Demonstration of microcantilever array with simultaneous readout using an in-plane photonic transduction method

3D-Printed Scanning-Probe Microscopes with Integrated Optical Actuation and Read-Out

Scanning-probe microscopy (SPM) is the method of choice for high-resolution imaging of surfaces in science and industry. However, SPM systems are still considered as rather complex and costly scientific instruments, realized by delicate combinations of microscopic cantilevers, nanoscopic tips, and macroscopic read-out units that require high-precision alignment prior to use. This study introduces a concept of ultra-compact SPM engines that combine cantilevers, tips, and a wide variety of actuator and read-out elements into one single monolithic structure. The devices are fabricated by multiphoton laser lithography as it is a particularly flexible and accurate additive nanofabrication technique. The resulting SPM engines are operated by optical actuation and read-out without manual alignment of individual components. The viability of the concept is demonstrated in a series of experiments that range from atomic-force microscopy engines offering atomic step height resolution, their operation in fluids, and to 3D printed scanning near-field optical microscopy. The presented approach is amenable to wafer-scale mass fabrication of SPM arrays and capable to unlock a wide range of novel applications that are inaccessible by current approaches to build SPMs.

Challenges for nanomechanical sensors in biological detection

Nanomechanical biosensing relies on changes in the movement and deformation of micro- and nanoscale objects when they interact with biomolecules and other biological targets. This field of research has provided ever-increasing records in the sensitivity of label-free detection but it has not yet been established as a practical alternative for biological detection. We analyze here the latest advancements in the field, along with the challenges remaining for nanomechanical biosensors to become a commonly used tool in biology and biochemistry laboratories.

Transient deflection response in microcantilever array integrated with polydimethylsiloxane (PDMS) microfluidics

We report the integration of a nanomechanical sensor consisting of 16 silicon microcantilevers with polydimethylsiloxane (PDMS) microfluidics. For microcantilevers positioned near the bottom of a microfluidic flow channel, a transient differential analyte concentration for the top versus bottom surface of each microcantilever is created when an analyte-bearing fluid is introduced into the flow channel (which is initially filled with a non-analyte containing solution). We use this effect to characterize a bare (nonfunctionalized) microcantilever array in which the microcantilevers are simultaneously read out with our recently developed high sensitivity in-plane photonic transduction method. We first examine the case of non-specific binding of bovine serum albumin (BSA) to silicon. The average maximum transient microcantilever deflection in the array is -1.6 nm, which corresponds to a differential surface stress of only -0.23 mN m(-1). This is in excellent agreement with the maximum differential surface stress calculated based on a modified rate equation in conjunction with finite element simulation. Following BSA adsorption, buffer solutions with different pH are introduced to further study microcantilever array transient response. Deflections of 20-100 nm are observed (2-14 mN m(-1) differential surface stress). At a flow rate of 5 μL min(-1), the average measured temporal width (FWHM) of the transient response is 5.3 s for BSA non-specific binding and 0.74 s for pH changes.

Scanning probe microscopy based on magnetoresistive sensing

Integrated sensors are essential for scanning probe microscopy (SPM) based systems that employ arrays of microcantilevers for high throughput. Common integrated sensors, such as piezoresistive, piezoelectric, capacitive and thermoelectric sensors, suffer from low bandwidth and/or low resolution. In this paper, a novel magnetoresistive-sensor-based scanning probe microscopy (MR-SPM) technique is presented. The principle of MR-SPM is first demonstrated using experiments with magnetic cantilevers and commercial MR sensors. A new cantilever design tailored to MR-SPM is then presented and micromagnetic simulations are employed to evaluate the achievable resolution. A remarkable resolution of 0.84 Å over a bandwidth of 1 MHz is estimated, which would significantly outperform state-of-the-art optical deflection sensors. Due to its combination of high resolution at high bandwidth, and its amenability to integration in probe arrays, MR-SPM holds great promise for low-cost, high-throughput SPM.

Sensitivity enhancement of differential splitter-based transduction for photonic microcantilever arrays

We report enhanced sensitivity for in-plane photonic transduction of static deflection of microscale cantilevers by modifying the mode structure of double-step rib waveguides used to capture light from the free end of waveguide microcantilevers. A measured sensitivity of 0.77 x 10( - 3) nm( - 1) is achieved, comparable to the best reported for the optical lever method and over two orders of magnitude larger than for piezoresistive transduction. The corresponding minimum detectable deflection is 59 pm for a 3.5 Hz measurement bandwidth.

In-plane all-photonic transduction with differential splitter using double-step rib waveguide for photonic microcantilever arrays

We report a differential splitter consisting of an asymmetric double-step multimode rib waveguide and a Y-branch splitter for in-plane photonic transduction of photonic microcantilever deflection. Arrays of photonic microcantilevers are integrated with differential splitters and an optical waveguide network to demonstrate uniformity and sensitivity of transduction. Measurement results from multiple arrays indicate a sensitivity of 0.32x10(-3) nm(-1) and minimum detectable deflection of 141 pm for a 3.5 Hz measurement bandwidth.