High-speed 3-D measurement with a large field of view based on direct-view confocal microscope with an electrically tunable lens

Optical path optimization of chromatic line confocal displacement sensor for high resolution and wide range

This study introduces the optical path-optimized dual-grating chromatic line confocal imaging (DG-LCI) technique for high-resolution and wide-range surface topography measurements. Chromatic line confocal imaging (LCI) finds extensive applications in high-speed 3D imaging of surface morphology, roughness analysis in industrial production, and quality inspection. A key advantage of LCI is its ability to achieve a large depth of focus, enabling the imaging system to measure a wide range in the Z direction. However, the challenge lies in the trade-off between the measurement range and resolution. Increasing the measurement range reduces the resolution, making it unsuitable for precise measurements required in industrial processing. Conversely, enhancing the resolution limits the measurement range, thereby sacrificing the advantage of LCI systems' broad measurement capabilities. Addressing this limitation, we propose a dual optical path dual-grating structure using a simplified and ingenious optical path optimization design. This design overcomes the challenge of sacrificing the millimeter-level measurement range while simultaneously improving the resolution. Rigorous simulations and experiments validate the effectiveness and validity of our proposed method.

Virtual double-slit differential dark-field chromatic line confocal imaging technology

Chromatic line confocal imaging (LCI) can be used in high-speed 3D imaging of surface morphology, roughness, and multi-layered transparent media in industrial production, quality inspection, and other fields. However, even if they are compensated for or corrected accordingly, the resolution of the built measurement system differs from the theoretical design. In particular, to guarantee high-speed measurement characteristics of the LCI system, a mass center algorithm with poor accuracy is usually chosen for peak extraction, and with the improvement of the manufacturing level, the axial resolution of the measurement system also puts forward higher requirements. Therefore, in this Letter, we propose a virtual double-slit differential dark-field chromatic LCI (VDSDD-LCI) technology. Our approach can reconstruct the optical 3D profile with higher axial resolution and signal-to-noise ratio (SNR) by reducing the full width at half maximums (FWHMs) of the axial response curve without changing the components of the completed LCI system. The experiments on a coin and scrive board surface demonstrate the validity of the proposed method.

Advancing the science of dynamic airborne nanosized particles using Nano-DIHM

In situ and real-time characterization of aerosols is vital to several fundamental and applied research domains including atmospheric chemistry, air quality monitoring, or climate change studies. To date, digital holographic microscopy is commonly used to characterize dynamic nanosized particles, but optical traps are required. In this study, a novel integrated digital in-line holographic microscope coupled with a flow tube (Nano-DIHM) is demonstrated to characterize particle phase, shape, morphology, 4D dynamic trajectories, and 3D dimensions of airborne particles ranging from the nanoscale to the microscale. We demonstrate the application of Nano-DIHM for nanosized particles (≤200 nm) in dynamic systems without optical traps. The Nano-DIHM allows observation of moving particles in 3D space and simultaneous measurement of each particle's three dimensions. As a proof of concept, we report the real-time observation of 100 nm and 200 nm particles, i.e. polystyrene latex spheres and the mixture of metal oxide nanoparticles, in air and aqueous/solid/heterogeneous phases in stationary and dynamic modes. Our observations are validated by high-resolution scanning/transmission electron microscopy and aerosol sizers. The complete automation of software (Octopus/Stingray) with Nano-DIHM permits the reconstruction of thousands of holograms within an hour with 62.5 millisecond time resolution for each hologram, allowing to explore the complex physical and chemical processes of aerosols.

Color three-dimensional imaging based on patterned illumination using a negative pinhole array

Reflectance confocal microscopy is widely used for non-destructive optical three-dimensional (3D) imaging. In confocal microscopy, a stack of sequential two-dimensional (2D) images with respect to the axial position is typically needed to reconstruct a 3D image. As a result, in conventional confocal microscopy, acquisition speed is often limited by the rate of mechanical scanning in both the transverse and axial directions. We previously reported a high-speed parallel confocal detection method using a pinhole array for color 3D imaging without any mechanical scanners. Here, we report a high-speed color 3D imaging method based on patterned illumination employing a negative pinhole array, whose optical characteristics are the reverse of the conventional pinhole array for transmitting light. The negative pinhole array solves the inherent limitation of a conventional pinhole array, i.e., low transmittance, meaning brighter color images with abundant color information can be acquired. We also propose a 3D image processing algorithm based on the 2D cross-correlation between the acquired image and filtering masks, to produce an axial response. By using four-different filtering masks, we were able to increase the sampling points in calculation of height and enhance the lateral resolution of the color acquisition by a factor of four. The feasibility of high-speed non-contact color 3D measurement with the improved lateral resolution and brightness provided by the negative pinhole array was demonstrated by imaging various specimens. We anticipate that this high-speed color 3D measurement technology with negative pinhole array will be a useful tool in a variety of fields where rapid and accurate non-contact measurement are required, such as industrial inspection and dental scanning.

Fast 3D form measurement using a tunable lens profiler based on imaging with LED illumination

We present a fast shape measurement of micro-parts based on depth discrimination in imaging with LED illumination. It is based on a 4f-setup with an electrically adjusted tunable lens at the common Fourier plane. Using such a configuration, the opportunity to implement a fast depth scan by means of a tunable lens without the requirement of mechanically moving parts and depth discrimination using the limited spatial coherence of LED illumination is investigated. The technique allows the use of limited spatially partially coherent illumination which can be easily adapted to the test object by selecting the geometrical parameters of the system accordingly. Using this approach, we demonstrate the approach by measuring the 3D form of a tilted optically rough surface and a cold-formed micro-cup. The approach is robust, fast since required images are captured in less than a second, and eye-safe and offers an extended depth of focus in the range of few millimetres. Using a step height standard, we determine a height error of ±1.75 μm (1σ). This value may be further decreased by lowering the spatial coherence length of the illumination or by increasing the numerical aperture of the imaging system.

High-speed color three-dimensional measurement based on parallel confocal detection with a focus tunable lens

Reflectance confocal microscopy is a widely used optical imaging technique for non-destructive three-dimensional (3D) surface measurement. In confocal microscopy, a stack of two-dimensional (2D) images along the axial position is used for 3D reconstruction. This means the speed of 3D volumetric acquisition is limited by the beam scanning and the mechanical axial scanning. To achieve fast volumetric imaging, simultaneous multiple point scanning by parallelizing the beam instead of transverse point scanning can be considered, using a pinhole array. Previously, we developed a direct-view confocal microscope with a focus tunable lens (FTL) to produce a monochrome 3D surface profile of a sample without any mechanical scanning. Here, we report a high-speed color 3D measurement method based on parallel confocal detection. The proposed method produces a color 3D image of an object by acquiring 180 2D color images with an acquisition time of 1 second. We also visualized the color information of the object by overlaying the color obtained with a color area detector and a white LED illumination on top of the 3D surface profile. In addition, we designed an improved optical system to reduce artifacts caused by internal reflections and developed a new algorithm for noise-resistant 3D measurements. The feasibility of the proposed non-contact high-speed color 3D measurement for use in industrial or biomedical fields was demonstrated by imaging the color 3D shapes of various specimens. We anticipate that this technology can be utilized in various fields, where rapid 3D surface profiles with color information are required.

Rapid acousto-optic focus tuning for improvement of imaging performance in confocal microscopy [Invited]

We demonstrate the application of focus-tunable acousto-optic lens technology in confocal microscopy for a high-speed axial scanning of the object. The advantages of the proposed approach include high axial scan rate, no mechanical sample movement, no additional non-symmetric aberrations, and the control of the effective depth of focus. The acousto-optic lens operating at the focus tuning rate of 300 kHz is developed and implemented in scanning laser confocal microscopy. The performance of the instrumentation is presented using test targets. Rapid focus tuning may enhance in vivo three-dimensional imaging in confocal microscopy.

Single shot, three-dimensional fluorescence microscopy with a spatially rotating point spread function

A wide-field fluorescence microscope with a double-helix point spread function (PSF) is constructed to obtain the specimen's three-dimensional distribution with a single snapshot. Spiral-phase-based computer-generated holograms (CGHs) are adopted to make the depth-of-field of the microscope adjustable. The impact of system aberrations on the double-helix PSF at high numerical aperture is analyzed to reveal the necessity of the aberration correction. A modified cepstrum-based reconstruction scheme is promoted in accordance with properties of the new double-helix PSF. The extended depth-of-field images and the corresponding depth maps for both a simulated sample and a tilted section slice of bovine pulmonary artery endothelial (BPAE) cells are recovered, respectively, verifying that the depth-of-field is properly extended and the depth of the specimen can be estimated at a precision of 23.4nm. This three-dimensional fluorescence microscope with a framerate-rank time resolution is suitable for studying the fast developing process of thin and sparsely distributed micron-scale cells in extended depth-of-field.

A Laser-Based Measuring System for Online Quality Control of Car Engine Block

For online quality control of car engine production, pneumatic measurement instrument plays an unshakeable role in measuring diameters inside engine block because of its portability and high-accuracy. To the limitation of its measuring principle, however, the working space between the pneumatic device and measured surface is too small to require manual operation. This lowers the measuring efficiency and becomes an obstacle to perform automatic measurement. In this article, a high-speed, automatic measuring system is proposed to take the place of pneumatic devices by using a laser-based measuring unit. The measuring unit is considered as a set of several measuring modules, where each of them acts like a single bore gauge and is made of four laser triangulation sensors (LTSs), which are installed on different positions and in opposite directions. The spatial relationship among these LTSs was calibrated before measurements. Sampling points from measured shaft holes can be collected by the measuring unit. A unified mathematical model was established for both calibration and measurement. Based on the established model, the relative pose between the measuring unit and measured workpiece does not impact the measuring accuracy. This frees the measuring unit from accurate positioning or adjustment, and makes it possible to realize fast and automatic measurement. The proposed system and method were finally validated by experiments.