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Huang Y, Li G, Bai T, Shin Y, Wang X, More AI, Boucher P, Chandrasekaran C, Liu J, Fang H. Flexible electronic-photonic 3D integration from ultrathin polymer chiplets. NPJ FLEXIBLE ELECTRONICS 2024; 8:61. [PMID: 39780990 PMCID: PMC11709425 DOI: 10.1038/s41528-024-00344-w] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/25/2024] [Accepted: 08/27/2024] [Indexed: 01/11/2025]
Abstract
The integration of flexible electronics and photonics has the potential to create revolutionary technologies, yet it has been challenging to marry electronic and photonic components on a single polymer device, especially through high-volume manufacturing. Here, we present a robust, chiplet-level heterogeneous integration of polymer-based circuits (CHIP), where several post-fabricated, ultrathin, polymer electronic, and optoelectronic chiplets are vertically bonded into one single chip at room temperature and then shaped into application-specific form factors with monolithic Input/Output (I/O). As a demonstration, we applied this process and developed a flexible 3D-integrated optrode with high-density arrays of microelectrodes for electrical recording and micro light-emitting diodes (μLEDs) for optogenetic stimulation while with unprecedented integration of additional temperature sensors for bio-safe operations and shielding designs for optoelectronic artifact prevention. Besides achieving simple, high-yield, and scalable 3D integration of much-needed functionalities, CHIP also enables double-sided area utilization and miniaturization of connection I/O. Systematic device characterization demonstrated the successfulness of this scheme and also revealed frequency-dependent origins of optoelectronic artifacts in flexible 3D-integrated optrodes. In addition to enabling excellent manufacturability and scalability, we envision CHIP to be generally applicable to numerous polymer-based devices to achieve wide-ranging applications.
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Affiliation(s)
- Yunxiang Huang
- Thayer School of Engineering, Dartmouth College, Hanover, NH, 03755, USA
| | - Gen Li
- Thayer School of Engineering, Dartmouth College, Hanover, NH, 03755, USA
| | - Tianyu Bai
- Thayer School of Engineering, Dartmouth College, Hanover, NH, 03755, USA
| | - Yieljae Shin
- Thayer School of Engineering, Dartmouth College, Hanover, NH, 03755, USA
| | - Xiaoxin Wang
- Thayer School of Engineering, Dartmouth College, Hanover, NH, 03755, USA
| | - Alexander Ian More
- Department of Psychological and Brain Sciences, Boston University, MA, 02118, USA
| | - Pierre Boucher
- Department of Psychological and Brain Sciences, Boston University, MA, 02118, USA
| | | | - Jifeng Liu
- Thayer School of Engineering, Dartmouth College, Hanover, NH, 03755, USA
| | - Hui Fang
- Thayer School of Engineering, Dartmouth College, Hanover, NH, 03755, USA
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Yi D, Yao Y, Wang Y, Chen L. Design, Fabrication, and Implantation of Invasive Microelectrode Arrays as in vivo Brain Machine Interfaces: A Comprehensive Review. JOURNAL OF MANUFACTURING PROCESSES 2024; 126:185-207. [PMID: 39185373 PMCID: PMC11340637 DOI: 10.1016/j.jmapro.2024.07.100] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 08/27/2024]
Abstract
Invasive Microelectrode Arrays (MEAs) have been a significant and useful tool for us to gain a fundamental understanding of how the brain works through high spatiotemporal resolution neuron-level recordings and/or stimulations. Through decades of research, various types of microwire, silicon, and flexible substrate-based MEAs have been developed using the evolving new materials, novel design concepts, and cutting-edge advanced manufacturing capabilities. Surgical implantation of the latest minimal damaging flexible MEAs through the hard-to-penetrate brain membranes introduces new challenges and thus the development of implantation strategies and instruments for the latest MEAs. In this paper, studies on the design considerations and enabling manufacturing processes of various invasive MEAs as in vivo brain-machine interfaces have been reviewed to facilitate the development as well as the state-of-art of such brain-machine interfaces from an engineering perspective. The challenges and solution strategies developed for surgically implanting such interfaces into the brain have also been evaluated and summarized. Finally, the research gaps have been identified in the design, manufacturing, and implantation perspectives, and future research prospects in invasive MEA development have been proposed.
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Affiliation(s)
- Dongyang Yi
- Department of Mechanical and Industrial Engineering, University of Massachusetts Lowell, Lowell, MA 01854
| | - Yao Yao
- Department of Industrial and Systems Engineering, University of Missouri, Columbia, MO 65211
| | - Yi Wang
- Department of Industrial and Systems Engineering, University of Missouri, Columbia, MO 65211
| | - Lei Chen
- Department of Mechanical and Industrial Engineering, University of Massachusetts Lowell, Lowell, MA 01854
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Horváth C, Ulbert I, Fiáth R. Propagating population activity patterns during spontaneous slow waves in the thalamus of rodents. Neuroimage 2024; 285:120484. [PMID: 38061688 DOI: 10.1016/j.neuroimage.2023.120484] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/31/2023] [Revised: 11/08/2023] [Accepted: 12/04/2023] [Indexed: 01/13/2024] Open
Abstract
Slow waves (SWs) represent the most prominent electrophysiological events in the thalamocortical system under anesthesia and during deep sleep. Recent studies have revealed that SWs have complex spatiotemporal dynamics and propagate across neocortical regions. However, it is still unclear whether neuronal activity in the thalamus exhibits similar propagation properties during SWs. Here, we report propagating population activity in the thalamus of ketamine/xylazine-anesthetized rats and mice visualized by high-density silicon probe recordings. In both rodent species, propagation of spontaneous thalamic activity during up-states was most frequently observed in dorsal thalamic nuclei such as the higher order posterior (Po), lateral posterior (LP) or laterodorsal (LD) nuclei. The preferred direction of thalamic activity spreading was along the dorsoventral axis, with over half of the up-states exhibiting a gradual propagation in the ventral-to-dorsal direction. Furthermore, simultaneous neocortical and thalamic recordings collected under anesthesia demonstrated that there is a weak but noticeable interrelation between propagation patterns observed during cortical up-states and those displayed by thalamic population activity. In addition, using chronically implanted silicon probes, we detected propagating activity patterns in the thalamus of naturally sleeping rats during slow-wave sleep. However, in comparison to propagating up-states observed under anesthesia, these propagating patterns were characterized by a reduced rate of occurrence and a faster propagation speed. Our findings suggest that the propagation of spontaneous population activity is an intrinsic property of the thalamocortical network during synchronized brain states such as deep sleep or anesthesia. Additionally, our data implies that the neocortex may have partial control over the formation of propagation patterns within the dorsal thalamus under anesthesia.
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Affiliation(s)
- Csaba Horváth
- Institute of Cognitive Neuroscience and Psychology, Research Centre for Natural Sciences, Eötvös Loránd Research Network, Budapest, Hungary; János Szentágothai Doctoral School of Neurosciences, Semmelweis University, Budapest, Hungary
| | - István Ulbert
- Institute of Cognitive Neuroscience and Psychology, Research Centre for Natural Sciences, Eötvös Loránd Research Network, Budapest, Hungary; Faculty of Information Technology and Bionics, Pázmány Péter Catholic University, Budapest, Hungary.
| | - Richárd Fiáth
- Institute of Cognitive Neuroscience and Psychology, Research Centre for Natural Sciences, Eötvös Loránd Research Network, Budapest, Hungary; Faculty of Information Technology and Bionics, Pázmány Péter Catholic University, Budapest, Hungary
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Yi D, Yao Y, Wang Y, Chen L. Manufacturing Processes of Implantable Microelectrode Array for In Vivo Neural Electrophysiological Recordings and Stimulation: A State-Of-the-Art Review. JOURNAL OF MICRO- AND NANO-MANUFACTURING 2022; 10:041001. [PMID: 37860671 PMCID: PMC10583290 DOI: 10.1115/1.4063179] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/23/2023] [Revised: 08/08/2023] [Indexed: 10/21/2023]
Abstract
Electrophysiological recording and stimulation of neuron activities are important for us to understand the function and dysfunction of the nervous system. To record/stimulate neuron activities as voltage fluctuation extracellularly, microelectrode array (MEA) implants are a promising tool to provide high temporal and spatial resolution for neuroscience studies and medical treatments. The design configuration and recording capabilities of the MEAs have evolved dramatically since their invention and manufacturing process development has been a key driving force for such advancement. Over the past decade, since the White House Brain Research Through Advancing Innovative Neurotechnologies (BRAIN) Initiative launched in 2013, advanced manufacturing processes have enabled advanced MEAs with increased channel count and density, access to more brain areas, more reliable chronic performance, as well as minimal invasiveness and tissue reaction. In this state-of-the-art review paper, three major types of electrophysiological recording MEAs widely used nowadays, namely, microwire-based, silicon-based, and flexible MEAs are introduced and discussed. Conventional design and manufacturing processes and materials used for each type are elaborated, followed by a review of further development and recent advances in manufacturing technologies and the enabling new designs and capabilities. The review concludes with a discussion on potential future directions of manufacturing process development to enable the long-term goal of large-scale high-density brain-wide chronic recordings in freely moving animals.
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Affiliation(s)
- Dongyang Yi
- Department of Mechanical and Industrial Engineering, University of Massachusetts Lowell, 1 University Avenue, Lowell, MA 01854
| | - Yao Yao
- Department of Industrial and Systems Engineering, University of Missouri, 416 South 6th Street, Columbia, MO 65211
| | - Yi Wang
- Department of Industrial and Systems Engineering, University of Missouri, E3437C Thomas & Nell Lafferre Hall, 416 South 6th Street, Columbia, MO 65211
| | - Lei Chen
- Department of Mechanical and Industrial Engineering, University of Massachusetts Lowell, 1 University Avenue, Lowell, MA 01854
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Dong T, Chen L, Shih A. Laser Sharpening of Carbon Fiber Microelectrode Arrays for Brain Recording. JOURNAL OF MICRO- AND NANO-MANUFACTURING 2020; 8:041013. [PMID: 35833189 PMCID: PMC8597551 DOI: 10.1115/1.4049780] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/01/2020] [Revised: 01/11/2021] [Indexed: 06/15/2023]
Abstract
Microwire microelectrode arrays (MEAs) are implanted in the brain for recording neuron activities to study the brain function. Among various microwire materials, carbon fiber stands out due to its small diameter (5-10 μm), relatively high Young's modulus, and low electrical resistance. Microwire tips in MEAs are often sharpened to reduce the insertion force and prevent the thin microwires from buckling. Currently, carbon fiber MEAs are sharpened by either torch burning, which limits the positions of wire tips to a water bath surface plane, or electrical discharge machining, which is difficult to implement to the nonelectrically conductive carbon fiber with parylene-C insulation. A laser-based carbon fiber sharpening method proposed in this study enables the fabrication of carbon fiber MEAs with sharp tips and custom lengths. Experiments were conducted to study effects of laser input voltage and transverse speed on carbon fiber tip geometry. Results of the tip sharpness and stripped length of the insulation as well as the electrochemical impedance spectroscopy measurement at 1 kHz were evaluated and analyzed. The laser input voltage and traverse speed have demonstrated to be critical for the sharp tip, short stripped length, and low electrical impedance of the carbon fiber electrode for brain recording MEAs. A carbon fiber MEA with custom electrode lengths was fabricated to validate the laser-based approach.
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Affiliation(s)
- Tianshu Dong
- Mechanical Engineering, University of Michigan, 2370 GG Brown, 2350 Hayward Street, Ann Arbor, MI 48109
| | - Lei Chen
- Mechanical Engineering, University of Massachusetts Lowell, Dandeneau Hall 231, 1 University Ave., Lowell, MA 01854
| | - Albert Shih
- Mechanical Engineering, Biomedical Engineering, University of Michigan, 3001E EECS, 1301 Beal Ave., Ann Arbor, MI 48109
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