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Carulla M, Barten R, Baruffaldi F, Bergamaschi A, Borghi G, Boscardin M, Brückner M, Butcher TA, Centis Vignali M, Dinapoli R, Ebner S, Ficorella F, Fröjdh E, Greiffenberg D, Hammad Ali O, Hasanaj S, Heymes J, Hinger V, King T, Kozlowski P, Lopez Cuenca C, Mezza D, Moustakas K, Mozzanica A, Paternoster G, Paton KA, Ronchin S, Ruder C, Schmitt B, Sieberer P, Thattil D, Vogelsang K, Xie X, Zhang J. Quantum Efficiency Measurement and Modeling of Silicon Sensors Optimized for Soft X-ray Detection. SENSORS (BASEL, SWITZERLAND) 2024; 24:942. [PMID: 38339659 PMCID: PMC10856868 DOI: 10.3390/s24030942] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/30/2023] [Revised: 01/19/2024] [Accepted: 01/22/2024] [Indexed: 02/12/2024]
Abstract
Hybrid pixel detectors have become indispensable at synchrotron and X-ray free-electron laser facilities thanks to their large dynamic range, high frame rate, low noise, and large area. However, at energies below 3 keV, the detector performance is often limited because of the poor quantum efficiency of the sensor and the difficulty in achieving single-photon resolution due to the low signal-to-noise ratio. In this paper, we address the quantum efficiency of silicon sensors by refining the design of the entrance window, mainly by passivating the silicon surface and optimizing the dopant profile of the n+ region. We present the measurement of the quantum efficiency in the soft X-ray energy range for silicon sensors with several process variations in the fabrication of planar sensors with thin entrance windows. The quantum efficiency for 250 eV photons is increased from almost 0.5% for a standard sensor to up to 62% as a consequence of these developments, comparable to the quantum efficiency of backside-illuminated scientific CMOS sensors. Finally, we discuss the influence of the various process parameters on quantum efficiency and present a strategy for further improvement.
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Affiliation(s)
- Maria Carulla
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Rebecca Barten
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Filippo Baruffaldi
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Anna Bergamaschi
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Giacomo Borghi
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Maurizio Boscardin
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Martin Brückner
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Tim A. Butcher
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Matteo Centis Vignali
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Roberto Dinapoli
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Simon Ebner
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Francesco Ficorella
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Erik Fröjdh
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Dominic Greiffenberg
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Omar Hammad Ali
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Shqipe Hasanaj
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Julian Heymes
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Viktoria Hinger
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Thomas King
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Pawel Kozlowski
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Carlos Lopez Cuenca
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Davide Mezza
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Konstantinos Moustakas
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Aldo Mozzanica
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Giovanni Paternoster
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Kirsty A. Paton
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Sabina Ronchin
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Christian Ruder
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Bernd Schmitt
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Patrick Sieberer
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Dhanya Thattil
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Konrad Vogelsang
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Xiangyu Xie
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Jiaguo Zhang
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
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Demirezen S, Ulusoy M, Durmuş H, Cavusoglu H, Yılmaz K, Altındal Ş. Electrical and Photodetector Characteristics of Schottky Structures Interlaid with P(EHA) and P(EHA- co-AA) Functional Polymers by the iCVD Method. ACS OMEGA 2023; 8:46499-46512. [PMID: 38107908 PMCID: PMC10720022 DOI: 10.1021/acsomega.3c04935] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 07/10/2023] [Revised: 11/14/2023] [Accepted: 11/20/2023] [Indexed: 12/19/2023]
Abstract
In this study, poly(2-ethylhexyl acrylate) (PEHA) homopolymer and its copolymer combined with acrylic acid P(EHA-co-AA) were employed as interfaces in two separate Schottky structures. First, both interfaces were grown by initiated chemical vapor deposition (iCVD), which provides much better deposition control and homogeneous coating compared to solution-phase methods. In addition to this advantageous method, the effects of two different polymers, one of which is better able to adhere to the crystal surface on which it is formed than the other, on the optoelectronic properties have been studied. Then, their current-voltage (I-V) and capacitance/conductance-voltage (C/(G/ω)-V) characteristics were investigated both in the dark and under illumination. The basic electrical parameters and the illumination-induced profile of the surface state (Nss) were probed by I-V and C-V measurements for two samples. A decrease in the barrier height (BH) and, consequently, a significant increase in the photocurrent were observed under illumination. Striking changes in series resistance (Rs) values are also highlighted. The photocapacitance and conductance characteristics indicated that the structures could be considered not only as photodiodes but also as photocapacitors. Moreover, the voltage-dependent changes of some photodetector parameters, such as responsivity (R), sensitivity (S), and specific detectivity (D*), along with the transient photocurrent characteristics, are discussed for both structures. Therefore, we can say that the strong changes in these parameters, which figure the merit of photodiode and photodetector applications, depending on the voltage and under illumination, prove that it is a study carried out in accordance with the purpose and so they can be used in electronic and optoelectronic applications.
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Affiliation(s)
- Selçuk Demirezen
- Sabuncuoğlu
Şerefeddin Vocational School of Health Services, Amasya University, 05100 Amasya, Turkey
| | - Murat Ulusoy
- Department
of Physics, Gazi University, 06500 Ankara, Turkey
| | - Haziret Durmuş
- Department
of Physics, Faculty of Science, Selçuk
University, Selçuklu, 42130 Konya, Turkey
| | - Halit Cavusoglu
- Department
of Physics, Faculty of Science, Selçuk
University, Selçuklu, 42130 Konya, Turkey
| | - Kurtuluş Yılmaz
- Chemical
Engineering Department, Konya Technical
University, 42030 Konya, Turkey
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