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Kim SW, Yoo JH, Park WJ, Lee CH, Lee JH, Kim JH, Uhm SH, Lee HC. Enhancing Charge Trapping Performance of Hafnia Thin Films Using Sequential Plasma Atomic Layer Deposition. NANOMATERIALS (BASEL, SWITZERLAND) 2024; 14:1686. [PMID: 39453022 PMCID: PMC11509989 DOI: 10.3390/nano14201686] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/04/2024] [Revised: 10/20/2024] [Accepted: 10/20/2024] [Indexed: 10/26/2024]
Abstract
We aimed to fabricate reliable memory devices using HfO2, which is gaining attention as a charge-trapping layer material for next-generation NAND flash memory. To this end, a new atomic layer deposition process using sequential remote plasma (RP) and direct plasma (DP) was designed to create charge-trapping memory devices. Subsequently, the operational characteristics of the devices were analyzed based on the thickness ratio of thin films deposited using the sequential RP and DP processes. As the thickness of the initially RP-deposited thin film increased, the memory window and retention also increased, while the interface defect density and leakage current decreased. When the thickness of the RP-deposited thin film was 7 nm, a maximum memory window of 10.1 V was achieved at an operating voltage of ±10 V, and the interface trap density (Dit) reached a minimum value of 1.0 × 1012 eV-1cm-2. Once the RP-deposited thin film reaches a certain thickness, the ion bombardment effect from DP on the substrate is expected to decrease, improving the Si/SiO2/HfO2 interface and thereby enhancing device endurance and reliability. This study confirmed that the proposed sequential RP and DP deposition processes could resolve issues related to unstable interface layers, improve device performance, and enhance process throughput.
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Affiliation(s)
- So-Won Kim
- Department of Advanced Materials Engineering, Tech University of Korea, Siheung 15073, Republic of Korea; (S.-W.K.); (J.-H.Y.); (W.-J.P.); (C.-H.L.); (J.-H.K.)
| | - Jae-Hoon Yoo
- Department of Advanced Materials Engineering, Tech University of Korea, Siheung 15073, Republic of Korea; (S.-W.K.); (J.-H.Y.); (W.-J.P.); (C.-H.L.); (J.-H.K.)
| | - Won-Ji Park
- Department of Advanced Materials Engineering, Tech University of Korea, Siheung 15073, Republic of Korea; (S.-W.K.); (J.-H.Y.); (W.-J.P.); (C.-H.L.); (J.-H.K.)
| | - Chan-Hee Lee
- Department of Advanced Materials Engineering, Tech University of Korea, Siheung 15073, Republic of Korea; (S.-W.K.); (J.-H.Y.); (W.-J.P.); (C.-H.L.); (J.-H.K.)
| | - Joung-Ho Lee
- Korea Evaluation Institute of Industrial Technology, Seoul 06152, Republic of Korea;
| | - Jong-Hwan Kim
- Department of Advanced Materials Engineering, Tech University of Korea, Siheung 15073, Republic of Korea; (S.-W.K.); (J.-H.Y.); (W.-J.P.); (C.-H.L.); (J.-H.K.)
- EN2CORE Technology Inc., Daejeon 18469, Republic of Korea;
| | - Sae-Hoon Uhm
- EN2CORE Technology Inc., Daejeon 18469, Republic of Korea;
| | - Hee-Chul Lee
- Department of Advanced Materials Engineering, Tech University of Korea, Siheung 15073, Republic of Korea; (S.-W.K.); (J.-H.Y.); (W.-J.P.); (C.-H.L.); (J.-H.K.)
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Manzoor M, Behera D, Sharma R, Moayad A, Al-Kahtani AA, Anil Kumar Y. Comprehensive first principles to investigate optoelectronic and transport phenomenon of lead-free double perovskites Ba 2AsBO 6 (B[bond, double bond]Nb, Ta) compounds. Heliyon 2024; 10:e30109. [PMID: 38699010 PMCID: PMC11064438 DOI: 10.1016/j.heliyon.2024.e30109] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/23/2023] [Revised: 04/18/2024] [Accepted: 04/19/2024] [Indexed: 05/05/2024] Open
Abstract
In the current work we studied the structural, elastics, electrical, optical, thermoelectric, as well as spectroscopic limited maximum efficiency (SLME) of oxide based Ba2AsBO6 (B[bond, double bond]Nb, Ta) materials. All the calculations were performed using first-principles calculation by employing the WIEN2k code. We checked the stability in diverse forms such as optimization, phonon dispersion, mechanical, formation energy, cohesive energy, and thermal stability is computed. The semiconducting nature of these Ba2AsBO6 (B[bond, double bond]Nb, Ta) systems is revealed by calculating the direct band gap values are 1.97 eV and 1.49 eV respectively. Additionally, we determined the optical properties which analyze the utmost absorption and transition of carriers versus photon energy (eV). Moreover, Ba2AsNbO6 has an estimated SLME of 32 %, making it an encouraging alternative for single-junction solar cells. Lastly, we studied the transport properties against temperature, the chemical potential for p-type and n-type charge carriers at various temperatures. At 300 K, the zT values are found to be 0.757 and 0.751 for Ba2AsBO6 (B[bond, double bond]Nb, Ta) compounds respectively. Both materials were examined as having strong absorption patterns and an excellent figure of merit (ZT), indicating that materials are appropriate for daily life applications.
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Affiliation(s)
- Mumtaz Manzoor
- Institute of physics, Slovak Academy of Science, Dubravska Cesta 9, 84507, Bratislava, Slovakia
| | - Debidatta Behera
- Department of Physics Birla Institute of Technology, Mesra, Ranchi, 835215, Jharkhand, India
| | - Ramesh Sharma
- Department of Applied Science, Feroze Gandhi Institute of Engineering and Technology, Raebareli, 229001, Uttar Pradesh, India
| | - A.J.A. Moayad
- Department of Materials Science, Malawi University of Science and Technology P.O Box 5196, Limbe, Malawi
| | - Abdullah A. Al-Kahtani
- Department of Chemistry, College of Science, King Saud University, P. O. Box 2455, Riyadh, 11451, Saudi Arabia
| | - Yedluri Anil Kumar
- Saveetha School of Engineering, Saveetha Institute of Medical and Technical Sciences, Saveetha University, Chennai, 602105, Tamilnadu, India
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Jeon YR, Akinwande D, Choi C. Volatile threshold switching and synaptic properties controlled by Ag diffusion using Schottky defects. NANOSCALE HORIZONS 2024; 9:853-862. [PMID: 38505960 DOI: 10.1039/d3nh00571b] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 03/21/2024]
Abstract
We investigated diffusion memristors in the structure of Ag/Ta2O5/HfO2/Pt, in which active Ag ions control active metal ion diffusion and mimic biological brain functions. The CMOS compatible high-k metal oxide could control an Ag electrode that was ionized by applying an appropriate voltage to form a conductive filament, and the movement of Ag ions was chemically and electrically controlled due to oxygen density. This diffusion memristor exhibited diffused characteristics with a selectivity of 109, and achieved a low power consumption of 2 mW at a SET voltage of 0.2 V. The threshold transitions were reliably repeatable over 20 cycles for compliance currents of 10-6 A, 10-4 A, and no compliance current, with the largest standard deviation value of SET variation being 0.028. Upon filament formation, Ag ions readily diffused into the interface of the Ta2O5 and HfO2 layer, which was verified by investigating the Ag atomic percentage using XPS and vertical EDX and by measuring the relaxation time of 0.8 ms. Verified volatile switching device demonstrated the biological synaptic properties of quantum conductance, short-term memory, and long-term memory due to controlling the Ag. Diffusion memristors using designed control and switching layers as following film density and oxygen vacancy have improved results as low-power devices and neuromorphic devices compared to other diffusion-based devices, and these properties can be used for various applications such as selectors, synapses, and neuromorphic devices.
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Affiliation(s)
- Yu-Rim Jeon
- Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, Texas 78712, USA
| | - Deji Akinwande
- Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, Texas 78712, USA
| | - Changhwan Choi
- Division of Materials Science and Engineering, Hanyang University, Seoul 04763, Korea.
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Spassov D, Paskaleva A. Challenges to Optimize Charge Trapping Non-Volatile Flash Memory Cells: A Case Study of HfO 2/Al 2O 3 Nanolaminated Stacks. NANOMATERIALS (BASEL, SWITZERLAND) 2023; 13:2456. [PMID: 37686963 PMCID: PMC10490109 DOI: 10.3390/nano13172456] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/20/2023] [Revised: 08/26/2023] [Accepted: 08/28/2023] [Indexed: 09/10/2023]
Abstract
The requirements for ever-increasing volumes of data storage have urged intensive studies to find feasible means to satisfy them. In the long run, new device concepts and technologies that overcome the limitations of traditional CMOS-based memory cells will be needed and adopted. In the meantime, there are still innovations within the current CMOS technology, which could be implemented to improve the data storage ability of memory cells-e.g., replacement of the current dominant floating gate non-volatile memory (NVM) by a charge trapping memory. The latter offers better operation characteristics, e.g., improved retention and endurance, lower power consumption, higher program/erase (P/E) speed and allows vertical stacking. This work provides an overview of our systematic studies of charge-trapping memory cells with a HfO2/Al2O3-based charge-trapping layer prepared by atomic layer deposition (ALD). The possibility to tailor density, energy, and spatial distributions of charge storage traps by the introduction of Al in HfO2 is demonstrated. The impact of the charge trapping layer composition, annealing process, material and thickness of tunneling oxide on the memory windows, and retention and endurance characteristics of the structures are considered. Challenges to optimizing the composition and technology of charge-trapping memory cells toward meeting the requirements for high density of trapped charge and reliable storage with a negligible loss of charges in the CTF memory cell are discussed. We also outline the perspectives and opportunities for further research and innovations enabled by charge-trapping HfO2/Al2O3-based stacks.
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Affiliation(s)
| | - Albena Paskaleva
- Institute of Solid-State Physics, Bulgarian Academy of Sciences, Tzarigradsko Chaussee 72, 1784 Sofia, Bulgaria;
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George T, Murugan AV. Improved Performance of the Al 2O 3-Protected HfO 2-TiO 2 Base Layer with a Self-Assembled CH 3NH 3PbI 3 Heterostructure for Extremely Low Operating Voltage and Stable Filament Formation in Nonvolatile Resistive Switching Memory. ACS APPLIED MATERIALS & INTERFACES 2022; 14:51066-51083. [PMID: 36397313 DOI: 10.1021/acsami.2c13478] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/16/2023]
Abstract
Herein, we report intriguing observations of an extremely stable nonvolatile bipolar resistive switching (NVBRS) memory device fabricated using HfO2-TiO2 topologically protected by Al2O3 as a stacked base layer for a CH3NH3PbI3 (MAPI) electrolyte layer sandwiched between Ag and fluorine-doped tin oxide (FTO) electrodes. MAPI has been successfully synthesized by a rapid microwave-solvothermal (MW-ST) method within 10 min at 120 °C without requiring any inert gas atmosphere using low-cost precursors and solvents. Subsequently, MAPI powders are dissolved in aprotic solvents (DMF/DMSO = 8:2), and a spin-coated thin film is allowed to recrystallize upon annealing at 120 °C via a solution-based nanoscale self-assembly process. The fabricated memory device with the Ag/MAPI/Al2O3/TiO2-HfO2/FTO configuration shows an enhanced resistance ratio of 105 for >104 s at an extremely lower operating voltage (SET +0.2 V, RESET -0.2 V) when compared to that of the pristine MAPI device (±1 V, 102, 104 s). We show that the memory device also exhibits a remarkable endurance of ≥3500 cycles due to the Al2O3 robust coating on the HfO2-TiO2 layer, facilitating prompt heterojunction formation. Thus, the adopted innovative strategies to prepare structurally and optically stable (∼1.5 years) MAPI under high-humid conditions could offer enhanced performance of NVBRS memory devices for medical, security, internet of things (IoT), and artificial intelligence (AI) applications.
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Affiliation(s)
- Twinkle George
- Advanced Functional Nanomaterials Research Laboratory, Centre for Nanoscience and Technology, Madanjeet School of Green Energy Technologies, Pondicherry University (A Central University), Dr. R. Vankataraman Nagar, Kalapet, Puducherry605014, India
| | - Arumugam Vadivel Murugan
- Advanced Functional Nanomaterials Research Laboratory, Centre for Nanoscience and Technology, Madanjeet School of Green Energy Technologies, Pondicherry University (A Central University), Dr. R. Vankataraman Nagar, Kalapet, Puducherry605014, India
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