Image contrast in X-ray reflection interface microscopy: comparison of data with model calculations and simulations

Direct recovery of interfacial topography from coherent X-ray reflectivity: model calculations for a 1D interface

The use of coherent X-ray reflectivity to recover interfacial topography is described using model calculations for a 1D interface. The results reveal that the illuminated topography can be recovered directly from the measured reflected intensities. This is achieved through an analysis of the Patterson function, the Fourier transform of the scattering intensity (as a function of lateral momentum transfer, Q //, at fixed vertical momentum transfer, Q z ). Specifically, a second-order Patterson function is defined that reveals the discrete set of separations and contrast factors (i.e. the product of changes in the effective scattering factor) associated with discontinuities in the effective interfacial topography. It is shown that the topography is significantly overdetermined by the measurements, and an algorithm is described that recovers the actual topography through a deterministic sorting of this information.

Full-field X-ray diffraction microscopy using polymeric compound refractive lenses

Diffraction imaging is the science of imaging samples under diffraction conditions. Diffraction imaging techniques are well established in visible light and electron microscopy, and have also been widely employed in X-ray science in the form of X-ray topography. Over the past two decades, interest in X-ray diffraction imaging has taken flight and resulted in a wide variety of methods. This article discusses a new full-field imaging method, which uses polymer compound refractive lenses as a microscope objective to capture a diffracted X-ray beam coming from a large illuminated area on a sample. This produces an image of the diffracting parts of the sample on a camera. It is shown that this technique has added value in the field, owing to its high imaging speed, while being competitive in resolution and level of detail of obtained information. Using a model sample, it is shown that lattice tilts and strain in single crystals can be resolved simultaneously down to 10−3° and Δa/a= 10−5, respectively, with submicrometre resolution over an area of 100 × 100 µm and a total image acquisition time of less than 60 s.

Full-field X-ray reflection microscopy of epitaxial thin-films

Novel X-ray imaging of structural domains in a ferroelectric epitaxial thin film using diffraction contrast is presented. The full-field hard X-ray microscope uses the surface scattering signal, in a reflectivity or diffraction experiment, to spatially resolve the local structure with 70 nm lateral spatial resolution and sub-nanometer height sensitivity. Sub-second X-ray exposures can be used to acquire a 14 µm × 14 µm image with an effective pixel size of 20 nm on the sample. The optical configuration and various engineering considerations that are necessary to achieve optimal imaging resolution and contrast in this type of microscopy are discussed.