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Abdellah AM, Salem KE, DiCecco L, Ismail F, Rakhsha A, Grandfield K, Higgins D. In Situ Transmission Electron Microscopy of Electrocatalyst Materials: Proposed Workflows, Technical Advances, Challenges, and Lessons Learned. SMALL METHODS 2025; 9:e2400851. [PMID: 39707656 PMCID: PMC11740959 DOI: 10.1002/smtd.202400851] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/06/2024] [Revised: 11/19/2024] [Indexed: 12/23/2024]
Abstract
In situ electrochemical liquid phase transmission electron microscopy (LP-TEM) measurements utilize micro-chip three-electrode cells with electron transparent silicon nitride windows that confine the liquid electrolyte. By imaging electrocatalysts deposited on micro-patterned electrodes, LP-TEM provides insight into morphological, phase structure, and compositional changes within electrocatalyst materials under electrochemical reaction conditions, which have practical implications on activity, selectivity, and durability. Despite LP-TEM capabilities becoming more accessible, in situ measurements under electrochemical reaction conditions remain non-trivial, with challenges including electron beam interactions with the electrolyte and electrode, the lack of well-defined experimental workflows, and difficulty interpreting particle behavior within a liquid. Herein a summary of the current state of LP-TEM technique capabilities alongside a discussion of the relevant experimental challenges researchers typically face, with a focus on in situ studies of electrochemical CO2 conversion catalysts is provided. A methodological approach for in situ LP-TEM measurements on CO2R catalysts prepared by electro-deposition, sputtering, or drop-casting is presented and include case studies where challenges and proposed workflows for each are highlighted. By providing a summary of LP-TEM technique capabilities and guidance for the measurements, the goal is for this paper to reduce barriers for researchers who are interested in utilizing LP-TEM characterization to answer their scientific questions.
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Affiliation(s)
- Ahmed M. Abdellah
- Department of Chemical EngineeringMcMaster UniversityHamiltonONL8S 4L7Canada
- Canadian Centre for Electron MicroscopyMcMaster UniversityHamiltonONL8S 4M1Canada
| | - Kholoud E. Salem
- Department of Chemical EngineeringMcMaster UniversityHamiltonONL8S 4L7Canada
| | - Liza‐Anastasia DiCecco
- Department of Materials Science and EngineeringMcMaster UniversityHamiltonONL8S 4L8Canada
- Department of Biomedical EngineeringThe Pennsylvania State UniversityUniversity ParkPA16802USA
| | - Fatma Ismail
- Department of Chemical EngineeringMcMaster UniversityHamiltonONL8S 4L7Canada
| | - Amirhossein Rakhsha
- Department of Chemical EngineeringMcMaster UniversityHamiltonONL8S 4L7Canada
| | - Kathryn Grandfield
- Department of Materials Science and EngineeringMcMaster UniversityHamiltonONL8S 4L8Canada
- School of Biomedical EngineeringMcMaster UniversityHamiltonONL8S 4L7Canada
| | - Drew Higgins
- Department of Chemical EngineeringMcMaster UniversityHamiltonONL8S 4L7Canada
- Canadian Centre for Electron MicroscopyMcMaster UniversityHamiltonONL8S 4M1Canada
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Koo K, Chang JH, Ji S, Choi H, Cho SH, Yoo SJ, Choe J, Lee HS, Bae SW, Oh JM, Woo HS, Shin S, Lee K, Kim TH, Jung YS, Kwon JH, Lee JH, Huh Y, Kang S, Kim HY, Yuk JM. Abnormal Silicon Etching Behaviors in Nanometer-Sized Channels. NANO LETTERS 2024. [PMID: 38557080 DOI: 10.1021/acs.nanolett.4c00326] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/04/2024]
Abstract
Modern semiconductor fabrication is challenged by difficulties in overcoming physical and chemical constraints. A major challenge is the wet etching of dummy gate silicon, which involves the removal of materials inside confined spaces of a few nanometers. These chemical processes are significantly different in the nanoscale and bulk. Previously, electrical double-layer formation, bubble entrapment, poor wettability, and insoluble intermediate precipitation have been proposed. However, the exact suppression mechanisms remain unclear due to the lack of direct observation methods. Herein, we investigate limiting factors for the etching kinetics of silicon with tetramethylammonium hydroxide at the nanoscale by using liquid-phase transmission electron microscopy, three-dimensional electron tomography, and first-principles calculations. We reveal suppressed chemical reactions, unstripping phenomena, and stochastic etching behaviors that have never been observed on a macroscopic scale. We expect that solutions can be suggested from this comprehensive insight into the scale-dependent limiting factors of fabrication.
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Affiliation(s)
- Kunmo Koo
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, Republic of Korea
| | - Joon Ha Chang
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, Republic of Korea
| | - Sanghyeon Ji
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, Republic of Korea
| | - Hyuk Choi
- Department of Materials Science and Engineering, Chungnam National University, Daejeon 34134, Republic of Korea
| | - Seunghee H Cho
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, Republic of Korea
| | - Seung Jo Yoo
- Electron Microscopy Research Center, Korea Basic Science Institute, Daejeon 34113, Republic of Korea
| | - Jacob Choe
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, Republic of Korea
| | - Hyo San Lee
- Process Development, Semiconductor R&D Center, Samsung Electronics, Hwaseong 18448, Republic of Korea
| | - Sang Won Bae
- Material Development Team, Semiconductor R&D Center, Samsung Electronics, Hwaseong 18448, Republic of Korea
| | - Jung Min Oh
- Material Development Team, Semiconductor R&D Center, Samsung Electronics, Hwaseong 18448, Republic of Korea
| | - Hee Suk Woo
- Material Development Team, Semiconductor R&D Center, Samsung Electronics, Hwaseong 18448, Republic of Korea
| | - Seungmin Shin
- Advanced Process Development Team, Semiconductor R&D Center, Samsung Electronics, Hwaseong 18448, Republic of Korea
| | - Kuntack Lee
- Process Development, Semiconductor R&D Center, Samsung Electronics, Hwaseong 18448, Republic of Korea
| | - Tae-Hong Kim
- DRAM Process Development Team, Semiconductor R&D Center, Samsung Electronics, Hwaseong 18448, Republic of Korea
| | - Yeon Sik Jung
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, Republic of Korea
| | - Ji-Hwan Kwon
- Korea Research Institute of Standard and Science, Daejeon 34113, Republic of Korea
| | - Ju Hyeok Lee
- Department of Materials Science and Engineering, Chungnam National University, Daejeon 34134, Republic of Korea
| | - Yoon Huh
- Analysis & Assessment Research Center, Research Institute of Industrial Science and Technology, Pohang 37673, Republic of Korea
| | - Sung Kang
- Analysis & Assessment Research Center, Research Institute of Industrial Science and Technology, Pohang 37673, Republic of Korea
| | - Hyun You Kim
- Department of Materials Science and Engineering, Chungnam National University, Daejeon 34134, Republic of Korea
| | - Jong Min Yuk
- Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 34141, Republic of Korea
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Lee S, Schneider NM, Tan SF, Ross FM. Temperature Dependent Nanochemistry and Growth Kinetics Using Liquid Cell Transmission Electron Microscopy. ACS NANO 2023; 17:5609-5619. [PMID: 36881385 DOI: 10.1021/acsnano.2c11477] [Citation(s) in RCA: 5] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/18/2023]
Abstract
Liquid cell transmission electron microscopy has become a powerful and increasingly accessible technique for in situ studies of nanoscale processes in liquid and solution phase. Exploring reaction mechanisms in electrochemical or crystal growth processes requires precise control over experimental conditions, with temperature being one of the most critical factors. Here we carry out a series of crystal growth experiments and simulations at different temperatures in the well-studied system of Ag nanocrystal growth driven by the changes in redox environment caused by the electron beam. Liquid cell experiments show strong changes in both morphology and growth rate with temperature. We develop a kinetic model to predict the temperature-dependent solution composition, and we discuss how the combined effect of temperature-dependent chemistry, diffusion, and the balance between nucleation and growth rates affect the morphology. We discuss how this work may provide guidance in interpreting liquid cell TEM and potentially larger-scale synthesis experiments for systems controlled by temperature.
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Affiliation(s)
- Serin Lee
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | | | - Shu Fen Tan
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
| | - Frances M Ross
- Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
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Zhou S, Zheng Q, Tang S, Sun SG, Liao HG. Liquid cell electrochemical TEM: Unveiling the real-time interfacial reactions of advanced Li-metal batteries. J Chem Phys 2022; 157:230901. [PMID: 36550040 DOI: 10.1063/5.0129238] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022] Open
Abstract
Li metal batteries (LMBs) reveal great application prospect in next-generation energy storage, because of their high energy density and low electrochemical potential, especially when paired with elemental sulfur and oxygen cathodes. Complex interfacial reactions have long been a big concern because of the elusive formation/dissolution of Li metal at the solid-electrolyte interface (SEI) layer, which leads to battery degradation under practical operating conditions. To precisely track the reactions at the electrode/electrolyte interfaces, in the past ten years, high spatio-temporal resolution, in situ electrochemical transmission electron microscopy (EC-TEM) has been developed. A preliminary understanding of the structural and chemical variation of Li metal during nucleation/growth and SEI layer formation has been obtained. In this perspective, we give a brief introduction of liquid cell development. Then, we comparably discuss the different configurations of EC-TEM based on open-cell and liquid-cell, and focus on the recent advances of liquid-cell EC-TEM and its investigation in the electrodes, electrolytes, and SEI. Finally, we present a perspective of liquid-cell EC-TEM for future LMB research.
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Affiliation(s)
- Shiyuan Zhou
- State Key Laboratory of Physical Chemistry of Solid Surfaces Collaborative Innovation Center of Chemistry for Energy Materials, Xiamen University, Xiamen 361005, People's Republic of China
| | - Qizheng Zheng
- State Key Laboratory of Physical Chemistry of Solid Surfaces Collaborative Innovation Center of Chemistry for Energy Materials, Xiamen University, Xiamen 361005, People's Republic of China
| | - Shi Tang
- State Key Laboratory of Physical Chemistry of Solid Surfaces Collaborative Innovation Center of Chemistry for Energy Materials, Xiamen University, Xiamen 361005, People's Republic of China
| | - Shi-Gang Sun
- State Key Laboratory of Physical Chemistry of Solid Surfaces Collaborative Innovation Center of Chemistry for Energy Materials, Xiamen University, Xiamen 361005, People's Republic of China
| | - Hong-Gang Liao
- State Key Laboratory of Physical Chemistry of Solid Surfaces Collaborative Innovation Center of Chemistry for Energy Materials, Xiamen University, Xiamen 361005, People's Republic of China
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Ma C, Xing Z, Gou X, Jiang LP, Zhu JJ. A temperature-tuned electrochemiluminescence layer for reversibly imaging cell topography. Chem Sci 2022; 13:13938-13947. [PMID: 36544730 PMCID: PMC9710227 DOI: 10.1039/d2sc04944a] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/05/2022] [Accepted: 11/05/2022] [Indexed: 11/12/2022] Open
Abstract
Investigating electrochemiluminescence (ECL) scenarios under different temperatures is important to expand its imaging scope near an electrode surface. Here, we develop a temperature-tuned ECL layer by recording the evolution of shadow regions of adherent cells. Finite element simulation and experimental results demonstrate that the thickness of the ECL layer (TEL) is reversibly regulated by electrode temperature (T e), so that single cell topography at different heights is imaged. The TEL in two ECL routes shows different regulation ranges with elevated T e, thus providing a flexible approach to adjust the imaging scope within specific heights. In addition, a heated electrode significantly improves the image quality of cell adhesion in heterogeneous electrochemical rate-determined situations. Thus, the contrast in cell regions shows a reversible response to T e. This work provides a new approach to regulate the TEL and is promising for monitoring transient heat generation from biological entities.
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Affiliation(s)
- Cheng Ma
- School of Chemistry and Chemical Engineering, Yangzhou UniversityYangzhou 225002P. R. China,State Key Laboratory of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing UniversityNanjing 210023P. R. China
| | - Zejing Xing
- State Key Laboratory of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing UniversityNanjing 210023P. R. China
| | - Xiaodan Gou
- State Key Laboratory of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing UniversityNanjing 210023P. R. China
| | - Li-Ping Jiang
- State Key Laboratory of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing UniversityNanjing 210023P. R. China
| | - Jun-Jie Zhu
- State Key Laboratory of Analytical Chemistry for Life Science, School of Chemistry and Chemical Engineering, Nanjing UniversityNanjing 210023P. R. China
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