Athermal and wavelength-trimmable photonic filters based on TiO₂-cladded amorphous-SOI

Thermal oscillation in the hybrid Si3N4 - TiO2 microring

The hybrid microcavity composed of different materials shows unique thermal-optical properties such as resonance frequency shift and small thermal noise fluctuations with the temperature variation. Here, we have fabricated the hybrid Si₃N₄ - TiO₂ microring, which decreases the effective thermo-optical coefficients (TOC) from 23.2pm/K to 11.05pm/K due to the opposite TOC of these two materials. In this hybrid microring, we experimentally study the thermal dynamic with different input powers and scanning speeds. The distorted transmission and thermal oscillation are observed, which results from the non-uniform scanning speed and the different thermal relaxation times of the Si₃N₄ and the TiO₂. We calibrate the distorted transmission spectrum for the resonance measurement at the reverse scanning direction and explain the thermal oscillation with a thermal-optical coupled model. Finally, we analyse the thermal oscillation condition and give the diagram about the oscillation region, which has significant guidance for the occurrence and avoidance of the thermal oscillation in practical applications.

Numerical characterization of soliton microcomb in an athermal hybrid Si3N4-TiO2 microring

We theoretically investigate the athermal constructions to cancel the thermorefractive effect of a hybrid Si₃N₄-TiO₂ microring, which merges two materials with opposite thermo-optical coefficients (TOCs). The analytical and numerical results predict that the thermorefractive effect can be reduced under the appropriate parameters. In addition, the soliton state is easily accessed under the athermal condition. The thermorefractive noise due to the fluctuation of the microresonator temperature caused by the heat exchange between the microresonator and the surrounding environment is also suppressed by one order of magnitude, which is critical for the potential applications of soliton microcombs, such as spectroscopy, optical clocks and microwave generation.

Athermal lithium niobate microresonator

Lithium niobate (LN), possessing wide transparent window, strong electro-optic effect, and large optical nonlinearity, is an ideal material platform for integrated photonics application. Microring resonators are particularly suitable as integrated photonic components, given their flexibility of device engineering and their potential for large-scale integration. However, the susceptibility to temperature fluctuation has become a major challenge for their implementation in a practical environment. Here, we demonstrate an athermal LN microring resonator. By cladding an x-cut LN microring resonator with a thin layer of titanium oxide, we are able to completely eliminate the first-order thermo-optic coefficient (TOC) of cavity resonance right at room temperature (20^°C), leaving only a small residual quadratic temperature dependence with a second-order TOC of only 0.37 pm/K². It corresponds to a temperature-induced resonance wavelength shift within 0.33 nm over a large operating temperature range of (-10 - 50)^°C that is one order of magnitude smaller than a bare LN microring resonator. Moreover, the TiO₂-cladded LN microring resonator is able to preserve high optical quality, with an intrinsic optical Q of 5.8 × 10⁵ that is only about 11% smaller than that of a bare LN resonator. The flexibility of thermo-optic engineering, high optical quality, and device fabrication compatibility show great promise of athermal LN/TiO₂ hybrid devices for practical applications, elevating the potential importance of LN photonic integrated circuits for future communication, sensing, nonlinear and quantum photonics.

Optofluidic biomolecule sensors based on a-Si:H microrings embedded in silicon-glass microchannels

The large-scale and low-cost fabrication of high sensitivity sensors for the real-time detection of biochemicals and molecular substances opens up new opportunities in the areas of bioanalytic screening and medical diagnostics. Planar integrated photonic resonators that can be fabricated with a low footprint, in spatial and wavelength multiplexed arrangements, and that enable integration with microfluidics on the wafer scale have emerged as a promising sensing platform for these application fields. We realized an optofluidic and label-free biosensor that is based on hydrogenated amorphous silicon microring resonators embedded in silicon/glass microfluidic channels for analyte injection and biomolecule immobilization. The optofluidic sensor merits for refractive index and biomolecule sensing are evaluated by sensitivity and detection limit simulations, whereas a proof of concept is demonstrated by real-time protein immobilization experiments of functionalized resonators.

Integrated Amorphous Silicon p-i-n Temperature Sensor for CMOS Photonics

Hydrogenated amorphous silicon (a-Si:H) shows interesting optoelectronic and technological properties that make it suitable for the fabrication of passive and active micro-photonic devices, compatible moreover with standard microelectronic devices on a microchip. A temperature sensor based on a hydrogenated amorphous silicon p-i-n diode integrated in an optical waveguide for silicon photonics applications is presented here. The linear dependence of the voltage drop across the forward-biased diode on temperature, in a range from 30 °C up to 170 °C, has been used for thermal sensing. A high sensitivity of 11.9 mV/°C in the bias current range of 34–40 nA has been measured. The proposed device is particularly suitable for the continuous temperature monitoring of CMOS-compatible photonic integrated circuits, where the behavior of the on-chip active and passive devices are strongly dependent on their operating temperature.