Transport and sensing in nanofluidic devices

Scanning Ion Conductance Microscopy of Nafion-Modified Nanopores

Single nanopores in silicon nitride membranes are asymmetrically modified with Nafion and investigated with scanning ion conductance microscopy, where Nafion alters local ion concentrations at the nanopore. Effects of applied transmembrane potentials on local ion concentrations are examined, with the Nafion film providing a reservoir of cations in close proximity to the nanopore. Fluidic diodes based on ion concentration polarization are observed in the current-voltage response of the nanopore and in approach curves of SICM nanopipette in the vicinity of the nanopore. Experimental results are supported with finite element method simulations that detail ion depletion and enrichment of the nanopore/Nafion/nanopipette environment.

Ion Current Rectification and Long-Range Interference in Conical Silicon Micropores

Fluidic devices exhibiting ion current rectification (ICR), or ionic diodes, are of broad interest for applications including desalination, energy harvesting, and sensing, among others. For such applications a large conductance is desirable, which can be achieved by simultaneously using thin membranes and wide pores. In this paper we demonstrate ICR in micrometer sized conical channels in a thin silicon membrane with pore diameters comparable to the membrane thickness but both much larger than the electrolyte screening length. We show that for these pores the entrance resistance is key not only to Ohmic conductance around 0 V but also for understanding ICR, both of which we measure experimentally and capture within a single analytic theoretical framework. The only fit parameter in this theory is the membrane surface potential, for which we find that it is voltage dependent and its value is excessively large compared to the literature. From this we infer that surface charge outside the pore strongly contributes to the observed Ohmic conductance and rectification by a different extent. We experimentally verify this hypothesis in a small array of pores and find that ICR vanishes due to pore-pore interactions mediated through the membrane surface, while Ohmic conductance around 0 V remains unaffected. We find that the pore-pore interaction for ICR is set by a long-ranged decay of the concentration which explains the surprising finding that the ICR vanishes for even a sparsely populated array with a pore-pore spacing as large as 7 μm.

An inverse averaging finite element method for solving three-dimensional Poisson-Nernst-Planck equations in nanopore system simulations

The Poisson-Nernst-Planck (PNP) model plays an important role in simulating nanopore systems. In nanopore simulations, the large-size nanopore system and convection-domination Nernst-Planck (NP) equations will bring convergence difficulties and numerical instability problems. Therefore, we propose an improved finite element method (FEM) with an inverse averaging technique to solve the three-dimensional PNP model, named inverse averaging FEM (IAFEM). At first, the Slotboom variables are introduced aiming at transforming non-symmetric NP equations into self-adjoint second-order elliptic equations with exponentially behaved coefficients. Then, these exponential coefficients are approximated with their harmonic averages, which are calculated with an inverse averaging technique on every edge of each tetrahedral element in the grid. Our scheme shows good convergence when simulating single or porous nanopore systems. In addition, it is still stable when the NP equations are convection domination. Our method can also guarantee the conservation of computed currents well, which is the advantage that many stabilization schemes do not possess. Our numerical experiments on benchmark problems verify the accuracy and robustness of our scheme. The numerical results also show that the method performs better than the standard FEM when dealing with convection-domination problems. A successful simulation combined with realistic chemical experiments is also presented to illustrate that the IAFEM is still effective for three-dimensional interconnected nanopore systems.

Charge Selectivity of an Ionic Transistor

The charge selective properties of a long planar nanochannel with an embedded finite uniformly charged section in the middle are studied. The probability flux of a single test ion initially confined to the inlet reservoir is determined by integrating the Smoluchowski equation using a previously published series solution for the Debye-Hückel potential in this geometry. The charge selective properties are characterized by a dimensionless quantity that we call the "fractional blockage". We study how the fractional blockage depends on the dimensionless parameters that characterize the charge state and channel geometry. In the limit of strongly overlapped wall Debye layers, analytical expressions for the fractional blockage are presented that are found to be in good agreement with numerically computed values in the appropriate asymptotic regimes. These results may be helpful in the design of nanofluidic devices that have a variety of applications.

Advances in Label-Free Detections for Nanofluidic Analytical Devices

Nanofluidics, a discipline of science and engineering of fluids confined to structures at the 1-1000 nm scale, has experienced significant growth over the past decade. Nanofluidics have offered fascinating platforms for chemical and biological analyses by exploiting the unique characteristics of liquids and molecules confined in nanospaces; however, the difficulty to detect molecules in extremely small spaces hampers the practical applications of nanofluidic devices. Laser-induced fluorescence microscopy with single-molecule sensitivity has been so far a major detection method in nanofluidics, but issues arising from labeling and photobleaching limit its application. Recently, numerous label-free detection methods have been developed to identify and determine the number of molecules, as well as provide chemical, conformational, and kinetic information of molecules. This review focuses on label-free detection techniques designed for nanofluidics; these techniques are divided into two groups: optical and electrical/electrochemical detection methods. In this review, we discuss on the developed nanofluidic device architectures, elucidate the mechanisms by which the utilization of nanofluidics in manipulating molecules and controlling light-matter interactions enhances the capabilities of biological and chemical analyses, and highlight new research directions in the field of detections in nanofluidics.

A Simulation Analysis of Nanofluidic Ion Current Rectification Using a Metal-Dielectric Janus Nanopore Driven by Induced-Charge Electrokinetic Phenomena

We propose herein a unique mechanism of generating tunable surface charges in a metal-dielectric Janus nanopore for the development of nanofluidic ion diode, wherein an uncharged metallic nanochannel is in serial connection with a dielectric nanopore of fixed surface charge. In response to an external electric field supplied by two probes located on both sides of the asymmetric Janus nanopore, the metallic portion of the nanochannel is electrochemically polarized, so that a critical junction is formed between regions with an enriched concentration of positive and negative ions in the bulk electrolyte adjacent to the conducting wall. The combined action of the field-induced bipolar induced double layer and the native unipolar double layer full of cations within the negatively-charged dielectric nanopore leads to a voltage-controllable heterogenous volumetric charge distribution. The electrochemical transport of field-induced counterions along the nanopore length direction creates an internal zone of ion enrichment/depletion, and thereby enhancement/suppression of the resulting electric current inside the Janus nanopore for reverse working status of the nanofluidic ion diode. A mathematical model based upon continuum mechanics is established to study the feasibility of the Janus nanochannel in causing sufficient ion current rectification, and we find that only a good matching between pore diameter and Debye length is able to result in a reliable rectifying functionality for practical applications. This rectification effect is reminiscent of the typical bipolar membrane, but much more flexible on account of the nature of a voltage-based control due to induced-charge electrokinetic polarization of the conducting end, which may hold promise for osmotic energy conversion wherein an electric current appears due to a difference in salt concentration. Our theoretical demonstration of a composite metal-dielectric ion-selective medium provides useful guidelines for construction of flexible on-chip platforms utilizing induced-charge electrokinetic phenomena for a high degree of freedom ion current control.

Theory of diffusioosmosis in a charged nanochannel

We probe the diffusioosmotic transport in a charged nanofluidic channel in the presence of an applied tangential salt concentration gradient. Ionic salt gradient driven diffusioosmosis or ionic diffusioosmosis (IDO) is characterized by the generation of an induced tangential electric field and a diffusioosmotic velocity (DOSV) that is a combination of an electroosmotic velocity (EOSV) triggered by this electric field and a chemiosmotic velocity (COSV) triggered by an induced tangential pressure gradient. We explain that unlike the existing theories on IDO, it is more appropriate to apply the zero net current conditions (formulation F2) and not more restrictive zero net local flux conditions (formulation F1) particularly for the case where one considers a nanochannel connected to two reservoirs. We pinpoint limitations in the existing literature in correctly predicting the diffusioosmotic behavior even for the case where formulation F1 is used. We address these limitations and establish that (a) the induced electric field is an interplay of the differences in ionic diffusivity, the EDL-induced imbalance in ion concentrations, and the advection effects, (b) formulation F1 may overpredict or underpredict the electric field and the EOSV leading to an overprediction/underprediction of the DOSV and (c) formulation F2 demonstrates remarkable fluid physics of localized backflows owing to a dominant local influence of the COSV, which is missed by formulation F1. We anticipate that our theory will provide the first rigorous understanding of nanofluidic IDO with applications in multiple areas of low Reynolds number transport such as biofluidics, microfluidic separation, and colloidal transport.

Microfluidics in nanoparticle drug delivery; From synthesis to pre-clinical screening

Microfluidic technologies employ nano and microscale fabrication techniques to develop highly controllable and reproducible fluidic microenvironments. Utilizing microfluidics, lead compounds can be produced with the controlled physicochemical properties, characterized in a high-throughput fashion, and evaluated in in vitro biomimetic models of human organs; organ-on-a-chip. As a step forward from conventional in vitro culture methods, microfluidics shows promise in effective preclinical testing of nanoparticle-based drug delivery. This review presents a curated selection of state-of-the-art microfluidic platforms focusing on the fabrication, characterization, and assessment of nanoparticles for drug delivery applications. We also discuss the current challenges and future prospects of nanoparticle drug delivery development using microfluidics.

Nanofluidics: A New Arena for Materials Science

A significant growth of research in nanofluidics is achieved over the past decade, but the field is still facing considerable challenges toward the transition from the current physics-centered stage to the next application-oriented stage. Many of these challenges are associated with materials science, so the field of nanofluidics offers great opportunities for materials scientists to exploit. In addition, the use of unusual effects and ultrasmall confined spaces of well-defined nanofluidic environments would offer new mechanisms and technologies to manipulate nanoscale objects as well as to synthesize novel nanomaterials in the liquid phase. Therefore, nanofluidics will be a new arena for materials science. In the past few years, burgeoning progress has been made toward this trend, as overviewed in this article, including materials and methods for fabricating nanofluidic devices, nanofluidics with functionalized surfaces and functional material components, as well as nanofluidics for manipulating nanoscale materials and fabricating new nanomaterials. Many critical challenges as well as fantastic opportunities in this arena lie ahead. Some of those, which are of particular interest, are also discussed.

On the Origin of Ionic Rectification in DNA-Stuffed Nanopores: The Breaking and Retrieving Symmetry

The discovery of ionic current rectification (ICR) phenomena in synthetic nanofluidic systems elicits broad interest from interdisciplinary fields of chemistry, physics, materials science, and nanotechnology; and thus, boosts their applications in, for example, chemical sensing, fluidic pumping, and energy related aspects. So far, it is generally accepted that the ICR effect stems from the broken symmetry either in the nanofluidic structures, or in the environmental conditions. Although this empirical regularity is supported by numerous experimental and theoretical results, great challenge still remains to precisely figure out the correlation between the asymmetric ion transport properties and the degree of symmetry breaking. An appropriate and quantified measure is therefore highly demanded. Herein, taking DNA-stuffed nanopores as a model system, we systematically investigate the evolution of dynamic ICR in between two symmetric states. The fully stuffed and fully opened nanopores are symmetric; therefore, they exhibit linear ion transport behaviors. Once the stuffed DNA superstructures are asymmetrically removed from one end of the nanopore via aptamer-target interaction, the nanofluidic system becomes asymmetric and starts to rectify ionic current. The peak of ICR is found right before the breakthrough of the stuffed DNA forest. After that, the nanofluidic system gradually retrieves symmetry, and becomes non-rectified. Theoretical results by both the coarse-grained Poisson-Nernst-Planck model and the 1D statistic model excellently support the experimental observations, and further establish a quantified correlation between the ICR effect and the degree of asymmetry for different molecular filling configurations. Based on the ICR properties, we develop a proof-of-concept demonstration for sensing ATP, termed the ATP balance. These findings help to clarify the origin of ICR, and show implications to other asymmetric transport phenomena for future innovative nanofluidic devices and materials.

Modulation of Molecular Flux Using a Graphene Nanopore Capacitor

Modulation of ionic current flowing through nanoscale pores is one of the fundamental biological processes. Inspired by nature, nanopores in synthetic solid-state membranes are being developed to enable rapid analysis of biological macromolecules and to serve as elements of nanofludic circuits. Here, we theoretically investigate ion and water transport through a graphene-insulator-graphene membrane containing a single, electrolyte-filled nanopore. By means of all-atom molecular dynamics simulations, we show that the charge state of such a graphene nanopore capacitor can regulate both the selectivity and the magnitude of the nanopore ionic current. At a fixed transmembrane bias, the ionic current can be switched from being carried by an equal mixture of cations and anions to being carried almost exclusively by either cationic or anionic species, depending on the sign of the charge assigned to both plates of the capacitor. Assigning the plates of the capacitor opposite sign charges can either increase the nanopore current or reduce it substantially, depending on the polarity of the bias driving the transmembrane current. Facilitated by the changes of the nanopore surface charge, such ionic current modulations are found to occur despite the physical dimensions of the nanopore being an order of magnitude larger than the screening length of the electrolyte. The ionic current rectification is accompanied by a pronounced electro-osmotic effect that can transport neutral molecules such as proteins and drugs across the solid-state membrane and thereby serve as an interface between electronic and chemical signals.

Voltage-Rectified Current and Fluid Flow in Conical Nanopores

Ion current rectification (ICR) refers to the asymmetric potential-dependent rate of the passage of solution ions through a nanopore, giving rise to electrical current-voltage characteristics that mimic those of a solid-state electrical diode. Since the discovery of ICR in quartz nanopipettes two decades ago, synthetic nanopores and nanochannels of various geometries, fabricated in membranes and on wafers, have been extensively investigated to understand fundamental aspects of ion transport in highly confined geometries. It is now generally accepted that ICR requires an asymmetric electrical double layer within the nanopore, producing an accumulation or depletion of charge-carrying ions at opposite voltage polarities. Our research groups have recently explored how the voltage-dependent ion distributions and ICR within nanopores can induce novel nanoscale flow phenomena that have applications in understanding ionics in porous materials used in energy storage devices, chemical sensing, and low-cost electrical pumping of fluids. In this Account, we review our most recent investigations on this topic, based on experiments using conical nanopores (10-300 nm tip opening) fabricated in thin glass, mica, and polymer membranes. Measurable fluid flow in nanopores can be induced either using external pressure forces, electrically via electroosmotic forces, or by a combination of these two forces. We demonstrate that pressure-driven flow can greatly alter the electrical properties of nanopores and, vice versa, that the nonlinear electrical properties of conical nanopores can impart novel and useful flow phenomena. Electroosmotic flow (EOF), which depends on the magnitude of the ion fluxes within the double layer of the nanopore, is strongly coupled to the accumulation/depletion of ions. Thus, the same underlying cause of ICR also leads to EOF rectification, i.e., unequal flows occurring for the same voltage but opposite polarities. EOF rectification can be used to electrically pump fluids with very precise control across membranes containing conical pores via the application of a symmetric sinusoidal voltage. The combination of pressure and asymmetric EOF can also provide a means to generate new nanopore electrical behaviors, including negative differential resistance (NDR), in which the current through a conical pore decreases with increasing driving force (applied voltage), similar to solid-state tunnel diodes. NDR results from a positive feedback mechanism between the ion distributions and EOF, yielding a true bistability in both fluid flow and electrical current at a critical applied voltage. Nanopore-based NDR is extremely sensitive to the surface charge near the nanopore opening, suggesting possible applications in chemical sensing.

Field effect nanofluidics

Nanoscale fluid transport through conduits in the 1-100 nm range is termed as nanofluidics. Over the past decade or so, significant scientific and technological advances have occurred in the domain of nanofluidics with a transverse external electrical signal through a dielectric layer permitting control over ionic and fluid flows in these nanoscale conduits. Consequently, this special class of nanofluidic devices is commonly referred to as field effect devices, analogous to the solid-state field effect transistors that form the basis for modern electronics. In this mini-review, we focus on summarizing the recent developments in field effect nanofluidics as a discipline and evaluate both tutorially and critically the scientific and technological advances that have been reported, including a discussion on the future outlook and identifying broad open questions which suggest that there are many breakthroughs still to come in field-effect nanofluidics.

Soft Matter-Regulated Active Nanovalves Locally Self-Assembled in Femtoliter Nanofluidic Channels

Well-tailored thermoresponsive polymer brushes locally self-assembled in tiny nanofluidic channels enable the active regulation of femtoliter-scale fluids. Such soft-matter-regulated active nanovalves within nanofluidic channels can be extended to build well-controlled functional nanofluidic systems, allowing complex fluidic processes to be performed at the nanometer scales.

Rectification of nanopores in aprotic solvents--transport properties of nanopores with surface dipoles

Nanopores have become a model system to understand transport properties at the nanoscale. We report experiments and modeling of ionic current in aprotic solvents with different dipole moments through conically shaped nanopores in a polycarbonate film and through glass nanopipettes. We focus on solutions of the salt LiClO4, which is of great importance in modeling lithium based batteries. Results presented suggest ion current rectification observed results from two effects: (i) adsorption of Li(+) ions to the pore walls, and (ii) a finite dipole moment rendered by adsorbed solvent molecules. Properties of surfaces in various solvents were probed by means of scanning ion conductance microscopy, which confirmed existence of an effectively positive surface potential in aprotic solvents with high dipole moments.

Kinetics of nanopore fabrication during controlled breakdown of dielectric membranes in solution

Nanopore fabrication by controlled breakdown (CBD) overcomes many of the challenges of traditional nanofabrication techniques, by reliably forming solid-state nanopores sub-2 nm in size in a low-cost and scalable way for nucleic acid analysis applications. Herein, the breakdown kinetics of thin dielectric membranes immersed in a liquid environment are investigated in order to gain deeper insights into the mechanism of solid-state nanopore formation by high electric fields. For various fabrication conditions, we demonstrate that nanopore fabrication time is Weibull-distributed, in support of the hypothesis that the fabrication mechanism is a stochastic process governed by the probability of forming a connected path across the membrane (i.e. a weakest-link problem). Additionally, we explore the roles that various ions and solvents play in breakdown kinetics, revealing that asymmetric pH conditions across the membrane can significantly affect nanopore fabrication time for a given voltage polarity. These results, characterizing the stochasticity of the nanopore fabrication process and highlighting the parameters affecting it, should assist researchers interested in exploiting the potential of CBD for nanofluidic channel fabrication, while also offering guidance towards the conceivable manufacturing of solid-state nanopore-based technologies for DNA sequencing applications.

Single-particle electrophoresis in nanochannels

Electrophoretic mobilities and particle sizes of individual Hepatitis B Virus (HBV) capsids were measured in nanofluidic channels with two nanopores in series. The channels and pores had three-dimensional topography and were milled directly in glass substrates with a focused ion beam instrument assisted by an electron flood gun. The nanochannel between the two pores was 300 nm wide, 100 nm deep, and 2.5 μm long, and the nanopores at each end had dimensions 45 nm wide, 45 nm deep, and 400 nm long. With resistive-pulse sensing, the nanopores fully resolved pulse amplitude distributions of T = 3 HBV capsids (32 nm outer diameter) and T = 4 HBV capsids (35 nm outer diameter) and had sufficient peak capacity to discriminate intermediate species from the T = 3 and T = 4 capsid distributions in an assembly reaction. Because the T = 3 and T = 4 capsids have a wiffle-ball geometry with a hollow core, the observed change in current due to the capsid transiting the nanopore is proportional to the volume of electrolyte displaced by the volume of capsid protein, not the volume of the entire capsid. Both the signal-to-noise ratio of the pulse amplitude and resolution between the T = 3 and T = 4 distributions of the pulse amplitudes increase as the electric field strength is increased. At low field strengths, transport of the larger T = 4 capsid through the nanopores is hindered relative to the smaller T = 3 capsid due to interaction with the pores, but at sufficiently high field strengths, the T = 3 and T = 4 capsids had the same electrophoretic mobilities (7.4 × 10(-5) cm(2) V(-1) s(-1)) in the nanopores and in the nanochannel with the larger cross-sectional area.

Single micro-channel formation in a gap between probe electrodes by freezing an aqueous electrolyte

A size-tunable micro-channel is fabricated in a gap between two probe electrodes by freezing aqueous KCl. The channel has been characterized by resistance measurements and channel blocking by resistive particles. The channel size can be varied by the temperature even after the preparation of the channel. The channel is potentially useful not only for size-selective particle counting but also for the size-selective separation or filtration of particles and macromolecules.

Rectification of Ion Current in Nanopores Depends on the Type of Monovalent Cations: Experiments and Modeling

Rectifying nanopores feature ion currents that are higher for voltages of one polarity compared to the currents recorded for corresponding voltages of the opposite polarity. Rectification of nanopores has been found to depend on the pore opening diameter and distribution of surface charges on the pore walls as well as pore geometry. Very little is known, however, on the dependence of ionic rectification on the type of transported ions of the same charge. We performed experiments with single conically shaped nanopores in a polymer film and recorded current-voltage curves in three electrolytes: LiCl, NaCl, and KCl. Rectification degrees of the pores, quantified as the ratio of currents recorded for voltages of opposite polarities, were the highest for KCl and the lowest for LiCl. The experimental observations could not be explained by a continuum modeling based on the Poisson-Nernst-Planck equations. All-atom molecular dynamics simulations revealed differential binding between Li⁺, Na⁺, and K⁺ ions and carboxyl groups on the pore walls, resulting in changes to both the effective surface charge of the nanopore and cation mobility within the pore.

Exploring new scaling regimes for streaming potential and electroviscous effects in a nanocapillary with overlapping electric double layers

In this paper, we unravel new scaling regimes for streaming potential and electroviscous effects in a nanocapillary with thick overlapping Electric Double Layers (EDLs). We observe that the streaming potential, for a given value of the capillary zeta (ζ) potential, varies with the EDL thickness and a dimensionless parameter R, quantifying the conduction current. Depending on the value of R, variation of the streaming potential with the EDL thickness demonstrates distinct scaling regimes: one can witness a Quadratic Regime where the streaming potential varies as the square of the EDL thickness, a Weak Regime where the streaming potential shows a weaker variation with the EDL thickness, and a Saturation Regime where the streaming potential ceases to vary with the EDL thickness. Effective viscosity, characterizing the electroviscous effect, obeys the variation of the streaming potential for smaller EDL thickness values; however, for larger EDL thickness the electroosmotic flow profile dictates the electroviscous effect, with insignificant contribution of the streaming potential.

Cylindrical glass nanocapillaries patterned via coarse lithography (>1 μm) for biomicrofluidic applications

We demonstrate a new method of fabricating in-plane cylindrical glass nanocapillaries (<100 nm) that does not require advanced patterning techniques but the standard coarse photolithography (>1 μm). These nanocapillaries are self-enclosed optically transparent and highly regular over large areas. Our method involves structuring μm-scale rectangular trenches in silicon, sealing the trenches into enclosed triangular channels by depositing phosphosilicate glass, and then transforming the channels into cylindrical capillaries through shape transformation by the reflow of annealed glass layer. Extended anneal has the structures shrunk into nanocapillaries preserving their cylindrical shape. Nanocapillaries ∼50 nm in diameter and effective stretching of digested λ-phage DNA in them are demonstrated.

Spatiotemporal mapping of concentration polarization induced pH changes at nanoconstrictions

Under an applied electric field, concentration polarization (CP) arises from ion permselectivity of most nanoporous materials and biological ion channels. We present novel methods to quantitatively assess CP-induced spatiotemporal changes of pH that may significantly impact transport dynamics, device functionality, and physicochemical properties of molecular analytes in devices with nanofluidic constrictions. We measured pH fluctuations of >1.5 pH units and changes extending over 100's of micrometers from nanoconstrictions. The degree of change depends on key system parameters including buffer composition, surface charge, and strength of electric field. The results highlight the importance of neglected contributions of pH changes, and the approach can aid characterization and manipulation of mass transport in nanofluidic systems.

Voltage-gated ion transport through semiconducting conical nanopores formed by metal nanoparticle-assisted plasma etching

Nanopores with conical geometries have been found to rectify ionic current in electrolytes. While nanopores in semiconducting membranes are known to modulate ionic transport through gated modification of pore surface charge, the fabrication of conical nanopores in silicon (Si) has proven challenging. Here, we report the discovery that gold (Au) nanoparticle (NP)-assisted plasma etching results in the formation of conical etch profiles in Si. These conical profiles result due to enhanced Si etch rates in the vicinity of the Au NPs. We show that this process provides a convenient and versatile means to fabricate conical nanopores in Si membranes and crystals with variable pore-diameters and cone-angles. We investigated ionic transport through these pores and observed that rectification ratios could be enhanced by a factor of over 100 by voltage gating alone, and that these pores could function as ionic switches with high on-off ratios of approximately 260. Further, we demonstrate voltage gated control over protein transport, which is of importance in lab-on-a-chip devices and biomolecular separations.

Nanofluidic devices with two pores in series for resistive-pulse sensing of single virus capsids

We report fabrication and characterization of nanochannel devices with two nanopores in series for resistive-pulse sensing of hepatitis B virus (HBV) capsids. The nanochannel and two pores are patterned by electron beam lithography between two microchannels and etched by reactive ion etching. The two nanopores are 50-nm wide, 50-nm deep, and 40-nm long and are spaced 2.0-μm apart. The nanochannel that brackets the two pores is 20× wider (1 μm) to reduce the electrical resistance adjacent to the two pores and to ensure the current returns to its baseline value between resistive-pulse events. Average pulse amplitudes differ by <2% between the two pores and demonstrate that the fabrication technique is able to produce pores with nearly identical geometries. Because the two nanopores in series sense single particles at two discrete locations, particle properties, e.g., electrophoretic mobility, are determined from the pore-to-pore transit time.