Unconventional micro-/nanofabrication technologies for hybrid-scale lab-on-a-chip

Directed Assembly of Nanomaterials for Making Nanoscale Devices and Structures: Mechanisms and Applications

Nanofabrication has been utilized to manufacture one-, two-, and three-dimensional functional nanostructures for applications such as electronics, sensors, and photonic devices. Although conventional silicon-based nanofabrication (top-down approach) has developed into a technique with extremely high precision and integration density, nanofabrication based on directed assembly (bottom-up approach) is attracting more interest recently owing to its low cost and the advantages of additive manufacturing. Directed assembly is a process that utilizes external fields to directly interact with nanoelements (nanoparticles, 2D nanomaterials, nanotubes, nanowires, etc.) and drive the nanoelements to site-selectively assemble in patterned areas on substrates to form functional structures. Directed assembly processes can be divided into four different categories depending on the external fields: electric field-directed assembly, fluidic flow-directed assembly, magnetic field-directed assembly, and optical field-directed assembly. In this review, we summarize recent progress utilizing these four processes and address how these directed assembly processes harness the external fields, the underlying mechanism of how the external fields interact with the nanoelements, and the advantages and drawbacks of utilizing each method. Finally, we discuss applications made using directed assembly and provide a perspective on the future developments and challenges.

Combined Effects of Zeta-potential and Temperature of Nanopores on Diffusioosmotic Ion Transport

Diffusioosmosis (DO) results from ion transport near charged surfaces in the presence of electrolyte gradients and is critical in nanofluidic systems. However, DO has not yet been comprehensively studied because nanofabrication materials have limitations of low throughput and difficult quantification. Herein, we describe a self-assembled particle membrane (SAPM)-integrated microfluidic platform that can modulate the material properties (e.g., zeta-potential) and transport flux of nanopores. We quantify the effect of the zeta-potential on DO by measuring the electrical signals across three different nanopores/nanochannels of the SAPM. We then empirically quantify the effects of the temperature and ionic strength of the electrolytes on DO and reveal a nonlinear relationship with DO-driven ion transport; the ionic strengths govern the DO- or diffusion-effective ion transport phenomena. Finally, we demonstrate DO-driven electric power generation with enhanced performance as a potential application under optimized experimental conditions.

Direct Single-Step Printing of Conductive Grids on Curved Surfaces Using Template-Guided Foaming

Advanced transparent conductors have been studied intensively in the aspects of materials, structures, and printing methods. The material and structural advancements have been successfully accomplished with various conductive nanomaterials and spring-like structures for better electrical conductivity and high mechanical flexibility of the transparent conductors. However, the capability to print submicrometer conductive patterns directly and conformally on curved surfaces with low processing cost and high throughput remains a technological challenge to achieve, primarily because of the original two-dimensional (2D) nature of conventional lithography processes. In our study, we exploit a liquid-mediated patterning approach in the development of flexible templates, enabling printing of curvilinear silver grids in a single-step and strain-free manner at a submicrometer resolution within several minutes with minimum loss of noble metals. The template can guide arrays of receding liquid-air interfaces on curved substrates during liquid evaporation, thereby generating ordered 2D foam structures that can confine and assemble silver nanoparticles in grid patterns. The printed silver grids exhibit suitable optical, electrical, and Joule-heating performances, enabling their application in transparent heaters. Our technique has the potential to extend the existing 2D micro/nanofluidic liquid-mediated patterning approach to three-dimensional (3D) control of liquid-air interfaces for low-cost all-liquid-processed functional 3D optoelectronics in the future.

Lithography Technology for Micro- and Nanofabrication

Micro and nanofabrication technologies are integral to the development of miniaturized systems. Lithography plays a key role in micro and nanofabrication techniques. Since high functional miniaturized systems are required in various fields, such as the development of a semiconductor, chemical and biological analysis, and biomedical researches, lithography techniques have been developed and applied for their appropriate purpose. Lithography can be classified into conventional and unconventional lithography, or top-down and bottom-up, or with mask and mask-less approaches. In this chapter, various lithography techniques are categorized and classified into conventional and unconventional lithography. In the first part, photolithography, electron beam, and focused-ion beam lithography are introduced as conventional lithography techniques. The second part introduces nanoimprint lithography, deformation lithography, and colloidal lithography as unconventional lithography techniques. In the last part, the pros and cons of each lithography are discussed for an appropriate design of fabrication processes.

Tuning Surface Morphology of Fluorescent Hydrogels Using a Vortex Fluidic Device

In recent decades, microfluidic techniques have been extensively used to advance hydrogel design and control the architectural features on the micro- and nanoscale. The major challenges with the microfluidic approach are clogging and limited architectural features: notably, the creation of the sphere, core-shell, and fibers. Implementation of batch production is almost impossible with the relatively lengthy time of production, which is another disadvantage. This minireview aims to introduce a new microfluidic platform, a vortex fluidic device (VFD), for one-step fabrication of hydrogels with different architectural features and properties. The application of a VFD in the fabrication of physically crosslinked hydrogels with different surface morphologies, the creation of fluorescent hydrogels with excellent photostability and fluorescence properties, and tuning of the structure-property relationship in hydrogels are discussed. We conceive, on the basis of this minireview, that future studies will provide new opportunities to develop hydrogel nanocomposites with superior properties for different biomedical and engineering applications.

Micro-/Nanofluidics for Liquid-Mediated Patterning of Hybrid-Scale Material Structures

Various materials are fabricated to form specific structures/patterns at the micro-/nanoscale, which exhibit additional functions and performance. Recent liquid-mediated fabrication methods utilizing bottom-up approaches benefit from micro-/nanofluidic technologies that provide a high controllability for manipulating fluids containing various solutes, suspensions, and building blocks at the microscale and/or nanoscale. Here, the state-of-the-art micro-/nanofluidic approaches are discussed, which facilitate the liquid-mediated patterning of various hybrid-scale material structures, thereby showing many additional advantages in cost, labor, resolution, and throughput. Such systems are categorized here according to three representative forms defined by the degree of the free-fluid-fluid interface: free, semiconfined, and fully confined forms. The micro-/nanofluidic methods for each form are discussed, followed by recent examples of their applications. To close, the remaining issues and potential applications are summarized.

Mixed-scale poly(methyl methacrylate) channel network-based single-particle manipulation via diffusiophoresis

Despite the unique advantages of nanochannels imparted by their small size, their utility is limited by the lack of affordable and versatile fabrication methods. Moreover, nanochannel-incorporated fluidic devices require micro-sized conduit integration for efficient access of liquid samples. In this study, a simple and cost-effective fabrication method for mixed-scale channel networks via hot-embossing of poly(methyl methacrylate) (PMMA) using a carbon stamp is demonstrated. Due to its high rigidity, PMMA ensures collapse-free channel fabrication. The carbon stamp is fabricated using only batch microfabrication and has a convex architecture that allows the fabrication of a complex channel network via a single imprinting process. In addition, the microchannels are connected to nanochannels via three-dimensional (3D) microfunnels that serve as single-particle-entrapment chambers, ensuring smooth transport of samples into the nanochannels. Owing to the 3D geometry of the microfunnels and the small size of the nanochannels, a solute gradient can be generated locally at the microfunnel. This local solute gradient enables the entrapment of microparticles at the microfunnels via diffusiophoresis, which can manipulate the particle motion in a controllable manner, without any external equipment or additional electrode integration into the channels. To the best of our knowledge, this is the first report of diffusiophoresis-based single-particle entrapment.

Fabrication of metal nanopatterns for organic field effect transistor electrodes by cracking and transfer printing

In this paper, we demonstrate a novel method for fabricating metal nanopatterns using cracking to address the limitations of traditional techniques. Parallel crack arrays were created in a polydimethylsiloxane (PDMS) mold using a combination of surface modification and control of strain fields. The elastic PDMS containing the crack arrays was subsequently used as a stamp to prepare nanoscale metal patterns on a substrate by transfer printing. To illustrate the functionality of this technique, we employed the metal patterns as the source and drain contacts of an organic field effect transistor. Using this approach, we fabricated transistors with channel lengths ranging from 70-600 nm. The performance of these devices when the channel length was reduced was studied. The drive current density increases as expected, indicating the creation of operational transistors with recognizable properties.

Colloidal lithography-based fabrication of highly-ordered nanofluidic channels with an ultra-high surface-to-volume ratio

This article shows a new strategy for the fabrication of nanofluidics based on nanoscale gaps in nanopillar arrays. Silicon nanopillar arrays are prepared in a designed position by combining conventional photolithography with colloidal lithography. The nanogaps between the pillars are used as nanochannels for the connection of two polydimethylsiloxane-based microchannels in microfluidics. The gap between neighbouring nanopillars can be accurately controlled by changing the size of initial colloidal spheres and by an etching process, which further determines the dimensions of the nanochannels. At a low ionic strength, the surface charge-governed ion transportation shows that the nanochannels possess the same electrokinetic properties as typical nanofluidics. Benefiting from the advantage of photolithography, large-area nanochannel arrays can be prepared in a parallel manner. Due to the perm-selectivity of the nanochannels, the nanofluidic chips can be used to preconcentrate low concentration samples. The large-area ordered nanostructures preserve their high-throughput property and large surface-to-volume ratio, which shows their great potential in the development of nanofluidics and their applications, such as in the separation of small molecules, energy conversion, etc.

Electrokinetic ion transport in nanofluidics and membranes with applications in bioanalysis and beyond

Electrokinetic transport of ions between electrolyte solutions and ion permselective solid media governs a variety of applications, such as molecular separation, biological detection, and bioelectronics. These applications rely on a unique class of materials and devices to interface the ionic and electronic systems. The devices built on ion permselective materials or micro-/nanofluidic channels are arranged to work with aqueous environments capable of either manipulating charged species through applied electric fields or transducing biological responses into electronic signals. In this review, we focus on recent advances in the application of electrokinetic ion transport using nanofluidic and membrane technologies. We start with an introduction into the theoretical basis of ion transport kinetics and their analogy to the charge transport in electronic systems. We continue with discussions of the materials and nanofabrication technologies developed to create ion permselective membranes and nanofluidic devices. Accomplishments from various applications are highlighted, including biosensing, molecular separation, energy conversion, and bio-electronic interfaces. We also briefly outline potential applications and challenges in this field.