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Shi Y, Tsuji M, Cho H, Ueda S, Kim J, Hosono H. Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway. ACS NANO 2024; 18:9736-9745. [PMID: 38518185 PMCID: PMC10993643 DOI: 10.1021/acsnano.4c02101] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/13/2024] [Revised: 03/14/2024] [Accepted: 03/20/2024] [Indexed: 03/24/2024]
Abstract
Amorphous oxide semiconductors (AOSs) with low off-currents and processing temperatures offer promising alternative materials for next-generation high-density memory devices. The complex vertical stacking process of memory devices significantly increases the probability of encountering internal contact issues. Conventional surface treatment methods developed for planar devices necessitate efficient approaches to eliminate contact issues at deep internal interfaces in the nanoscale complex structures of AOS devices. In this work, we report the pioneering use of palladium thin film as a high-efficiency active hydrogen transfer pathway from the outside to the internal contact interface via low-temperature postannealing in the H2 atmosphere, and the formation of highly conductive metallic interlayer effectively solves the contact issues at the deeply buried interfaces in devices. The application of this method reduced the contact resistance of Pd electrodes/amorphous indium-gallium-zinc oxide (a-IGZO) thin-film by 2 orders of magnitude, and thereby the mobility of thin-film transistor was increased from 3.2 cm2 V-1 s-1 to nearly 20 cm2 V-1 s-1, preserving an excellent bias stress stability. This technology has wide applicability for the solution of contact resistance issues in oxide semiconductor devices with complex architectures.
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Affiliation(s)
- Yuhao Shi
- MDX Research
Center for Element Strategy, International Research Frontiers Initiative, Tokyo Institute of Technology, Yokohama 226-8503, Japan
| | - Masatake Tsuji
- MDX Research
Center for Element Strategy, International Research Frontiers Initiative, Tokyo Institute of Technology, Yokohama 226-8503, Japan
| | - Hanjun Cho
- MDX Research
Center for Element Strategy, International Research Frontiers Initiative, Tokyo Institute of Technology, Yokohama 226-8503, Japan
| | - Shigenori Ueda
- Research
Center for Electronic and Optical Materials, National Institute for Materials Science (NIMS), Tsukuba, Ibaraki 305-0044, Japan
| | - Junghwan Kim
- MDX Research
Center for Element Strategy, International Research Frontiers Initiative, Tokyo Institute of Technology, Yokohama 226-8503, Japan
- Graduate
School of Semiconductor Materials and Devices Engineering, Ulsan National Institute of Science and Technology, Ulsan 44919, Republic of Korea
| | - Hideo Hosono
- MDX Research
Center for Element Strategy, International Research Frontiers Initiative, Tokyo Institute of Technology, Yokohama 226-8503, Japan
- Research
Center for Materials Nanoarchitectonics, NIMS, Tsukuba, Ibaraki 305-0044, Japan
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2
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Ding X, Shi Y, Sun H, Ding X. A dual-frequency phase-difference method for ultrasonic hydrogen-concentration detection. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2021; 92:084901. [PMID: 34470422 DOI: 10.1063/5.0047094] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/10/2021] [Accepted: 07/12/2021] [Indexed: 06/13/2023]
Abstract
Hydrogen has a wide range of energy applications, but hydrogen energy systems can suffer from high-concentration leaks that pose security risks, therefore making the measurement of high-concentration hydrogen very important. Traditional ultrasonic gas-detection methods are based mainly on ultrasonic time-of-flight measurements and can be divided into threshold-detection and phase-difference techniques. Threshold detection suffers from low resolution and a complex structure in gas detection, while the phase-difference technique has high resolution and a simple structure but can only measure the time of flight within one period of the ultrasonic signal. In this study, a dual-frequency phase-difference technique is proposed that solves the problem of multi-period phase detection with the phase-difference technique and can be used to detect high-concentration hydrogen. Simulation analysis and an experiment show that the proposed technique can measure the multi-period phase difference accurately. The maximum hydrogen concentration can reach 50% with an uncertainty of less than 5%, which meets commercial requirements.
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Affiliation(s)
- Xin Ding
- The Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentation of Heilongjiang Province, Harbin University of Science and Technology, Harbin 150080, China
| | - Yunbo Shi
- The Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentation of Heilongjiang Province, Harbin University of Science and Technology, Harbin 150080, China
| | - Hui Sun
- The Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentation of Heilongjiang Province, Harbin University of Science and Technology, Harbin 150080, China
| | - Xibo Ding
- The Higher Educational Key Laboratory for Measuring & Control Technology and Instrumentation of Heilongjiang Province, Harbin University of Science and Technology, Harbin 150080, China
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3
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Miliutina E, Guselnikova O, Chufistova S, Kolska Z, Elashnikov R, Burtsev V, Postnikov P, Svorcik V, Lyutakov O. Fast and All-Optical Hydrogen Sensor Based on Gold-Coated Optical Fiber Functionalized with Metal-Organic Framework Layer. ACS Sens 2019; 4:3133-3140. [PMID: 31793768 DOI: 10.1021/acssensors.9b01074] [Citation(s) in RCA: 18] [Impact Index Per Article: 3.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/02/2023]
Abstract
Remote detection of hydrogen, without the utilization of electronic component or elevated temperature, is one of the hot topics in the hydrogen technology and safety. In this work, the design and realization of the optical fiber-based hydrogen sensor with unique characteristics are proposed. The proposed sensor is based on the gold-coated multimode fiber, providing the plasmon properties, decorated by the IRMOF-20 layer with high selectivity and affinity toward hydrogen. The IRMOF-20 layer was grown by a surface-assisted technique, and its formation and properties were studied using X-ray photoelectron spectroscopy, Raman, X-ray diffraction, and Brunauer-Emmett-Teller techniques. Simultaneous ellipsometry results indicate the apparent changes of the refractive index of the IRMOF-20 layer due to hydrogen sorption. As results, the presence of hydrogen led to the pronounced changes of plasmon band wavelength position as well as its intensity increase. The proposed hydrogen sensors were favorably distinguished by a high response/recovery rate, excellent selectivity toward the hydrogen, very low temperature dependency, functionality at room or lower temperature, insensitivity toward the humidity, and the presence of CO2, CO, or NO2. Additionally, the proposed hydrogen sensor showed good reversibility, reproducibility, and long-term stability.
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Affiliation(s)
- Elena Miliutina
- Department of Solid State Engineering, University of Chemistry and Technology, 16628 Prague, Czech Republic
- Research School of Chemistry and Applied Biomedical Sciences, Tomsk Polytechnic University, 634050 Tomsk, Russian Federation
| | - Olga Guselnikova
- Department of Solid State Engineering, University of Chemistry and Technology, 16628 Prague, Czech Republic
- Research School of Chemistry and Applied Biomedical Sciences, Tomsk Polytechnic University, 634050 Tomsk, Russian Federation
| | - Sofiia Chufistova
- Department of Solid State Engineering, University of Chemistry and Technology, 16628 Prague, Czech Republic
| | - Zdenka Kolska
- Materials Centre, Faculty of Science, J. E Purkyně University, 400 96 Ústí nad Labem, Czech Republic
| | - Roman Elashnikov
- Department of Solid State Engineering, University of Chemistry and Technology, 16628 Prague, Czech Republic
| | - Vasilii Burtsev
- Department of Solid State Engineering, University of Chemistry and Technology, 16628 Prague, Czech Republic
| | - Pavel Postnikov
- Department of Solid State Engineering, University of Chemistry and Technology, 16628 Prague, Czech Republic
- Research School of Chemistry and Applied Biomedical Sciences, Tomsk Polytechnic University, 634050 Tomsk, Russian Federation
| | - Vaclav Svorcik
- Department of Solid State Engineering, University of Chemistry and Technology, 16628 Prague, Czech Republic
| | - Oleksiy Lyutakov
- Department of Solid State Engineering, University of Chemistry and Technology, 16628 Prague, Czech Republic
- Research School of Chemistry and Applied Biomedical Sciences, Tomsk Polytechnic University, 634050 Tomsk, Russian Federation
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4
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Rebello Sousa Dias M, Leite MS. Alloying: A Platform for Metallic Materials with On-Demand Optical Response. Acc Chem Res 2019; 52:2881-2891. [PMID: 31305980 DOI: 10.1021/acs.accounts.9b00153] [Citation(s) in RCA: 26] [Impact Index Per Article: 5.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/06/2023]
Abstract
Metallic materials with engineered optical properties have the potential to enhance the performance of energy harvesting and storage devices operating at the macro- and nanoscale, such as solar cells, photocatalysts, water splitting, and hydrogen storage systems. For both thin films and subwavelength nanostructures, upon illumination, the coherent oscillation of charge carriers at the interface with a dielectric material gives rise to resonances named surface plasmon polariton (SPP) and localized surface plasmon resonance (LSPR), respectively. These resonances result in unique light absorption, scattering, and transmission responses over the electromagnetic spectrum, which, in turn, can be exploited to tailor the behavior of active metallic components in optoelectronic devices containing Ag, Au, Cu, Al, Mg, among other metals. The wavelength in which the resonances occur primarily depends on the metal itself (i.e., the dielectric function or permittivity), the dielectric medium surrounding the metals, and the size, geometry, and periodicity of the metallic nanostructures. Nevertheless, the aforementioned parameters allow a limited modulation of both SPP and LSPR over a narrow window of frequencies. To overcome this constraint, we have proposed and realized the alloying of metals via physical deposition methods as a paradigm to almost arbitrarily tuning their optical behavior in the UV-NIR, which leads to permittivity values currently not available. Our approach offers an additional knob, chemical composition, to engineer light-matter interactions in metallic materials. This Account highlights recent progress in using alloying as a pathway to control the optical behavior of metallic thin films and nanostructures for energy harvesting and storage applications, including (photo)catalysis, photovoltaics, superabsorbers, hydrogen storage, among other systems. We choose to primarily focus on the optical properties of the metallic mixtures and in their near- to far-field responses in the UV-NIR range of the spectrum as they represent key parameters for materials' selection for the devices above. By alloying, it is possible to obtain metallic materials with LSPR not available for pure metals, which can enable the further control of the electromagnetic spectrum. First, we discuss how the permittivity of binary mixtures of coinage metals (Au, Ag, and Cu) can be tailored based on the chemical composition of their pure counterparts. Second, we present how novel metallic materials can be designed through band structure engineering through density functional theory (DFT), a paradigm that could benefit from artificial intelligence methods. Concerning alloyed thin films, we discuss the promise of earth-abundant metals and provide an example of the superior performance of AlCu in superabsorbers. In the realm of nanostructures, we focus the discussion on physical deposition methods, where we provide a detailed analysis of how chemical composition can affect the far- and near-field responses of metallic building blocks. Finally, we provide a brief outlook of promising next steps in the field.
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Affiliation(s)
| | - Marina S. Leite
- Department of Materials Science and Engineering, University of Maryland, College Park, Maryland 20742, United States
- Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, Maryland 20742, United States
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5
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Pawar D, Kale SN. A review on nanomaterial-modified optical fiber sensors for gases, vapors and ions. Mikrochim Acta 2019; 186:253. [DOI: 10.1007/s00604-019-3351-7] [Citation(s) in RCA: 47] [Impact Index Per Article: 9.4] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/03/2018] [Accepted: 02/28/2019] [Indexed: 12/23/2022]
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6
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Song H, Luo Z, Liu M, Zhang G, Peng W, Wang B, Zhu Y. Centrifugal Deposited Au-Pd Core-Shell Nanoparticle Film for Room-Temperature Optical Detection of Hydrogen Gas. SENSORS 2018; 18:s18051448. [PMID: 29734789 PMCID: PMC5982576 DOI: 10.3390/s18051448] [Citation(s) in RCA: 12] [Impact Index Per Article: 2.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 04/04/2018] [Revised: 04/27/2018] [Accepted: 05/04/2018] [Indexed: 12/23/2022]
Abstract
In the present work, centrifugal deposited Au-Pd core-shell nanoparticle (NP) film was proposed for the room-temperature optical detection of hydrogen gas. The size dimension of 44, 48, 54, and 62 nm Au-Pd core-shell nanocubes with 40 nm Au core were synthesized following a solution-based seed-mediated growth method. Compared to a pure Pd NP, this core-shell structure with an inert Au core could decrease the H diffusion length in the Pd shell. Through a modified centrifugal deposition process, continues film samples with different core-shell NPs were deposited on 10 mm diameter quartz substrates. Under various hydrogen concentration conditions, the optical response properties of these samples were characterized by an intensity-based optical fiber bundle sensor. Experimental results show that the continues film that was composed of 62 nm Au-Pd core-shell NPs has achieved a stable and repeatable reflectance response with low zero drift in the range of 4 to 0.1% hydrogen after a stress relaxation mechanism at first few loading/unloading cycles. Because of the short H diffusion length due to the thinner Pd shell, the film sample composed of 44 nm Au-Pd NPs has achieved a dramatically decreased response/recovery time to 4 s/30 s. The experiments present the promising prospect of this simple method to fabricate optical hydrogen sensors with controllable high sensitivity and response rate at low cost.
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Affiliation(s)
- Han Song
- School of Mechanical and Electronic Engineering, Wuhan University of Technology, Wuhan 430070, China.
| | - Zhijie Luo
- School of Mechanical and Electronic Engineering, Wuhan University of Technology, Wuhan 430070, China.
| | - Mingyao Liu
- School of Mechanical and Electronic Engineering, Wuhan University of Technology, Wuhan 430070, China.
| | - Gang Zhang
- School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
| | - Wang Peng
- School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China.
| | - Boyi Wang
- School of Engineering, Griffith University, Nathan, QLD 4222, Australia.
| | - Yong Zhu
- School of Engineering, Griffith University, Nathan, QLD 4222, Australia.
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7
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Tan X, Li M, Arsad N, Wen X, Lu H. An effective temperature compensation approach for ultrasonic hydrogen sensors. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2018; 89:035005. [PMID: 29604764 DOI: 10.1063/1.5017639] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
Hydrogen is a kind of promising clean energy resource with a wide application prospect, which will, however, cause a serious security issue upon the leakage of hydrogen gas. The measurement of its concentration is of great significance. In a traditional approach of ultrasonic hydrogen sensing, a temperature drift of 0.1 °C results in a concentration error of about 250 ppm, which is intolerable for trace amount of gas sensing. In order to eliminate the influence brought by temperature drift, we propose a feasible approach named as linear compensation algorithm, which utilizes the linear relationship between the pulse count and temperature to compensate for the pulse count error (ΔN) caused by temperature drift. Experimental results demonstrate that our proposed approach is capable of improving the measurement accuracy and can easily detect sub-100 ppm of hydrogen concentration under variable temperature conditions.
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Affiliation(s)
- Xiaolong Tan
- Department of Physics, Wuhan University of Technology, Wuhan 430070, People's Republic of China
| | - Min Li
- Department of Physics, Wuhan University of Technology, Wuhan 430070, People's Republic of China
| | - Norhana Arsad
- Department of Electric, Electronic and System Engineering, Faculty of Engineering, Universiti Kebangsaan Malaysia, 43600 UKM, Bangi, Selangor, Malaysia
| | - Xiaoyan Wen
- Department of Physics, Wuhan University of Technology, Wuhan 430070, People's Republic of China
| | - Haifei Lu
- Department of Physics, Wuhan University of Technology, Wuhan 430070, People's Republic of China
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8
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Modeling of hydrogen atom diffusion and response behavior of hydrogen sensors in Pd-Y alloy nanofilm. Sci Rep 2016; 6:37043. [PMID: 27845408 PMCID: PMC5109211 DOI: 10.1038/srep37043] [Citation(s) in RCA: 17] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/22/2016] [Accepted: 10/18/2016] [Indexed: 11/25/2022] Open
Abstract
To detect hydrogen gas leakage rapidly, many types of hydrogen sensors containing palladium alloy film have been proposed and fabricated to date. However, the mechanisms and factors that determine the response rate of such hydrogen sensor have not been established theoretically. The manners in which response time is forecasted and sensitive film is designed are key issues in developing hydrogen sensors with nanometer film. In this paper, a unilateral diffusion model of hydrogen atoms in Pd alloy based on Fick’s second law is proposed to describe the Pd–H reaction process. Model simulation shows that the hydrogen sensor response time with Pd alloy film is dominated by two factors (film thickness and hydrogen diffusion coefficient). Finally, a series of response rate experiments with varying thicknesses of Pd–Y (yttrium) alloy film are implemented to verify model validity. Our proposed model can help researchers in the precise optimization of film thickness to realize a simultaneously speedy and sensitive hydrogen sensor. This study also aids in evaluating the influence of manufacturing errors on performances and comparing the performances of sensors with different thicknesses.
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9
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Huang PC, Chen YP, Zhang G, Song H, Liu Y. Note: Durability analysis of optical fiber hydrogen sensor based on Pd-Y alloy film. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2016; 87:026104. [PMID: 26931903 DOI: 10.1063/1.4941749] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
The Pd-Y alloy sensing film has an excellent property for hydrogen detection, but just for one month, the sensing film's property decreases seriously. To study the failure of the sensing film, the XPS spectra analysis was used to explore the chemical content of the Pd-Y alloy film, and analysis results demonstrate that the yttrium was oxidized. The paper presented that such an oxidized process was the potential reason of the failure of the sensing film. By understanding the reason of the failure of the sensing film better, we could improve the manufacturing process to enhance the property of hydrogen sensor.
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Affiliation(s)
- Peng-cheng Huang
- School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China
| | - You-ping Chen
- School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China
| | - Gang Zhang
- School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China
| | - Han Song
- School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China
| | - Yi Liu
- School of Mechatronic Engineering, Wuhan University of Technology, Wuhan, China
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10
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Ma GM, Jiang J, Li CR, Song HT, Luo YT, Wang HB. Pd/Ag coated fiber Bragg grating sensor for hydrogen monitoring in power transformers. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2015; 86:045003. [PMID: 25933889 DOI: 10.1063/1.4918802] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
Compared with conventional DGA (dissolved gas analysis) method for on-line monitoring of power transformers, FBG (fiber Bragg grating) hydrogen sensor represents marked advantages over immunity to electromagnetic field, time-saving, and convenience to defect location. Thus, a novel FBG hydrogen sensor based on Pd/Ag (Palladium/Silver) along with polyimide composite film to measure dissolved hydrogen concentration in large power transformers is proposed in this article. With the help of Pd/Ag composite coating, the enhanced performance on mechanical strength and sensitivity is demonstrated, moreover, the response time and sensitivity influenced by oil temperature are solved by correction lines. Sensitivity measurement and temperature calibration of the specific hydrogen sensor have been done respectively in the lab. And experiment results show a high sensitivity of 0.055 pm/(μl/l) with instant response time about 0.4 h under the typical operating temperature of power transformers, which proves a potential utilization inside power transformers to monitor the health status by detecting the dissolved hydrogen concentration.
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Affiliation(s)
- G M Ma
- State Key Laboratory of Alternate Electrical Power System with Renewable Energy Sources, North China Electric Power University, Beijing 102206, People's Republic of China
| | - J Jiang
- State Key Laboratory of Alternate Electrical Power System with Renewable Energy Sources, North China Electric Power University, Beijing 102206, People's Republic of China
| | - C R Li
- State Key Laboratory of Alternate Electrical Power System with Renewable Energy Sources, North China Electric Power University, Beijing 102206, People's Republic of China
| | - H T Song
- State Key Laboratory of Alternate Electrical Power System with Renewable Energy Sources, North China Electric Power University, Beijing 102206, People's Republic of China
| | - Y T Luo
- Electric Power Research Institute of Guangdong Power Grid Co., Ltd., Guangzhou 510080, People's Republic of China
| | - H B Wang
- Electric Power Research Institute of Guangdong Power Grid Co., Ltd., Guangzhou 510080, People's Republic of China
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