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Jia H, Xu P, Li X. Integrated Resonant Micro/Nano Gravimetric Sensors for Bio/Chemical Detection in Air and Liquid. MICROMACHINES 2021; 12:mi12060645. [PMID: 34073049 PMCID: PMC8227694 DOI: 10.3390/mi12060645] [Citation(s) in RCA: 6] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/07/2021] [Accepted: 05/27/2021] [Indexed: 02/07/2023]
Abstract
Resonant micro/nanoelectromechanical systems (MEMS/NEMS) with on-chip integrated excitation and readout components, exhibit exquisite gravimetric sensitivities which have greatly advanced the bio/chemical sensor technologies in the past two decades. This paper reviews the development of integrated MEMS/NEMS resonators for bio/chemical sensing applications mainly in air and liquid. Different vibrational modes (bending, torsional, in-plane, and extensional modes) have been exploited to enhance the quality (Q) factors and mass sensing performance in viscous media. Such resonant mass sensors have shown great potential in detecting many kinds of trace analytes in gas and liquid phases, such as chemical vapors, volatile organic compounds, pollutant gases, bacteria, biomarkers, and DNA. The integrated MEMS/NEMS mass sensors will continuously push the detection limit of trace bio/chemical molecules and bring a better understanding of gas/nanomaterial interaction and molecular binding mechanisms.
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Tian Y, Liu Y, Wang Y, Xu J, Yu X. A Flexible PI/Si/SiO 2 Piezoresistive Microcantilever for Trace-Level Detection of Aflatoxin B1. SENSORS (BASEL, SWITZERLAND) 2021; 21:1118. [PMID: 33562752 PMCID: PMC7915870 DOI: 10.3390/s21041118] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/14/2021] [Revised: 02/01/2021] [Accepted: 02/03/2021] [Indexed: 01/11/2023]
Abstract
In this paper, a polyimide (PI)/Si/SiO2-based piezoresistive microcantilever biosensor was developed to achieve a trace level detection for aflatoxin B1. To take advantage of both the high piezoresistance coefficient of single-crystal silicon and the small spring constant of PI, the flexible piezoresistive microcantilever was designed using the buried oxide (BOX) layer of a silicon-on-insulator (SOI) wafer as a bottom passivation layer, the topmost single-crystal silicon layer as a piezoresistor layer, and a thin PI film as a top passivation layer. To obtain higher sensitivity and output voltage stability, four identical piezoresistors, two of which were located in the substrate and two integrated in the microcantilevers, were composed of a quarter-bridge configuration wheatstone bridge. The fabricated PI/Si/SiO2 microcantilever showed good mechanical properties with a spring constant of 21.31 nN/μm and a deflection sensitivity of 3.54 × 10-7 nm-1. The microcantilever biosensor also showed a stable voltage output in the Phosphate Buffered Saline (PBS) buffer with a fluctuation less than 1 μV @ 3 V. By functionalizing anti-aflatoxin B1 on the sensing piezoresistive microcantilever with a biotin avidin system (BAS), a linear aflatoxin B1 detection concentration resulting from 1 ng/mL to 100 ng/mL was obtained, and the toxic molecule detection also showed good specificity. The experimental results indicate that the PI/Si/SiO2 flexible piezoresistive microcantilever biosensor has excellent abilities in trace-level and specific detections of aflatoxin B1 and other biomolecules.
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Affiliation(s)
| | | | | | | | - Xiaomei Yu
- National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, China; (Y.T.); (Y.L.); (Y.W.); (J.X.)
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Microcantilever: Dynamical Response for Mass Sensing and Fluid Characterization. SENSORS 2020; 21:s21010115. [PMID: 33375431 PMCID: PMC7795892 DOI: 10.3390/s21010115] [Citation(s) in RCA: 15] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/09/2020] [Revised: 12/20/2020] [Accepted: 12/22/2020] [Indexed: 02/07/2023]
Abstract
A microcantilever is a suspended micro-scale beam structure supported at one end which can bend and/or vibrate when subjected to a load. Microcantilevers are one of the most fundamental miniaturized devices used in microelectromechanical systems and are ubiquitous in sensing, imaging, time reference, and biological/biomedical applications. They are typically built using micro and nanofabrication techniques derived from the microelectronics industry and can involve microelectronics-related materials, polymeric materials, and biological materials. This work presents a comprehensive review of the rich dynamical response of a microcantilever and how it has been used for measuring the mass and rheological properties of Newtonian/non-Newtonian fluids in real time, in ever-decreasing space and time scales, and with unprecedented resolution.
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Point-of-Care Diagnostics: Molecularly Imprinted Polymers and Nanomaterials for Enhanced Biosensor Selectivity and Transduction. EUROBIOTECH JOURNAL 2020. [DOI: 10.2478/ebtj-2020-0023] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 12/18/2022]
Abstract
Abstract
Significant healthcare disparities resulting from personal wealth, circumstances of birth, education level, and more are internationally prevalent. As such, advances in biomedical science overwhelmingly benefit a minority of the global population. Point-of-Care Testing (POCT) can contribute to societal equilibrium by making medical diagnostics affordable, convenient, and fast. Unfortunately, conventional POCT appears stagnant in terms of achieving significant advances. This is attributed to the high cost and instability associated with conventional biorecognition: primarily antibodies, but nucleic acids, cells, enzymes, and aptamers have also been used. Instead, state-of-the-art biosensor researchers are increasingly leveraging molecularly imprinted polymers (MIPs) for their high selectivity, excellent stability, and amenability to a variety of physical and chemical manipulations. Besides the elimination of conventional bioreceptors, the incorporation of nanomaterials has further improved the sensitivity of biosensors. Herein, modern nanobiosensors employing MIPs for selectivity and nanomaterials for improved transduction are systematically reviewed. First, a brief synopsis of fabrication and wide-spread challenges with selectivity demonstration are presented. Afterward, the discussion turns to an analysis of relevant case studies published in the last five years. The analysis is given through two lenses: MIP-based biosensors employing specific nanomaterials and those adopting particular transduction strategies. Finally, conclusions are presented along with a look to the future through recommendations for advancing the field. It is hoped that this work will accelerate successful efforts in the field, orient new researchers, and contribute to equitable health care for all.
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Wang X, Cheng Y, Cai S, Chen J, Xu P, Chen Y, Yu H, Xu T, Zhang S, Li X. Resonant-Cantilever-Detected Kinetic/Thermodynamic Parameters for Aptamer-Ligand Binding on a Liquid-Solid Interface. Anal Chem 2020; 92:11127-11134. [PMID: 32551574 DOI: 10.1021/acs.analchem.0c01142] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/30/2022]
Abstract
Nucleic acid aptamers have been widely used as recognition elements on various biosensing interfaces, but quantitative kinetic/thermodynamic analysis for revealing the aptamer-ligand binding mechanism, which occurs on a liquid-solid interface, has not been realized due to a lack of usable biophysical tools. Herein we apply a resonant microcantilever sensor to continuously record the frequency shift according to the binding-induced mass change on the liquid-solid interface. The frequency-shift curve is used for tracing the reaction process and is fitted with classic equations to calculate a set of kinetic/thermodynamic parameters, such as rate constants (ka = 902.95 M-1 s-1, kd = 0.000141 s-1), equilibrium constants (KD = 1.55 μM), the Gibbs free energy (ΔG° = -32.57 kJ/mol), and the activation energy (Ea = 38.03 kJ/mol) for the immobilized aptamer and free ATP. This quantitative analysis method is label-free, calibration-free, and highly sensitive. The kinetic/thermodynamic parameter detection method provides new resolution to the in-depth understanding of the ligand-aptamer interaction on the liquid-solid interface for biosensing or lab-on-a-chip applications.
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Affiliation(s)
- Xuefeng Wang
- State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China.,University of Chinese Academy of Sciences, Beijing 100049, China
| | - Yarong Cheng
- State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China.,College of Life Sciences, Shanghai Normal University, 100 Guilin Road, Shanghai 200234, China
| | - Shengran Cai
- State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China.,University of Chinese Academy of Sciences, Beijing 100049, China
| | - Jianzhong Chen
- State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China.,University of Chinese Academy of Sciences, Beijing 100049, China
| | - Pengcheng Xu
- State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China.,University of Chinese Academy of Sciences, Beijing 100049, China
| | - Ying Chen
- State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China.,University of Chinese Academy of Sciences, Beijing 100049, China
| | - Haitao Yu
- State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China.,University of Chinese Academy of Sciences, Beijing 100049, China
| | - Tiegang Xu
- State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China.,University of Chinese Academy of Sciences, Beijing 100049, China
| | - Sen Zhang
- College of Life Sciences, Shanghai Normal University, 100 Guilin Road, Shanghai 200234, China
| | - Xinxin Li
- State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China.,University of Chinese Academy of Sciences, Beijing 100049, China
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