Fabrication, characterization, and applications of microlenses

Drop-on-Demand Pyro-Electrohydrodynamic Printing of Nematic Liquid Crystal Microlenses

Inkjet printing of liquid crystal (LC) microlens arrays is particularly appealing for the development of switchable 2D/3D organic light-emitting diode (OLED) displays, as the printing process ensures that the lenses can be deposited directly and on-demand onto the pixelated OLED layer without the need for additional steps, thus simplifying fabrication complexity. Even if different fabrication technologies have been employed and good results in LC direct printing have already been achieved, all the systems used require costly equipment and heated nozzles to reduce the LC solution's viscosity. Here, we present the direct printing of a nematic LC (NLC) lens by a Drop-on-Demand (DoD) inkjet printing by a pyro-electrohydrodynamic effect for the first time. The method works at ambient temperature and avoids dispensing nozzles, thus offering a noncontact manipulation approach of liquid with high resolution and good repeatability on different kinds of substrates. NLC microlenses are printed on different substrates and fully characterized. Polarization properties are evaluated for various samples, i.e., NLC lenses on unaligned and indium-tin oxide (ITO) aligned. Moreover, an in-depth characterization of the NLC lenses is reported by polarized optical microscopy and by analyzing the birefringence in digital holographic microscopy.

On reactive Ion Etching of Parylene-C with Simple Photoresist Mask for Fabrication of High Porosity Membranes to Capture Circulating and Exfoliated Tumor Cells

A high porosity micropore arrayed parylene membrane is a promising device that is used to capture circulating and exfoliated tumor cells (CTCs and ETCs) for liquid biopsy applications. However, its fabrication still requires either expensive equipment or an expensive process. Here, we report on the fabrication of high porosity (>40%) micropore arrayed parylene membranes through a simple reactive ion etching (RIE) that uses photoresist as the etching mask. Vertical sidewalls were observed in etched parylene pores despite the sloped photoresist mask sidewalls, which was found to be due to the simultaneous high DC-bias RIE induced photoresist melting and substrate pedestal formation. A theoretical model has been derived to illustrate the dependence of the maximum membrane thickness on the final pore-to-pore spacing, and it is consistent with the experimental data. A simple, yet accurate, low number (<50) cell counting method was demonstrated through counting cells directly inside a pipette tip under phase-contrast microscope. Membranes as thin as 3 μm showed utility for low number tumor cell capture, with an efficiency of 87-92%.

An Ultraviolet-Lithography-Assisted Sintering Method for Glass Microlens Array Fabrication

Glass microlens arrays (MLAs) have tremendous prospects in the fields of optical communication, sensing and high-sensitivity imaging for their excellent optical properties, high mechanical robustness and physicochemical stability. So far, glass MLAs are primarily fabricated using femtosecond laser modification assisted etching, in which the preparation procedure is time-consuming, with each concave-shaped microlens being processed using a femtosecond laser point by point. In this paper, a new method is proposed for implementing large-scale glass MLAs using glass particle sintering with the assistance of ultraviolet (UV) lithography. The glass particles are dispersed into the photoresist at first, and then immobilized as large-scaled micropillar arrays on quartz glass substrate using UV lithographing. Subsequently, the solidified photoresist is debinded and the glass particles are melted by means of sintering. By controlling the sintering conditions, the convex microlens will be self-assembled, attributed to the surface tension of the molten glass particles. Finally, MLAs with different focal lengths (0.12 to 0.2 mm) are successfully fabricated by utilizing different lithography masks. Meanwhile, we also present the optimization of the sintering parameter for eliminating the bubbles in the microlenses. The main factors that affect the focal length of the microlens and the image performance of the MLAs have been studied in detail.

High-resolution silicon photonics focused ultrasound transducer with a sub-millimeter aperture

We present an all-optical focused ultrasound transducer with a sub-millimeter aperture and demonstrate its capability for high-resolution imaging of tissue ex vivo. The transducer is composed of a wideband silicon photonics ultrasound detector and a miniature acoustic lens coated with a thin optically absorbing metallic layer used to produce laser-generated ultrasound. The demonstrated device achieves axial resolution and lateral resolutions of 12 μm and 60 μm, respectively, well below typical values achieved by conventional piezoelectric intravascular ultrasound. The size and resolution of the developed transducer may enable its use for intravascular imaging of thin fibrous cap atheroma.

Ultra-thin multifocal integral LED-projector based on aspherical microlens arrays

Multifocal imaging has been a challenging and rewarding research focus in the field of imaging optics. In this paper, an ultra-thin multifocal integral LED-projector based on aspherical microlens array (MLA) is presented. A two-layer aspherical sub-lens with NA = 0.3 is proposed as a sub-channel projector and the optimization design ensures high optical integration precision and improves optical efficiency. To avoid the tailoring loss of the projected images between multi-plane projections, the central-projection constraints between size and projection distance for the multifocal projection are defined. The depth of focus (DOF) analysis for MLA and sub-lens is also introduced to proof the sufficiency of realizing multifocal projection. Combined with the radial basis function image warping method, multifocal sub-image arrays were acquired, and three types of multifocal integral projection were realized, breaking through the traditional limitations of the single-focal DOF. A prototype with thickness of less than 4 mm is developed. Substantial simulations and experiments are conducted to verify the effectiveness of the method and the design.

Variable focus convex microlens array on K9 glass substrate based on femtosecond laser processing and hot embossing lithography

We propose a high-precision method for the fabrication of variable focus convex microlens arrays on K9 glass substrate by combining femtosecond laser direct writing and hot embossing lithography. A sapphire master mold with a blind cylindrical hole array was prepared first by femtosecond laser ablation. The profile control of microlenses dependent on the temperature and the diameter of the blind hole in the sapphire mold was investigated. The curvature radius of the microlens decreased with temperature and increased with diameter. Uniform convex microlens arrays were fabricated with good imaging performance. Further, variable focus convex microlens arrays were fabricated by changing the diameter of the blind hole in sapphire, which produced the image at variable z planes. This method provides a highly precise fabrication of convex microlens arrays and is well suited for batch production of micro-optical elements.

3D Printing of a PDMS Cylindrical Microlens Array with 100% Fill-Factor

Cylindrical microlens arrays (CMLAs) play a key role in many optoelectronic devices, and 100% fill-factor CMLAs also have the advantage of improving the signal-to-noise ratio and avoiding stray-light effects. However, the existing preparation technologies are complicated and costly, which are not suitable for mass production. Herein, we propose a simple, efficient, and low-cost manufacturing method for CMLAs with a high fill-factor via the electric-field-driven (EFD) microscale 3D printing of polydimethylsiloxane (PDMS). By adjusting the printing parameters, the profile and the fill-factor of the CMLAs can be controlled to improve their optical performance. The optical performance test results show that the printed PDMS CMLAs have good image-projecting and light-diffraction properties. Using the two printing modes of this EFD microscale 3D-printing technology, a cylindrical dual-microlens array with a double-focusing function is simply prepared. At the same time, we print a series of specially shaped microlenses, proving the flexible manufacturing capabilities of this technology. The results show that the prepared CMLAs have good morphology and optical properties. The proposed method may provide a viable route for manufacturing large-area CMLAs with 100% fill-factor in a very simple, efficient, and low-cost manner.

Development of a two-degree-of-freedom vibration generator for fabricating optical microstructure arrays

Optical microstructure arrays on metallic surfaces are drawing ever-increasing attention due to the increasing requirements in optical systems. Although vibration generators are developed for generating optical microarrays with the ultra-precision diamond cutting process, the systematic research works on its mechanical design, working performance simulation, and numerical simulation of microstructure arrays has received less attention. In this study, a novel two-degree-of-freedom vibration generator (2DOF-VG) is designed based on the triangular amplification mechanism. To precisely simulate the working performance of this designed 2DOF-VG, the detailed multi-physics finite element method is proposed. Considering the three-dimensional geometric shape of the cutting tool, the cutting motion trajectory, and the elastic recovery of the workpiece material, the numerical simulation algorithm of the microstructure arrays generation is then established and used to precisely predict the surface topography of microstructure arrays. Finally, two types of unique microstructure arrays are fabricated, which demonstrates the feasibility and flexibility of the 2DOF-VG.

Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques

Tolerancing is an important step toward the fabrication of high-quality and cost-effective lens surfaces. It is critical for wafer-level optics, when up to tens of thousands microlenses are fabricated in parallel and whose surfaces cannot be formed individually. However, approaches developed for macro-optics cannot be directly transposed for microlenses because of differences in fabrication and testing techniques. In particular, microlens surfaces are usually limited to conical surfaces. Here, we study the connection between the microlens optical performance and the form of its surface, suggesting surface form representations suited for tolerancing purposes. Then, we compare them with common representations for tolerancing real optical systems. Measured surface forms of microlenses are also provided to make the tolerancing procedure realistic. In addition, we propose term definitions for micro-optics, complements to typical terms for macro-optics, to ease the communication between optical designers and manufacturers. Based on the results presented in this paper, guidelines are proposed for tolerancing microlenses. We suggest applying them as a first step toward a more effective and comprehensive tolerancing procedure.

Research on the surface morphological and electrochemical modification of polyvinyl chloride induced by KrF and ArF excimer laser direct writing

To obtain superior performance in adhesion, polyvinyl chloride (PVC) substrates were modified by excimer laser direct writing with different operating wavelengths, scanning speeds, and laser fluences. The induced morphological and electrochemical changes were detailedly tested and analyzed. Microchannels were formed on the surfaces of the PVC substrates due to the laser ablation, where the melted-resolidified droplet-like structures were distributed uniformly and can significantly improve the mechanical interlock. Furthermore, according to the Fourier transform infrared spectroscopy and x-ray photoelectron spectroscopy analyses, Lewis bases such as hydroxyl and carbonyl were formed after laser treatment, which is beneficial to the adhesion strength. These mechanical and chemical modifications may play positive roles in enhancing the bonding strength of the PVC edge bandings.

Microfabrication of Microlens by Timed-Development-and-Thermal-Reflow (TDTR) Process for Projection Lithography

This paper presents a microlens fabrication process using the timed-development-and-thermal-reflow process, which can fabricate various types of aperture geometry with a parabolic profile on a single substrate in the same batch of the process. By controlling the development time of the uncrosslinked negative photoresist, a state of partial development of the photoresist is achieved, called the timed development process. The thermal reflow process is followed after the timed development, which allows the photoresist to regain its liquid state to form a smooth meniscus trench surrounded by a crosslinked photoresist sidewall. Microlens with larger aperture size forms deeper trench with constant development time. With constant aperture size, longer developing time shows deeper meniscus trench. The depth of the meniscus trench is modeled in the relationship of the development time and aperture size. Other characteristics for the microlens including the radius of curvature, focal length, and the parabolic surface profile are modeled in the relationship of the microlens thickness and diameter. Microlens with circular, square, and hexagonal bases have been successfully fabricated and demonstrated where each geometry of the lens-bases shows different fill factors of the lens arrays. To test the fabricated lenses, a miniaturized projection lithography scheme was proposed. A centimeter-scale photomask pattern was photo-reduced using the fabricated microlens array with a ratio of 133, where the smallest linewidth was measured as 2.6 µm.

Precision Imprinted Nanostructural Wood

Wood is a ubiquitous material, widely used in human society, that features naturally abundant, aligned longitudinal cells (e.g., tracheids in softwood and fibers/vessels in hardwood) with diameters of ≈50-1000 µm. Here, the realization of, fine patterns on a wood surface ranging in size from 40 nm to 50 µm by precision imprinting is described. The precision imprinting is enabled by releasing cellulose fibril aggregates from the bondage of lignin through the delignification process, then imprinting in wet condition and fixing the designed configuration in the dry state. Various precision structures on a wood surface using imprinting technology, including dot arrays, lines, triangular features, and other complex patterns, are successfully demonstrated. Even multiscale structures with nanosized lines on the surface of micrometer hemiballs can be acquired. As a proof of concept, the use of surface-imprinted wood as a microlens array (MLA), which exhibits superior imaging ability and thermal stability even at a high temperature up to 150 °C compared with traditional polystyrene MLA, is demonstrated. This precision imprinted wood may open new possibilities toward environmentally friendly devices and applications in optics, biology, electronics, etc.

Ultrafast Three-Dimensional Printing of Optically Smooth Microlens Arrays by Oscillation-Assisted Digital Light Processing

A microlens array has become an important micro-optics device in various applications. Compared with traditional manufacturing approaches, digital light processing (DLP)-based printing enables fabrication of complex three-dimensional (3D) geometries and is a possible manufacturing approach for microlens arrays. However, the nature of 3D printing objects by stacking successive 2D patterns formed by discrete pixels leads to coarse surface roughness and makes DLP-based printing unsuccessful in fabricating optical components. Here, we report an oscillation-assisted DLP-based printing approach for fabrication of microlens arrays. An optically smooth surface (about 1 nm surface roughness) is achieved by mechanical oscillation that eliminates the jagged surface formed by discrete pixels, and a 1-3 s single grayscale ultraviolet (UV) exposure that removes the staircase effect. Moreover, computationally designed grayscale UV patterns allow us to fabricate microlenses with various profiles. The proposed approach paves a way to 3D print optical components with high quality, fast speed, and vast flexibility.

Using Micromachined Molds, Partial-curing PDMS Bonding Technique, and Multiple Casting to Create Hybrid Microfluidic Chip for Microlens Array

In a previous study, we presented a novel manufacturing process for the creation of 6 × 6 and 8 × 8 microlens arrays (MLAs) comprising lenses with diameters of 1000 μm, 500 μm, and 200 μm within an area that covers 10 mm × 10 mm. In the current study, we revised the manufacturing process to allow for the fabrication of MLAs of far higher density (15 × 15 and 29 × 29 within the same area). In this paper, we detail the revised manufacturing scheme, including the micromachining of molds, the partial-curing polydimethylsiloxane (PDMS) bonding used to fuse the glass substrate and PDMS, and the multi-step casting process. The primary challenges that are involved in creating MLAs of this density were ensuring uniform membrane thickness and preventing leakage between the PDMS and glass substrate. The experiment results demonstrated that the revised fabrication process is capable of producing high density arrays: Design I produced 15 × 15 MLAs with lens diameter of 0.5 mm and fill factor of 47.94%, while Design II produced 29 × 29 MLAs with lens diameter of 0.25 mm and fill factor of 40.87%. The partial-curing PDMS bonding system also proved to be effective in fusing PDMS with glass (maximum bonding strength of approximately six bars). Finally, the redesigned mold was used to create PDMS membranes of high thickness uniformity (coefficient of variance <0.07) and microlenses of high lens height uniformity (coefficient of variance <0.15).

Optimization method of tool path generation considering the edge of lenslets for a microlens array in FTS diamond turning

Shape accuracy is an important parameter for evaluating the quality of microlens arrays. In fast tool servo (FTS) diamond turning, the generation of tool path has a significant influence on shape accuracy. By analyzing the distribution of the cutting points at the edge of the lenslets and the linearization error of the original tool path generated by the constant-angle method for the microlens array, there is overcut at the edge of the lenslets. Previous tool path planning focused on consideration of the entire surface, and the error on the edge of the lens was rarely considered. Therefore, an optimization method of tool path generation based on interpolation of the lens edge is proposed. Compared to the tool path generated by the conventional constant-angle method, the simulation and experimental results show that the proposed method can effectively reduce the overcut of the lens edge.

Low f-Number Diffraction-Limited Pancharatnam-Berry Microlenses Enabled by Plasmonic Photopatterning of Liquid Crystal Polymers

Microlenses are desired by a wide range of industrial applications while it is always challenging to make them with diffraction-limited quality. Here, it is shown that high-quality microlenses based on Pancharatnam-Berry (PB) phases can be made with liquid crystal polymers by using a plasmonic photopatterning technique. Based on the generalized Snell's law for the PB phases, PB microlenses with a range of focal lengths and f-numbers are designed and fabricated and their point-spread functions and ability to image micrometer-sized particles are carefully characterized. The results show that these PB microlenses with f-number down to 2 are all diffraction-limited. The capability of arraying these PB microlenses with 100% filling factor with a step-and-flash approach is further demonstrated.

"Print-to-pattern": Silk-Based Water Lithography

The requirement of nontoxic and versatile manufacturing frameworks for biologically relevant applications has imposed significant constraints on the choice of functional materials and the complementary fabrication tools. In this context, silk is actively studied, thanks to its mechanical robustness, biocompatibility, wide availability, aqueous processing conditions, and ease of functionalization. The inherent matching between the water solubility of silk and the aqueous inks of the inkjet printing (IJP) process has derived a biofriendly and versatile "print-to-pattern" scheme-termed silk-based water lithography-toward scalable functional biomanufacturing. The deposition mode of IJP and the etching effect of silk film by water features a dual tone fabrication where functional molecules are dispensed additively, while the silk film is patterned in a "subtractive" fashion. Such versatility and scalability pave the way to a wide range of opportunities in the biomedical field.

Controllable long focal length microlens based on thermal expansion

A novel method to fabricate a microlens array with a long focal length has been developed in this paper. It is based on the fabricating and heating of a microlens consisting of two materials with a great difference in coefficient of thermal expansion. A thermal expansion process leads to considerable deformation of the microlens surface and significant increase in focal length, which could be controlled by altering the processing temperature. Cylindrical polymeric microlens arrays with different focal lengths were successfully fabricated. By measuring the focal length and temperature dependence of the cylindrical microlens geometry, the formation mechanism was analyzed and validated. While the temperature is ranged from 20°C to 50°C, the focal length of the cylindrical microlens has been extended by 38.2% and the longest focal length was obtained up to 6.6 mm for the microlens with a linewidth of 240 μm.

Fabrication of glass microlenses using focused Xe beam

Focused ion beam (FIB) systems based on high brightness plasma ion sources are becoming largely diffuse in material and semiconductor research, thanks to the higher current densities and milling rates provided by noble gas ions (e.g., Xe) compared with traditional liquid metal Ga FIBs. In this paper, we demonstrate the feasibility of a rapid, direct milling of microlenses in glass substrates using high current Xe plasma FIB. We present quantitative analyses of roughness and profile of microlenses with diameters up to 230-µm and focal distances between 7 mm and 1.4 mm. We characterized the performance of the lenses by mapping the transmitted intensity through the lenses, by forming an image of a resolution object by scanning the focused spot and collecting the transmitted intensity, and in full-field imaging experiments. The results indicate the applicability of plasma focused ion beam systems for direct writing in glass of high-quality micro-optical elements with diffraction-limited focusing.

Quasi-periodic concave microlens array for liquid refractive index sensing fabricated by femtosecond laser assisted with chemical etching

In this study, a high-efficiency single-pulsed femtosecond laser assisted with chemical wet etching method has been proposed to obtain large-area concave microlens array (MLA). The quasi-periodic MLA consisting of about two million microlenses with tunable diameter and sag height by adjusting laser scanning speed and etching time is uniformly manufactured on fused silica and sapphire within 30 minutes. Moreover, the fabricated MLA behaves excellent optical focusing and imaging performance, which could be used to sense the change of the liquid refractive index (RI). In addition, it is demonstrated that small period and high RI of MLA could acquire high sensitivity and broad dynamic measurement range, respectively. Furthermore, the theoretical diffraction efficiency is calculated by the finite domain time difference (FDTD) method, which is in good agreement with the experimental results.

Printed cylindrical lens pair for application to the seam concealment in tiled displays

Seamless tiling of displays is one of the key enabling technologies for the next-generation large-area electronics applications. In this paper, we propose a facile method to demonstrate a seamless display using cylindrical lens pair (CLP) fabricated by dispenser printing method. Optical properties of the printed CLP and corresponding capability of concealing seam in the display are analyzed by a set of luminance simulation and measurement in terms of geometric parameters of the lens. The seamless display with an optimized CLP features a viewing angle of the seam concealment of 40°.

Fluid jet-array parallel machining of optical microstructure array surfaces

Optical microstructure array surfaces such as micro-lens array surface, micro-groove array surface etc., are being used in more and more optical products, depending on its ability to produce a unique or particular performance. The geometrical complexity of the optical microstructures array surfaces makes them difficult to be fabricated. In this paper, a novel method named fluid jet-array parallel machining (FJAPM) is proposed to provide a new way to generate the microstructure array surfaces with high productivity. In this process, an array of abrasive water jets is pumped out of a nozzle, and each fluid jet simultaneously impinges the target surface to implement material removal independently. The jet-array nozzle was optimally designed firstly to diminish the effect of jet interference based on the experimental investigation on the 2-Jet nozzles with different jet intervals. The material removal and surface generation models were built and validated through the comparison of simulation and experimental results of the generation of several kinds of microstructure array surfaces. Following that, the effect of some factors in the process was discussed, including the fluid pressure, nozzle geometry, tool path, and dwell time. The experimental results and analysis prove that FJAPM process is an effective way to fabricate the optical microstructure array surface together with high productivity.

Fabrication of Large-Scale Microlens Arrays Based on Screen Printing for Integral Imaging 3D Display

The low-cost large-scale fabrication of microlens arrays (MLAs) with precise alignment, great uniformity of focusing, and good converging performance are of great importance for integral imaging 3D display. In this work, a simple and effective method for large-scale polymer microlens arrays using screen printing has been successfully presented. The results show that the MLAs possess high-quality surface morphology and excellent optical performances. Furthermore, the microlens' shape and size, i.e., the diameter, the height, and the distance between two adjacent microlenses of the MLAs can be easily controlled by modifying the reflowing time and the size of open apertures of the screen. MLAs with the neighboring microlenses almost tangent can be achieved under suitable size of open apertures of the screen and reflowing time, which can remarkably reduce the color moiré patterns caused by the stray light between the blank areas of the MLAs in the integral imaging 3D display system, exhibiting much better reconstruction performance.

A single-step lithography system based on an enhanced robotic adhesive dispenser

In the paper, we present a single-step lithography system whereby the robotically controlled micro-extrusion of resist adhesive onto a substrate surface to directly create resist adhesive patterns of interest. This system is modified from a robotic adhesive dispenser by shrinking the aperture of the nozzle to a few micrometers aiming to realize patterns at microscale. From experimental investigation, it is found that working factors including writing speed, working time, and applied pressure can be adopted to conveniently regulate the feature size (the width of the line features and the diameter of the dot features). To test its functionality, the system was used to pattern line features on silicon dioxide (SiO₂) and generate an array of square-like silicon microstructure by combining with wet etching. It provides a simple and flexible alternative tool to facilitate the development of microfabrication.

Extrusion printing for fabrication of spherical and cylindrical microlens arrays

In this paper, we present an extrusion printing technique for producing spherical and cylindrical plano-convex microlens arrays with controllable feature dimensions. This technique employs a robotic adhesive dispenser for robotically controlled microextrusion of ultraviolet (UV) curable polymer onto a glass substrate surface to directly deposit the microlens arrays. It provides a simple and flexible alternative to fabricate both spherical and cylindrical microlens arrays.

Direct Laser Printing of Tailored Polymeric Microlenses

We report a laser-based approach for the fast fabrication of high-optical-quality polymeric microlenses and microlens arrays with controllable geometry and size. Our strategy consists of the direct laser printing of microdroplets of a highly viscous UV prepolymer at targeted positions, followed by photocuring. We study the morphological characteristics and imaging performance of the microlenses as a function of the substrate and laser parameters and investigate optimal printing conditions and printing mechanisms. We show that the microlens size and focusing properties can be easily tuned by the laser pulse energy, with minimum volumes below 20 fL and focal lengths ranging from 7 to 50 μm.