Augmenting mask-based lithography with direct laser writing to increase resolution and speed

Implantable photonic neural probes with out-of-plane focusing grating emitters

We have designed, fabricated, and characterized implantable silicon neural probes with nanophotonic grating emitters that focus the emitted light at a specified distance above the surface of the probe for spatially precise optogenetic targeting of neurons. Using the holographic principle, we designed gratings for wavelengths of 488 and 594 nm, targeting the excitation spectra of the optogenetic actuators Channelrhodopsin-2 and Chrimson, respectively. The measured optical emission pattern of these emitters in non-scattering medium and tissue matched well with simulations. To our knowledge, this is the first report of focused spots with the size scale of a neuron soma in brain tissue formed from implantable neural probes.

Variable ring-shaped lithography for the fabrication of meso- and microscale binary optical elements

This paper presents concept, optical design, and the implementation of a novel, to the best of our knowledge, lithographic exposure tool for the fabrication of rotationally symmetric meso- and microscale optical structures using a variable ring-shaped light distribution. Compared to the conventional lithographic technique of direct writing in Cartesian coordinates, which is intrinsically suboptimal for the fabrication of rotationally symmetric optical structures, this approach allows for fast exposure and avoids disturbing stitching effects. The diameter of the exposure ring varies between 1.6 and 6.5 mm, and the ring width measures ∼75µm full width at half-maximum for all diameters. The basic capabilities of the exposure tool are demonstrated by the fabrication of exemplary meso- and microscale structures such as diffractive axicon elements, phase rings, Fresnel zone plates and zone plate arrays.

Fabrication of Functional Microdevices in SU-8 by Multi-Photon Lithography

This review surveys advances in the fabrication of functional microdevices by multi-photon lithography (MPL) using the SU-8 material system. Microdevices created by MPL in SU-8 have been key to progress in the fields of micro-fluidics, micro-electromechanical systems (MEMS), micro-robotics, and photonics. The review discusses components, properties, and processing of SU-8 within the context of MPL. Emphasis is focused on advances within the last five years, but the discussion also includes relevant developments outside this period in MPL and the processing of SU-8. Novel methods for improving resolution of MPL using SU-8 and discussed, along with methods for functionalizing structures after fabrication.

Implantable photonic neural probes for light-sheet fluorescence brain imaging

Significance: Light-sheet fluorescence microscopy (LSFM) is a powerful technique for high-speed volumetric functional imaging. However, in typical light-sheet microscopes, the illumination and collection optics impose significant constraints upon the imaging of non-transparent brain tissues. We demonstrate that these constraints can be surmounted using a new class of implantable photonic neural probes. Aim: Mass manufacturable, silicon-based light-sheet photonic neural probes can generate planar patterned illumination at arbitrary depths in brain tissues without any additional micro-optic components. Approach: We develop implantable photonic neural probes that generate light sheets in tissue. The probes were fabricated in a photonics foundry on 200-mm-diameter silicon wafers. The light sheets were characterized in fluorescein and in free space. The probe-enabled imaging approach was tested in fixed, in vitro, and in vivo mouse brain tissues. Imaging tests were also performed using fluorescent beads suspended in agarose. Results: The probes had 5 to 10 addressable sheets and average sheet thicknesses < 16    μ m for propagation distances up to 300    μ m in free space. Imaging areas were as large as ≈ 240    μ m × 490    μ m in brain tissue. Image contrast was enhanced relative to epifluorescence microscopy. Conclusions: The neural probes can lead to new variants of LSFM for deep brain imaging and experiments in freely moving animals.

Microfabrication and Surface Functionalization of Soda Lime Glass through Direct Laser Interference Patterning

All-purpose glasses are common in many established and emerging industries, such as microelectronics, photovoltaics, optical components, and biomedical devices due to their outstanding combination of mechanical, optical, thermal, and chemical properties. Surface functionalization through nano/micropatterning can further enhance glasses’ surface properties, expanding their applicability into new fields. Although laser structuring methods have been successfully employed on many absorbing materials, the processability of transparent materials with visible laser radiation has not been intensively studied, especially for producing structures smaller than 10 µm. Here, interference-based optical setups are used to directly pattern soda lime substrates through non-lineal absorption with ps-pulsed laser radiation in the visible spectrum. Line- and dot-like patterns are fabricated with spatial periods between 2.3 and 9.0 µm and aspect ratios up to 0.29. Furthermore, laser-induced periodic surface structures (LIPSS) with a feature size of approximately 300 nm are visible within these microstructures. The textured surfaces show significantly modified properties. Namely, the treated surfaces have an increased hydrophilic behavior, even reaching a super-hydrophilic state for some cases. In addition, the micropatterns act as relief diffraction gratings, which split incident light into diffraction modes. The process parameters were optimized to produce high-quality textures with super-hydrophilic properties and diffraction efficiencies above 30%.