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Chen FD, Sharma A, Roszko DA, Xue T, Mu X, Luo X, Chua H, Lo PGQ, Sacher WD, Poon JKS. Development of wafer-scale multifunctional nanophotonic neural probes for brain activity mapping. LAB ON A CHIP 2024; 24:2397-2417. [PMID: 38623840 DOI: 10.1039/d3lc00931a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/17/2024]
Abstract
Optical techniques, such as optogenetic stimulation and functional fluorescence imaging, have been revolutionary for neuroscience by enabling neural circuit analysis with cell-type specificity. To probe deep brain regions, implantable light sources are crucial. Silicon photonics, commonly used for data communications, shows great promise in creating implantable devices with complex optical systems in a compact form factor compatible with high volume manufacturing practices. This article reviews recent developments of wafer-scale multifunctional nanophotonic neural probes. The probes can be realized on 200 or 300 mm wafers in commercial foundries and integrate light emitters for photostimulation, microelectrodes for electrophysiological recording, and microfluidic channels for chemical delivery and sampling. By integrating active optical devices to the probes, denser emitter arrays, enhanced on-chip biosensing, and increased ease of use may be realized. Silicon photonics technology makes possible highly versatile implantable neural probes that can transform neuroscience experiments.
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Affiliation(s)
- Fu Der Chen
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada
| | - Ankita Sharma
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada
| | - David A Roszko
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada
| | - Tianyuan Xue
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada
| | - Xin Mu
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada
| | - Xianshu Luo
- Advanced Micro Foundry Pte Ltd, 11 Science Park Road, Singapore Science Park II, 117685, Singapore
| | - Hongyao Chua
- Advanced Micro Foundry Pte Ltd, 11 Science Park Road, Singapore Science Park II, 117685, Singapore
| | - Patrick Guo-Qiang Lo
- Advanced Micro Foundry Pte Ltd, 11 Science Park Road, Singapore Science Park II, 117685, Singapore
| | - Wesley D Sacher
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
| | - Joyce K S Poon
- Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.
- Department of Electrical and Computer Engineering, University of Toronto, 10 King's College Road, Toronto, Ontario M5S 3G4, Canada
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Vöröslakos M, Petersen PC, Vöröslakos B, Buzsáki G. Metal microdrive and head cap system for silicon probe recovery in freely moving rodent. eLife 2021; 10:e65859. [PMID: 34009122 PMCID: PMC8177890 DOI: 10.7554/elife.65859] [Citation(s) in RCA: 18] [Impact Index Per Article: 6.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 12/16/2020] [Accepted: 05/18/2021] [Indexed: 01/03/2023] Open
Abstract
High-yield electrophysiological extracellular recording in freely moving rodents provides a unique window into the temporal dynamics of neural circuits. Recording from unrestrained animals is critical to investigate brain activity during natural behaviors. The use and implantation of high-channel-count silicon probes represent the largest cost and experimental complexity associated with such recordings making a recoverable and reusable system desirable. To address this, we have designed and tested a novel 3D printed head-gear system for freely moving mice and rats. The system consists of a recoverable microdrive printed in stainless steel and a plastic head cap system, allowing researchers to reuse the silicon probes with ease, decreasing the effective cost, and the experimental effort and complexity. The cap designs are modular and provide structural protection and electrical shielding to the implanted hardware and electronics. We provide detailed procedural instructions allowing researchers to adapt and flexibly modify the head-gear system.
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Affiliation(s)
| | - Peter C Petersen
- Neuroscience Institute, New York UniversityNew YorkUnited States
| | - Balázs Vöröslakos
- Budapest University of Technology and Economics, Faculty of Mechanical EngineeringBudapestHungary
| | - György Buzsáki
- Neuroscience Institute, New York UniversityNew YorkUnited States
- Department of Neurology, Langone Medical Center, New York UniversityNew YorkUnited States
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Electrical Properties of Thiol-ene-based Shape Memory Polymers Intended for Flexible Electronics. Polymers (Basel) 2019; 11:polym11050902. [PMID: 31108911 PMCID: PMC6571767 DOI: 10.3390/polym11050902] [Citation(s) in RCA: 19] [Impact Index Per Article: 3.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/15/2019] [Revised: 05/09/2019] [Accepted: 05/15/2019] [Indexed: 01/09/2023] Open
Abstract
Thiol-ene/acrylate-based shape memory polymers (SMPs) with tunable mechanical and thermomechanical properties are promising substrate materials for flexible electronics applications. These UV-curable polymer compositions can easily be polymerized onto pre-fabricated electronic components and can be molded into desired geometries to provide a shape-changing behavior or a tunable softness. Alternatively, SMPs may be prepared as a flat substrate, and electronic circuitry may be built directly on top by thin film processing technologies. Whichever way the final structure is produced, the operation of electronic circuits will be influenced by the electrical and mechanical properties of the underlying (and sometimes also encapsulating) SMP substrate. Here, we present electronic properties, such as permittivity and resistivity of a typical SMP composition that has a low glass transition temperature (between 40 and 60 °C dependent on the curing process) in different thermomechanical states of polymer. We fabricated parallel plate capacitors from a previously reported SMP composition (fully softening (FS)-SMP) using two different curing processes, and then we determined the electrical properties of relative permittivity and resistivity below and above the glass transition temperature. Our data shows that the curing process influenced the electrical permittivity, but not the electrical resistivity. Corona-Kelvin metrology evaluated the quality of the surface of FS-SMP spun on the wafer. Overall, FS-SMP demonstrates resistivity appropriate for use as an insulating material.
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Ecker M, Joshi-Imre A, Modi R, Frewin CL, Garcia-Sandoval A, Maeng J, Gutierrez-Heredia G, Pancrazio JJ, Voit WE. From softening polymers to multimaterial based bioelectronic devices. ACTA ACUST UNITED AC 2018. [DOI: 10.1088/2399-7532/aaed58] [Citation(s) in RCA: 22] [Impact Index Per Article: 3.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/11/2022]
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Scholvin J, Zorzos A, Kinney J, Bernstein J, Moore-Kochlacs C, Kopell N, Fonstad C, Boyden ES. Scalable, Modular Three-Dimensional Silicon Microelectrode Assembly via Electroless Plating. MICROMACHINES 2018; 9:E436. [PMID: 30424369 PMCID: PMC6187301 DOI: 10.3390/mi9090436] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/31/2018] [Revised: 08/22/2018] [Accepted: 08/24/2018] [Indexed: 11/17/2022]
Abstract
We devised a scalable, modular strategy for microfabricated 3-D neural probe synthesis. We constructed a 3-D probe out of individual 2-D components (arrays of shanks bearing close-packed electrodes) using mechanical self-locking and self-aligning techniques, followed by electroless nickel plating to establish electrical contact between the individual parts. We detail the fabrication and assembly process and demonstrate different 3-D probe designs bearing thousands of electrode sites. We find typical self-alignment accuracy between shanks of <0.2° and demonstrate orthogonal electrical connections of 40 µm pitch, with thousands of connections formed electrochemically in parallel. The fabrication methods introduced allow the design of scalable, modular electrodes for high-density 3-D neural recording. The combination of scalable 3-D design and close-packed recording sites may support a variety of large-scale neural recording strategies for the mammalian brain.
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Affiliation(s)
- Jörg Scholvin
- Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
| | - Anthony Zorzos
- Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
| | - Justin Kinney
- Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
| | - Jacob Bernstein
- Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
| | - Caroline Moore-Kochlacs
- Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
- Department of Mathematics, Boston University, Boston, MA 02215, USA.
| | - Nancy Kopell
- Department of Mathematics, Boston University, Boston, MA 02215, USA.
| | - Clifton Fonstad
- Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
| | - Edward S Boyden
- Massachusetts Institute of Technology, Cambridge, MA 02139, USA.
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