Fabrication of Linear Array and Top-Orthogonal-to-Bottom Electrode CMUT Arrays With a Sacrificial Release Process

An Emerging Era: Conformable Ultrasound Electronics

Conformable electronics are regarded as the next generation of personal healthcare monitoring and remote diagnosis devices. In recent years, piezoelectric-based conformable ultrasound electronics (cUSE) have been intensively studied due to their unique capabilities, including nonradiative monitoring, soft tissue imaging, deep signal decoding, wireless power transfer, portability, and compatibility. This review provides a comprehensive understanding of cUSE for use in biomedical and healthcare monitoring systems and a summary of their recent advancements. Following an introduction to the fundamentals of piezoelectrics and ultrasound transducers, the critical parameters for transducer design are discussed. Next, five types of cUSE with their advantages and limitations are highlighted, and the fabrication of cUSE using advanced technologies is discussed. In addition, the working function, acoustic performance, and accomplishments in various applications are thoroughly summarized. It is noted that application considerations must be given to the tradeoffs between material selection, manufacturing processes, acoustic performance, mechanical integrity, and the entire integrated system. Finally, current challenges and directions for the development of cUSE are highlighted, and research flow is provided as the roadmap for future research. In conclusion, these advances in the fields of piezoelectric materials, ultrasound transducers, and conformable electronics spark an emerging era of biomedicine and personal healthcare.

High-Performance Electrode-Post CMUTs: Fabrication Details and Best Practices

Capacitive micromachined ultrasound transducers (CMUTs) have been investigated for over 25 years due to their promise for mass manufacturing and electronic co-integration. Previously, CMUTs were fabricated with many small membranes comprising a single transducer element. This, however, resulted in suboptimal electromechanical efficiency and transmit performance, such that resulting devices were not necessarily competitive with piezoelectric transducers. Moreover, many previous CMUT devices were subject to dielectric charging and operational hysteresis that limited long-term reliability. Recently, we demonstrated a CMUT architecture using a single long rectangular membrane per transducer element and novel electrode-post (EP) structures. This architecture not only offers long-term reliability, but also provides performance advantages over previously published CMUT and piezoelectric arrays. The purpose of this article is to highlight these performance advantages and provide details of the fabrication process, including the best practices to avoid common pitfalls. The objective is to provide sufficient detail to inspire a new generation of microfabricated transducers, which could lead to performance gains of future ultrasound systems.

cMUT technology developments

Capacitive micromachined ultrasonic transducer (cMUT) technology has steadily advanced since its advent in the mid-1990's. Though cMUTs have not supplanted piezoelectric transducers for medical ultrasound imaging to date, researchers and engineers are continuing to improve cMUTs and leverage unique cMUT characteristics toward new applications. While not intended to be an exhaustive review of every aspect of cMUT state-of-the-art, this article provides a brief overview of cMUT benefits, challenges, and opportunities, as well as recent progress in cMUT research and translation.

Investigation on Design Theory and Performance Analysis of Vacuum Capacitive Micromachined Ultrasonic Transducer

The capacitive micromachined ultrasonic transducer (CMUT), as a new acoustic-electric conversion element, has a promising application prospect. In this paper, the structure of the vacuum capacitive micromachined ultrasonic transducer is presented, and its performance-influencing factors are investigated. Firstly, the influencing factors of the performance parameters of the vacuum CMUT are analyzed theoretically based on the circular plate model and flat plate capacitance model, and the design principles of the structural parameters of the CMUT cell are proposed. Then, the finite element simulation software COMSOL Multiphysics is used to construct CMUT cell models with different membrane materials, membrane shapes, membrane radius thicknesses, and cavity heights for simulation verification. The results show that both the membrane parameters and the cavity heights affect the performance parameters of the Vacuum CMUT. In order to improve the efficiency of the CMUT, materials with low bending stiffness should be selected, and the filling factor of the membrane should be increased. In order to achieve high-transmission sound pressure, a smaller radius thickness and a larger cavity height should be selected. To achieve high reception sensitivity, a larger membrane radius thickness and a smaller cavity height should be selected. In order to obtain high fractional bandwidth, a larger membrane radius thickness should be selected. The results of this paper provide a basis for the design of Vacuum CMUT cell structure.

A Review of Transparent Sensors for Photoacoustic Imaging Applications

Photoacoustic imaging is a new type of noninvasive, nonradiation imaging modality that combines the deep penetration of ultrasonic imaging and high specificity of optical imaging. Photoacoustic imaging systems employing conventional ultrasonic sensors impose certain constraints such as obstructions in the optical path, bulky sensor size, complex system configurations, difficult optical and acoustic alignment, and degradation of signal-to-noise ratio. To overcome these drawbacks, an ultrasonic sensor in the optically transparent form has been introduced, as it enables direct delivery of excitation light through the sensors. In recent years, various types of optically transparent ultrasonic sensors have been developed for photoacoustic imaging applications, including optics-based ultrasonic sensors, piezoelectric-based ultrasonic sensors, and microelectromechanical system-based capacitive micromachined ultrasonic transducers. In this paper, the authors review representative transparent sensors for photoacoustic imaging applications. In addition, the potential challenges and future directions of the development of transparent sensors are discussed.

Dual-Frequency CMUT Arrays for Multiband Ultrasound Imaging Applications

Dual-frequency capacitive micromachined ultrasonic transducers (CMUTs) are introduced for multiscale imaging applications, where a single array transducer can be used for both deep low-resolution imaging and shallow high-resolution imaging. These transducers consist of low- and high-frequency membranes interlaced within each subarray element. They are fabricated using a modified sacrificial release process. Successful performance is demonstrated using wafer-level vibrometer testing, as well as acoustic testing on wirebonded dies consisting of arrays of 2- and 9-MHz elements of up to 64 elements for each subarray. The arrays are demonstrated to provide multiscale, multiresolution imaging using wire phantoms and can span frequencies from 2 MHz up to as high as 17 MHz. Peak transmit sensitivities of 27 and 7.5 kPa/V are achieved with the low- and high-frequency subarrays, respectively. At 16-mm imaging depth, lateral spatial resolution achieved is 0.84 and 0.33 mm for low- and high-frequency subarrays, respectively. The signal-to-noise ratio of the low-frequency subarray is significantly higher for deep targets compared to the high-frequency subarray. The array achieves multiband imaging capabilities difficult to achieve with current transducer technologies and may have applications to multipurpose probes and novel contrast agent imaging schemes.

Biometric recognition through 3D ultrasound hand geometry

Biometric recognition systems based on ultrasonic images have several advantages over other technologies, including the capability of capturing 3D images and detecting liveness. In this work, a recognition system based on hand geometry achieved through ultrasound images is proposed and experimentally evaluated. 3D images of human hand are acquired by performing parallel mechanical scans with a commercial ultrasound probe. Several 2D images are then extracted at increasing under-skin depths and, from each of them, up to 26 distances among key points of the hand are defined and computed to achieve a 2D template. A 3D template is then obtained by combining in several ways 2D templates of two or more images. A preliminary evaluation of the system is achieved by carrying out verification experiments on a home-made database. Results have shown a good recognition accuracy: the Equal Error Rate was 1.15% when a single 2D image is used and improved to 0.98% by using the 3D template. The possibility to upgrade the proposed system to a multimodal system, by extracting from the same volume other features like palmprint and hand veins, as well as possible improvements are finally discussed.

Transparent capacitive micromachined ultrasonic transducer (CMUT) arrays for real-time photoacoustic applications

Photoacoustic imaging has shown great potential for non-invasive high-resolution deep-tissue imaging. Minimizing the optical and acoustic paths for excitation and detection could significantly increase the signal-to-noise ratio. This could be accomplished by transparent transducers permitting through-transducer illumination. However, most ultrasound transducers are not optically transparent. Capacitive micromachined ultrasound transducer (CMUT) technology has compelling properties compared to piezoelectric transducers such as wide bandwidth and high receive sensitivity. Here, we introduce transparent CMUT linear arrays with high transparency in the visible and near-infrared range. To fabricate the devices, we used an adhesive wafer bonding technique using photosensitive benzocyclobutene (BCB) as both a structural and adhesive layer with a glass-indium-tin-oxide (ITO) substrate. Silicon nitride is used as the membrane material ensuring hermiticity and optical transparency. Our fabricated transducer arrays consist of 64 and 128 elements with immersion operation frequency of 8 MHz, enabling high-resolution imaging. ITO, along with thin metal strips, are used as a conductive layer for the top electrodes with minimal impact on device transparency. Fabricated devices have shown average transparency of 70% in the visible wavelength range that goes up to 90% in the near-infrared range. Arrays are wire-bonded to interfacing electronics and connected to a research ultrasound platform for phantom imaging. Arrays exhibited signal-to-noise (SNR) of 40 dB with 30V bias voltage and laser fluence of 13.5 mJ/cm². Arrays with 128 channels provided lateral and axial resolutions of 234 µm and 220 µm, respectively.

A Photoacoustic Imaging Device Using Piezoelectric Micromachined Ultrasound Transducers (PMUTs)

A linear piezoelectric micromachined ultrasound transducer (PMUT) array was fabricated and integrated into a device for photoacoustic imaging (PAI) of tissue phantoms. The PMUT contained 65 array elements, with each element having 60 diaphragms of [Formula: see text] diameter and [Formula: see text] pitch. A lead zirconate titanate (PZT) thin film was used as the piezoelectric layer. The in-air vibration response of the PMUT array elements showed a first mode resonance between 6 and 8 MHz. Hydrophone measurements showed 16.2 kPa average peak ultrasound pressure output at 7.5 mm from one element excited with 5 Vpp input. A receive sensitivity of ~0.48 mV/kPa was observed for a PMUT array element with 0 dB gain. The PMUT array was bonded to a custom-printed circuit board to enable compact integration with an optical fiber bundle for PAI. A broad photoacoustic bandwidth of ~89% was observed for the photoacoustic response captured from absorbing pencil lead targets. Linear scanning of a single element of a PMUT array was performed on different tissue phantoms embedded with light-absorbing targets to successfully demonstrate B-mode PAI using PMUTs.

A Nonlinear Lumped Equivalent Circuit Model for a Single Uncollapsed Square CMUT Cell

An accurate nonlinear lumped equivalent circuit model is used for modeling of capacitive micromachined ultrasonic transducers (CMUTs). Finite-element analysis (FEA) is a powerful tool for the analysis of CMUT arrays with a small number of cells while with the harmonic balance (HB) analysis of the lumped equivalent circuit model, the entire behavior of a large-scale arbitrary CMUT array can be modeled in a very short time. Recently, an accurate nonlinear equivalent circuit model for uncollapsed single circular CMUT cells has been developed. However, the need for an accurate large-signal circuit model for CMUT cells with square membranes motivated us to produce a new nonlinear large-signal equivalent circuit model for uncollapsed CMUT cells. In this paper, using analytical calculations and FEA as the tuning tool, a precise large signal equivalent circuit model of square CMUT dynamics was developed and showed excellent agreement with finite-element modeling (FEM) results. Then, different CMUT single cells with square and circular membranes were fabricated using a standard sacrificial release process. Model predictions of resonance frequencies and displacements closely matched experimental vibrometer measurements. The framework presented here may prove valuable for future design and modeling of CMUT arrays with square membranes for ultrasound imaging and therapy applications.

Investigation and Analysis of Ultrasound Imaging Based on Linear CMUT Array

In the next generation of ultrasound imaging systems, Capacitive micromachined ultasonic transducer (CMUT) based on microelectromechanical systems (MEMS) is a promising research direction of transducers, which has wide application prospects. In this paper, based on the study of three imaging methods, including classical phased array (CPA) imaging, classical synthetic aperture (CSA) imaging and phased subarray (PSA) imaging, several different imaging schemes are designed for linear CMUT array, after that the performances of these imaging schemes are compared and analyzed. The effects of the three imaging methods are verified and analyzed based on the linear CMUT array. Through analysis, it is found that the image quality of the classical phased array imaging method is the best, the imaging quality of the above three imaging methods can be effectively improved by adopting the amplitude apodization and dynamic focusing method. The research results in this paper will provide theoretical basis and application reference for the design of ultrasonic imaging system based on linear CMUT array in the future.

Ultrasound Open Platforms for Next-Generation Imaging Technique Development

Open platform (OP) ultrasound systems are aimed primarily at the research community. They have been at the forefront of the development of synthetic aperture, plane wave, shear wave elastography, and vector flow imaging. Such platforms are driven by a need for broad flexibility of parameters that are normally preset or fixed within clinical scanners. OP ultrasound scanners are defined to have three key features including customization of the transmit waveform, access to the prebeamformed receive data, and the ability to implement real-time imaging. In this paper, a formative discussion is given on the development of OPs from both the research community and the commercial sector. Both software- and hardware-based architectures are considered, and their specifications are compared in terms of resources and programmability. Software-based platforms capable of real-time beamforming generally make use of scalable graphics processing unit architectures, whereas a common feature of hardware-based platforms is the use of field-programmable gate array and digital signal processor devices to provide additional on-board processing capacity. OPs with extended number of channels (>256) are also discussed in relation to their role in supporting 3-D imaging technique development. With the increasing maturity of OP ultrasound scanners, the pace of advancement in ultrasound imaging algorithms is poised to be accelerated.