Thin film piezoelectrics for bulk acoustic wave (BAW) acoustophoresis

Harnessing the power of Microscale AcoustoFluidics: A perspective based on BAW cancer diagnostics

Cancer directly affects one in every three people, and mortality rates strongly correlate with the stage at which diagnosis occurs. Each of the multitude of methods used in cancer diagnostics has its own set of advantages and disadvantages. Two common drawbacks are a limited information value of image based diagnostic methods and high invasiveness when opting for methods that provide greater insight. Microfluidics offers a promising avenue for isolating circulating tumor cells from blood samples, offering high informational value at predetermined time intervals while being minimally invasive. Microscale AcoustoFluidics, an active method capable of manipulating objects within a fluid, has shown its potential use for the isolation and measurement of circulating tumor cells, but its full potential has yet to be harnessed. Extensive research has focused on isolating single cells, although the significance of clusters should not be overlooked and requires attention within the field. Moreover, there is room for improvement by designing smaller and automated devices to enhance user-friendliness and efficiency as illustrated by the use of bulk acoustic wave devices in cancer diagnostics. This next generation of setups and devices could minimize streaming forces and thereby enable the manipulation of smaller objects, thus aiding in the implementation of personalized oncology for the next generation of cancer treatments.

Microfluidic pumps for cell sorting

Microfluidic cell sorting has shown promising advantages over traditional bulky cell sorting equipment and has demonstrated wide-reaching applications in biological research and medical diagnostics. The most important characteristics of a microfluidic cell sorter are its throughput, ease of use, and integration of peripheral equipment onto the chip itself. In this review, we discuss the six most common methods for pumping fluid samples in microfluidic cell sorting devices, present their advantages and drawbacks, and discuss notable examples of their use. Syringe pumps are the most commonly used method for fluid actuation in microfluidic devices because they are easily accessible but they are typically too bulky for portable applications, and they may produce unfavorable flow characteristics. Peristaltic pumps, both on- and off-chip, can produce reversible flow but they suffer from pulsatile flow characteristics, which may not be preferable in many scenarios. Gravity-driven pumping, and similarly hydrostatic pumping, require no energy input but generally produce low throughputs. Centrifugal flow is used to sort cells on the basis of size or density but requires a large external rotor to produce centrifugal force. Electroosmotic pumping is appealing because of its compact size but the high voltages required for fluid flow may be incompatible with live cells. Emerging methods with potential for applications in cell sorting are also discussed. In the future, microfluidic cell sorting methods will trend toward highly integrated systems with high throughputs and low sample volume requirements.

Microfabricated acoustofluidic membrane acoustic waveguide actuator for highly localized in-droplet dynamic particle manipulation

Precision manipulation techniques in microfluidics often rely on ultrasonic actuators to generate displacement and pressure fields in a liquid. However, strategies to enhance and confine the acoustofluidic forces often work against miniaturization and reproducibility in fabrication. This study presents microfabricated piezoelectric thin film membranes made via silicon diffusion for guided flexural wave generation as promising acoustofluidic actuators with low frequency, voltage, and power requirements. The guided wave propagation can be dynamically controlled to tune and confine the induced acoustofluidic radiation force and streaming. This provides for highly localized dynamic particle manipulation functionalities such as multidirectional transport, patterning, and trapping. The device combines the advantages of microfabrication and advanced acoustofluidic capabilities into a miniature "drop-and-actuate" chip that is mechanically robust and features a high degree of reproducibility for large-scale production. The membrane acoustic waveguide actuators offer a promising pathway for acoustofluidic applications such as biosensing, organoid production, and in situ analyte transport.

Glass-embedded PDMS microfluidic device for enhanced concentration of nanoparticles using an ultrasonic nanosieve

Surface acoustic wave (SAW) driven devices typically employ polymeric microfluidic channels of low acoustic impedance mismatch to the fluid in contact, to allow precise control of the wave field. Several of these applications, however, can benefit from the implementation of an acoustically reflective surface at the microfluidic channel's ceiling to increase energy retention within the fluid and hence, performance of the device. In this work, we embed a glass insert at the ceiling of the PDMS microfluidic channel used in a SAW activated nanosieve, which utilises a microparticle resonance for enrichment of nanoparticles. Due to the system's independence of performance on channel geometry and wave field pattern, the glass-inserted device allowed for a 30-fold increase in flow rate, from 0.05 μl min^-1 to 1.5 μL min^-1, whilst maintaining high capture efficiencies of >90%, when compared to its previously reported design. This effectively enables the system to process larger volume samples, which typically is a main limitation of these type of devices. This work demonstrates a simple way to increase the performance and throughput of SAW-based devices, especially within systems that can benefit from the energy retention.

Bisymmetric coherent acoustic tweezers based on modulation of surface acoustic waves for dynamic and reconfigurable cluster manipulation of particles and cells

Acoustic tweezers based on surface acoustic waves (SAWs) have raised great interest in the fields of tissue engineering, targeted therapy, and drug delivery. Generally, the complex structure and array layout design of interdigital electrodes would restrict the applications of acoustic tweezers. Here, we present a novel approach by using bisymmetric coherent acoustic tweezers to modulate the shape of acoustic pressure fields with high flexibility and accuracy. Experimental tests were conducted to perform the precise, contactless, and biocompatible cluster manipulation of polystyrene microparticles and yeast cells. Stripe, dot, quadratic lattice, hexagonal lattice, interleaved stripe, oblique stripe, and many other complex arrays were achieved by real-time modulation of amplitudes and phase relations of coherent SAWs to demonstrate the capability of the device for the cluster manipulation of particles and cells. Furthermore, rapid switching among various arrays, shape regulation, geometric parameter modulation of array units, and directional translation of microparticles and cells were implemented. This study demonstrated a favorable technique for flexible and versatile manipulation and patterning of cells and biomolecules, and it has the advantages of high manipulation accuracy and adjustability, thus it is expected to be utilized in the fields of targeted cellular assembly, biological 3D printing, and targeted release of drugs.

Optical feedback control loop for the precise and robust acoustic focusing of cells, micro- and nanoparticles

Despite a long history and the vast number of applications demonstrated, very few market products incorporate acoustophoresis. Because a human operator must run and control a device during an experiment, most devices are limited to proof of concepts. On top of a possible detuning due to temperature changes, the human operator introduces a bias which reduces the reproducibility, performance and reliability of devices. To mitigate some of these problems, we propose an optical feedback control loop that optimizes the excitation frequency. We investigate the improvements that can be expected when a human operator is replaced for acoustic micro- and nanometer particle focusing experiments. Three experiments previously conducted in our group were taken as a benchmark. In addition to being automatic, this resulted in the feedback control loop displaying a superior performance compared to an experienced scientist in 1) improving the particle focusing by at least a factor of two for 5 μm diameter PS particles, 2) increasing the range of flow rates in which 1 μm diameter PS particles could be focused and 3) was even capable of focusing 600 nm diameter PS particles at a frequency of 1.72075 MHz. Furthermore, the feedback control loop is capable of focusing biological cells in one and two pressure nodes. The requirements for the feedback control loop are: an optical setup, a run-of-the-mill computer and a computer controllable function generator. Thus resulting in a cost-effective, high-throughput and automated method to rapidly increase the efficiency of established systems. The code for the feedback control loop is openly accessible and the authors explicitly wish that the community uses and modifies the feedback control loop to their own needs.

Acoustic Biosensors and Microfluidic Devices in the Decennium: Principles and Applications

Lab-on-a-chip (LOC) technology has gained primary attention in the past decade, where label-free biosensors and microfluidic actuation platforms are integrated to realize such LOC devices. Among the multitude of technologies that enables the successful integration of these two features, the piezoelectric acoustic wave method is best suited for handling biological samples due to biocompatibility, label-free and non-invasive properties. In this review paper, we present a study on the use of acoustic waves generated by piezoelectric materials in the area of label-free biosensors and microfluidic actuation towards the realization of LOC and POC devices. The categorization of acoustic wave technology into the bulk acoustic wave and surface acoustic wave has been considered with the inclusion of biological sample sensing and manipulation applications. This paper presents an approach with a comprehensive study on the fundamental operating principles of acoustic waves in biosensing and microfluidic actuation, acoustic wave modes suitable for sensing and actuation, piezoelectric materials used for acoustic wave generation, fabrication methods, and challenges in the use of acoustic wave modes in biosensing. Recent developments in the past decade, in various sensing potentialities of acoustic waves in a myriad of applications, including sensing of proteins, disease biomarkers, DNA, pathogenic microorganisms, acoustofluidic manipulation, and the sorting of biological samples such as cells, have been given primary focus. An insight into the future perspectives of real-time, label-free, and portable LOC devices utilizing acoustic waves is also presented. The developments in the field of thin-film piezoelectric materials, with the possibility of integrating sensing and actuation on a single platform utilizing the reversible property of smart piezoelectric materials, provide a step forward in the realization of monolithic integrated LOC and POC devices. Finally, the present paper highlights the key benefits and challenges in terms of commercialization, in the field of acoustic wave-based biosensors and actuation platforms.

Versatile acoustic manipulation of micro-objects using mode-switchable oscillating bubbles: transportation, trapping, rotation, and revolution

Controllable on-chip multimodal manipulation of micro-objects in microfluidic devices is urgently required for enhancing the efficiency of potential biomedical applications. However, fixed design and driving models make it difficult to achieve switchable multifunction efficiently in a single device. In this study, a versatile bubble-based acoustofluidic device is proposed for multimodal manipulation of micro-objects in a biocompatible manner. Identical bubbles trapped over the bottom microcavities are made to flexibly switch between four different oscillatory motions by varying the applied frequency to generate corresponding modes of streaming patterns in the microchannel. Such regular modes enable stable transportation, trapping, 3D rotation, and circular revolution of the micro-objects, which were experimentally and numerically verified. The mode-switchable manipulations can be noninvasively applied to particles, cells, and organisms with different sizes, shapes, and quantities and can be controlled by key driving parameters. Moreover, 3D cell reconstruction is developed by applying the out-of-plane rotational mode and analyzed for illustration of cell surface morphology while quantifying reliably basic cell properties. Finally, a simple platform is established to integrate user-friendly function control and reconstruction analysis. The mode-switchable acoustofluidic device features a versatile, controllable, and contactless micro-object manipulation method, which provides an efficient solution for biomedical applications.

Acoustofluidic platforms for particle manipulation

There is an increasing interest in acoustics for microfluidic applications. This field, commonly known as acoustofluidics involves the interaction of ultrasonic standing waves with fluids and dispersed microparticles. The combination of microfluidics and the so-called acoustic standing waves (ASWs) led to the development of integrated systems for contact-less on-chip cell and particle manipulation where it is possible to move and spatially localize these particles based on the different acoustophysical properties. While it was initially suggested that the acoustic forces could be harmful to the cells and could impact cell viability, proliferation, or function via phenotypic or even genotypic changes, further studies disproved such claims. This review is summarizing some interesting applications of acoustofluidics in the manipulations of biomaterials, such as cells or subcellular vesicles, in works published mainly within the last 5 years.

Numerical study of bulk acoustofluidic devices driven by thin-film transducers and whole-system resonance modes

In bulk acoustofluidic devices, acoustic resonance modes for fluid and microparticle handling are traditionally excited by bulk piezoelectric (PZE) transducers. In this work, it is demonstrated by numerical simulations in three dimensions that integrated PZE thin-film transducers, constituting less than 0.1% of the bulk device, work equally well. The simulations are performed using a well-tested and experimentally validated numerical model. A water-filled straight channel embedded in a mm-sized bulk glass chip with a 1- μm-thick thin-film transducer made of Al_0.6Sc_0.4N is presented as a proof-of-concept example. The acoustic energy, radiation force, and microparticle focusing times are computed and shown to be comparable to those of a conventional bulk silicon-glass device actuated by a bulk lead-zirconate-titanate transducer. The ability of thin-film transducers to create the desired acoustofluidic effects in bulk acoustofluidic devices relies on three physical aspects: the in-plane-expansion of the thin-film transducer under the applied orthogonal electric field, the acoustic whole-system resonance of the device, and the high Q-factor of the elastic solid, constituting the bulk part of the device. Consequently, the thin-film device is remarkably insensitive to the Q-factor and resonance properties of the thin-film transducer.

Phase separation of a nonionic surfactant aqueous solution in a standing surface acoustic wave for submicron particle manipulation

Acoustic manipulation of submicron particles in a controlled manner has been challenging to date because of the increased contribution of acoustic streaming, which leads to fluid mixing and homogenization. This article describes the patterning of submicron particles and the migration of their patterned locations from pressure nodes to antinodes in a non-ionic surfactant (Tween 20) aqueous solution in a conventional standing surface acoustic wave field with a wavelength of 150 μm. Phase separation of the aqueous surfactant solution occurs when they are exposed to acoustic waves, probably due to the "clouding behavior" of non-ionic surfactant. The generated surfactant precipitates are pushed to the pressure antinodes due to the negative acoustic contrast factor relative to water. Compared with the mixing appearance in pure water media, the patterning behavior of submicron particles with a diameter of 300 nm dominated by acoustic radiation force is readily apparent in an aqueous solution with 2% volumetric concentration of Tween 20 surfactant, thanks to the suppression effect of acoustic streaming in inhomogeneous fluids. These submicron particles are first pushed to acoustic pressure nodes and then are migrated to antinodes where the surfactant precipitates stay. More attractively, the migration of acoustically patterned locations is not only limited to submicron particles, but also occurs to micrometer-sized particles in solutions with higher surfactant concentrations. These findings open up a novel avenue for controllable acoustic manipulation.

Flexural wave-based soft attractor walls for trapping microparticles and cells

Acoustic manipulation of microparticles and cells, called acoustophoresis, inside microfluidic systems has significant potential in biomedical applications. In particular, using acoustic radiation force to push microscopic objects toward the wall surfaces has an important role in enhancing immunoassays, particle sensors, and recently microrobotics. In this paper, we report a flexural-wave based acoustofluidic system for trapping micron-sized particles and cells at the soft wall boundaries. By exciting a standard microscope glass slide (1 mm thick) at its resonance frequencies <200 kHz, we show the wall-trapping action in sub-millimeter-size rectangular and circular cross-sectional channels. For such low-frequency excitation, the acoustic wavelength can range from 10-150 times the microchannel width, enabling a wide design space for choosing the channel width and position on the substrate. Using the system-level acousto-structural simulations, we confirm the acoustophoretic motion of particles near the walls, which is governed by the competing acoustic radiation and streaming forces. Finally, we investigate the performance of the wall-trapping acoustofluidic setup in attracting the motile cells, such as Chlamydomonas reinhardtii microalgae, toward the soft boundaries. Furthermore, the rotation of microalgae at the sidewalls and trap-escape events under pulsed ultrasound are demonstrated. The flexural-wave driven acoustofluidic system described here provides a biocompatible, versatile, and label-free approach to attract particles and cells toward the soft walls.

Open-tubular radially cyclical electric field-flow fractionation (OTR-CyElFFF): an online concentric distribution strategy for simultaneous separation of microparticles

An open-tubular radially cyclical electric field-flow fractionation technique which achieves the online separation of microparticles in a functional annular channel is proposed in this study. The system was set up by using a stainless steel tube and a platinum wire modified with ionic liquid/mesoporous silica materials as the external and internal electrodes. The feasibility for online separation of various particles was experimentally demonstrated. Particles in the channel were affected by a radial electric field and field-flow fractionation (FFF). On the cross section, different particles showed distinctive migration distances depending on their own properties and the different magnitudes of forces being exerted. The same kind of particles form an annular distribution within the same annulus while different particles form annular distributions at varied concentric annuli through electrophoresis. Under a laminar flow of FFF, different sizes of particles formed a conical arrangement within the annular separation channel. With the joint influence of electric field and flow field, different trajectories were obtained and the particles were eventually separated. Voltage, frequency and duty cycle value are the main parameters affecting the separation of particles. By adjusting these parameters, particles migrate in a zigzag trajectory on one side of the electrodes (mode I) and reach both sides of the electrodes (mode II). Six polystyrene particles were completely separated with high resolution within several minutes. Our system offers numerous advantages of label-free, high-resolution and online separation without tedious operations, and it is a promising tool for the effective separation of various micro-objects.

Toward optimal acoustophoretic microparticle manipulation by exploiting asymmetry

The performance of a micro-acousto-fluidic device designed for microparticle trapping is simulated using a three-dimensional (3D) numerical model. It is demonstrated by numerical simulations that geometrically asymmetric architecture and actuation can increase the acoustic radiation forces in a liquid-filled cavity by almost 2 orders of magnitude when setting up a standing pressure half wave in a microfluidic chamber. Similarly, experiments with silicon-glass devices show a noticeable improvement in acoustophoresis of 20-μm silica beads in water when asymmetric devices are used. Microparticle acoustophoresis has an extensive array of applications in applied science fields ranging from life sciences to 3D printing. A more efficient and powerful particle manipulation system can boost the overall effectiveness of an acoustofluidic device. The numerical simulations are developed in the COMSOL Multiphysics^® software package (COMSOL AB, Stockholm, Sweden). By monitoring the modes and magnitudes of simulated acoustophoretic fields in a relatively wide range of ultrasonic frequencies, a map of device performance is obtained. 3D resonant acoustophoretic fields are identified to quantify the improved performance of the chips with an asymmetric layout. Four different device designs are analyzed experimentally, and particle tracking experimental data qualitatively supports the numerical results.

Theory of acoustic trapping of microparticles in capillary tubes

We present a semianalytical theory for the acoustic fields and particle-trapping forces in a viscous fluid inside a capillary tube with arbitrary cross section and ultrasound actuation at the walls. We find that the acoustic fields vary axially on a length scale proportional to the square root of the quality factor of the two-dimensional (2D) cross-section resonance mode. This axial variation is determined analytically based on the numerical solution to the eigenvalue problem in the 2D cross section. The analysis is developed in two steps: First, we generalize a recently published expression for the 2D standing-wave resonance modes in a rectangular cross section to arbitrary shapes, including the viscous boundary layer. Second, based on these 2D modes, we derive analytical expressions in three dimensions for the acoustic pressure, the acoustic radiation and trapping force, as well as the acoustic energy flux density. We validate the theory by comparison to three-dimensional numerical simulations.

Modeling and Analysis of the Two-Dimensional Axisymmetric Acoustofluidic Fields in the Probe-Type and Substrate-Type Ultrasonic Micro/Nano Manipulation Systems

The probe-type and substrate-type ultrasonic micro/nano manipulation systems have proven to be two kinds of powerful tools for manipulating micro/nanoscale materials. Numerical simulations of acoustofluidic fields in these two kinds of systems can not only be used to explain and analyze the physical mechanisms of experimental phenomena, but also provide guidelines for optimization of device parameters and working conditions. However, in-depth quantitative study and analysis of acoustofluidic fields in the two ultrasonic micro/nano manipulation systems have scarcely been reported. In this paper, based on the finite element method (FEM), we numerically investigated the two-dimensional (2D) axisymmetric acoustofluidic fields in the probe-type and substrate-type ultrasonic micro/nano manipulation systems by the perturbation method (PM) and Reynolds stress method (RSM), respectively. Through comparing the simulation results computed by the two methods and the experimental verifications, the feasibility and reasonability of the two methods in simulating the acoustofluidic fields in these two ultrasonic micro/nano manipulation systems have been validated. Moreover, the effects of device parameters and working conditions on the acoustofluidic fields are clarified by the simulation results and qualitatively verified by the experiments.

Active PZT Composite Microfluidic Channel for Bioparticle Manipulation

The concept of active microchannel for precise manipulation of particles in biomedicine is reported in this paper. A novel vibration-assisted thermal imprint method is proposed for effective formation of a microchannel network in the nanocomposite piezo polymer layer. In this method, bulk acoustic waves of different wavelengths excited in an imprinted microstructure enable it to function in trapping-patterning, valve, or free particle passing modes. Acoustic waves are excited using a special pattern of electrodes formed on its top surface and a single electric ground electrode formed on the bottom surface. To develop the microchannel, we first started with lead zirconate titanate (PZT) nanopowder [Pb (Zr_x, Ti_1-x) O₃] synthesis. The PZT was further mixed with three different binding materials-polyvinyl butyral (PVB), poly(methyl methacrylate) (PMMA), and polystyrene (PS)-in benzyl alcohol to prepare a screen-printing paste. Then, using conventional screen printing techniques, three types of PZT coatings on copper foil substrates were obtained. To improve the voltage characteristics, the coatings were polarized. Their structural and chemical composition was analyzed using scanning electron microscope (SEM), while the mechanical and electrical characteristics were determined using the COMSOL Multiphysics model with experimentally obtained parameters of periodic response of the layered copper foil structure. The hydrophobic properties of the PZT composite were analyzed by measuring the contact angle between the distilled water drop and the three different polymer composites: PZT with PVB, PZT with PMMA, and PZT with PS. Finally, the behavior of the microchannel formed in the nanocomposite piezo polymer was simulated by applying electrical excitation signal on the pattern of electrodes and then analyzed experimentally using holographic interferometry. Wave-shaped vibration forms of the microchannel were obtained, thereby enabling particle manipulation.