Ultra-high aspect ratio replaceable AFM tips using deformation-suppressed focused ion beam milling

Large Range Atomic Force Microscopy with High Aspect Ratio Micropipette Probe for Deep Trench Imaging

Atomic force microscopy (AFM) has been adopted in both industry and academia for high-fidelity, full-profile topographic characterization. Typically, the tiny tip of the cantilever and the limited traveling range of the scanner restrict AFM measurement to relatively flat samples (recommend 1 µm). The primary objective of this work is to address these limitations using a large-range AFM (measuring height >10 µm) system consisting of a novel repairable high aspect ratio probe (HARP) with a nested-proportional-integral-derivative (nested-PID) AFM system. The HARP is fabricated using a reliable, cost-efficient bench-top process. The tip is then fused by pulling the end of the micropipette cantilever with a length up to hundreds of micrometers and a tip diameter of 30 nm. The design, simulation, fabrication, and performance of the HARP are described herein. This instrument is then tested using polymer trenches which reveals superior image fidelity compared to standard silicon tips. Finally, a nested-PID system is developed and employed to facilitate 3D characterization of 50-µm-step samples. The results demonstrate the efficacy of the proposed bench-top technique for the fabrication of low-cost, simple HAR AFM probes that facilitate the imaging of samples with deep trenches.

High-reliability graphene-wrapped nanoprobes for scanning probe microscopy

The nanoprobe is a powerful tool in scanning probe microscopy (SPM) that is used to explore various fields of nanoscience. However, the tips can wear out very fast due to the low stability of conventional probes, especially after the measurement of high currents or lateral friction, which results in image distortion and test imprecision. Herein, a novel functional nanoprobe is presented using graphene sheets in a high-quality graphene solution wrapped round a plasma-treated conventional Pt-Ir coated nanoprobe, which shows highly stability and resistance to degradation, leading to a significantly increased lifetime. Furthermore, we show that the graphene-wrapped nanoprobes have the advantages of enhanced electrical conductivity and reduced tip-sample friction, compared with Pt-Ir coated nanoprobes. The simplicity and low cost of this method make it valuable to various functional graphene-wrapped nanoprobes and applications.

Modulus characterization of cells with submicron colloidal probes by atomic force microscope

Colloidal probes have been increasingly demanded for the characterization of cellular modulus in atomic force microscope because of their well-defined geometry and large contact area with cell. In this work, submicron colloidal probes are prepared by scanning electron microscope/focused ion beam and compared with sharp tip and micron colloidal probe, in conjunction with loading velocity and indentation depth on the apparent elastic modulus. NIM and cartilage cells are used as specimens. The results show that modulus value measured by sharp tip changes significantly with loading velocity while remains almost stable by colloidal probes. Also, submicron colloidal probe is superior in characterizing the modulus with increasing indentation depth, which could help reveal the mechanical details of cellular membrane and the modulus of the whole cell. To test the submicron colloidal probe further, the modulus distribution map of cell is scanned with submicron colloidal probe of 50 nm radius during small and large indentation depths with high spatial resolution. The outcome of this work will provide the effective submicron colloidal probe according to the effect of loading velocity and indentation depth, characterizing the mechanical properties of the cells.

Reduction and Increase in Thermal Conductivity of Si Irradiated with Ga+ via Focused Ion Beam

Focused ion beam (FIB) technology has become a valuable tool for the microelectronics industry and for the fabrication and preparation of samples at the micro/nanoscale. Its effects on the thermal transport properties of Si, however, are not well understood nor do experimental data exist. This paper presents a carefully designed set of experiments for the determination of the thermal conductivity of Si samples irradiated by Ga⁺ FIB. Generally, the thermal conductivity decreases with increasing ion dose. For doses of >10¹⁶ (Ga⁺/cm²), a reversal of the trend was observed due to recrystallization of Si. This report provides insight on the thermal transport considerations relevant to engineering of Si nanostructures and interfaces fabricated or prepared by FIB.