Scanning-free grazing emission x-ray fluorescence by means of an angular dispersive arrangement with a two-dimensional position-sensitive area detector

Exploring the Depths of Corrosion: A Novel GE-XANES Technique for Investigating Compositionally Complex Alloys

In this study, we propose the use of nondestructive, depth-resolved, element-specific characterization using grazing exit X-ray absorption near-edge structure spectroscopy (GE-XANES) to investigate the corrosion process in compositionally complex alloys (CCAs). By combining grazing exit X-ray fluorescence spectroscopy (GE-XRF) geometry and a pnCCD detector, we provide a scanning-free, nondestructive, depth-resolved analysis in a sub-micrometer depth range, which is especially relevant for layered materials, such as corroded CCAs. Our setup allows for spatial and energy-resolved measurements and directly extracts the desired fluorescence line, free from scattering events and other overlapping lines. We demonstrate the potential of our approach on a compositionally complex CrCoNi alloy and a layered reference sample with known composition and specific layer thickness. Our findings indicate that this new GE-XANES approach has exciting opportunities for studying surface catalysis and corrosion processes in real-world materials.

Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces

The grazing emission X-ray fluorescence (GEXRF) technique offers a promising approach to determining the spatial distribution of various chemical elements in nanostructures. In this paper, we present a comparison with grazing incidence small-angle X-ray scattering (GISAXS), an established method for dimensional nanometrology, on periodic TiO₂ nanostructures fabricated by a self-aligned double patterning (SADP) process. We further test the potential of GEXRF for process control in the presence of residual chromium on the structures. The angle-resolved fluorescence emission as well as the scattered radiation from the surface are collected with photon-counting hybrid pixel area detectors using scanning-free detection schemes. By modelling the X-ray standing wave (XSW) field in the vicinity of and inside the nanostructure, it is possible to obtain both the angle-resolved fluorescence intensities and the far-field scattering intensities from the same model. The comparison also illustrates that for ensemble photon-based measurement methods, accounting for roughness effects and imperfections can be essential when modelling advanced nanostructured surfaces.

Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples

Scan-free grazing-emission X-ray fluorescence spectroscopy (GEXRF) is an established technique for the investigation of the elemental depth-profiles of various samples. Recently it has been applied to investigating structured nanosamples in the tender X-ray range. However, lighter elements such as oxygen, nitrogen or carbon cannot be efficiently investigated in this energy range, because of the ineffective excitation. Moreover, common CCD detectors are not able to discriminate between fluorescence lines below 1 keV. Oxygen and nitrogen are important components of insulation and passivation layers, for example, in silicon oxide or silicon nitride. In this work, scan-free GEXRF is applied in proof-of-concept measurements for the investigation of lateral ordered 2D nanostructures in the soft X-ray range. The sample investigated is a Si3N4 lamellar grating, which represents 2D periodic nanostructures as used in the semiconductor industry. The emerging two-dimensional fluorescence patterns are recorded with a CMOS detector. To this end, energy-dispersive spectra are obtained via single-photon event evaluation. In this way, spatial and therefore angular information is obtained, while discrimination between different photon energies is enabled. The results are compared to calculations of the sample model performed by a Maxwell solver based on the finite-elements method. A first measurement is carried out at the UE56-2 PGM-2 beamline at the BESSY II synchrotron radiation facility to demonstrate the feasibility of the method in the soft X-ray range. Furthermore, a laser-produced plasma source (LPP) is utilized to investigate the feasibility of this technique in the laboratory. The results from the BESSY II measurements are in good agreement with the simulations and prove the applicability of scan-free GEXRF in the soft X-ray range for quality control and process engineering of 2D nanostructures. The LPP results illustrate the chances and challenges concerning a transfer of the methodology to the laboratory.

Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

The spatial and compositional complexity of 3D structures employed in today's nanotechnologies has developed to a level at which the requirements for process development and control can no longer fully be met by existing metrology techniques. For instance, buried parts in stratified nanostructures, which are often crucial for device functionality, can only be probed in a destructive manner in few locations as many existing nondestructive techniques only probe the objects surfaces. Here, it is demonstrated that grazing exit X-ray fluorescence can simultaneously characterize an ensemble of regularly ordered nanostructures simultaneously with respect to their dimensional properties and their elemental composition. This technique is nondestructive and compatible to typically sized test fields, allowing the same array of structures to be studied by other techniques. For crucial parameters, the technique provides sub-nm discrimination capabilities and it does not require access-limited large-scale research facilities as it is compatible to laboratory-scale instrumentation.

Reconstruction of evolving nanostructures in ultrathin films with X-ray waveguide fluorescence holography

Controlled synthesis of nanostructure ultrathin films is critical for applications in nanoelectronics, photonics, and energy generation and storage. The paucity of structural probes that are sensitive to nanometer-thick films and also capable of in-operando conditions with high spatiotemporal resolutions limits the understanding of morphology and dynamics in ultrathin films. Similar to X-ray fluorescence holography for crystals, where holograms are formed through the interference between the reference and the object waves, we demonstrated that an ultrathin film, being an X-ray waveguide, can also generate fluorescence holograms as a result of the establishment of X-ray standing waves. Coupled with model-independent reconstruction algorithms based on rigorous dynamical scattering theories, the thin-film-based X-ray waveguide fluorescence holography becomes a unique in situ and time-resolved imaging probe capable of elucidating the real-time nanostructure kinetics with unprecedented resolutions. Combined with chemical sensitive spectroscopic analysis, the reconstruction can yield element-specific morphology of embedding nanostructures in ultrathin films.

The authors introduce X-ray waveguide fluorescence holography based on the waveguiding properties of thin films. Combined with model-independent reconstruction algorithms, they show that the method can be used for real-time nanostructure kinetic studies.

Laboratory Setup for Scanning-Free Grazing Emission X-ray Fluorescence

Grazing incidence and grazing emission X-ray fluorescence spectroscopy (GI/GE-XRF) are techniques that enable nondestructive, quantitative analysis of elemental depth profiles with a resolution in the nanometer regime. A laboratory setup for soft X-ray GEXRF measurements is presented. Reasonable measurement times could be achieved by combining a highly brilliant laser produced plasma (LPP) source with a scanning-free GEXRF setup, providing a large solid angle of detection. The detector, a pnCCD, was operated in a single photon counting mode in order to utilize its energy dispersive properties. GEXRF profiles of the Ni-L_α,β line of a nickel-carbon multilayer sample, which displays a lateral (bi)layer thickness gradient, were recorded at several positions. Simulations of theoretical profiles predicted a prominent intensity minimum at grazing emission angles between 5° and 12°, depending strongly on the bilayer thickness of the sample. This information was used to retrieve the bilayer thickness gradient. The results are in good agreement with values obtained by X-ray reflectometry, conventional X-ray fluorescence and transmission electron microscopy measurements and serve as proof-of-principle for the realized GEXRF setup. The presented work demonstrates the potential of nanometer resolved elemental depth profiling in the soft X-ray range with a laboratory source, opening, for example, the possibility of in-line or even in situ process control in semiconductor industry.

Nanoparticle characterization by means of scanning free grazing emission X-ray fluorescence

Nanoparticles are considered for applications in domains as various as medical and pharmaceutical sciences, opto- and microelectronics, catalysis, photovoltaics, spintronics or nano- and biotechnology. The applications realized with nanocrystals depend strongly on the physical dimensions (shape and size) and elemental constitution. We demonstrate here that grazing emission X-ray fluorescence (GEXRF) is an element sensitive technique that presents the potential for a reliable and accurate determination of the morphology of nanoparticles deposited on a flat substrate (ready-to-use devices). Thanks to the scanning-free approach of the used GEXRF setup, the composition, shape and average size of nanoparticles are determined in short time intervals, minimizing the exposure to radiation. The (scanning-free) GEXRF technique allows for in situ investigations of the nanoparticulate systems thanks to the penetration properties of both the probe X-ray beam and the emitted X-ray fluorescence signal.