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Carulla M, Barten R, Baruffaldi F, Bergamaschi A, Borghi G, Boscardin M, Brückner M, Butcher TA, Centis Vignali M, Dinapoli R, Ebner S, Ficorella F, Fröjdh E, Greiffenberg D, Hammad Ali O, Hasanaj S, Heymes J, Hinger V, King T, Kozlowski P, Lopez Cuenca C, Mezza D, Moustakas K, Mozzanica A, Paternoster G, Paton KA, Ronchin S, Ruder C, Schmitt B, Sieberer P, Thattil D, Vogelsang K, Xie X, Zhang J. Quantum Efficiency Measurement and Modeling of Silicon Sensors Optimized for Soft X-ray Detection. SENSORS (BASEL, SWITZERLAND) 2024; 24:942. [PMID: 38339659 PMCID: PMC10856868 DOI: 10.3390/s24030942] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/30/2023] [Revised: 01/19/2024] [Accepted: 01/22/2024] [Indexed: 02/12/2024]
Abstract
Hybrid pixel detectors have become indispensable at synchrotron and X-ray free-electron laser facilities thanks to their large dynamic range, high frame rate, low noise, and large area. However, at energies below 3 keV, the detector performance is often limited because of the poor quantum efficiency of the sensor and the difficulty in achieving single-photon resolution due to the low signal-to-noise ratio. In this paper, we address the quantum efficiency of silicon sensors by refining the design of the entrance window, mainly by passivating the silicon surface and optimizing the dopant profile of the n+ region. We present the measurement of the quantum efficiency in the soft X-ray energy range for silicon sensors with several process variations in the fabrication of planar sensors with thin entrance windows. The quantum efficiency for 250 eV photons is increased from almost 0.5% for a standard sensor to up to 62% as a consequence of these developments, comparable to the quantum efficiency of backside-illuminated scientific CMOS sensors. Finally, we discuss the influence of the various process parameters on quantum efficiency and present a strategy for further improvement.
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Affiliation(s)
- Maria Carulla
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Rebecca Barten
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Filippo Baruffaldi
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Anna Bergamaschi
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Giacomo Borghi
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Maurizio Boscardin
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Martin Brückner
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Tim A. Butcher
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Matteo Centis Vignali
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Roberto Dinapoli
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Simon Ebner
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Francesco Ficorella
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Erik Fröjdh
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Dominic Greiffenberg
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Omar Hammad Ali
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Shqipe Hasanaj
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Julian Heymes
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Viktoria Hinger
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Thomas King
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Pawel Kozlowski
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Carlos Lopez Cuenca
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Davide Mezza
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Konstantinos Moustakas
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Aldo Mozzanica
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Giovanni Paternoster
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Kirsty A. Paton
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Sabina Ronchin
- Fondazione Bruno Kessler, Via Sommarive 18, 38126 Povo, Italy; (G.B.); (M.B.); (M.C.V.); (F.F.); (O.H.A.); (G.P.); (S.R.)
| | - Christian Ruder
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Bernd Schmitt
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Patrick Sieberer
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Dhanya Thattil
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Konrad Vogelsang
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Xiangyu Xie
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
| | - Jiaguo Zhang
- Paul Scherrer Institut, Forschungsstrasse 111, 5232 Villigen, Switzerland (F.B.); (A.B.); (T.A.B.); (R.D.); (E.F.); (D.G.); (J.H.); (V.H.); (D.M.); (K.M.); (A.M.); (K.A.P.); (B.S.); (P.S.); (X.X.); (J.Z.)
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Jin Z, Brunskog R, Danielsson M, Persson M. First experimental evaluation of count-rate performance for micrometre resolution deep silicon detector. Phys Med Biol 2024; 69:035013. [PMID: 38211317 DOI: 10.1088/1361-6560/ad1d67] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/27/2023] [Accepted: 01/11/2024] [Indexed: 01/13/2024]
Abstract
Objective.An ultra-fine-pitch deep silicon detector has been developed for clinical photon-counting computed tomography (CT). With a small pixel size of 14 × 650μm2, it has shown potential to reach micrometre spatial resolution in previous simulation studies. A detector prototype with such geometry has been manufactured, and we report on the first experimental evaluation of its count-rate performance.Approach.The measurement was carried out at MAX IV synchrotron laboratory with 35 keV monochromatic x-rays. By inserting tungsten attenuators of 50, 75, 100, 150, 200, 225, 325μm-thicknesses into the beam, the response of the detector to fluence rates from 3.3 × 107to 1.3 × 1011mm-2s-1was characterized.Main results.The measurement result showed that the detector exhibited count rate linearity up to 6.66 × 108mm-2s-1with 13% count loss and was still functional at count rate up to 2.9 × 1010mm-2s-1. A semi-nonparalyzable dead-time model was fitted to the count-rate behaviour of the detector, showing great agreement with the measured data, with an estimated nonparalyzable dead time of 2.9 ns.Significance.This is the first experimental evaluation of the count-rate performance for a deep silicon detector with such small pixel geometry. The results suggest that this type of detector shows the potential to be used at fluence rates encountered in clinical CT with little count loss due to pile-up.
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Affiliation(s)
- Zihui Jin
- Department of Physics, KTH Royal Institute of Technology, Stockholm, Sweden
| | - Rickard Brunskog
- Department of Physics, KTH Royal Institute of Technology, Stockholm, Sweden
- MedTechLabs, Karolinska University Hospital, Stockholm, Sweden
| | - Mats Danielsson
- Department of Physics, KTH Royal Institute of Technology, Stockholm, Sweden
- MedTechLabs, Karolinska University Hospital, Stockholm, Sweden
| | - Mats Persson
- Department of Physics, KTH Royal Institute of Technology, Stockholm, Sweden
- MedTechLabs, Karolinska University Hospital, Stockholm, Sweden
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Duan X, Li N, Chen X, Zhu N. Characterization of Tissue Scaffolds Using Synchrotron Radiation Microcomputed Tomography Imaging. Tissue Eng Part C Methods 2021; 27:573-588. [PMID: 34670397 DOI: 10.1089/ten.tec.2021.0155] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.7] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/12/2022] Open
Abstract
Distinguishing from other traditional imaging, synchrotron radiation microcomputed tomography (SR-μCT) imaging allows for the visualization of three-dimensional objects of interest in a nondestructive and/or in situ way with better spatial resolution, deep penetration, relatively fast speed, and/or high contrast. SR-μCT has been illustrated promising for visualizing and characterizing tissue scaffolds for repairing or replacing damaged tissue or organs in tissue engineering (TE), which is of particular advance for longitudinal monitoring and tracking the success of scaffolds once implanted in animal models and/or human patients. This article presents a comprehensive review on recent studies of characterization of scaffolds based on SR-μCT and takes scaffold architectural properties, mechanical properties, degradation, swelling and wettability, and biological properties as five separate sections to introduce SR-μCT wide applications. We also discuss and highlight the unique opportunities of SR-μCT in various TE applications; conclude this article with the suggested future research directions, including the prospective applications of SR-μCT, along with its challenges and methods for improvement in the field of TE.
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Affiliation(s)
- Xiaoman Duan
- Division of Biomedical Engineering, College of Engineering, University of Saskatchewan, Saskatoon, Canada
| | - Naitao Li
- Division of Biomedical Engineering, College of Engineering, University of Saskatchewan, Saskatoon, Canada
| | - Xiongbiao Chen
- Division of Biomedical Engineering, College of Engineering, University of Saskatchewan, Saskatoon, Canada
- Department of Mechanical Engineering, College of Engineering, University of Saskatchewan, Saskatoon, Canada
| | - Ning Zhu
- Division of Biomedical Engineering, College of Engineering, University of Saskatchewan, Saskatoon, Canada
- Department of Chemical and Biological Engineering, College of Engineering, University of Saskatchewan, Saskatoon, Canada
- Canadian Light Source, Saskatoon, Canada
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Khan A, Markus A, Rittmann T, Albers J, Alves F, Hülsmann S, Dullin C. Simple low dose radiography allows precise lung volume assessment in mice. Sci Rep 2021; 11:4163. [PMID: 33602964 PMCID: PMC7893164 DOI: 10.1038/s41598-021-83319-5] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 11/09/2020] [Accepted: 01/08/2021] [Indexed: 02/07/2023] Open
Abstract
X-ray based lung function (XLF) as a planar method uses dramatically less X-ray dose than computed tomography (CT) but so far lacked the ability to relate its parameters to pulmonary air volume. The purpose of this study was to calibrate the functional constituents of XLF that are biomedically decipherable and directly comparable to that of micro-CT and whole-body plethysmography (WBP). Here, we developed a unique set-up for simultaneous assessment of lung function and volume using XLF, micro-CT and WBP on healthy mice. Our results reveal a strong correlation of lung volumes obtained from radiographic XLF and micro-CT and demonstrate that XLF is superior to WBP in sensitivity and precision to assess lung volumes. Importantly, XLF measurement uses only a fraction of the radiation dose and acquisition time required for CT. Therefore, the redefined XLF approach is a promising tool for preclinical longitudinal studies with a substantial potential of clinical translation.
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Affiliation(s)
- Amara Khan
- Translational Molecular Imaging, Max-Planck-Institute for Experimental Medicine, Hermann-Rein-Straße 3, 37075, Göttingen, Germany
| | - Andrea Markus
- Translational Molecular Imaging, Max-Planck-Institute for Experimental Medicine, Hermann-Rein-Straße 3, 37075, Göttingen, Germany
| | - Thomas Rittmann
- 4th Physical Institute - Solids and Nanostructures, University of Göttingen, Friedrich-Hund-Platz 1, 37077, Göttingen, Germany
| | - Jonas Albers
- Translational Molecular Imaging, Max-Planck-Institute for Experimental Medicine, Hermann-Rein-Straße 3, 37075, Göttingen, Germany
- Institute for Diagnostic and Interventional Radiology, University Medical Center Göttingen, Robert-Koch-Straße 40, 37075, Göttingen, Germany
| | - Frauke Alves
- Translational Molecular Imaging, Max-Planck-Institute for Experimental Medicine, Hermann-Rein-Straße 3, 37075, Göttingen, Germany
- Institute for Diagnostic and Interventional Radiology, University Medical Center Göttingen, Robert-Koch-Straße 40, 37075, Göttingen, Germany
- Clinic for Hematology and Medical Oncology, University Medical Center Göttingen, Robert-Koch-Str. 40, 37075, Göttingen, Germany
| | - Swen Hülsmann
- Clinic for Anesthesiology, University Medical Center Göttingen, Humboldtallee 23, 37073, Göttingen, Germany
| | - Christian Dullin
- Translational Molecular Imaging, Max-Planck-Institute for Experimental Medicine, Hermann-Rein-Straße 3, 37075, Göttingen, Germany.
- Institute for Diagnostic and Interventional Radiology, University Medical Center Göttingen, Robert-Koch-Straße 40, 37075, Göttingen, Germany.
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Albers J, Pacilé S, Markus MA, Wiart M, Vande Velde G, Tromba G, Dullin C. X-ray-Based 3D Virtual Histology-Adding the Next Dimension to Histological Analysis. Mol Imaging Biol 2019; 20:732-741. [PMID: 29968183 DOI: 10.1007/s11307-018-1246-3] [Citation(s) in RCA: 40] [Impact Index Per Article: 8.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/21/2022]
Abstract
Histology and immunohistochemistry of thin tissue sections have been the standard diagnostic procedure in many diseases for decades. This method is highly specific for particular tissue regions or cells, but mechanical sectioning of the specimens is required, which destroys the sample in the process and can lead to non-uniform tissue deformations. In addition, regions of interest cannot be located beforehand and the analysis is intrinsically two-dimensional. Micro X-ray computed tomography (μCT) on the other hand can provide 3D images at high resolution and allows for quantification of tissue structures, as well as the localization of small regions of interest. These advantages advocate the use of μCT for virtual histology tool with or without subsequent classical histology. This review summarizes the most recent examples of virtual histology and provides currently known possibilities of improving contrast and resolution of μCT. Following a background in μCT imaging, ex vivo staining procedures for contrast enhancement are presented as well as label-free virtual histology approaches and the technologies, which could rapidly advance it, such as phase-contrast CT. Novel approaches such as zoom tomography and nanoparticulate contrast agents will also be considered. The current evidence suggests that virtual histology may present a valuable addition to the workflow of histological analysis, potentially reducing the workload in pathology, refining tissue classification, and supporting the detection of small malignancies.
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Affiliation(s)
- J Albers
- Institute for Diagnostic and Interventional Radiology, University Medical Center Göttingen, Göttingen, Germany
| | - S Pacilé
- Department of Engineering and Architecture, University of Trieste, Trieste, Italy.,Elettra Sincrotrone Trieste, Trieste, Italy
| | - M A Markus
- Translational Molecular Imaging, Max-Planck-Institute for Experimental Medicine, Göttingen, Germany
| | - M Wiart
- Univ Lyon, CarMeN Laboratory, INSERM, INRA, INSA Lyon, Université Claude Bernard Lyon 1, 69500, Bron, France
| | - G Vande Velde
- Department of Imaging and Pathology, Faculty of Medicine, KU Leuven-University of Leuven, Leuven, Belgium
| | - G Tromba
- Elettra Sincrotrone Trieste, Trieste, Italy
| | - C Dullin
- Institute for Diagnostic and Interventional Radiology, University Medical Center Göttingen, Göttingen, Germany. .,Elettra Sincrotrone Trieste, Trieste, Italy. .,Translational Molecular Imaging, Max-Planck-Institute for Experimental Medicine, Göttingen, Germany.
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