Three-dimensional optical sensing network written in fused silica glass with femtosecond laser

Instrumented Flexible Glass Structure: A Bragg Grating Inscribed with Femtosecond Laser Used as a Bending Sensor

Fused silica glass is a material with outstanding mechanical, thermal and optical properties. Being a brittle material, it is challenging to shape. In the last decade, the manufacturing of monolithic flexible mechanisms in fused silica has evolved with the femtosecond-laser-assisted etching process. However, instrumenting those structures is demanding. To address this obstacle, this article proposes to inscribe a Bragg Grating sensor inside a flexure and interface it with an optical fibre to record the strain using a spectrum analyser. The strain sensitivity of this Bragg Grating sensor is characterized at 1.2 pm/μϵ (1 μϵ = 1 microstrain). Among other applications, deformation sensing can be used to record a force. Its use as a micro-force sensor is estimated. The sensor resolution is limited by our recording equipment to 30 μN over a measurement range above 10 mN. This technology can offer opportunities for surgery applications or others where precision and stability in harsh environments are required.

Laser-written vapor cells for chip-scale atomic sensing and spectroscopy

We report the fabrication of alkali-metal vapor cells using femtosecond laser machining. This laser-written vapor-cell (LWVC) technology allows arbitrarily-shaped 3D interior volumes and has potential for integration with photonic structures and optical components. We use non-evaporable getters both to dispense rubidium and to absorb buffer gas. This enables us to produce cells with sub-atmospheric buffer gas pressures without vacuum apparatus. We demonstrate sub-Doppler saturated absorption spectroscopy and single beam optical magnetometry with a single LWVC. The LWVC technology may find application in miniaturized atomic quantum sensors and frequency references.

Surface plasmon resonance refractive index sensor based on fiber-interface waveguide inscribed by femtosecond laser

A novel surface plasmon resonance (SPR) configuration based on fiber-interface waveguide was proposed and realized by combining the technology of femtosecond laser writing waveguide with SPR effect for measuring refractive index (RI) of analyte. A U-shaped waveguide is inscribed in the coreless fiber and its bottom is very close to the fiber surface, which can produce strong evanescent field being sensitive to ambient media. When the fiber surface is coated with a layer of gold film, the strong evanescent field can excite the SPR effect on the fiber surface. Most importantly, different from some types of fiber SPR sensors with a fragile physical structure, the fiber-interface waveguide SPR sensor exhibits an excellent mechanical strength. Such a SPR sensor exhibits a high sensitivity of ∼3352  nm/RIU at the RI value of ∼1.395, which may have important practical applications in medicine, environmental monitoring, and food safety.

Silicon microsphere whispering gallery modes excited by femtosecond-laser-inscribed glass waveguides

We report on the coupling of whispering gallery modes in a 500-μm-radius silicon microsphere to a femtosecond-laser-inscribed glass optical waveguide. The shallow glass waveguide with a large mode field diameter in the near-infrared is written at a depth of 25 μm below the glass surface, resulting in a high excitation impact parameter of 525 μm for the microsphere. The excited whispering gallery modes of the silicon microsphere have quality factors of approximately 10⁵ in the 90° elastic scattering and 0° transmission. Integration of such spherical silicon microresonators on femtosecond-laser-inscribed glass waveguides is promising for photonic communication, computation, and sensing applications.

Micro-optics for microfluidic analytical applications

This critical review summarizes the developments in the integration of micro-optical elements with microfluidic platforms for facilitating detection and automation of bio-analytical applications.

Femtosecond laser writing of Bragg grating waveguide bundles in bulk glass

Waveguide bundles in bulk glass materials, consisting of several parallel scans of refractive index modifications, have been generated with a low-repetition femtosecond laser. Additionally, Bragg grating (BG) structures for 840 and 1550 nm have been introduced by segmentation of the central scan. A spectral loss in the transmission signal of >36  dB was achieved at 1550 nm with a second-order Bragg grating waveguide (BGW) in fused silica, which corresponds to an intrinsic grating efficiency of >16  dB/cm. This is to our knowledge the strongest BG structure realized in glass with a femtosecond laser. The BGW were proven to be stable up to a temperature of 250°C in fused silica. The diameter of the waveguide bundles can be adapted very easily for a broad range of wavelengths and have been demonstrated for diameters between 1 and 50 μm. The transmission properties of the waveguide bundles are affected minorly by the insertion of BG structures, which opens the ability for adjusting the BGW for a broad range of wavelength in single-mode or multimode optical circuits. BGW have been realized successfully in fused silica, borosilicate glass (BOROFLOAT 33), and AF 32 eco Thin Glass from Schott.

Laser-written photonic crystal optofluidics for electrochromatography and spectroscopy on a chip

Femtosecond laser processes were optimized for nonlinear interactions with various optical materials to develop a novel biophotonic lab-on-a-chip device that integrates laser-formed waveguides (WGs), microfluidic channels and photonic crystals (PCs). Such integration seeks the unique demonstration of dual PC functionalities: (1) efficient chromatographic separation and filtration of analytes through a porous PC embedded inside a microfluidic channel and (2) optofluidic spectroscopy through embedded WGs that probe PC stopband shifts as varying analyte concentrations flow and separate. The building blocks together with their integration were demonstrated, providing embedded porous PCs through which electrochromatography drove an accelerated mobile phase of analyte and an optical stopband was probed via integrated buried WGs. Together, these laboratory results underpin the promise of simultaneous chromatographic and spectroscopic capabilities in a single PC optofluidic device.

Fabrication and multifunction integration of microfluidic chips by femtosecond laser direct writing

In the pursuit of modern microfluidic chips with multifunction integration, micronanofabrication techniques play an increasingly important role. Despite the fact that conventional fabrication approaches such as lithography, imprinting and soft lithography have been widely used for the preparation of microfluidic chips, it is still challenging to achieve complex microfluidic chips with multifunction integration. Therefore, novel micronanofabrication approaches that could be used to achieve this end are highly desired. As a powerful 3D processing tool, femtosecond laser fabrication shows great potential to endow general microfluidic chips with multifunctional units. In this review, we briefly introduce the fundamental principles of femtosecond laser micronanofabrication. With the help of laser techniques, both the preparation and functionalization of advanced microfluidic chips are summarized. Finally, the current challenges and future perspective of this dynamic field are discussed based on our own opinion.

Femtosecond laser writing of a flat-top interleaver via cascaded Mach-Zehnder interferometers

A flat-top interleaver consisting of cascaded Mach-Zehnder interferometers (MZIs) was fabricated in bulk glass by femtosecond laser direct writing. Spectral contrast ratios of greater than 15 dB were demonstrated over a 30 nm bandwidth for 3 nm channel spacing. The observed spectral response agreed well with a standard transfer matrix model generated from responses of individual optical components, demonstrating the possibility for multi-component optical design as well as sufficient process accuracy and fabrication consistency for femtosecond laser writing of advanced optical circuits in three dimensions.

Microfabrication and applications of opto-microfluidic sensors

A review of research activities on opto-microfluidic sensors carried out by the research groups in Canada is presented. After a brief introduction of this exciting research field, detailed discussion is focused on different techniques for the fabrication of opto-microfluidic sensors, and various applications of these devices for bioanalysis, chemical detection, and optical measurement. Our current research on femtosecond laser microfabrication of optofluidic devices is introduced and some experimental results are elaborated. The research on opto-microfluidics provides highly sensitive opto-microfluidic sensors for practical applications with significant advantages of portability, efficiency, sensitivity, versatility, and low cost.

Annealing dynamics of waveguide Bragg gratings: evidence of femtosecond laser induced colour centres

There is still significant speculation regarding the nature of femtosecond laser induced index change in bulk glasses with colour centre formation and densification the main candidates. In the work presented here, we fabricated waveguide Bragg gratings in doped and undoped phosphate glasses and use these as a diagnostic for monitoring subtle changes in the induced refractive index during photo- and thermal annealing experiments. Reductions in grating strengths during such experiments were attributed to the annihilation of colour centres.

Femtosecond laser written optofluidic sensor: Bragg Grating Waveguide evanescent probing of microfluidic channel

Microfluidic channels and Bragg Grating Waveguides (BGWs) were simultaneously fabricated inside fused silica glass by means of femtosecond laser exposure followed by chemical etching. Evanescent field penetration of the waveguide mode into the parallel microfluidic channel induced Bragg resonant wavelength shifts to enable refractive index characterization of the fluidic medium in the 1 to 1.452 range. Laser exposure was optimized to fabricate devices with optically smooth channel walls and narrow Bragg resonances for high sensing response at 1560 nm wavelength. Reference gratings were also employed in the optical circuit for temperature and strain compensation. These devices open new directions for optical sensing in three-dimensional optofluidic and reactor microsystems.