Recent progress in flexible pressure sensors based on multiple microstructures: from design to application

Flexible Pressure, Humidity, and Temperature Sensors for Human Health Monitoring

The rapid advancements in artificial intelligence, micro-nano manufacturing, and flexible electronics technology have unleashed unprecedented innovation and opportunities for applying flexible sensors in healthcare, wearable devices, and human-computer interaction. The human body's tactile perception involves physical parameters such as pressure, temperature, and humidity, all of which play an essential role in maintaining human health. Inspired by the sensory function of human skin, many bionic sensors have been developed to simulate human skin's perception to various stimuli and are widely applied in health monitoring. Given the urgent requirements for sensing performance and integration of flexible sensors in the field of wearable devices and health monitoring, here is a timely overview of recent advances in pressure, humidity, temperature, and multi-functional sensors for human health monitoring. It covers the fundamental components of flexible sensors and categorizes them based on different response mechanisms, including resistive, capacitive, voltage, and other types. Specifically, the application of these flexible tactile sensors in the area of human health monitoring is highlighted. Based on this, an extended overview of recent advances in dual/triple-mode flexible sensors integrating pressure, humidity, and temperature tactile sensing is presented. Finally, the challenges and opportunities of flexible sensors are discussed.

Synthesis of PDMS Chain Structure with Introduced Dynamic Covalent Bonding for High-Performance Rehealable Tactile Sensor Application

In addressing the increasing demand for wearable sensing systems, the performance and lifespan of such devices must be improved by enhancing their sensitivity and healing capabilities. The present work introduces an innovative method for synthesizing a healable disulfide bond contained in a polydimethylsiloxane network (PDMS-SS) that incorporates ionic salts, which is designed to serve as a highly effective dielectric layer for capacitive tactile sensors. Within the polymer network structure, the cross-linking agent pentaerythritol tetrakis 3-mercaptopropionate (PTKPM) forms reversible disulfide bonds while simultaneously increasing polymer softness and the dielectric constant. The incorporation of dioctyl sulfosuccinate sodium salt (DOSS) significantly improves the capacitance and sensing properties by forming an electrical double-layer through interactions between the electrode charge and salt ions at the contact interface. The developed polymer material-based tactile sensor shows a strong response signal at low pressure (0.1 kPa) and maintains high sensitivity (0.175 kPa-1) over a wide pressure range (0.1-10 kPa). It also maintains the same sensitivity over 10 000 repeated applications of external pressure and is easily self-healed against mechanical deformation due to the dynamic disulfide covalent bonding, restoring ≈95% of its detection capacity.

Flexible highly-sensitive pressure sensor based on rGO/Fe nanowires composites for wearable human health detection

Flexible pressure sensors applied in wearable detection often face challenges, such as low sensitivity, large device size, poor flexibility, and long response time. This study aims to design and develop high-performance pressure-sensitive materials for wearable human detection applications. Using a sensitive layer composite and microstructural design, rGO/Fe nanowires (NWs) composites were proposed as the pressure-sensitive material. This approach yields a compact sensor with high flexibility, good mechanical properties, and excellent sensing performance. Firstly, rGO/Fe NWs composites were prepared by the Hummers method and an in situ reduction technique under a magnetic field. Secondly, the structural design, component construction, and sensing mechanism of the sensors were thoroughly investigated. Finally, the performance of the flexible pressure sensor was tested, and its application in the wearable field was explored. The results demonstrate that the sensor exhibits excellent performance with a good response to both large and small pressures within the range of 0-30 kPa, providing an effective method for wearable human health detection.

Controlled evolution of surface microstructure and phase boundary of ZnO nanoparticles for the multiple sensitization effects on triethylamine detection

In ZnO gas sensors, donor defects (such as zinc interstitials and oxygen vacancies) are considered active sites for the chemical adsorption and ionization of oxygen on the surface of ZnO, which can significantly enhance the sensor's response. However, the influence of the surface microstructure and phase boundaries of ZnO nanoparticles on the chemical adsorption and ionization of surface oxygen has rarely been explored. In this study, we developed a mixed-phase ZnO nanoparticle gas sensor with a rich phase boundary showing 198-50 ppm improvement in response to triethylamine at 340 °C. This is attributed to the generation of defects originating from lattice mismatch at the ZnO - zincite phase boundaries, which providing more active sites for adsorption of oxygen and triethylamine molecules. This work demonstrates a feasible method of combining surface microstructure regulation with pyrolysis strategies to develop ZnO sensors with significantly enhanced gas response performance.

Two-dimensional MXene nanosheets on nano-scale fibrils in hierarchical porous structure to achieve ultra-high sensitivity

The complex hybrid nanostructure combining a two-dimensional (2D) conductive material and a hierarchical nanoscale skeleton plays an important role to enhance its piezoresistive sensitivity. To construct such a novel hybrid nanostructure, a piezoresistive sensor was designed with the following strategy to take the full advantages of 2D MXene and nanoscale fibrils: ethylene oxide propylene oxide random copolymer (EOPO) was grafted to ethylene-vinyl alcohol (EVOH) molecular chains and was foamed by an environmentally-friendly supercritical CO2 (scCO2) foaming technology to fabricate abundant nanoscale EVOH fibrils surrounding micropores; MXene featured as a 2D structure of nanoscale size that strongly interacted with this hierarchical nanoscale skeleton, and MXene not only convolved on nanoscale fibrils to generate bumps but also MXene covered the end of broken fibrils to build spots, and furthermore, MXene adhered on the soft EOPO embedded EVOH fibrils to form wrinkles, in which these bumps, spots and wrinkles assembled by highly conductive 2D MXene offered sufficient contacts when the hierarchical nanoscale skeleton was compressed (these contacts would then destruct when the skeleton recovered). Such an elaborated hybrid nanostructural design exploits the full potential of 2D MXene and hence achieves an ultra-high sensitivity of 6895.0 kPa-1 for this fabricated MXene piezoresistive sensor.

Porous nanocomposites with enhanced intrinsic piezoresistive sensitivity for bioinspired multimodal tactile sensors

In this work, we propose porous fluororubber/thermoplastic urethane nanocomposites (PFTNs) and explore their intrinsic piezoresistive sensitivity to pressure. Our experiments reveal that the intrinsic sensitivity of the PFTN-based sensor to pressure up to 10 kPa increases up to 900% compared to the porous thermoplastic urethane nanocomposite (PTN) counterpart and up to 275% compared to the porous fluororubber nanocomposite (PFN) counterpart. For pressures exceeding 10 kPa, the resistance-pressure relationship of PFTN follows a logarithmic function, and the sensitivity is 221% and 125% higher than that of PTN and PFN, respectively. With the excellent intrinsic sensitivity of the thick PFTN film, a single sensing unit with integrated electrode design can imitate human skin for touch detection, pressure perception and traction sensation. The sensing range of our multimodal tactile sensor reaches ~150 Pa, and it exhibits a linear fit over 97% for both normal pressure and shear force. We also demonstrate that an electronic skin, made of an array of sensing units, is capable of accurately recognizing complex tactile interactions including pinch, spread, and tweak motions.

Contact Piezoresistive Sensors Based on Electro-Polymerized Polypyrrole and a Regulated Conductive Pathway

The performance of contact resistive pressure sensors heavily relies on the intrinsic characteristics of the active layers, including the mechanical surface structure, conductivity, and elastic properties. However, efficiently and simply regulating the conductivity, morphology, and modulus of the active layers has remained a challenge. In this study, we introduced electro-polymerized polypyrrole (ePPy) to design flexible contact piezoresistive sensors with tailored intrinsic properties. The customizable intrinsic property of ePPy was comprehensively illustrated on the chemical and electronic structure scale, and the impact of ePPy's intrinsic properties on the sensing performance of the device was investigated by determining the correlation between resistivity, roughness, and device sensitivity. Due to the synergistic effects of roughness, conductivity, and elastic properties of the active layers, the flexible ePPy-based pressure sensor exhibited high sensitivity (3.19 kPa-1, 1-10 kPa, R2 = 0.97), fast response time, good durability, and low power consumption. These advantages allowed the sensor to offer an immediate response to human motion such as finger-bending and grasping movements, demonstrating the promising potential of tailorable ePPy-based contact piezoresistive sensors for wearable electronic applications.

Highly sensitive, wide-pressure and low-frequency characterized pressure sensor based on piezoresistive-piezoelectric coupling effects in porous wood

Lightweight and highly compressible materials have received considerable attention in flexible pressure sensing devices. In this study, a series of porous woods (PWs) are produced by chemical removal of lignin and hemicellulose from natural wood by tuning treatment time from 0 to 15 h and extra oxidation through H₂O₂. The prepared PWs with apparent densities varying from 95.9 to 46.16 mg/cm³ tend to form a wave-shaped interwoven structure with improved compressibility (up to 91.89 % strain under 100 kPa). The sensor assembled from PW with treatment time of 12 h (PW-12) exhibits the optimal piezoresistive-piezoelectric coupling sensing properties. For the piezoresistive properties, it has high stress sensitivity of 15.14 kPa^-1, covering a wide linear working pressure range of 0.06-100 kPa. For its piezoelectric potential, PW-12 shows a sensitivity of 0.443 V·kPa^-1 with ultralow frequency detection as low as 0.0028 Hz, and good cyclability over 60,000 cycles under 0.41 Hz. The nature-derived all-wood pressure sensor shows obvious superiority in the flexibility for power supply requirement. More importantly, it presents fully decoupled signals without cross-talks in the dual-sensing functionality. Sensor like this is capable of monitoring various dynamic human motions, making it an extremely promising candidate for the next generation artificial intelligence products.

Structural Engineering in Piezoresistive Micropressure Sensors: A Focused Review

The longstanding demands for micropressure detection in commercial and industrial applications have led to the rapid development of relevant sensors. As a type of long-term favored device based on microelectromechanical system technology, the piezoresistive micropressure sensor has become a powerful measuring platform owing to its simple operational principle, favorable sensitivity and accuracy, mature fabrication, and low cost. Structural engineering in the sensing diaphragm and piezoresistor serves as a core issue in the construction of the micropressure sensor and undertakes the task of promoting the overall performance for the device. This paper focuses on the representative structural engineering in the development of the piezoresistive micropressure sensor, largely concerning the trade-off between measurement sensitivity and nonlinearity. Functional elements on the top and bottom layers of the diaphragm are summarized, and the influences of the shapes and arrangements of the piezoresistors are also discussed. The addition of new materials endows the research with possible solutions for applications in harsh environments. A prediction for future tends is presented, including emerging advances in materials science and micromachining techniques that will help the sensor become a stronger participant for the upcoming sensor epoch.