Strong optomechanical coupling in a slotted photonic crystal nanobeam cavity with an ultrahigh quality factor-to-mode volume ratio

High-performance CO detection based on a PhC cavity in terahertz band

Combined with the light absorption from molecular vibration, photonic crystal (PhC) cavity structures have gradually shown great potential in gas detection, particularly for toxic gases. We proposed a PhC cavity with a high-quality factor of 1.24 × 106 and a small mode volume of 2.3 × 10-4 (λ/n)3, which was used for carbon monoxide detection. To reduce the interference of other gases, we set the resonance frequency in the terahertz band. The numerical analysis shows that the structure has good selectivity and high sensitivity, and the linear fitting of the results provides the possibility to realize the application, which has great competitiveness in the same type of sensor structure. Additionally, we also proved that the interference of H2O and CO2 on the CO sensing can be ignored, and it supports the detection of CO without pre-drying.

Nanometer-scale photon confinement in topology-optimized dielectric cavities

Nanotechnology enables in principle a precise mapping from design to device but relied so far on human intuition and simple optimizations. In nanophotonics, a central question is how to make devices in which the light-matter interaction strength is limited only by materials and nanofabrication. Here, we integrate measured fabrication constraints into topology optimization, aiming for the strongest possible light-matter interaction in a compact silicon membrane, demonstrating an unprecedented photonic nanocavity with a mode volume of V ~ 3 × 10-4 λ3, quality factor Q ~ 1100, and footprint 4 λ2 for telecom photons with a λ ~ 1550 nm wavelength. We fabricate the cavity, which confines photons inside 8 nm silicon bridges with ultra-high aspect ratios of 30 and use near-field optical measurements to perform the first experimental demonstration of photon confinement to a single hotspot well below the diffraction limit in dielectrics. Our framework intertwines topology optimization with fabrication and thereby initiates a new paradigm of high-performance additive and subtractive manufacturing.

Two regimes of confinement in photonic nanocavities: bulk confinement versus lightning rods

We present a theoretical study of dielectric bowtie cavities and show that they are governed by two essentially different confinement regimes. The first is confinement inside the bulk dielectric and the second is a local lightning-rod regime where the field is locally enhanced at sharp corners and may yield a vanishing mode volume without necessarily enhancing the mode inside the bulk dielectric. We show that while the bulk regime is reminiscent of the confinement in conventional nanocavities, the most commonly used definition of the mode volume gauges in fact the lightning-rod effect when applied to ultra-compact cavities, such as bowties. Distinguishing between these two regimes will be crucial for future research on nanocavities, and our insights show how to obtain strongly enhanced light-matter interaction over large bandwidths.

Deep sub-wavelength localization of light and sound in dielectric resonators

Optomechanical crystals provide coupling between phonons and photons by confining them to commensurate wavelength-scale dimensions. We present a new concept for designing optomechanical crystals capable of achieving unprecedented coupling rates by confining optical and mechanical waves to deep sub-wavelength dimensions. Our design is based on a dielectric bowtie unit cell with an effective optical/mechanical mode volume of 7.6 × 10^-3(λ/n_Si)³/1.2×10^-3 λ _mech ³. We present results from numerical modeling, indicating a single-photon optomechanical coupling of 2.2 MHz with experimentally viable parameters. Monte Carlo simulations are used to demonstrate the design's robustness against fabrication disorder.

Hexagonal Boron Nitride Cavity Optomechanics

Hexagonal boron nitride (hBN) is an emerging layered material that plays a key role in a variety of two-dimensional devices, and has potential applications in nanophotonics and nanomechanics. Here, we demonstrate the first cavity optomechanical system incorporating hBN. Nanomechanical resonators consisting of hBN beams with average dimensions of 12 μm × 1.2 μm × 28 nm and minimum predicted thickness of 8 nm were fabricated using electron beam induced etching and positioned in the optical near-field of silicon microdisk cavities. Of the multiple devices studied here a maximum 0.16 pm/[Formula: see text] sensitivity to the hBN nanobeam motion is demonstrated, allowing observation of thermally driven mechanical resonances with frequencies between 1 and 23 MHz, and largest mechanical quality factor of 1100 for a 23 MHz mode, at room temperature in high vacuum. In addition, the role of air damping is studied via pressure dependent measurements. Our results constitute an important step toward realizing integrated optomechanical circuits employing hBN.

Optimized process for fabrication of free-standing silicon nanophotonic devices

A detailed procedure is presented for fabrication of free-standing silicon photonic devices that accurately reproduces design dimensions while minimizing surface roughness. By reducing charging effects during inductively coupled-plasma reactive ion etching, undercutting in small, high-aspect ratio openings is reduced. Slot structures with a width as small as 40 nm and an aspect ratio of 5.5:1 can be produced with a nearly straight, vertical sidewall profile. Subsequent removal of an underlying sacrificial silicon dioxide layer by wet-etching to create free-standing devices is performed under conditions which suppress attack of the silicon. Slotted one-dimensional photonic crystal cavities are used as sensitive test structures to demonstrate that performance specifications can be reached without iteratively adapting design dimensions; optical resonance frequencies are within 1% of the simulated values and quality factors on the order of 105 are routinely attained.