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Tian S, Chen P, Jiao M, Mu K, Gao Y, Qiao Y, Li L, Shan C. Geometry optimization of cantilever-based optical microphones. OPTICS LETTERS 2024; 49:2101-2104. [PMID: 38621086 DOI: 10.1364/ol.519135] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/18/2024] [Accepted: 03/25/2024] [Indexed: 04/17/2024]
Abstract
The introduction of cantilever-based fiber-optic microphones (FOMs) has proven to be effective in acoustic sensing. Further improvements in cantilevers face two key constraints: the challenge of achieving minimal sizes with sufficient reflective area and the trade-off between sensitivity and response bandwidth. Herein, we present a geometry optimization framework for a cantilever-based FOM that addresses this issue. Employing drumstick-shaped cantilevers housed within a Fabry-Perot (F-P) interferometric structure, we showcase a heightened sensitivity of 302.8 mV/Pa at 1 kHz and a minimum detectable acoustic pressure (MDP) of 2.35 µPa/H z. Notably, these metrics outperform those of the original rectangular cantilever with identical dimensions. Furthermore, our proposed cantilever effectively mitigates the reduction in resonance frequencies, thereby improving the response bandwidth. This geometry optimization framework offers considerable design flexibility and scalability, making it especially suitable for high-performance acoustic sensing applications.
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Park J, Lee Y, Cho S, Choe A, Yeom J, Ro YG, Kim J, Kang DH, Lee S, Ko H. Soft Sensors and Actuators for Wearable Human-Machine Interfaces. Chem Rev 2024; 124:1464-1534. [PMID: 38314694 DOI: 10.1021/acs.chemrev.3c00356] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/07/2024]
Abstract
Haptic human-machine interfaces (HHMIs) combine tactile sensation and haptic feedback to allow humans to interact closely with machines and robots, providing immersive experiences and convenient lifestyles. Significant progress has been made in developing wearable sensors that accurately detect physical and electrophysiological stimuli with improved softness, functionality, reliability, and selectivity. In addition, soft actuating systems have been developed to provide high-quality haptic feedback by precisely controlling force, displacement, frequency, and spatial resolution. In this Review, we discuss the latest technological advances of soft sensors and actuators for the demonstration of wearable HHMIs. We particularly focus on highlighting material and structural approaches that enable desired sensing and feedback properties necessary for effective wearable HHMIs. Furthermore, promising practical applications of current HHMI technology in various areas such as the metaverse, robotics, and user-interactive devices are discussed in detail. Finally, this Review further concludes by discussing the outlook for next-generation HHMI technology.
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Affiliation(s)
- Jonghwa Park
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Youngoh Lee
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Seungse Cho
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Ayoung Choe
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Jeonghee Yeom
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Yun Goo Ro
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Jinyoung Kim
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Dong-Hee Kang
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Seungjae Lee
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
| | - Hyunhyub Ko
- School of Energy and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan Metropolitan City 44919, Republic of Korea
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Sayyad PW, Park SJ, Ha TJ. Bioinspired nanoplatforms for human-machine interfaces: Recent progress in materials and device applications. Biotechnol Adv 2024; 70:108297. [PMID: 38061687 DOI: 10.1016/j.biotechadv.2023.108297] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/17/2023] [Revised: 11/20/2023] [Accepted: 11/29/2023] [Indexed: 01/13/2024]
Abstract
The panoramic characteristics of human-machine interfaces (HMIs) have prompted the needs to update the biotechnology community with the recent trends, developments, and future research direction toward next-generation bioelectronics. Bioinspired materials are promising for integrating various bioelectronic devices to realize HMIs. With the advancement of scientific biotechnology, state-of-the-art bioelectronic applications have been extensively investigated to improve the quality of life by developing and integrating bioinspired nanoplatforms in HMIs. This review highlights recent trends and developments in the field of biotechnology based on bioinspired nanoplatforms by demonstrating recently explored materials and cutting-edge device applications. Section 1 introduces the recent trends and developments of bioinspired nanomaterials for HMIs. Section 2 reviews various flexible, wearable, biocompatible, and biodegradable nanoplatforms for bioinspired applications. Section 3 furnishes recently explored substrates as carriers for advanced nanomaterials in developing HMIs. Section 4 addresses recently invented biomimetic neuroelectronic, nanointerfaces, biointerfaces, and nano/microfluidic wearable bioelectronic devices for various HMI applications, such as healthcare, biopotential monitoring, and body fluid monitoring. Section 5 outlines designing and engineering of bioinspired sensors for HMIs. Finally, the challenges and opportunities for next-generation bioinspired nanoplatforms in extending the potential on HMIs are discussed for a near-future scenario. We believe this review can stimulate the integration of bioinspired nanoplatforms into the HMIs in addition to wearable electronic skin and health-monitoring devices while addressing prevailing and future healthcare and material-related problems in biotechnologies.
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Affiliation(s)
- Pasha W Sayyad
- Dept. of Electronic Materials Engineering, Kwangwoon University, Seoul 01897, South Korea
| | - Sang-Joon Park
- Dept. of Electronic Materials Engineering, Kwangwoon University, Seoul 01897, South Korea
| | - Tae-Jun Ha
- Dept. of Electronic Materials Engineering, Kwangwoon University, Seoul 01897, South Korea.
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Xing T, Xing E, Jia T, Li J, Rong J, Li L, Tian S, Zhou Y, Liu W, Tang J, Liu J. An ultrahigh sensitivity acoustic sensor system for weak signal detection based on an ultrahigh- Q CaF 2 resonator. MICROSYSTEMS & NANOENGINEERING 2023; 9:65. [PMID: 37213821 PMCID: PMC10192424 DOI: 10.1038/s41378-023-00540-0] [Citation(s) in RCA: 4] [Impact Index Per Article: 4.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 11/17/2022] [Revised: 03/16/2023] [Accepted: 03/24/2023] [Indexed: 05/23/2023]
Abstract
Acoustic sensors with ultrahigh sensitivity, broadband response, and high resolution are essential for high-precision nondestructive weak signal detection technology. In this paper, based on the size effect of an ultrahigh-quality (Q) calcium fluoride (CaF2) resonator, a weak acoustic signal is detected by the dispersive response regime in which an acoustic, elastic wave modulates the geometry and is converted to a resonance frequency shift. Through the structural design of the resonator, the sensitivity reaches 11.54 V/Pa at 10 kHz in the experiment. To our knowledge, the result is higher than that of other optical resonator acoustic sensors. We further detected a weak signal as low as 9.4 µPa/Hz1/2, which greatly improved the detection resolution. With a good directionality of 36.4 dB and a broadband frequency response range of 20 Hz-20 kHz, the CaF2 resonator acoustic sensing system can not only acquire and reconstruct speech signals over a long distance but also accurately identify and separate multiple voices in noisy environments. This system shows high performance in weak sound detection, sound source localization, sleep monitoring, and many other voice interaction applications.
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Affiliation(s)
- Tong Xing
- Key Laboratory of Dynamic Testing Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051 China
| | - Enbo Xing
- Key Laboratory of Dynamic Testing Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051 China
| | - Tao Jia
- School of Semiconductors and Physics, North University of China, Taiyuan, 030051 China
| | - Jianglong Li
- Key Laboratory of Dynamic Testing Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051 China
| | - Jiamin Rong
- School of Semiconductors and Physics, North University of China, Taiyuan, 030051 China
| | - Li Li
- Shanxi Key Laboratory of Advanced Semiconductor Optoelectronic Devices and Integrated Systems, Jincheng, 048026 China
| | - Sicong Tian
- State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033 China
| | - Yanru Zhou
- Key Laboratory of Dynamic Testing Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051 China
| | - Wenyao Liu
- Key Laboratory of Dynamic Testing Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051 China
| | - Jun Tang
- School of Semiconductors and Physics, North University of China, Taiyuan, 030051 China
| | - Jun Liu
- Key Laboratory of Dynamic Testing Technology, School of Instrument and Electronics, North University of China, Taiyuan, 030051 China
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