Design optimization and fabrication of Mach- Zehnder interferometer based on MIM plasmonic waveguides

ZrN-based plasmonic sensor: a promising alternative to traditional noble metal-based sensors for CMOS-compatible and tunable optical properties

In this article, we introduce a novel comb shaped plasmonic refractive index sensor that employs a ZrN-Insulator-ZrN configuration. The sensor is constructed using Zirconium Nitride (ZrN), an alternative refractory material that offers advantages over traditional metals such as silver and gold, as ZrN is standard Complementary Metal Oxide Semiconductor (CMOS)-compatible and has tunable optical properties. The sensor has recorded a maximum sensitivity, figure of merit (FOM), and sensing resolution of 1445.46 nm/RIU, 140.96, and 6.91 × 10-7RIU-1, respectively. Beyond that, the integration of ZrN offers the sensor with various advantages, including higher hardness, thermal stability at high temperatures, better corrosion and abrasion resistance, and lower electrical resistivity, whereas traditional plasmonic metals lack these properties, curtailing the real-world use of plasmonic devices. As a result, our suggested model surpasses the typical noble material based Metal-Insulator-Metal (MIM) arrangement and offers potential for the development of highly efficient, robust, and durable nanometric sensing devices which will create a bridge between nanoelectronics and plasmonics.

Balance between the diffraction efficiency and process robustness for plasmonic lithographic alignment technology considering the Fabry-Perot resonator effect

Different from traditional lithography, metal material with high absorptivity and high reflectivity is introduced into plasmonic lithography technology. In particular, a silver/photo resist/silver film stack can form a Fabry-Perot (F-P) resonator structure, which can greatly change the behavior of the light reflection and transmission. Since the silver layer has a strong absorption ability to the alignment probe light with a wavelength of 532 or 633 nm, the quality of the alignment signal is seriously affected. In this paper, a thin film Fourier transfer model is established to quantitatively calculate the amplitude and phase information of the diffraction light with different orders. The results show that the diffraction optical power can be enhanced by the thickness optimization of all film stacks, and the maximum wafer quality (normalized diffraction efficiency) can be increased to 25.7%. The mechanism analysis of alignment signal enhancement is based on the F-P resonator phase oscillation amplification effect. However, it can also bring the reverse of both the power and phase for the alignment probe signal when the thickness fluctuation of the F-P resonator exists, which will be a great challenge for through-the-mask moiré fringe alignment technology. To obtain the optical power distribution of the structure surface and image of moiré fringes, a transfer matrix method is given to point-by-point calculate the incidence and reflection of the probe light in the vertical direction. The finite-difference time-domain method is also used to demonstrate alignment performance. It is proved that the subtle fluctuation of the photoresist thickness can make a huge difference to moiré fringes. A balance between the diffraction efficiency and process robustness can be achieved for plasmonic lithographic alignment technology by controlling the thickness range of the F-P resonator structure. In addition, the metal-insulator-metal structure has excellent thickness sensitivity and is applicable to optical signal detection and material property monitoring.

Ultracompact, high-extinction ratio XOR, OR, and Feynman logic gates based on plasmonic metal-insulator-metal directional couplers

Three plasmonic logic gates including XOR, OR, and Feynman based on directional couplers operating in the optical communications band are proposed. First, a 3 dB directional coupler based on metal-insulator-metal waveguides is presented and its operation principles are investigated using the coupled mode theory method. Then, XOR and OR logic gates are implemented simultaneously in one structure. The simulations performed by the finite-difference time-domain method show that the extinction ratios for the OR and XOR gates are infinite and 29.3 dB, respectively. The Feynman gate is also implemented using two directional couplers placed parallel to each other. The ER values for outputs P and Q are 7.26 dB and 34.23 dB, respectively. The footprints of the XOR/OR and Feynman structures are less than 8µm ² and 12µm ², respectively. The presented gates have a high potential to be used in photonic integrated circuits.

A multichannel color filter with the functions of optical sensor and switch

This paper reports a multichannel color filter with the functions of optical sensor and switch. The proposed structure comprises a metal-insulator-metal (MIM) bus waveguide side-couples to six circular cavities with different sizes for filtering ultra-violet and visible lights into individual colors in the wavelength range of 350-700 nm. We used the finite element method to analyze the electromagnetic field distributions and transmittance properties by varying the structural parameters in detail. The designed plasmonic filter takes advantage of filtering out different colors since the light-matter resonance and interference between the surface plasmon polaritons (SPPs) modes within the six cavities. Results show that the designed structure can preferentially select the desired colors and confine the SPPS modes in one of the cavities. This designed structure can filter eleven color channels with a small full width at half maximum (FWHM) ~ 2 nm. Furthermore, the maximum values of sensitivity, figure of merit, quality factor, dipping strength, and extinction ratio can achieve of 700 nm/RIU, 350 1/RIU, 349.0, 65.04%, and 174.50 dB, respectively, revealing the excellent functions of sensor performance and optical switch, and offering a chance for designing a beneficial nanophotonic device.

Ultrahigh Sensitivity of a Plasmonic Pressure Sensor with a Compact Size

This study proposes a compact plasmonic metal-insulator-metal pressure sensor comprising a bus waveguide and a resonator, including one horizontal slot and several stubs. We calculate the transmittance spectrum and the electromagnetic field distribution using the finite element method. When the resonator's top layer undergoes pressure, the resonance wavelength redshifts with increasing deformation, and their relation is nearly linear. The designed pressure sensor possesses the merits of ultrahigh sensitivity, multiple modes, and a simple structure. The maximum sensitivity and resonance wavelength shift can achieve 592.44 nm/MPa and 364 nm, respectively, which are the highest values to our knowledge. The obtained sensitivity shows 23.32 times compared to the highest one reported in the literature. The modeled design paves a promising path for applications in the nanophotonic field.

Significantly enhanced coupling effect and gap plasmon resonance in a MIM-cavity based sensing structure

Herein, we design a high sensitivity with a multi-mode plasmonic sensor based on the square ring-shaped resonators containing silver nanorods together with a metal–insulator-metal bus waveguide. The finite element method can analyze the structure's transmittance properties and electromagnetic field distributions in detail. Results show that the coupling effect between the bus waveguide and the side-coupled resonator can enhance by generating gap plasmon resonance among the silver nanorods, increasing the cavity plasmon mode in the resonator. The suggested structure obtained a relatively high sensitivity and acceptable figure of merit and quality factor of about 2473 nm/RIU (refractive index unit), 34.18 1/RIU, and 56.35, respectively. Thus, the plasmonic sensor is ideal for lab-on-chip in gas and biochemical analysis and can significantly enhance the sensitivity by 177% compared to the regular one. Furthermore, the designed structure can apply in nanophotonic devices, and the range of the detected refractive index is suitable for gases and fluids (e.g., gas, isopropanol, optical oil, and glucose solution).

State-of-the-Art Optical Devices for Biomedical Sensing Applications—A Review

Optical sensors for biomedical applications have gained prominence in recent decades due to their compact size, high sensitivity, reliability, portability, and low cost. In this review, we summarized and discussed a few selected techniques and corresponding technological platforms enabling the manufacturing of optical biomedical sensors of different types. We discussed integrated optical biosensors, vertical grating couplers, plasmonic sensors, surface plasmon resonance optical fiber biosensors, and metasurface biosensors, Photonic crystal-based biosensors, thin metal films biosensors, and fiber Bragg grating biosensors as the most representative cases. All of these might enable the identification of symptoms of deadly illnesses in their early stages; thus, potentially saving a patient’s life. The aim of this paper was not to render a definitive judgment in favor of one sensor technology over another. We presented the pros and cons of all the major sensor systems enabling the readers to choose the solution tailored to their needs and demands.

Ultrawide Bandgap and High Sensitivity of a Plasmonic Metal-Insulator-Metal Waveguide Filter with Cavity and Baffles

A plasmonic metal-insulator-metal waveguide filter consisting of one rectangular cavity and three silver baffles is numerically investigated using the finite element method and theoretically described by the cavity resonance mode theory. The proposed structure shows a simple shape with a small number of structural parameters that can function as a plasmonic sensor with a filter property, high sensitivity and figure of merit, and wide bandgap. Simulation results demonstrate that a cavity with three silver baffles could significantly affect the resonance condition and remarkably enhance the sensor performance compared to its counterpart without baffles. The calculated sensitivity (S) and figure of merit (FOM) in the first mode can reach 3300.00 nm/RIU and 170.00 RIU⁻¹. Besides, S and FOM values can simultaneously get above 2000.00 nm/RIU and 110.00 RIU⁻¹ in the first and second modes by varying a broad range of the structural parameters, which are not attainable in the reported literature. The proposed structure can realize multiple modes operating in a wide wavelength range, which may have potential applications in the on-chip plasmonic sensor, filter, and other optical integrated circuits.

Highly Sensitive and Tunable Plasmonic Sensor Based on a Nanoring Resonator with Silver Nanorods

We numerically and theoretically investigate a highly sensitive and tunable plasmonic refractive index sensor that is composed of a metal-insulator-metal waveguide with a side-coupled nanoring, containing silver nanorods using the finite element method. Results reveal that the presence of silver nanorods in the nanoring has a significant impact on sensitivity and tunability performance. It gives a flexible way to tune the system response in the proposed structure. Our designed sensor has a sensitivity of 2080 nm/RIU (RIU is the refractive index unit) along with a figure of merit and a quality factor of 29.92 and 29.67, respectively. The adequate refractive index sensitivity can increase by adding the silver nanorods in a nanoring, which can induce new surface plasmon polaritons (SPPs) modes that cannot be found by a regular nanoring. For a practical application, a valid introduction of silver nanorods in the nanoring can dramatically reduce the dimension of the proposed structure without sacrificing performance.

Active Enhancement of Slow Light Based on Plasmon-Induced Transparency with Gain Materials

As a plasmonic analogue of electromagnetically induced transparency (EIT), plasmon-induced transparency (PIT) has drawn more attention due to its potential of realizing on-chip sensing, slow light and nonlinear effect enhancement. However, the performance of a plasmonic system is always limited by the metal ohmic loss. Here, we numerically report a PIT system with gain materials based on plasmonic metal-insulator-metal waveguide. The corresponding phenomenon can be theoretically analyzed by coupled mode theory (CMT). After filling gain material into a disk cavity, the system intrinsic loss can be compensated by external pump beam, and the PIT can be greatly fueled to achieve a dramatic enhancement of slow light performance. Finally, a double-channel enhanced slow light is introduced by adding a second gain disk cavity. This work paves way for a potential new high-performance slow light device, which can have significant applications for high-compact plasmonic circuits and optical communication.