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Lü B, Chen Y, Ma X, Shi Z, Zhang S, Jia Y, Li Y, Cheng Y, Jiang K, Li W, Zhang W, Yue Y, Li S, Sun X, Li D. Wafer-Scale Growth and Transfer of High-Quality MoS 2 Array by Interface Design for High-Stability Flexible Photosensitive Device. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024; 11:e2405050. [PMID: 38973148 PMCID: PMC11425836 DOI: 10.1002/advs.202405050] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/07/2024] [Indexed: 07/09/2024]
Abstract
Transition metal disulfide compounds (TMDCs) emerges as the promising candidate for new-generation flexible (opto-)electronic device fabrication. However, the harsh growth condition of TMDCs results in the necessity of using hard dielectric substrates, and thus the additional transfer process is essential but still challenging. Here, an efficient strategy for preparation and easy separation-transfer of high-uniform and quality-enhanced MoS2 via the precursor pre-annealing on the designed graphene inserting layer is demonstrated. Based on the novel strategy, it achieves the intact separation and transfer of a 2-inch MoS2 array onto the flexible resin. It reveals that the graphene inserting layer not only enhances MoS2 quality but also decreases interfacial adhesion for easy separation-transfer, which achieves a high yield of ≈99.83%. The theoretical calculations show that the chemical bonding formation at the growth interface has been eliminated by graphene. The separable graphene serves as a photocarrier transportation channel, making a largely enhanced responsivity up to 6.86 mA W-1, and the photodetector array also qualifies for imaging featured with high contrast. The flexible device exhibits high bending stability, which preserves almost 100% of initial performance after 5000 cycles. The proposed novel TMDCs growth and separation-transfer strategy lightens their significance for advances in curved and wearable (opto-)electronic applications.
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Affiliation(s)
- Bingchen Lü
- Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Yang Chen
- Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Xiaobao Ma
- Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Zhiming Shi
- Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Shanli Zhang
- Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Yuping Jia
- Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Yahui Li
- Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Yuang Cheng
- Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Ke Jiang
- Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Wenwen Li
- Key Laboratory of Automobile Materials MOE, and School of Materials Science & Engineering, and Electron Microscopy Center, and International Center of Future Science, and Jilin Provincial International Cooperation Key Laboratory of High-Efficiency Clean Energy Materials, Jilin University, Changchun, 130012, P. R. China
| | - Wei Zhang
- Key Laboratory of Automobile Materials MOE, and School of Materials Science & Engineering, and Electron Microscopy Center, and International Center of Future Science, and Jilin Provincial International Cooperation Key Laboratory of High-Efficiency Clean Energy Materials, Jilin University, Changchun, 130012, P. R. China
| | - Yuanyuan Yue
- School of Management Science and Information Engineering, Jilin University of Finance and Economics, Changchun, 130117, P. R. China
| | - Shaojuan Li
- Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Xiaojuan Sun
- Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
| | - Dabing Li
- Key Laboratory of Luminescence Science and Technology, Chinese Academy of Sciences & State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, P. R. China
- Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, 100049, P. R. China
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Khan K, Tareen AK, Ahmad W, Hussain I, Chaudhry MU, Mahmood A, Khan MF, Zhang H, Xie Z. Recent Advances in Non-Ti MXenes: Synthesis, Properties, and Novel Applications. ADVANCED SCIENCE (WEINHEIM, BADEN-WURTTEMBERG, GERMANY) 2024; 11:e2303998. [PMID: 38894594 PMCID: PMC11423233 DOI: 10.1002/advs.202303998] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/17/2023] [Revised: 09/10/2023] [Indexed: 06/21/2024]
Abstract
One of the most fascinating 2D nanomaterials (NMs) ever found is various members of MXene family. Among them, the titanium-based MXenes, with more than 70% of publication-related investigations, are comparatively well studied, producing fundamental foundation for the 2D MXene family members with flexible properties, familiar with a variety of advanced novel technological applications. Nonetheless, there are still more candidates among transitional metals (TMs) that can function as MXene NMs in ways that go well beyond those that are now recognized. Systematized details of the preparations, characteristics, limitations, significant discoveries, and uses of the novel M-based MXenes (M-MXenes), where M stands for non-Ti TMs (M = Sc, V, Cr, Y, Zr, Nb, Mo, Hf, Ta, W, and Lu), are given. The exceptional qualities of the 2D non-Ti MXene outperform standard Ti-MXene in several applications. There is many advancement in top-down as well as bottom-up production of MXenes family members, which allows for exact control of the M-characteristics MXene NMs to contain cutting-edge applications. This study offers a systematic evaluation of existing research, covering everything in producing complex M-MXenes from primary limitations to the characterization and selection of their applications in accordance with their novel features. The development of double metal combinations, extension of additional metal candidates beyond group-(III-VI)B family, and subsequent development of the 2D TM carbide/TMs nitride/TM carbonitrides to 2D metal boride family are also included in this overview. The possibilities and further recommendations for the way of non-Ti MXene NMs are in the synthesis of NMs will discuss in detail in this critical evaluation.
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Affiliation(s)
- Karim Khan
- School of Electrical Engineering and Intelligentization, Dongguan University of Technology, Dongguan, 523808, China
- Shenzhen Nuoan Environmental and Safety Inc., Shenzhen, 518107, China
- Additive Manufacturing Institute, Shenzhen University, Shenzhen, 518060, China
- Shenzhen Engineering Laboratory of Phosphorene and Optoelectronics, International Collaborative Laboratory of 2D Materials for Optoelectronics Science and Technology of Ministry of Education, Institute of Microscale Optoelectronics Engineering, Shenzhen University, Shenzhen, 518060, China
| | - Ayesha Khan Tareen
- School of Mechanical Engineering, Dongguan University of Technology, Dongguan, 523808, China
| | - Waqas Ahmad
- Institute of Fundamental and Frontier Sciences University of Electronic Science and Technology of China, Chengdu, 610054, China
| | - Iftikhar Hussain
- Department of Mechanical Engineering, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, 999077, Hong Kong
- A. J. Drexel Nanomaterials Institute and Department of Materials Science and Engineering, Drexel University, Philadelphia, PA, 19104, USA
| | - Mujeeb U Chaudhry
- Department of Engineering, Durham University, Lower Mountjoy, South Rd, Durham, DH1 3LE, UK
| | - Asif Mahmood
- School of Chemical and Biomolecular Engineering, The University of Sydney, Sydney, 2006, Australia
| | - Muhammad Farooq Khan
- Department of Electrical Engineering, Sejong University, Seoul, 05006, Republic of Korea
| | - Han Zhang
- Shenzhen Engineering Laboratory of Phosphorene and Optoelectronics, International Collaborative Laboratory of 2D Materials for Optoelectronics Science and Technology of Ministry of Education, Institute of Microscale Optoelectronics Engineering, Shenzhen University, Shenzhen, 518060, China
| | - Zhongjian Xie
- Shenzhen Children's Hospital, Clinical Medical College of Southern University of Science and Technology, Shenzhen, Guangdong, 518038, P. R. China
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Mallick S, Majumder S, Maiti P, Kesavan K, Rahman A, Rath A. Development of Self-Doped Monolayered 2D MoS 2 for Enhanced Photoresponsivity. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2024:e2403225. [PMID: 39096114 DOI: 10.1002/smll.202403225] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/22/2024] [Revised: 07/24/2024] [Indexed: 08/04/2024]
Abstract
Transition metal dichalcogenides (TMDs) exist in two distinct phases: the thermodynamically stable trigonal prismatic (2H) and the metastable octahedral (1T) phase. Phase engineering has emerged as a potent technique for enhancing the performance of TMDs in optoelectronics applications. Nevertheless, understanding the mechanism of phase transition in TMDs and achieving large-area synthesis of phase-controlled TMDs continue to pose significant challenges. This study presents the synthesis of large-area monolayered 2H-MoS2 and mixed-phase 1T/2H-MoS2 by controlling the growth temperature in the chemical vapor deposition (CVD) method without use of a catalyst. The field-effect transistors (FETs) devices fabricated with 1T/2H-MoS2 mixed-phase show an on/off ratio of 107. Photo response devices fabricated with 1T/2H-MoS2 mixed-phase show ≈55 times enhancement in responsivity (from 0.32 to 17.4 A W-1) and 102 times increase in the detectivity (from 4.1 × 1010 to 2.48 × 1012 cm Hz W-1) compare to 2H-MoS2. Introducing the metallic 1T phase within the 2H phase contributes additional carriers to the material, which prevents the electron-hole recombination and thereby increases the carrier density in the 1T/2H-MoS2 mixed-phase in comparison to 2H-MoS2. This work provides insights into the self-doping effects of 1T phase in 2H MoS2, enabling the tuning of 2D TMDs properties for optoelectronic applications.
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Affiliation(s)
- Sagar Mallick
- Central Characterization Department, CSIR-Institute of Minerals and Materials Technology, Bhubaneswar, Odisha, 751013, India
- Academy of Scientific & Innovative Research, Ghaziabad, 201002, India
| | - Sudipta Majumder
- Indian Institute of Science Education and Research, Dr Homi Bhabha Road, Pashan, Pune, Maharashtra, 411008, India
| | - Paramita Maiti
- Institute of Physics, Sachivalaya Marg, Bhubaneswar, Odisha, 751005, India
| | - Kamali Kesavan
- Central Characterization Department, CSIR-Institute of Minerals and Materials Technology, Bhubaneswar, Odisha, 751013, India
- Academy of Scientific & Innovative Research, Ghaziabad, 201002, India
| | - Atikur Rahman
- Indian Institute of Science Education and Research, Dr Homi Bhabha Road, Pashan, Pune, Maharashtra, 411008, India
| | - Ashutosh Rath
- Central Characterization Department, CSIR-Institute of Minerals and Materials Technology, Bhubaneswar, Odisha, 751013, India
- Academy of Scientific & Innovative Research, Ghaziabad, 201002, India
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Lyu Z, Qian Y, Zhang Q, Fang Z, Kang DJ. Liquid-phase catalyst pre-seeding for controlled growth of layered MoS 2 films over a large area via chemical vapor deposition. NANOSCALE 2024; 16:1906-1914. [PMID: 38170840 DOI: 10.1039/d3nr02928j] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/05/2024]
Abstract
We introduce an innovative method that facilitates precise control of high-quality molybdenum disulfide (MoS2) growth, extending up to three layers, on a large scale. This scalable growth is realized by employing solution-based catalysts and precursors in conjunction with chemical vapor deposition (CVD). The catalyst not only diminishes the precursor's activation energy and melting temperature but also augments the overall reaction rate. By regulating the concentration ratio, we directly manipulate the precursor concentrations, thereby promoting clean growth. This unique control mechanism, as delineated in this study, is unprecedented. Our findings confirm that the catalyst introduction does not compromise the quality of the resulting samples. Field effect transistors (FETs) fabricated from the synthesized MoS2 display superior electrical properties; they exhibit a high carrier mobility of 32.1 cm2 V-1 s-1 and an on/off current ratio of 108, signifying their promising electrical performance. Accordingly, our findings suggest that the solution-based CVD strategy presented herein can be potentially utilized for the integration of FETs into a multitude of practical applications.
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Affiliation(s)
- Zhiyi Lyu
- Department of Physics, Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do 16419, Republic of Korea.
| | - Yongteng Qian
- College of Pharmacy, Jinhua Polytechnic, Jinhua, Zhejiang Province, 321007, P. R. China
| | - Qianwen Zhang
- Department of Physics, Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do 16419, Republic of Korea.
| | - Zhenxing Fang
- College of Science and Technology, Ningbo University, Ningbo 315212, P. R. China
| | - Dae Joon Kang
- Department of Physics, Sungkyunkwan University, 2066, Seobu-ro, Jangan-gu, Suwon, Gyeonggi-do 16419, Republic of Korea.
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5
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Yang KY, Nguyen HT, Tsao YM, Artemkina SB, Fedorov VE, Huang CW, Wang HC. Large area MoS 2 thin film growth by direct sulfurization. Sci Rep 2023; 13:8378. [PMID: 37225785 DOI: 10.1038/s41598-023-35596-5] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/11/2023] [Accepted: 05/20/2023] [Indexed: 05/26/2023] Open
Abstract
In this study, we present the growth of monolayer MoS2 (molybdenum disulfide) film. Mo (molybdenum) film was formed on a sapphire substrate through e-beam evaporation, and triangular MoS2 film was grown by direct sulfurization. First, the growth of MoS2 was observed under an optical microscope. The number of MoS2 layers was analyzed by Raman spectrum, atomic force microscope (AFM), and photoluminescence spectroscopy (PL) measurement. Different sapphire substrate regions have different growth conditions of MoS2. The growth of MoS2 is optimized by controlling the amount and location of precursors, adjusting the appropriate growing temperature and time, and establishing proper ventilation. Experimental results show the successful growth of a large-area single-layer MoS2 on a sapphire substrate through direct sulfurization under a suitable environment. The thickness of the MoS2 film determined by AFM measurement is about 0.73 nm. The peak difference between the Raman measurement shift of 386 and 405 cm-1 is 19.1 cm-1, and the peak of PL measurement is about 677 nm, which is converted into energy of 1.83 eV, which is the size of the direct energy gap of the MoS2 thin film. The results verify the distribution of the number of grown layers. Based on the observation of the optical microscope (OM) images, MoS2 continuously grows from a single layer of discretely distributed triangular single-crystal grains into a single-layer large-area MoS2 film. This work provides a reference for growing MoS2 in a large area. We expect to apply this structure to various heterojunctions, sensors, solar cells, and thin-film transistors.
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Affiliation(s)
- Kai-Yao Yang
- Division of Gastroenterology, Department of Internal Medicine, Kaohsiung Armed Forces General Hospital, 2, Zhongzheng 1st.Rd., Lingya District, Kaohsiung City, 80284, Taiwan
| | - Hong-Thai Nguyen
- Department of Mechanical Engineering, National Chung Cheng University, 168, University Rd., Min Hsiung, Chia Yi, 62102, Taiwan
| | - Yu-Ming Tsao
- Department of Mechanical Engineering, National Chung Cheng University, 168, University Rd., Min Hsiung, Chia Yi, 62102, Taiwan
| | - Sofya B Artemkina
- Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, Novosibirsk, Russia, 630090
- Department of Natural Sciences, Novosibirsk State University, 1, Pirogova Str., Novosibirsk, Russia, 630090
| | - Vladimir E Fedorov
- Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, Novosibirsk, Russia, 630090
- Department of Natural Sciences, Novosibirsk State University, 1, Pirogova Str., Novosibirsk, Russia, 630090
| | - Chien-Wei Huang
- Division of Gastroenterology, Department of Internal Medicine, Kaohsiung Armed Forces General Hospital, 2, Zhongzheng 1st.Rd., Lingya District, Kaohsiung City, 80284, Taiwan.
- Department of Nursing, Tajen University, 20, Weixin Rd., Yanpu Township, 90741, Pingtung County, Taiwan.
| | - Hsiang-Chen Wang
- Department of Mechanical Engineering, National Chung Cheng University, 168, University Rd., Min Hsiung, Chia Yi, 62102, Taiwan.
- Director of Technology Development, Hitspectra Intelligent Technology Co., Ltd., 4F., No. 2, Fuxing 4th Rd., Qianzhen Dist., Kaohsiung City, 80661, Taiwan.
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Ji J, Kwak HM, Yu J, Park S, Park JH, Kim H, Kim S, Kim S, Lee DS, Kum HS. Understanding the 2D-material and substrate interaction during epitaxial growth towards successful remote epitaxy: a review. NANO CONVERGENCE 2023; 10:19. [PMID: 37115353 PMCID: PMC10147895 DOI: 10.1186/s40580-023-00368-4] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 02/02/2023] [Accepted: 04/09/2023] [Indexed: 06/19/2023]
Abstract
Remote epitaxy, which was discovered and reported in 2017, has seen a surge of interest in recent years. Although the technology seemed to be difficult to reproduce by other labs at first, remote epitaxy has come a long way and many groups are able to consistently reproduce the results with a wide range of material systems including III-V, III-N, wide band-gap semiconductors, complex-oxides, and even elementary semiconductors such as Ge. As with any nascent technology, there are critical parameters which must be carefully studied and understood to allow wide-spread adoption of the new technology. For remote epitaxy, the critical parameters are the (1) quality of two-dimensional (2D) materials, (2) transfer or growth of 2D materials on the substrate, (3) epitaxial growth method and condition. In this review, we will give an in-depth overview of the different types of 2D materials used for remote epitaxy reported thus far, and the importance of the growth and transfer method used for the 2D materials. Then, we will introduce the various growth methods for remote epitaxy and highlight the important points in growth condition for each growth method that enables successful epitaxial growth on 2D-coated single-crystalline substrates. We hope this review will give a focused overview of the 2D-material and substrate interaction at the sample preparation stage for remote epitaxy and during growth, which have not been covered in any other review to date.
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Affiliation(s)
- Jongho Ji
- Department of Electrical and Electronic Engineering, Yonsei University, Seoul, South Korea
| | - Hoe-Min Kwak
- School of Electrical Engineering and Computer Science, Gwnagju Institute of Science and Technology, Gwangju, South Korea
| | - Jimyeong Yu
- Department of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul, South Korea
| | - Sangwoo Park
- Department of Electrical and Electronic Engineering, Yonsei University, Seoul, South Korea
| | - Jeong-Hwan Park
- Venture Business Laboratory, Nagoya University, Furo-Cho, Chikusa-ku, Nagoya, 464-8603, Japan
| | - Hyunsoo Kim
- Department of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul, South Korea
| | - Seokgi Kim
- Department of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul, South Korea
| | - Sungkyu Kim
- Department of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul, South Korea.
| | - Dong-Seon Lee
- School of Electrical Engineering and Computer Science, Gwnagju Institute of Science and Technology, Gwangju, South Korea.
| | - Hyun S Kum
- Department of Electrical and Electronic Engineering, Yonsei University, Seoul, South Korea.
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Thoutam LR, Mathew R, Ajayan J, Tayal S, Nair SV. A critical review of fabrication challenges and reliability issues in top/bottom gated MoS 2field-effect transistors. NANOTECHNOLOGY 2023; 34:232001. [PMID: 36731113 DOI: 10.1088/1361-6528/acb826] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/31/2022] [Accepted: 02/02/2023] [Indexed: 06/18/2023]
Abstract
The voyage of semiconductor industry to decrease the size of transistors to achieve superior device performance seems to near its physical dimensional limitations. The quest is on to explore emerging material systems that offer dimensional scaling to match the silicon- based technologies. The discovery of atomic flat two-dimensional materials has opened up a completely new avenue to fabricate transistors at sub-10 nanometer level which has the potential to compete with modern silicon-based semiconductor devices. Molybdenum disulfide (MoS2) is a two-dimensional layered material with novel semiconducting properties at atomic level seems like a promising candidate that can possibly meet the expectation of Moore's law. This review discusses the various 'fabrication challenges' in making MoS2based electronic devices from start to finish. The review outlines the intricate challenges of substrate selection and various synthesis methods of mono layer and few-layer MoS2. The review focuses on the various techniques and methods to minimize interface defect density at substrate/MoS2interface for optimum MoS2-based device performance. The tunable band-gap of MoS2with varying thickness presents a unique opportunity for contact engineering to mitigate the contact resistance issue using different elemental metals. In this work, we present a comprehensive overview of different types of contact materials with myriad geometries that show a profound impact on device performance. The choice of different insulating/dielectric gate oxides on MoS2in co-planar and vertical geometry is critically reviewed and the physical feasibility of the same is discussed. The experimental constraints of different encapsulation techniques on MoS2and its effect on structural and electronic properties are extensively discussed.
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Affiliation(s)
- Laxman Raju Thoutam
- Amrita School of Nanosciences and Molecular Medicine, Amrita Vishwa Vidyapeetham, Ponekkara, Kochi 682041, India
| | - Ribu Mathew
- School of Electrical & Electronics Engineering, VIT Bhopal University, Bhopal, 466114, India
| | - J Ajayan
- Department of Electronics and Communication Engineering, SR University, Warangal, 506371, India
| | - Shubham Tayal
- Department of Electronics and Communication Engineering, SR University, Warangal, 506371, India
| | - Shantikumar V Nair
- Amrita School of Nanosciences and Molecular Medicine, Amrita Vishwa Vidyapeetham, Ponekkara, Kochi 682041, India
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Lee S, Lee Y, Kim T, Kim G, Eom T, Shin H, Jeong Y, Jeon S. Steep-Slope Transistor with an Imprinted Antiferroelectric Film. ACS APPLIED MATERIALS & INTERFACES 2022; 14:53019-53026. [PMID: 36394287 DOI: 10.1021/acsami.2c10610] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/16/2023]
Abstract
The effect of negative capacitance (NC), which can internally boost the voltage applied to a transistor, has been considered to overcome the fundamental Boltzmann limit of a transistor. To stabilize the NC effect, the dielectric (DE) must be integrated into a heterostructure with a ferroelectric (FE) film. However, in a multidomain hafnia, the charge boosting effect is reduced owing to a lowering of the depolarization field originating from the stray field at each domain, and simultaneously, the operating voltage increases owing to the voltage division at the DE. Here, we demonstrate core approaches to the gate stack of energy-efficient device technology using a transient NC. Electrical measurements of the transistor with imprinted antiferroelectric and high CDE/CFE structures exhibit low subthreshold slopes below 20 mV/dec, a low voltage operation of 0.5 V, a fast operation of 20 ns, hysteresis-free Id-Vg, and high endurance characteristics of 1012 cycles. We expect that this will lead to the rapid implementation of the NC effect in high-speed switching device applications with significantly improved energy efficiency.
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Affiliation(s)
- Sangho Lee
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST)291 Daehak-ro, Yuseong-gu, Daejeon34141, Korea
| | - Yongsun Lee
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST)291 Daehak-ro, Yuseong-gu, Daejeon34141, Korea
| | - Taeho Kim
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST)291 Daehak-ro, Yuseong-gu, Daejeon34141, Korea
| | - Giuk Kim
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST)291 Daehak-ro, Yuseong-gu, Daejeon34141, Korea
| | - Taehyong Eom
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST)291 Daehak-ro, Yuseong-gu, Daejeon34141, Korea
| | - Hunbeom Shin
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST)291 Daehak-ro, Yuseong-gu, Daejeon34141, Korea
| | - Yeongseok Jeong
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST)291 Daehak-ro, Yuseong-gu, Daejeon34141, Korea
| | - Sanghun Jeon
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST)291 Daehak-ro, Yuseong-gu, Daejeon34141, Korea
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9
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Goh Y, Hwang J, Kim M, Lee Y, Jung M, Jeon S. Selector-less Ferroelectric Tunnel Junctions by Stress Engineering and an Imprinting Effect for High-Density Cross-Point Synapse Arrays. ACS APPLIED MATERIALS & INTERFACES 2021; 13:59422-59430. [PMID: 34855347 DOI: 10.1021/acsami.1c14952] [Citation(s) in RCA: 9] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/13/2023]
Abstract
In the quest for highly scalable and three-dimensional (3D) stackable memory components, ferroelectric tunnel junction (FTJ) crossbar architectures are promising technologies for nonvolatile logic and neuromorphic computing. Most FTJs, however, require additional nonlinear devices to suppress sneak-path current, limiting large-scale arrays in practical applications. Moreover, the giant tunneling electroresistance (TER) remains challenging due to their inherent weak polarization. Here, we present that the employment of a diffusion barrier layer as well as a bottom metal electrode having a significantly low thermal expansion coefficient has been identified as an important way to enhance the strain, stabilize the ferroelectricity, and manage the leakage current in ultrathin hafnia film, achieving a high TER of 100, negligible resistance changes even up to 108 cycles, and a high switching speed of a few tens of nanoseconds. Also, we demonstrate that the usage of an imprinting effect in a ferroelectric capacitor induced by an ionized oxygen vacancy near the electrode results in highly asymmetric current-voltage characteristics with a rectifying ratio of 1000. Notably, the proposed FTJ exhibits a high density array size (>4k) with a securing read margin of 10%. These findings provide a guideline for the design of high-performance and selector-free FTJ devices for large-scale crossbar arrays in neuromorphic applications.
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Affiliation(s)
- Youngin Goh
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Korea
| | - Junghyeon Hwang
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Korea
| | - Minki Kim
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Korea
| | - Yongsun Lee
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Korea
| | - Minhyun Jung
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Korea
| | - Sanghun Jeon
- School of Electrical Engineering, Korea Advanced Institute of Science and Technology, 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Korea
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Ng LR, Chen GF, Lin SH. Generating large out-of-plane piezoelectric properties of atomically thin MoS 2via defect engineering. Phys Chem Chem Phys 2021; 23:23945-23952. [PMID: 34657948 DOI: 10.1039/d1cp02976b] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
We calculated the piezoelectric properties of asymmetrically defected MoS2 using density functional theory. By creating uneven numbers of defects on either side of two-dimensional MoS2, the out-of-plane centrosymmetry of the charge distribution is clearly broken, and the out-of-plane piezoelectric response is induced. The largest out-of-plane piezoelectric response is associated with the highest defect ratio for MoS2 to be semiconducting. We calculated the critical defect density of the metal-insulator transition of the asymmetrically defected MoS2 to be 9.90 × 1014 cm-2 and chemical formula MoS1.22. The d33 of the multilayer of optimally defected MoS2 is found to be greater than those of AlN and ZnO, and in the same order of magnitude as lead zirconate titanate. All two-dimensional transition metal dichalcogenides can in principle be fabricated as piezoelectric with this approach. The required defect engineering is readily available with various types of ion irradiation or plasma treatment. By controlling the dose of the ion, the defect ratio and hence the piezoelectricity can be tuned. Such asymmetrically defected transition metal dichalcogenides can easily be integrated into two-dimensional transition metal dichalcogenide based devices, which is hard for conventional piezoelectric thin films to rival.
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Affiliation(s)
- Li-Ren Ng
- Department of Materials and Optoelectronic Science, Center of Crystal Research, National Sun Yat-Sen University, Kaohsiung 804, Taiwan.
| | - Guan-Fu Chen
- Department of Materials and Optoelectronic Science, Center of Crystal Research, National Sun Yat-Sen University, Kaohsiung 804, Taiwan.
| | - Shi-Hsin Lin
- Department of Materials and Optoelectronic Science, Center of Crystal Research, National Sun Yat-Sen University, Kaohsiung 804, Taiwan.
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