microstructures, College of Engineering and Applied Sciences, and Institute of Materials Engineering, Nanjing University, Jiangsu, P. R. China
| | - Yuming Dai
- School of Materials Engineering, Nanjing Institute of Technology, Jiangsu, P. R. China
| | - Xiao Huang
- National Laboratory of Solid State Microstructures, Collaborative Innovation Center of Advanced Microstructures, College of Engineering and Applied Sciences, and Institute of Materials Engineering, Nanjing University, Jiangsu, P. R. China
| | - Xiangkang Meng
- National Laboratory of Solid State Microstructures, Collaborative Innovation Center of Advanced Microstructures, College of Engineering and Applied Sciences, and Institute of Materials Engineering, Nanjing University, Jiangsu, P. R. China
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9
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Fu F, Cheng Z, Lu J. Synthesis and use of bimetals and bimetal oxides in contaminants removal from water: a review. RSC Adv 2015. [DOI: 10.1039/c5ra13067k] [Citation(s) in RCA: 45] [Impact Index Per Article: 5.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
This paper gives an overview of the recent advances of the synthesis methods of bimetals and bimetal oxides and applying them in contaminant removal from water.
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Affiliation(s)
- Fenglian Fu
- School of Environmental Science and Engineering
- Guangdong University of Technology
- Guangzhou 510006
- PR China
| | - Zihang Cheng
- School of Environmental Science and Engineering
- Guangdong University of Technology
- Guangzhou 510006
- PR China
| | - Jianwei Lu
- School of Environmental Science and Engineering
- Guangdong University of Technology
- Guangzhou 510006
- PR China
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Ryu Y, Kang G, Lee CW, Kim K. Porous metallic nanocone arrays for high-density SERS hot spots via solvent-assisted nanoimprint lithography of block copolymer. RSC Adv 2015. [DOI: 10.1039/c5ra11787a] [Citation(s) in RCA: 13] [Impact Index Per Article: 1.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/28/2022] Open
Abstract
We present a facile method of fabricating SERS substrate by combining solvent-assisted nanoimprint lithography and selective etching of block copolymer.
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Affiliation(s)
- Yunha Ryu
- School of Mechanical Engineering
- Yonsei University
- Seoul 120-749
- Korea
| | - Gumin Kang
- School of Mechanical Engineering
- Yonsei University
- Seoul 120-749
- Korea
| | | | - Kyoungsik Kim
- School of Mechanical Engineering
- Yonsei University
- Seoul 120-749
- Korea
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