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Cao X, Yang H, Wu ZL, Li BB. Ultrasound sensing with optical microcavities. LIGHT, SCIENCE & APPLICATIONS 2024; 13:159. [PMID: 38982066 PMCID: PMC11233744 DOI: 10.1038/s41377-024-01480-8] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/09/2023] [Revised: 04/10/2024] [Accepted: 05/13/2024] [Indexed: 07/11/2024]
Abstract
Ultrasound sensors play an important role in biomedical imaging, industrial nondestructive inspection, etc. Traditional ultrasound sensors that use piezoelectric transducers face limitations in sensitivity and spatial resolution when miniaturized, with typical sizes at the millimeter to centimeter scale. To overcome these challenges, optical ultrasound sensors have emerged as a promising alternative, offering both high sensitivity and spatial resolution. In particular, ultrasound sensors utilizing high-quality factor (Q) optical microcavities have achieved unprecedented performance in terms of sensitivity and bandwidth, while also enabling mass production on silicon chips. In this review, we focus on recent advances in ultrasound sensing applications using three types of optical microcavities: Fabry-Perot cavities, π-phase-shifted Bragg gratings, and whispering gallery mode microcavities. We provide an overview of the ultrasound sensing mechanisms employed by these microcavities and discuss the key parameters for optimizing ultrasound sensors. Furthermore, we survey recent advances in ultrasound sensing using these microcavity-based approaches, highlighting their applications in diverse detection scenarios, such as photoacoustic imaging, ranging, and particle detection. The goal of this review is to provide a comprehensive understanding of the latest advances in ultrasound sensing with optical microcavities and their potential for future development in high-performance ultrasound imaging and sensing technologies.
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Affiliation(s)
- Xuening Cao
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
- University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Hao Yang
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
- University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Zu-Lei Wu
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China
- School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan, 430074, China
| | - Bei-Bei Li
- Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, 100190, China.
- University of Chinese Academy of Sciences, Beijing, 100049, China.
- Songshan Lake Materials Laboratory, Dongguan, 523808, Guangdong, China.
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Yang WQ, Niu W, Ma YH, Zhang WZ. Quantum nonlinear effect in a dissipatively coupled optomechanical system. OPTICS EXPRESS 2024; 32:11801-11817. [PMID: 38571019 DOI: 10.1364/oe.518042] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/08/2024] [Accepted: 03/01/2024] [Indexed: 04/05/2024]
Abstract
A full-quantum approach is used to study the quantum nonlinear properties of a compound Michelson-Sagnac interferometer optomechanical system. By deriving the effective Hamiltonian, we find that the reduced system exhibits a Kerr nonlinear term with a complex coefficient, entirely induced by the dissipative and dispersive couplings. Unexpectedly, the nonlinearities resulting from the dissipative coupling possess non-Hermitian Hamiltonian-like properties preserving the quantum nature of the dispersive coupling beyond the traditional system dissipation. This protective mechanism allows the system to exhibit strong quantum nonlinear effects when the detuning (the compound cavity detuning Δc and the auxiliary cavity detuning Δe) and the tunneling coupling strength (J) of two cavities satisfy the relation J2 = ΔcΔe. Moreover, the additive effects of dispersive and dissipative couplings can produce strong anti-bunching effects, which exist in both strong and weak coupling conditions. Our work may provide a new way to study and produce strong quantum nonlinear effects in dissipatively coupled optomechanical systems.
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Wang ZY, Wang PY, Wan S, Wang Z, Song Q, Guo GC, Dong CH. Thermal oscillation in the hybrid Si 3N 4 - TiO 2 microring. OPTICS EXPRESS 2023; 31:4569-4579. [PMID: 36785421 DOI: 10.1364/oe.478983] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/25/2022] [Accepted: 12/31/2022] [Indexed: 06/18/2023]
Abstract
The hybrid microcavity composed of different materials shows unique thermal-optical properties such as resonance frequency shift and small thermal noise fluctuations with the temperature variation. Here, we have fabricated the hybrid Si3N4 - TiO2 microring, which decreases the effective thermo-optical coefficients (TOC) from 23.2pm/K to 11.05pm/K due to the opposite TOC of these two materials. In this hybrid microring, we experimentally study the thermal dynamic with different input powers and scanning speeds. The distorted transmission and thermal oscillation are observed, which results from the non-uniform scanning speed and the different thermal relaxation times of the Si3N4 and the TiO2. We calibrate the distorted transmission spectrum for the resonance measurement at the reverse scanning direction and explain the thermal oscillation with a thermal-optical coupled model. Finally, we analyse the thermal oscillation condition and give the diagram about the oscillation region, which has significant guidance for the occurrence and avoidance of the thermal oscillation in practical applications.
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Xing T, Xing E, Jia T, Li J, Rong J, Li L, Tian S, Zhou Y, Liu W, Tang J, Liu J. An ultrahigh sensitivity acoustic sensor system for weak signal detection based on an ultrahigh- Q CaF 2 resonator. MICROSYSTEMS & NANOENGINEERING 2023; 9:65. [PMID: 37213821 PMCID: PMC10192424 DOI: 10.1038/s41378-023-00540-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/17/2022] [Revised: 03/16/2023] [Accepted: 03/24/2023] [Indexed: 05/23/2023]
Abstract
Acoustic sensors with ultrahigh sensitivity, broadband response, and high resolution are essential for high-precision nondestructive weak signal detection technology. In this paper, based on the size effect of an ultrahigh-quality (Q) calcium fluoride (CaF2) resonator, a weak acoustic signal is detected by the dispersive response regime in which an acoustic, elastic wave modulates the geometry and is converted to a resonance frequency shift. Through the structural design of the resonator, the sensitivity reaches 11.54 V/Pa at 10 kHz in the experiment. To our knowledge, the result is higher than that of other optical resonator acoustic sensors. We further detected a weak signal as low as 9.4 µPa/Hz1/2, which greatly improved the detection resolution. With a good directionality of 36.4 dB and a broadband frequency response range of 20 Hz-20 kHz, the CaF2 resonator acoustic sensing system can not only acquire and reconstruct speech signals over a long distance but also accurately identify and separate multiple voices in noisy environments. This system shows high performance in weak sound detection, sound source localization, sleep monitoring, and many other voice interaction applications.
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Affiliation(s)
- Tong Xing
- Key Laboratory of Dynamic Testing Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051 China
| | - Enbo Xing
- Key Laboratory of Dynamic Testing Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051 China
| | - Tao Jia
- School of Semiconductors and Physics, North University of China, Taiyuan, 030051 China
| | - Jianglong Li
- Key Laboratory of Dynamic Testing Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051 China
| | - Jiamin Rong
- School of Semiconductors and Physics, North University of China, Taiyuan, 030051 China
| | - Li Li
- Shanxi Key Laboratory of Advanced Semiconductor Optoelectronic Devices and Integrated Systems, Jincheng, 048026 China
| | - Sicong Tian
- State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033 China
| | - Yanru Zhou
- Key Laboratory of Dynamic Testing Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051 China
| | - Wenyao Liu
- Key Laboratory of Dynamic Testing Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051 China
| | - Jun Tang
- School of Semiconductors and Physics, North University of China, Taiyuan, 030051 China
| | - Jun Liu
- Key Laboratory of Dynamic Testing Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051 China
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