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Diego M, Pirro M, Kim B, Anufriev R, Nomura M. Tailoring Phonon Dispersion of a Genetically Designed Nanophononic Metasurface. ACS NANO 2024; 18:18307-18313. [PMID: 38958360 PMCID: PMC11256740 DOI: 10.1021/acsnano.4c01954] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/08/2024] [Revised: 05/31/2024] [Accepted: 06/11/2024] [Indexed: 07/04/2024]
Abstract
Phonon engineering at the nanoscale holds immense promise for a myriad of applications. However, the design of phononic devices continues to rely on regular shapes chosen according to long-established simple rules. Here, we demonstrate an inverse design approach to create a two-dimensional phononic metasurface exhibiting a highly anisotropic phonon dispersion along the main axes of the Brillouin zone. A partial hypersonic bandgap of approximately 3.5 GHz is present along one axis, with gap closure along the orthogonal axis. Such a level of control is achieved through genetically optimized unit cells, with shapes exceeding conventional intuition. We experimentally validated our theoretical predictions using Brillouin light scattering, confirming the effectiveness of the inverse design method. Our approach unlocks the potential for automated engineering of phononic metasurfaces with on-demand functionalities, thus leading toward innovative phononic devices beyond the limitations of traditional design paradigms.
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Affiliation(s)
- Michele Diego
- Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan
| | - Matteo Pirro
- Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan
| | - Byunggi Kim
- Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan
| | - Roman Anufriev
- Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan
| | - Masahiro Nomura
- Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan
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Anufriev R, Ohori D, Wu Y, Yanagisawa R, Jalabert L, Samukawa S, Nomura M. Impact of nanopillars on phonon dispersion and thermal conductivity of silicon membranes. NANOSCALE 2023; 15:2248-2253. [PMID: 36628951 DOI: 10.1039/d2nr06266f] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/17/2023]
Abstract
The performance of silicon-based thermoelectric energy generators is limited by the high thermal conductivity of silicon. Theoretical works have long proposed reducing the thermal conductivity by resonant phonon modes in nanopillars placed on the surface of silicon films. However, these predictions have never been confirmed due to the difficulty in the nanofabrication and measurements of such nanoscale systems. In this work, we report on the fabrication and measurements of silicon films with nanopillars as small as 12 nm in diameter. Our Brillouin light scattering spectroscopy experiments revealed that nanopillars indeed host resonant phonon modes. Yet, our thermal measurements using the micro time-domain thermoreflectance technique showed only a statistically insignificant difference between the thermal properties of silicon membranes with and without nanopillars. Results of this work contrast with the predictions of a substantial reduction in the thermal conductivity due to nanopillars and suggest refining the simulations to account for realistic experimental conditions.
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Affiliation(s)
- Roman Anufriev
- Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan.
| | - Daisuke Ohori
- Institute of Fluid Science, Tohoku University, Sendai, 980-8577, Japan
| | - Yunhui Wu
- Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan.
| | - Ryoto Yanagisawa
- Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan.
| | - Laurent Jalabert
- Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan.
- Laboratory for Integrated Micro Mechatronic Systems/National Center for Scientific Research-Institute of Industrial Science (LIMMS/CNRS-IIS), The University of Tokyo, Tokyo 153-8505, Japan
| | - Seiji Samukawa
- Department of Electrical and Computer Engineering, National Yang Ming Chiao Tung University, Hsinchu, 300, Taiwan
- Joint Research Center of National Yang Ming Chiao Tung University and Tohoku University, National Yang Ming Chiao Tung University, Hsinchu, 300, Taiwan
- Institute of Fluid Science, Tohoku University, Sendai, 980-8577, Japan
- Advanced Institute for Materials Research, Tohoku University, Sendai, 980-8577, Japan
| | - Masahiro Nomura
- Institute of Industrial Science, The University of Tokyo, Tokyo 153-8505, Japan.
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Jin Y, Pennec Y, Bonello B, Honarvar H, Dobrzynski L, Djafari-Rouhani B, Hussein MI. Physics of surface vibrational resonances: pillared phononic crystals, metamaterials, and metasurfaces. REPORTS ON PROGRESS IN PHYSICS. PHYSICAL SOCIETY (GREAT BRITAIN) 2021; 84:086502. [PMID: 33434894 DOI: 10.1088/1361-6633/abdab8] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/11/2020] [Accepted: 01/12/2021] [Indexed: 06/12/2023]
Abstract
The introduction of engineered resonance phenomena on surfaces has opened a new frontier in surface science and technology. Pillared phononic crystals, metamaterials, and metasurfaces are an emerging class of artificial structured media, featuring surfaces that consist of pillars-or branching substructures-standing on a plate or a substrate. A pillared phononic crystal exhibits Bragg band gaps, while a pillared metamaterial may feature both Bragg band gaps and local resonance hybridization band gaps. These two band-gap phenomena, along with other unique wave dispersion characteristics, have been exploited for a variety of applications spanning a range of length scales and covering multiple disciplines in applied physics and engineering, particularly in elastodynamics and acoustics. The intrinsic placement of pillars on a semi-infinite surface-yielding a metasurface-has similarly provided new avenues for the control and manipulation of wave propagation. Classical waves are admitted in pillared media, including Lamb waves in plates and Rayleigh and Love waves along the surfaces of substrates, ranging in frequency from hertz to several gigahertz. With the presence of the pillars, these waves couple with surface resonances richly creating new phenomena and properties in the subwavelength regime and in some applications at higher frequencies as well. At the nanoscale, it was shown that atomic-scale resonances-stemming from nanopillars-alter the fundamental nature of conductive thermal transport by reducing the group velocities and generating mode localizations across the entire spectrum of the constituent material well into the terahertz regime. In this article, we first overview the history and development of pillared materials, then provide a detailed synopsis of a selection of key research topics that involve the utilization of pillars or similar branching substructures in different contexts. Finally, we conclude by providing a short summary and some perspectives on the state of the field and its promise for further future development.
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Affiliation(s)
- Yabin Jin
- School of Aerospace Engineering and Applied Mechanics, Tongji University, 200092 Shanghai, People's Republic of China
| | - Yan Pennec
- Institut d'Electronique, de Microélectronique et de Nanotechnologie (IEMN), UMR CNRS 8520, Université de Lille, 59650 Villeneuve d'Ascq, France
| | - Bernard Bonello
- Sorbonne Université, Faculté des Sciences, CNRS, Institut des Nanosciences de Paris (INSP), 75005 Paris, France
| | - Hossein Honarvar
- Ann and H. J. Smead Department of Aerospace Engineering Sciences, University of Colorado Boulder, Colorado 80309, United States of America
- Department of Physics, University of Colorado Boulder, Colorado 80302, United States of America
- JILA, University of Colorado and NIST, Boulder, CO 80309, United States of America
| | - Leonard Dobrzynski
- Institut d'Electronique, de Microélectronique et de Nanotechnologie (IEMN), UMR CNRS 8520, Université de Lille, 59650 Villeneuve d'Ascq, France
| | - Bahram Djafari-Rouhani
- Institut d'Electronique, de Microélectronique et de Nanotechnologie (IEMN), UMR CNRS 8520, Université de Lille, 59650 Villeneuve d'Ascq, France
| | - Mahmoud I Hussein
- Ann and H. J. Smead Department of Aerospace Engineering Sciences, University of Colorado Boulder, Colorado 80309, United States of America
- Department of Physics, University of Colorado Boulder, Colorado 80302, United States of America
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Wang H, Cheng Y, Fan Z, Guo Y, Zhang Z, Bescond M, Nomura M, Ala-Nissila T, Volz S, Xiong S. Anomalous thermal conductivity enhancement in low dimensional resonant nanostructures due to imperfections. NANOSCALE 2021; 13:10010-10015. [PMID: 34037041 DOI: 10.1039/d1nr01679b] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/12/2023]
Abstract
Nanophononic metamaterials have broad applications in fields such as heat management, thermoelectric energy conversion, and nanoelectronics. Phonon resonance in pillared low-dimensional structures has been suggested to be a feasible approach to reduce thermal conductivity (TC). In this work, we study the effects of imperfections in pillared nanostructures based on graphene nanoribbons (GNR), using classical molecular dynamics simulations and harmonic lattice dynamics. The TC of perfect pillared GNR is only about 13% of that of pristine GNR due to the strong phonon resonant hybridization in pillared GNR. However, introducing imperfections such as vacancy defects and mass mismatch between the pillars and the base material, and alloy disorder in the pillars, can weaken the resonant hybridization and abnormally increase the TC. We show that both vacancy defects and mass mismatch can reduce the penetration of the resonant modes from the pillars into the base material, while the alloy disorder in the pillars can scatter the phonons inside them, which turns regular resonance into a random one with weaker hybridization. Our work provides useful insight into the phonon resonance mechanisms in experimentally relevant low dimensional nanostructures containing various imperfections.
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Affiliation(s)
- Hongying Wang
- Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, Soochow University, 199 Ren'ai Road, Suzhou, 215123, Jiangsu, P. R. China.
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Anchor Loss Reduction of Lamb Wave Resonator by Pillar-Based Phononic Crystal. MICROMACHINES 2021; 12:mi12010062. [PMID: 33430263 PMCID: PMC7825680 DOI: 10.3390/mi12010062] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/10/2020] [Revised: 01/02/2021] [Accepted: 01/05/2021] [Indexed: 11/24/2022]
Abstract
Energy leakage via anchors in substrate plates impairs the quality factor (Q) in microelectromechanical system (MEMS) resonators. Most phononic crystals (PnCs) require complicated fabrication conditions and have difficulty generating a narrow bandgap at high frequency. This paper demonstrates a pillar-based PnC slab with broad bandgaps in the ultra high frequency (UHF) range. Due to Bragg interference and local resonances, the proposed PnC structure creates notably wide bandgaps and shows great advantages in the high frequency, large electromechanical coupling coefficient (k2) thin film aluminum nitride (AlN) lamb wave resonator (LWR). The dispersion relations and the transmission loss of the PnC structure are presented. To optimize the bandgap, the influence of the material mechanical properties, lattice type, pillar height and pillar radius are explored. These parameters are also available to adjust the center frequency of the bandgap to meet the desirable operating frequency. Resonators with uniform beam anchors and PnC slab anchors are characterized. The results illustrate that the Q of the resonator improves from 1551 to 2384, and the mechanical energy leakage via the anchors is significantly decreased using the proposed PnC slab anchors. Moreover, employment of the PNC slab anchors has little influence on resonant frequency and induces no spurious modes. Pillar-based PnCs are promising in suppressing the anchor loss and further improving the Q of the resonators.
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Huang X, Gluchko S, Anufriev R, Volz S, Nomura M. Thermal Conductivity Reduction in a Silicon Thin Film with Nanocones. ACS APPLIED MATERIALS & INTERFACES 2019; 11:34394-34398. [PMID: 31490655 DOI: 10.1021/acsami.9b08797] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/10/2023]
Abstract
Modern thermoelectric devices incline toward inexpensive, environmentally friendly, and CMOS-compatible materials, such as silicon. To improve the thermoelectric performance of silicon, researchers try to decrease its thermal conductivity using various nanostructuring methods. However, most of these methods have limited efficiency because they are costly and damaging for the internal structure of silicon. Here, we propose a cost-effective, large-area, and maskless nanofabrication method that creates external nanocones on the silicon surface while preserving its interior. Our experiments show that these nanocones reduce the thermal conductivity of thin silicon membranes by more than 40%. Using a modified Callaway-Holland model, we study how the thermal conductivity is affected by various phonon scattering processes in the 4-295 K temperature range. We conclude that the nanocones generate additional surface scattering, which causes the thermal conductivity reduction. The proposed nanocones and their simple fabrication method are promising for the planar thermoelectric devices based on silicon.
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Affiliation(s)
| | | | | | | | - Masahiro Nomura
- CREST, Japan Science and Technology Agency , Kawaguchi , Saitama 332-0012 , Japan
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George A, Yanagisawa R, Anufriev R, He J, Yoshie N, Tsujii N, Guo Q, Mori T, Volz S, Nomura M. Thermoelectric Enhancement of Silicon Membranes by Ultrathin Amorphous Films. ACS APPLIED MATERIALS & INTERFACES 2019; 11:12027-12031. [PMID: 30869508 DOI: 10.1021/acsami.8b21003] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
We propose a simple, low-cost, and large-area method to increase the thermoelectric figure of merit (ZT) in silicon membranes by the deposition of an ultrathin aluminum layer. Transmission electron microscopy showed that short deposition of aluminum on a silicon substrate covers the surface with an ultrathin amorphous film, which, according to recent theoretical works, efficiently destroys phonon wave packets. As a result, we measured 30-40% lower thermal conductivity in silicon membranes covered with aluminum films while the electrical conductivity was not affected. Thus, we have achieved 40-45% higher ZT values in membranes covered with aluminum films. To demonstrate a practical application, we applied this method to enhance the performance of a silicon membrane-based thermoelectric device and measured 42% higher power generation.
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Affiliation(s)
- Anthony George
- Institute of Industrial Science , The University of Tokyo , Tokyo 153-8505 , Japan
| | - Ryoto Yanagisawa
- Institute of Industrial Science , The University of Tokyo , Tokyo 153-8505 , Japan
| | - Roman Anufriev
- Institute of Industrial Science , The University of Tokyo , Tokyo 153-8505 , Japan
| | - Jinghan He
- Institute of Industrial Science , The University of Tokyo , Tokyo 153-8505 , Japan
| | - Naoko Yoshie
- Institute of Industrial Science , The University of Tokyo , Tokyo 153-8505 , Japan
| | | | | | | | - Sebastian Volz
- Institute of Industrial Science , The University of Tokyo , Tokyo 153-8505 , Japan
| | - Masahiro Nomura
- Institute of Industrial Science , The University of Tokyo , Tokyo 153-8505 , Japan
- PRESTO , Japan Science and Technology Agency , Saitama 332-0012 , Japan
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Anufriev R, Nomura M. Coherent Thermal Conduction in Silicon Nanowires with Periodic Wings. NANOMATERIALS 2019; 9:nano9020142. [PMID: 30678318 PMCID: PMC6410301 DOI: 10.3390/nano9020142] [Citation(s) in RCA: 11] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/01/2019] [Revised: 01/17/2019] [Accepted: 01/17/2019] [Indexed: 12/02/2022]
Abstract
Artificial periodic nanostructures, known as phononic crystals, promise to control the thermal properties of nanostructures in the coherent regime, which can be achieved in semiconductors at low temperatures. Here, we study coherent thermal conduction in silicon nanowires with added periodic wings at sub-Kelvin temperature. Our simulations show that the added periodic wings flatten the phonon dispersion and thus reduce the thermal conductance. We investigate the dependence of this reduction on the size of the wings and conclude that the reduction is mainly caused by the periodicity of the wings, rather than by local resonances in them. These findings help to better understand the mechanisms controlling coherent heat conduction in periodic resonant nanostructures.
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Affiliation(s)
- Roman Anufriev
- Institute of Industrial Science, University of Tokyo, Tokyo 153-8505, Japan.
| | - Masahiro Nomura
- Institute of Industrial Science, University of Tokyo, Tokyo 153-8505, Japan.
- PRESTO, Japan Science and Technology Agency, Saitama 332-0012, Japan.
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Hori T, Shiomi J. Tuning phonon transport spectrum for better thermoelectric materials. SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS 2018; 20:10-25. [PMID: 31001366 PMCID: PMC6454406 DOI: 10.1080/14686996.2018.1548884] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/15/2018] [Revised: 11/13/2018] [Accepted: 11/13/2018] [Indexed: 06/09/2023]
Abstract
The figure of merit of thermoelectric materials can be increased by suppressing the lattice thermal conductivity without degrading electrical properties. Phonons are the carriers for lattice thermal conduction, and their transport can be impeded by nanostructuring, owing to the recent progress in nanotechnology. The key question for further improvement of thermoelectric materials is how to realize ultimate structure with minimum lattice thermal conductivity. From spectral viewpoint, this means to impede transport of phonons in the entire spectral domain with noticeable contribution to lattice thermal conductivity that ranges in general from subterahertz to tens of terahertz in frequency. To this end, it is essential to know how the phonon transport varies with the length scale, morphology, and composition of nanostructures, and how effects of different nanostructures can be mutually adopted in view of the spectral domain. Here we review recent advances in analyzing such spectral impedance of phonon transport on the basis of various effects including alloy scattering, boundary scattering, and particle resonance.
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Affiliation(s)
- Takuma Hori
- Department of Mechanical Engineering, Tokyo University of Science, Noda, Japan
| | - Junichiro Shiomi
- Department of Mechanical Engineering, The University of Tokyo, Tokyo, Japan
- Center for Materials Research by Information Integration (CMI2), Research and Services Division of Materials Data and Integrated System (MaDIS), National Institute for Materials Science, Tsukuba, Japan
- CREST, Japan Science and Technology Agency, Kawaguchi, Japan
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