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Nuñez CG, Wallace G, Fleming L, Craig K, Song S, Ahmadzadeh S, Clark C, Tait S, Martin I, Reid S, Rowan S, Gibson D. Amorphous dielectric optical coatings deposited by plasma ion-assisted electron beam evaporation for gravitational wave detectors. APPLIED OPTICS 2023; 62:B209-B221. [PMID: 37132933 DOI: 10.1364/ao.477186] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/04/2023]
Abstract
Coating thermal noise (CTN) in amorphous coatings is a drawback hindering their application in precision experiments such as gravitational wave detectors (GWDs). Mirrors for GWDs are Bragg's reflectors consisting of a bilayer-based stack of high- and low-refractive-index materials showing high reflectivity and low CTN. In this paper, we report the characterization of morphological, structural, optical, and mechanical properties of high-index materials such as scandium sesquioxide and hafnium dioxide and a low-index material such as magnesium fluoride deposited by plasma ion-assisted electron beam evaporation. We also evaluate their properties under different annealing treatments and discuss their potential for GWDs.
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Paul P, Hafiz MG, Schmitt P, Patzig C, Otto F, Fritz T, Tünnermann A, Szeghalmi A. Optical bandgap control in Al 2O 3/TiO 2 heterostructures by plasma enhanced atomic layer deposition: Toward quantizing structures and tailored binary oxides. SPECTROCHIMICA ACTA. PART A, MOLECULAR AND BIOMOLECULAR SPECTROSCOPY 2021; 252:119508. [PMID: 33571739 DOI: 10.1016/j.saa.2021.119508] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/29/2020] [Revised: 01/12/2021] [Accepted: 01/16/2021] [Indexed: 06/12/2023]
Abstract
Atomically thin heterostructures and superlattices are promising candidates for various optoelectronic and photonic applications. Different combinations of Al2O3/TiO2 composites are obtained by plasma enhanced atomic layer deposition (PEALD). Their growth, composition, dispersion relation, and optical bandgap are systematically studied by means of UV/VIS spectrophotometry, spectroscopic ellipsometry (SE), x-ray reflectometry (XRR), scanning transmission electron microscopy(STEM) and x-ray photoelectron spectroscopy (XPS). Besides, an effective medium approximation (EMA) approach is applied to model the heterostructures theoretically. The refractive index and the indirect bandgap of the heterostructures depend on the ratio of the two oxides, while the bandgap is very sensitive to the thicknesses of the barrier and quantum well layers. A large blue shift of the absorption edge from 400 nm to 320 nm is obtained by changing the TiO2 (quantum well) thickness from ~2 nm to ~0.1 nm separated by ~2 nm of Al2O3 (barrier) layers. PEALD unfolds the possibility of achieving optical quantizing effects within complex heterostructures enabling control of their structures down to atomic scale. It enables a path towards atomic scale processing of new 'artificial' materials with desired refractive indices and bandgap combinations by precise control of their compositions.
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Affiliation(s)
- Pallabi Paul
- Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, Germany
| | - Md Golam Hafiz
- Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, Germany
| | - Paul Schmitt
- Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, Germany; Fraunhofer Institute for Applied Optics and Precision Engineering, Centre of Excellence in Photonics, Albert-Einstein-Str. 7, 07745 Jena, Germany
| | - Christian Patzig
- Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Walter-Huelse-Str. 1, 06120 Halle (Saale), Germany
| | - Felix Otto
- Institute of Solid-State Physics IFK, Friedrich Schiller University Jena, Helmholtzweg 5, 07743 Jena, Germany
| | - Torsten Fritz
- Institute of Solid-State Physics IFK, Friedrich Schiller University Jena, Helmholtzweg 5, 07743 Jena, Germany
| | - Andreas Tünnermann
- Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, Germany; Fraunhofer Institute for Applied Optics and Precision Engineering, Centre of Excellence in Photonics, Albert-Einstein-Str. 7, 07745 Jena, Germany
| | - Adriana Szeghalmi
- Institute of Applied Physics, Abbe Center of Photonics, Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745 Jena, Germany; Fraunhofer Institute for Applied Optics and Precision Engineering, Centre of Excellence in Photonics, Albert-Einstein-Str. 7, 07745 Jena, Germany.
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