Differential Ring Oscillator Based Capacitance Sensor for Microfluidic Applications

Wide Input Dynamic Range Fully Integrated Capacitive Sensor for Life Science Applications

This paper presents a new fully integrated CMOS capacitance sensor chip with a wider input dynamic range (IDR) compared to the state-of-the-art, suitable for a variety of life science applications. With the novel differential capacitance to current conversion topology, it achieves an IDR of about seven times higher compared to the previous charge based capacitive measurement (CBCM) circuits and about three times higher compared to the CBCM with cascode current mirrors. It also features a calibration circuitry consisting of an array of switched capacitors, interdigitated electrodes (IDEs) realized on the topmost metal layer, a current-controlled 300 MHz oscillator, and a counter-serializer to create digital output. The proposed sensor, fabricated in AMS 0.35 μm CMOS technology, enables a high-resolution measurement, equal to 416 aF, of physiochemical changes in the IDE with up to 1.27 pF input offset adjustment range (IOAR). With a measurement speed of 15 μs, this sensor is among the fast CMOS capacitive sensors in the literature. In this paper, we demonstrate its functionality and applicability and present the experimental results for monitoring 2 μL evaporating droplets of chemical solvents. By using samples of solvents with different conductivity and relative permittivity, a wide range of capacitance and resistance variations in the sample-IDE interface electric equivalent model can be created. In addition, the evaporating droplet test has inherently fast dynamic changes. Based on the results, our proposed device addresses the challenge of detecting small capacitance changes despite large parasitic elements caused by the ions in the solution or by remnants deposited on the electrode.

A Time-Based Electronic Front-End for a Capacitive Particle Matter Detector

This paper introduces the electronic interface for a capacitive airborne particle matter detector. The proposed circuit relies on two matched ring oscillators and a mixer to detect the frequency difference induced by the deposition of a particle onto an interdigitated capacitor, which constitutes the load of one of the oscillators. The output of the mixer is digitized through a simple counter. In order to compensate the oscillation frequency offset of the two ring oscillators due to process and mismatch variations, a capacitive trimming circuit has been implemented. The sensor is connected to host through an I2C interface for communication and configuration. The sensor has been implemented using a standard 130-nm CMOS technology by STMicroelectronics and occupies 0.12-mm² die area. Experimental measurements using talcum powder show a sensitivity of 60 kHz/fF and a 3σ resolution equal to 165 aF.

Miniaturized Impedance Flow Cytometer: Design Rules and Integrated Readout

A dual-channel credit-card-sized impedance cell counter featuring a throughput of 2000 cell/s and detection of single yeast cells (5 μm) with a signal-to-noise ratio of 20 dB is presented. Its compactness is achieved by a CMOS ASIC combining a lock-in impedance demodulator with an oversampling 20-bit ΣΔ ADC and real-time peak detection embedded in field-programmable gate array. The module is coupled to a dielectrophoretic cell-sorting microfluidic device, offering compact and label-free electrical readout that replaces the need for a fluorescence microscope and, thus, is suitable for point-of-care diagnostics. The independent role of each dimension of the planar sensing microelectrodes is demonstrated, with simulations and experiments, along with its relevant effect on the spectrum of thin channels, deriving useful design guidelines.