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Zhang G, Zhao Y, Sun J. Design and fabrication of a large-range graphene/hexagonal boron nitride heterostructure based pressure sensor with poly(methyl methacrylate) substrate. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2022; 93:015009. [PMID: 35104979 DOI: 10.1063/5.0065687] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/04/2021] [Accepted: 11/05/2021] [Indexed: 06/14/2023]
Abstract
Aiming at overpressure measurement, this paper presents a large-range graphene/hexagonal boron nitride (h-BN) heterostructure-based pressure sensor with a poly(methyl methacrylate) (PMMA) substrate. Graphene and h-BN are chosen as sensitive materials because they both have large Young's modulus, high intrinsic strength, high natural frequency, and atomic thickness at the same time. These characteristics provide favorable conditions for the application of the sensor in the high pressure and high frequency dynamic environment. Moreover, the photoresist-assisted transfer technology is proposed for transferring graphene from the growth substrate to the PMMA substrate and the lift-off method with exposure and development is developed to achieve metal patterning on the PMMA substrate. The sensor characterization results suggest that the graphene and h-BN films have good transfer qualities and the heterojunction possesses excellent electrical performance. The static pressure loading experiments confirm that the sensor has a pressure range of up to 85 MPa and its piezoresistive coefficient is 0.7 GPa-1, which indicates that the designed sensor is suitable for overpressure fields. This study provides a novel method for determining overpressure and lays a foundation for the fabrication of graphene-based electronic devices with an organic substrate.
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Affiliation(s)
- Guodong Zhang
- State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
| | - Yulong Zhao
- State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
| | - Jing Sun
- State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
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Wang B, Kim S, Zhai T, Seok J, Yang H, Salas-Montiel R. Near-field probing of dielectric screening by hexagonal boron nitride in graphene integrated on silicon photonics. NANOTECHNOLOGY 2021; 32:315207. [PMID: 33892483 DOI: 10.1088/1361-6528/abfb31] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/19/2021] [Accepted: 04/23/2021] [Indexed: 06/12/2023]
Abstract
Hexagonal boron nitride (hBN) is one of the most suitable 2D materials for supporting graphene in electronic devices, and it plays a fundamental role in screening out the effect of charge impurities in graphene in contrast to inhomogeneous supports such as silicon dioxide (SiO2). Although many interesting surface science techniques such as scanning tunneling microscopy (STM) revealed dielectric screening by hBN and emergent physical phenomena were observed, STM is only appropriate for graphene electronics. In this paper, we demonstrate the dielectric screening by hBN in graphene integrated on a silicon photonic waveguide from the perspective of a near-field scanning optical microscopy (NSOM) and Raman spectroscopy. We found shifts in the Raman spectra and about three times lower slope decrease in the measured electric near-field amplitude for graphene on hBN relative to that for graphene on SiO2. Based on finite-difference time-domain simulations, we confirm lower electric field slope and scattering rate in graphene on hBN, which implies dielectric screening, in agreement with the NSOM signal. Graphene on hBN integrated on silicon photonics can pave the way for high-performance hybrid graphene photonics.
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Affiliation(s)
- Binbin Wang
- Light, Nanomaterials, Nanotechnologies (L2n) Laboratory, CNRS ERL 7004, University of Technology of Troyes,10004 Troyes, France
- Key Laboratory of Light-Field Manipulation and Information Acquisition, Ministry of Industry and Information Technology, School of Science, Northwestern Polytechnical University, Xi'an 710072, People's Republic of China
| | - Sera Kim
- Department of Energy Science, Sungkyunkwan University, Suwon 440-746, Republic of Korea
| | - Tingting Zhai
- Light, Nanomaterials, Nanotechnologies (L2n) Laboratory, CNRS ERL 7004, University of Technology of Troyes,10004 Troyes, France
| | - Jinbong Seok
- Department of Energy Science, Sungkyunkwan University, Suwon 440-746, Republic of Korea
| | - Heejun Yang
- Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon 34141, Republic of Korea
| | - Rafael Salas-Montiel
- Light, Nanomaterials, Nanotechnologies (L2n) Laboratory, CNRS ERL 7004, University of Technology of Troyes,10004 Troyes, France
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Zhou R, Yasuda S, Minamimoto H, Murakoshi K. Sensitive Raman Probe of Electronic Interactions between Monolayer Graphene and Substrate under Electrochemical Potential Control. ACS OMEGA 2018; 3:2322-2328. [PMID: 31458531 PMCID: PMC6641367 DOI: 10.1021/acsomega.7b01928] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 12/05/2017] [Accepted: 02/12/2018] [Indexed: 06/10/2023]
Abstract
In situ electrochemical Raman spectroscopic measurements of defect-free monolayer graphene on various substrates were performed under electrochemical potential control. The G and 2D Raman band wavenumbers (ωG, ω2D) of graphene were found to depend upon the electrochemical potential, i.e., the charge density of graphene. The values of ωG and ω2D also varied depending on the choice of substrates. On metal substrates where graphene was synthesized by chemical vapor deposition, a strong blue shift of ω2D was induced, which could not account for the strain and charge doping. We attributed the blue shift of ω2D to a change in the electronic properties of graphene induced by distinct electronic interactions with the metal substrates. To explain the unique characteristics in the Raman spectrum of graphene on various substrates, a novel mechanism is proposed considering reduction of the Fermi velocity in graphene owing to dielectric screening from the metal substrates.
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Affiliation(s)
- Ruifeng Zhou
- Institute
for International Collaboration, Hokkaido
University, Sapporo, Hokkaido 060-0815, Japan
- Department
of Chemistry, Faculty of Science, Hokkaido
University, N10W8, Kita-ku, Sapporo, Hokkaido 060-0810, Japan
| | - Satoshi Yasuda
- Department
of Chemistry, Faculty of Science, Hokkaido
University, N10W8, Kita-ku, Sapporo, Hokkaido 060-0810, Japan
| | - Hiro Minamimoto
- Department
of Chemistry, Faculty of Science, Hokkaido
University, N10W8, Kita-ku, Sapporo, Hokkaido 060-0810, Japan
| | - Kei Murakoshi
- Department
of Chemistry, Faculty of Science, Hokkaido
University, N10W8, Kita-ku, Sapporo, Hokkaido 060-0810, Japan
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Banszerus L, Schmitz M, Engels S, Dauber J, Oellers M, Haupt F, Watanabe K, Taniguchi T, Beschoten B, Stampfer C. Ultrahigh-mobility graphene devices from chemical vapor deposition on reusable copper. SCIENCE ADVANCES 2015; 1:e1500222. [PMID: 26601221 PMCID: PMC4646786 DOI: 10.1126/sciadv.1500222] [Citation(s) in RCA: 249] [Impact Index Per Article: 27.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/03/2015] [Accepted: 05/31/2015] [Indexed: 05/20/2023]
Abstract
Graphene research has prospered impressively in the past few years, and promising applications such as high-frequency transistors, magnetic field sensors, and flexible optoelectronics are just waiting for a scalable and cost-efficient fabrication technology to produce high-mobility graphene. Although significant progress has been made in chemical vapor deposition (CVD) and epitaxial growth of graphene, the carrier mobility obtained with these techniques is still significantly lower than what is achieved using exfoliated graphene. We show that the quality of CVD-grown graphene depends critically on the used transfer process, and we report on an advanced transfer technique that allows both reusing the copper substrate of the CVD growth and making devices with mobilities as high as 350,000 cm(2) V(-1) s(-1), thus rivaling exfoliated graphene.
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Affiliation(s)
- Luca Banszerus
- JARA-FIT and 2nd Institute of Physics, RWTH Aachen University, 52074 Aachen, Germany
| | - Michael Schmitz
- JARA-FIT and 2nd Institute of Physics, RWTH Aachen University, 52074 Aachen, Germany
| | - Stephan Engels
- JARA-FIT and 2nd Institute of Physics, RWTH Aachen University, 52074 Aachen, Germany
- Peter Grünberg Institute (PGI-9), Forschungszentrum Jülich, 52425 Jülich, Germany
| | - Jan Dauber
- JARA-FIT and 2nd Institute of Physics, RWTH Aachen University, 52074 Aachen, Germany
- Peter Grünberg Institute (PGI-9), Forschungszentrum Jülich, 52425 Jülich, Germany
| | - Martin Oellers
- JARA-FIT and 2nd Institute of Physics, RWTH Aachen University, 52074 Aachen, Germany
| | - Federica Haupt
- JARA–Institute for Quantum Information, RWTH Aachen University, 52056 Aachen, Germany
| | - Kenji Watanabe
- National Institute for Materials Science, 1-1 Namiki, Tsukuba 305–0044, Japan
| | - Takashi Taniguchi
- National Institute for Materials Science, 1-1 Namiki, Tsukuba 305–0044, Japan
| | - Bernd Beschoten
- JARA-FIT and 2nd Institute of Physics, RWTH Aachen University, 52074 Aachen, Germany
| | - Christoph Stampfer
- JARA-FIT and 2nd Institute of Physics, RWTH Aachen University, 52074 Aachen, Germany
- Peter Grünberg Institute (PGI-9), Forschungszentrum Jülich, 52425 Jülich, Germany
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Yankowitz M, Xue J, LeRoy BJ. Graphene on hexagonal boron nitride. JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2014; 26:303201. [PMID: 24994551 DOI: 10.1088/0953-8984/26/30/303201] [Citation(s) in RCA: 15] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
The field of graphene research has developed rapidly since its first isolation by mechanical exfoliation in 2004. Due to the relativistic Dirac nature of its charge carriers, graphene is both a promising material for next-generation electronic devices and a convenient low-energy testbed for intrinsically high-energy physical phenomena. Both of these research branches require the facile fabrication of clean graphene devices so as not to obscure its intrinsic physical properties. Hexagonal boron nitride has emerged as a promising substrate for graphene devices as it is insulating, atomically flat and provides a clean charge environment for the graphene. Additionally, the interaction between graphene and boron nitride provides a path for the study of new physical phenomena not present in bare graphene devices. This review focuses on recent advancements in the study of graphene on hexagonal boron nitride devices from the perspective of scanning tunneling microscopy with highlights of some important results from electrical transport measurements.
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