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Fletcher J, Parish G, Dell J, Keating A. Morphological and Optical Transformation of Gas Assisted Direct Laser Written Porous Silicon Films. SMALL (WEINHEIM AN DER BERGSTRASSE, GERMANY) 2023; 19:e2300655. [PMID: 37069782 DOI: 10.1002/smll.202300655] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/01/2023] [Indexed: 06/19/2023]
Abstract
Direct laser writing (DLW) of mesoporous porous silicon (PS) films is shown to selectively create spatially separated nitridized and carbonized features on a single film. Nitridized or carbonized features are formed during DLW at 405 nm in an ambient of nitrogen and propane gas, respectively. The range of laser fluence required to create varying feature sizes while avoiding damage to the PS film is identified. At high enough fluence, nitridation using DLW has been shown as an effective method for laterally isolating regions on the PS films. The efficacy in preventing oxidation once passivated is investigated via energy dispersive X-ray spectroscopy. Changes in composition and optical properties of the DL written films are investigated using spectroscopic analysis. Results show carbonized DLW regions have a much higher absorption than as-fabricated PS, attributed to pyrolytic carbon or transpolyacetylene deposits in the pores. Nitridized regions exhibit optical loss similar to previously published thermally nitridized PS films. This work presents methods to engineer PS films for a variety of potential device applications, including the application of carbonized PS to selectively engineer thermal conductivity and electrical resistivity and of nitridized PS to micromachining and selective modification of refractive index for optical applications.
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Affiliation(s)
- Jesse Fletcher
- Department of Electrical, Electronic and Computer Engineering, University of Western Australia, 35 Stirling Hwy, Crawley, 6009, Australia
| | - Giacinta Parish
- Department of Electrical, Electronic and Computer Engineering, University of Western Australia, 35 Stirling Hwy, Crawley, 6009, Australia
| | - John Dell
- Department of Electrical, Electronic and Computer Engineering, University of Western Australia, 35 Stirling Hwy, Crawley, 6009, Australia
| | - Adrian Keating
- Department of Electrical, Electronic and Computer Engineering, University of Western Australia, 35 Stirling Hwy, Crawley, 6009, Australia
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Vercauteren R, Leprince A, Mahillon J, Francis LA. Porous Silicon Biosensor for the Detection of Bacteria through Their Lysate. BIOSENSORS 2021; 11:27. [PMID: 33498536 PMCID: PMC7909573 DOI: 10.3390/bios11020027] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [MESH Headings] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 12/24/2020] [Revised: 01/13/2021] [Accepted: 01/16/2021] [Indexed: 12/13/2022]
Abstract
Porous silicon (PSi) has been widely used as a biosensor in recent years due to its large surface area and its optical properties. Most PSi biosensors consist in close-ended porous layers, and, because of the diffusion-limited infiltration of the analyte, they lack sensitivity and speed of response. In order to overcome these shortcomings, PSi membranes (PSiMs) have been fabricated using electrochemical etching and standard microfabrication techniques. In this work, PSiMs have been used for the optical detection of Bacillus cereus lysate. Before detection, the bacteria are selectively lysed by PlyB221, an endolysin encoded by the bacteriophage Deep-Blue targeting B. cereus. The detection relies on the infiltration of bacterial lysate inside the membrane, which induces a shift of the effective optical thickness. The biosensor was able to detect a B. cereus bacterial lysate, with an initial bacteria concentration of 105 colony forming units per mL (CFU/mL), in only 1 h. This proof-of-concept also illustrates the specificity of the lysis before detection. Not only does this detection platform enable the fast detection of bacteria, but the same technique can be extended to other bacteria using selective lysis, as demonstrated by the detection of Staphylococcus epidermidis, selectively lysed by lysostaphin.
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Affiliation(s)
- Roselien Vercauteren
- Electrical Engineering Department, Institute of Information and Communication Technologies Electronics and Applied Mathematics, UCLouvain, 1348 Louvain-la-Neuve, Belgium;
| | - Audrey Leprince
- Laboratory of Food and Environmental Microbiology, Earth and Life Institute, UCLouvain, 1348 Louvain-la-Neuve, Belgium; (A.L.); (J.M.)
| | - Jacques Mahillon
- Laboratory of Food and Environmental Microbiology, Earth and Life Institute, UCLouvain, 1348 Louvain-la-Neuve, Belgium; (A.L.); (J.M.)
| | - Laurent A. Francis
- Electrical Engineering Department, Institute of Information and Communication Technologies Electronics and Applied Mathematics, UCLouvain, 1348 Louvain-la-Neuve, Belgium;
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Application of Miniature FBG-MEMS Pressure Sensor in Penetration Process of Jacked Pile. MICROMACHINES 2020; 11:mi11090876. [PMID: 32967090 PMCID: PMC7570314 DOI: 10.3390/mi11090876] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 08/30/2020] [Revised: 09/16/2020] [Accepted: 09/18/2020] [Indexed: 11/17/2022]
Abstract
In order to study the penetration mechanism of jacked piles in viscous soil foundation, the stress variation law of the pile–soil interface was obtained by installing silicon piezoresistive earth pressure and pore water pressure sensors, and fiber Bragg grating (FBG) sensors in a model pile body, and the penetration characteristics of jacked piles in homogeneous viscous soil were defined. The test results show that: Fiber Bragg grating and silicon piezoresistive sensing technology can better meet the requirements of testing the characteristics of jacked pile in viscous soil. The ratio of pile lateral resistance to pile end resistance varies when pile is jacked in homogeneous viscous soil. In the early stage of pile jacking, the ratio of pile lateral resistance is small, and in the later stage of pile jacking, the ratio of pile lateral resistance increases, but the ratio of pile end resistance is still higher than that of pile lateral resistance. The ratio of the effective stress to the total radial stress is high, and the variation law of the two is consistent with the depth. The total radial stress, pore water pressure, and effective radial stress all exhibit the degradation phenomenon, and the degradation degree decreases gradually with the increase in penetration depth at the same depth. The ratio of excess pore water pressure to overburden weight decreases with the increase in depth, and the maximum value is 87%. The research results can provide a reference for the engineering practice of jacked pile in viscous soil foundation.
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Manolis A, Chatzianagnostou E, Dabos G, Ketzaki D, Chmielak B, Giesecke AL, Porschatis C, Cegielski PJ, Suckow S, Markey L, Weeber JC, Dereux A, Schrittwieser S, Heer R, Pleros N, Tsiokos D. Ultra-sensitive refractive index sensor using CMOS plasmonic transducers on silicon photonic interferometric platform. OPTICS EXPRESS 2020; 28:20992-21001. [PMID: 32680148 DOI: 10.1364/oe.383435] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/03/2019] [Accepted: 04/01/2020] [Indexed: 06/11/2023]
Abstract
Optical refractive-index sensors exploiting selective co-integration of plasmonics with silicon photonics has emerged as an attractive technology for biosensing applications that can unleash unprecedented performance breakthroughs that reaps the benefits of both technologies. However, towards this direction, a major challenge remains their integration using exclusively CMOS-compatible materials. In this context, herein, we demonstrate, for the first time to our knowledge, a CMOS-compatible plasmo-photonic Mach-Zehnder-interferometer (MZI) based on aluminum and Si3N4 waveguides, exhibiting record-high bulk sensitivity of 4764 nm/RIU with clear potential to scale up the bulk sensitivity values by properly engineering the design parameters of the MZI. The proposed sensor is composed of Si3N4 waveguides butt-coupled with an aluminum stripe in one branch to realize the sensing transducer. The reference arm is built by Si3N4 waveguides, incorporating a thermo-optic phase shifter followed by an MZI-based variable optical attenuation stage to maximize extinction ratio up to 38 dB, hence optimizing the overall sensing performance. The proposed sensor exhibits the highest bulk sensitivity among all plasmo-photonic counterparts, while complying with CMOS manufacturing standards, enabling volume manufacturing.
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Kazanskiy NL, Khonina SN, Butt MA. Subwavelength Grating Double Slot Waveguide Racetrack Ring Resonator for Refractive Index Sensing Application. SENSORS (BASEL, SWITZERLAND) 2020; 20:E3416. [PMID: 32560484 PMCID: PMC7349533 DOI: 10.3390/s20123416] [Citation(s) in RCA: 27] [Impact Index Per Article: 6.8] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/24/2020] [Revised: 06/10/2020] [Accepted: 06/15/2020] [Indexed: 01/15/2023]
Abstract
In this paper, a racetrack ring resonator design based on a subwavelength grating double slot waveguide is presented. The proposed waveguide scheme is capable of confining the transverse electric field in the slots and the gaps between the grating segments. This configuration facilitates a large light-matter interaction which elevates the sensitivity of the device approximately 2.5 times higher than the one that can be obtained via a standard slot waveguide resonator. The best sensitivity of the design is obtained at 1000 nm/RIU by utilizing a subwavelength grating double slot waveguide of period 300 nm. The numerical study is conducted via 2D and 3D finite element methods. We believe that the proposed sensor design can play an important role in the realization of highly sensitive lab-on-chip sensors.
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Affiliation(s)
- Nikolay Lvovich Kazanskiy
- Department of Technical Cybernetics, Samara National Research University, 443086 Samara, Russia; (N.L.K.); (S.N.K.)
- Institute of RAS-Branch of the FSRC “Crystallography and Photonics” RAS, 443086 Samara, Russia
| | - Svetlana Nikolaevna Khonina
- Department of Technical Cybernetics, Samara National Research University, 443086 Samara, Russia; (N.L.K.); (S.N.K.)
- Institute of RAS-Branch of the FSRC “Crystallography and Photonics” RAS, 443086 Samara, Russia
| | - Muhammad Ali Butt
- Department of Technical Cybernetics, Samara National Research University, 443086 Samara, Russia; (N.L.K.); (S.N.K.)
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Talukdar TH, Allen GD, Kravchenko I, Ryckman JD. Single-mode porous silicon waveguide interferometers with unity confinement factors for ultra-sensitive surface adlayer sensing. OPTICS EXPRESS 2019; 27:22485-22498. [PMID: 31510540 DOI: 10.1364/oe.27.022485] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/07/2019] [Accepted: 07/16/2019] [Indexed: 06/10/2023]
Abstract
Guided wave-optics has emerged as a promising platform for label free biosensing. However, device sensitivity toward surface-bound small molecules is directly limited by the evanescent interaction and low confinement factor with the active sensing region. Here, we report a mesoporous silicon waveguide design and inverse fabrication technique that resolves the evanescent field interaction limitation while achieving maximal transverse confinement factors and preserving single-mode operation. The waveguide sensors are characterized in a Fabry-Perot interferometer configuration and the ultra-high sensitivity to small molecule adlayers is demonstrated. We also identify dispersion to be a promising degree of freedom for exceeding the sensitivity limits predicted by the conventional non-dispersive effective medium theory.
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Rodriguez GA, Markov P, Cartwright AP, Choudhury MH, Afzal FO, Cao T, Halimi SI, Retterer ST, Kravchenko II, Weiss SM. Photonic crystal nanobeam biosensors based on porous silicon. OPTICS EXPRESS 2019; 27:9536-9549. [PMID: 31045103 DOI: 10.1364/oe.27.009536] [Citation(s) in RCA: 11] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/14/2019] [Accepted: 03/06/2019] [Indexed: 05/22/2023]
Abstract
Photonic crystal (PhC) nanobeams (NB) patterned on porous silicon (PSi) waveguide substrates are demonstrated for the specific, label-free detection of oligonucleotides. These photonic structures combine the large active sensing area intrinsic to PSi sensors with the high-quality (Q) factor and low-mode volume characteristic of compact resonant silicon-on-insulator (SOI) PhC NB devices. The PSi PhC NB can achieve a Q-factor near 9,000 and has an approximately 40-fold increased active sensing area for molecular attachment, compared to traditional SOI PhC NB sensors. The PSi PhC NB exhibits a resonance shift that is more than one order of magnitude larger than that of a similarly designed SOI PhC NB for the detection of small chemical molecules and 16-base peptide nucleic acids. The design and fabrication of PSi PhC NB sensors are compatible with CMOS processing, sensor arrays, and integration with lab-on-chip systems.
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Martínez-Pérez P, García-Rupérez J. Commercial polycarbonate track-etched membranes as substrates for low-cost optical sensors. BEILSTEIN JOURNAL OF NANOTECHNOLOGY 2019; 10:677-683. [PMID: 30931209 PMCID: PMC6423561 DOI: 10.3762/bjnano.10.67] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/18/2018] [Accepted: 02/14/2019] [Indexed: 05/21/2023]
Abstract
Porous materials have become one of the best options for the development of optical sensors, since they maximize the interaction between the optical field and the target substances, which boosts the sensitivity. In this work, we propose the use of a readily available mesoporous material for the development of such sensors: commercial polycarbonate track-etched membranes. In order to demonstrate their utility for this purpose, we firstly characterized their optical response in the near-infrared range. This response is an interference fringe pattern, characteristic of a Fabry-Pérot interferometer, which is an optical device typically used for sensing purposes. Afterwards, several refractive index sensing experiments were performed by placing different concentrations of ethanol solution on the polycarbonate track-etched membranes. As a result, a sensitivity value of around 56 nm/RIU was obtained and the reusability of the substrate was demonstrated. These results pave the way for the development of optical porous sensors with such easily available mesoporous material.
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Affiliation(s)
- Paula Martínez-Pérez
- Nanophotonics Technology Center, Universitat Politècnica de València, Camino de Vera s/n, 46022 Valencia, Spain
| | - Jaime García-Rupérez
- Nanophotonics Technology Center, Universitat Politècnica de València, Camino de Vera s/n, 46022 Valencia, Spain
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Arshavsky-Graham S, Massad-Ivanir N, Segal E, Weiss S. Porous Silicon-Based Photonic Biosensors: Current Status and Emerging Applications. Anal Chem 2018; 91:441-467. [DOI: 10.1021/acs.analchem.8b05028] [Citation(s) in RCA: 110] [Impact Index Per Article: 18.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/08/2023]
Affiliation(s)
- Sofia Arshavsky-Graham
- Department of Biotechnology and Food Engineering, Technion − Israel Institute of Technology, Haifa 3200003, Israel
- Institute of Technical Chemistry, Leibniz Universität Hannover, Callinstrasse 5, 30167 Hanover, Germany
| | - Naama Massad-Ivanir
- Department of Biotechnology and Food Engineering, Technion − Israel Institute of Technology, Haifa 3200003, Israel
| | - Ester Segal
- Department of Biotechnology and Food Engineering, Technion − Israel Institute of Technology, Haifa 3200003, Israel
- The Russell Berrie Nanotechnology Institute, Technion − Israel Institute of Technology, Haifa 3200003, Israel
| | - Sharon Weiss
- Department of Electrical Engineering and Computer Science, Vanderbilt University, Nashville, Tennessee 37235, United States
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