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Tuktamyshev A, Vichi S, Cesura FG, Fedorov A, Carminati G, Lambardi D, Pedrini J, Vitiello E, Pezzoli F, Bietti S, Sanguinetti S. Strain Relaxation of InAs Quantum Dots on Misoriented InAlAs(111) Metamorphic Substrates. NANOMATERIALS (BASEL, SWITZERLAND) 2022; 12:3571. [PMID: 36296766 PMCID: PMC9607536 DOI: 10.3390/nano12203571] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 09/14/2022] [Revised: 09/27/2022] [Accepted: 10/07/2022] [Indexed: 06/16/2023]
Abstract
We investigate in detail the role of strain relaxation and capping overgrowth in the self-assembly of InAs quantum dots by droplet epitaxy. InAs quantum dots were realized on an In0.6Al0.4As metamorphic buffer layer grown on a GaAs(111)A misoriented substrate. The comparison between the quantum electronic calculations of the optical transitions and the emission properties of the quantum dots highlights the presence of a strong quenching of the emission from larger quantum dots. Detailed analysis of the surface morphology during the capping procedure show the presence of a critical size over which the quantum dots are plastically relaxed.
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Affiliation(s)
- Artur Tuktamyshev
- Isituto Nazionale di Fisica Nucleare, Sezione di Milano-Bicocca, 20100 Milano, Italy
| | - Stefano Vichi
- Isituto Nazionale di Fisica Nucleare, Sezione di Milano-Bicocca, 20100 Milano, Italy
| | | | - Alexey Fedorov
- Centro Nazionale delle Ricerche, Istituto di Fotonica e Nanotecnologie, 20100 Milano, Italy
| | - Giuseppe Carminati
- Department of Materials Science, University of Milano-Bicocca, 20100 Milano, Italy
| | - Davide Lambardi
- Department of Materials Science, University of Milano-Bicocca, 20100 Milano, Italy
| | - Jacopo Pedrini
- Department of Materials Science, University of Milano-Bicocca, 20100 Milano, Italy
| | - Elisa Vitiello
- Department of Materials Science, University of Milano-Bicocca, 20100 Milano, Italy
| | - Fabio Pezzoli
- Department of Materials Science, University of Milano-Bicocca, 20100 Milano, Italy
| | - Sergio Bietti
- Department of Materials Science, University of Milano-Bicocca, 20100 Milano, Italy
| | - Stefano Sanguinetti
- Isituto Nazionale di Fisica Nucleare, Sezione di Milano-Bicocca, 20100 Milano, Italy
- Department of Materials Science, University of Milano-Bicocca, 20100 Milano, Italy
- Centro Nazionale delle Ricerche, Istituto di Fotonica e Nanotecnologie, 20100 Milano, Italy
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Gajjela RSR, van Venrooij NRS, da Cruz AR, Skiba-Szymanska J, Stevenson RM, Shields AJ, Pryor CE, Koenraad PM. Study of Size, Shape, and Etch pit formation in InAs/InP Droplet Epitaxy Quantum Dots. NANOTECHNOLOGY 2022; 33:305705. [PMID: 35395644 DOI: 10.1088/1361-6528/ac659e] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/28/2022] [Accepted: 04/07/2022] [Indexed: 06/14/2023]
Abstract
We investigated metal-organic vapor phase epitaxy grown droplet epitaxy (DE) and Stranski-Krastanov (SK) InAs/InP quantum dots (QDs) by cross-sectional scanning tunneling microscopy (X-STM). We present an atomic-scale comparison of structural characteristics of QDs grown by both growth methods proving that the DE yields more uniform and shape-symmetric QDs. Both DE and SKQDs are found to be truncated pyramid-shaped with a large and sharp top facet. We report the formation of localized etch pits for the first time in InAs/InP DEQDs with atomic resolution. We discuss the droplet etching mechanism in detail to understand the formation of etch pits underneath the DEQDs. A summary of the effect of etch pit size and position on fine structure splitting (FSS) is provided via thek·ptheory. Finite element (FE) simulations are performed to fit the experimental outward relaxation and lattice constant profiles of the cleaved QDs. The composition of QDs is estimated to be pure InAs obtained by combining both FE simulations and X-STM results. The preferential formation of {136} and {122} side facets was observed for the DEQDs. The formation of a DE wetting layer from As-P surface exchange is compared with the standard SKQDs wetting layer. The detailed structural characterization performed in this work provides valuable feedback for further growth optimization to obtain QDs with even lower FSS for applications in quantum technology.
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Affiliation(s)
- Raja S R Gajjela
- Department of Applied Physics, Eindhoven University of Technology, Eindhoven 5612 AZ, The Netherlands
| | - Niels R S van Venrooij
- Department of Applied Physics, Eindhoven University of Technology, Eindhoven 5612 AZ, The Netherlands
| | - Adonai R da Cruz
- Department of Applied Physics, Eindhoven University of Technology, Eindhoven 5612 AZ, The Netherlands
| | - Joanna Skiba-Szymanska
- Toshiba Europe Limited, Cambridge Research Laboratory, 208 Science Park, Milton Road, Cambridge CB4 0GZ, United Kingdom
| | - R Mark Stevenson
- Toshiba Europe Limited, Cambridge Research Laboratory, 208 Science Park, Milton Road, Cambridge CB4 0GZ, United Kingdom
| | - Andrew J Shields
- Toshiba Europe Limited, Cambridge Research Laboratory, 208 Science Park, Milton Road, Cambridge CB4 0GZ, United Kingdom
| | - Craig E Pryor
- Department of Physics and Astronomy, Optical Science and Technology Center, University of Iowa, Iowa City, Iowa IA-52242, United States of America
| | - Paul M Koenraad
- Department of Applied Physics, Eindhoven University of Technology, Eindhoven 5612 AZ, The Netherlands
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Gajjela RSR, Koenraad PM. Atomic-Scale Characterization of Droplet Epitaxy Quantum Dots. NANOMATERIALS 2021; 11:nano11010085. [PMID: 33401568 PMCID: PMC7823520 DOI: 10.3390/nano11010085] [Citation(s) in RCA: 8] [Impact Index Per Article: 2.7] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/08/2020] [Revised: 12/21/2020] [Accepted: 12/29/2020] [Indexed: 01/30/2023]
Abstract
The fundamental understanding of quantum dot (QD) growth mechanism is essential to improve QD based optoelectronic devices. The size, shape, composition, and density of the QDs strongly influence the optoelectronic properties of the QDs. In this article, we present a detailed review on atomic-scale characterization of droplet epitaxy quantum dots by cross-sectional scanning tunneling microscopy (X-STM) and atom probe tomography (APT). We will discuss both strain-free GaAs/AlGaAs QDs and strained InAs/InP QDs grown by droplet epitaxy. The effects of various growth conditions on morphology and composition are presented. The efficiency of methods such as flushing technique is shown by comparing with conventional droplet epitaxy QDs to further gain control over QD height. A detailed characterization of etch pits in both QD systems is provided by X-STM and APT. This review presents an overview of detailed structural and compositional analysis that have assisted in improving the fabrication of QD based optoelectronic devices grown by droplet epitaxy.
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High-temperature droplet epitaxy of symmetric GaAs/AlGaAs quantum dots. Sci Rep 2020; 10:6532. [PMID: 32300114 PMCID: PMC7162903 DOI: 10.1038/s41598-020-62248-9] [Citation(s) in RCA: 17] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/07/2019] [Accepted: 01/02/2020] [Indexed: 11/08/2022] Open
Abstract
We introduce a high-temperature droplet epitaxy procedure, based on the control of the arsenization dynamics of nanoscale droplets of liquid Ga on GaAs(111)A surfaces. The use of high temperatures for the self-assembly of droplet epitaxy quantum dots solves major issues related to material defects, introduced during the droplet epitaxy fabrication process, which limited its use for single and entangled photon sources for quantum photonics applications. We identify the region in the parameter space which allows quantum dots to self-assemble with the desired emission wavelength and highly symmetric shape while maintaining a high optical quality. The role of the growth parameters during the droplet arsenization is discussed and modeled.
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Scarpellini D, Fedorov A, Somaschini C, Frigeri C, Bollani M, Bietti S, Nöetzel R, Sanguinetti S. Ga crystallization dynamics during annealing of self-assisted GaAs nanowires. NANOTECHNOLOGY 2017; 28:045605. [PMID: 27997367 DOI: 10.1088/1361-6528/28/4/045605] [Citation(s) in RCA: 8] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
In As atmosphere, we analyzed the crystallization dynamics during post-growth annealing of Ga droplets residing at the top of self-assisted GaAs nanowires grown by molecular beam epitaxy. The final crystallization steps, fundamental to determining the top facet nanowire morphology, proceeded via a balance of Ga crystallization via vapor-liquid-solid and layer-by-layer growth around the droplet, promoted by Ga diffusion out of the droplet perimeter, As desorption, and diffusion dynamics. By controlling As flux and substrate temperature the transformation of Ga droplets into nanowire segments with a top surface flat and parallel to the substrate was achieved, thus opening the possibility to realize atomically sharp vertical heterostructures in III-As self-assisted nanowires through group III exchange.
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Affiliation(s)
- David Scarpellini
- LNESS and Dipartimento di Scienza dei Materiali, Università di Milano-Bicocca, Milano, Italy
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Chen HJY, Yang DL, Huang TW, Yu IS. Formation and Temperature Effect of InN Nanodots by PA-MBE via Droplet Epitaxy Technique. NANOSCALE RESEARCH LETTERS 2016; 11:241. [PMID: 27142879 PMCID: PMC4854854 DOI: 10.1186/s11671-016-1455-0] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 03/04/2016] [Accepted: 04/26/2016] [Indexed: 06/05/2023]
Abstract
In this report, self-organized indium nitride nanodots have been grown on Si (111) by droplet epitaxy method and their density can reach as high as 2.83 × 10(11) cm(-2) for the growth at low temperature of 250 °C. Based on the in situ reflection high-energy electron diffraction, the surface condition, indium droplets, and the formation of InN nanodots are identified during the epitaxy. The X-ray photoelectron spectroscopy and photoluminescence measurements have shown the formation of InN nanodots as well. The growth mechanism of InN nanodots could be described via the characterizations of indium droplets and InN nanodots using scanning electron microscopy, atomic force microscopy, and transmission electron microscopy. The density of the InN nanodots was less than that of the In droplets due to the surface diffusion and desorption of atoms during the nitridation and annealing process. The average size and density of InN nanodots can be controlled by the substrate temperatures during the growth. For the growth at lower temperature, we obtained the higher density and smaller average size of InN nanodots. To minimize the total surface energy, the coarsening and some preferred orientations of InN nanodots were observed for the growth at high temperature.
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Affiliation(s)
- Hugo Juin-Yu Chen
- Department of Materials Science and Engineering, National Dong Hwa University, Hualien, 97401, Taiwan, Republic of China
| | - Dian-Long Yang
- Department of Materials Science and Engineering, National Dong Hwa University, Hualien, 97401, Taiwan, Republic of China
| | - Tseh-Wet Huang
- Department of Materials Science and Engineering, National Dong Hwa University, Hualien, 97401, Taiwan, Republic of China
| | - Ing-Song Yu
- Department of Materials Science and Engineering, National Dong Hwa University, Hualien, 97401, Taiwan, Republic of China.
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