High-sensitivity photoacoustic gas detector by employing multi-pass cell and fiber-optic microphone

High-sensitivity trace gas detection based on differential Helmholtz photoacoustic cell with dense spot pattern

A high-sensitivity photoacoustic spectroscopy (PAS) sensor based on differential Helmholtz photoacoustic cell (DHPAC) with dense spot pattern is reported in this paper for the first time. A multi-pass cell based on two concave mirrors was designed to achieve a dense spot pattern, which realized 212 times excitation of incident laser. A finite element analysis was utilized to simulate the sound field distribution and frequency response of the designed DHPAC. An erbium-doped fiber amplifier (EDFA) was employed to amplify the output optical power of the laser to achieve strong excitation. In order to assess the designed sensor's performance, an acetylene (C2H2) detection system was established using a near infrared diode laser with a central wavelength 1530.3 nm. According to experimental results, the differential characteristics of DHPAC was verified. Compared to the sensor without dense spot pattern, the photoacoustic signal with dense spot pattern had a 44.73 times improvement. The minimum detection limit (MDL) of the designed C2H2-PAS sensor can be improved to 5 ppb when the average time of the sensor system is 200 s.

Dense Multibutterfly Spots-Enhanced Miniaturized Optical Fiber Photoacoustic Gas Sensor

A miniaturized optical fiber photoacoustic gas sensor enhanced by dense multibutterfly spots is reported for the first time. The principle of space light transmission of neglecting paraxial approximation is theoretically analyzed for designing a dense multibutterfly spots-based miniature multipass cell. In a multipass photoacoustic tube with a diameter of 16 mm, the light beam is reflected about a hundred times. The light spots on the mirror surfaces at both ends of the photoacoustic tube form a dense multibutterfly distribution. The volume of the micro multipass gas chamber is only 5.3 mL. An optical fiber cantilever based on F-P interference is utilized as a photoacoustic pressure detector. Compared with that of the single-pass structure, the gas detection ability of the photoacoustic system with dense multibutterfly spots is improved by about 50 times. The proposed miniaturized sensor realizes a detection limit of 3.4 ppb for C2H2 gas with an averaging time of 100 s. The recognized coefficients of minimum detectable absorption (αmin) and normalized noise equivalent absorption are 1.9 × 10-8 cm-1 and 8.4 × 10-10 W cm-1 Hz-1/2, respectively.

Fiber-Optic Photoacoustic Gas Sensor with Multiplexed Fabry-Pérot Interferometric Cantilevers

A fiber-optic photoacoustic (PA) gas sensor with multiplexed Fabry-Pérot (F-P) interferometric cantilevers is demonstrated. A compact cylindrical nonresonant PA tube with a volume of only 0.45 mL is designed. The PA signal is measured by two symmetrically installed fiber-optic interferometric cantilever microphones (FOICMs) to improve the signal-to-noise ratio (SNR). For multiplexing the two cantilevers by a single demodulation system, a dual cavity length synchronous measurement method based on total-phase demodulation algorithm with ultrahigh resolution is developed. The PA signal detection is realized by the second-harmonic wavelength modulation spectroscopy (2f-WMS) technique. The sensor performance is verified by conducting the detection of trace acetylene (C2H2). The normalized noise equivalent absorption (NNEA) coefficient is 2.5 × 10-9 cm-1·W·Hz-1/2, and the minimum detection limit (MDL) downs to about 0.2 ppm with an averaging time of 1 s. The fiber-optic PA gas sensor has characteristics of high resolution and immunity to electromagnetic and vibration interference. Furthermore, the technical scheme of the multiplexed cantilever demodulation shows great potential for remote multipoint monitoring of gases in harsh environments.

Differential integrating sphere-based photoacoustic spectroscopy gas sensing

In this Letter, a differential integrating sphere-based photoacoustic spectroscopy (PAS) gas sensor is proposed for the first time to our knowledge. The differential integrating sphere system consists of two integrating spheres and a tube. Based on differential characteristics, the photoacoustic signal of the designed differential integrating sphere was doubly enhanced and the noise was suppressed. Compared with a single channel integrating sphere, the differential integrating sphere sensing system had a 1.86 times improvement in signal level. An erbium-doped fiber amplifier (EDFA) was adopted to amplify the output of diode laser to enhance the optical excitation. The second harmonic (2f) signal of differential integrating sphere-based acetylene (C2H2) PAS sensor with an amplified 1000 mW optical output power was 104.67 mV, which was 22.80 times improved compared to the sensing system without EDFA. When the integration time was 100 s, the minimum detection limit (MDL) of the differential integrating sphere-based C2H2 PAS sensor was 416.7 ppb. The differential integrating sphere provides a new method, to the best of our knowledge, for the development of PAS sensor, which has the advantages of photoacoustic signal enhancement, strong noise immunity, and no need for optical adjustment.

Integrated near-infrared fiber-optic photoacoustic sensing demodulator for ultra-high sensitivity gas detection

An integrated near-infrared fiber-optic photoacoustic sensing demodulator was established for ultra-high sensitivity gas detection. The demodulator has capacities of interference spectrum acquisition and calculation, laser modulation control as well as digital lock-in amplification. FPGA was utilized to realize all the control and signal processing functions, which immensely improved the integration and stability of the system. The photoacoustic signal detection based on fiber-optic Fabry-Perot (F-P) acoustic sensor was realized by applying ultra-high resolution spectral demodulation technique. The detectable frequency of photoacoustic signal achieved 10 kHz. The system integrated lock-in amplification technology, which made the noise sound pressure and dynamic response range of sound pressure detection reached 3.7 μPa/√Hz @1 kHz and 142 dB, respectively. The trace C2H2 gas was tested with a multi-pass resonant photoacoustic cell. Ultra-high sensitivity gas detection was accomplished, which was based on high acoustic detection sensitivity and the matching digital lock-in amplification. The system detection limit and normalized noise equivalent absorption (NNEA) coefficient were reached 3.5 ppb and 6.7 × 10-10 cm-1WHz-1/2, respectively. The devised demodulator can be applied for long-distance gas measurement, which depends on the fact that both the near-infrared photoacoustic excitation light and the probe light employ optical fiber as transmission medium.

Low-frequency Resonant Photoacoustic Gas Sensor by Employing Hollow Core Fiber-Based O-Shaped Multipass Cells

A low-frequency flexible resonant photoacoustic (PA) gas sensor using an O-shaped multipass cell is demonstrated. The PA sensor employed a flexible gradually tapered leaky hollow core fiber (LHCF). The LHCF was bent to be an end-to-end structure to make full use of the incident light. Additionally, the two ends of the LHCF were put inside a single buffer chamber, yielding an equivalent H-type acoustic resonator. The geometric size was reduced thanks to the bending structure. The geometric length of the LHCF was 500 mm. A micro-electro-mechanical-systems electrical microphone was installed at the center of the resonant tube to detect the PA signal. The proposed PA gas sensor exhibited a first-order longitudinal resonance frequency of 408 Hz. Trace acetylene (C2H2) was used as the target gas. The minimum detectable limit was calculated to be 25.8 parts-per-billion (ppb) with an average time of 400 s, which was 1.93 times higher than that of a single-pass PA gas sensor. The normalized noise-equivalent absorption coefficient and the PA cell constant were calculated to be 9.6 × 10-9 W·cm-1·Hz-1/2 and 8295 Pa/W·cm-1, respectively. The PA gas sensor owns a low resonance frequency and can be used for detection of most of the polar gaseous molecules, especially suitable for gas molecules with a long V-T relation time, such as carbon monoxide and carbon dioxide.

Flexible Hollow Core Fiber Photoacoustic Gas Sensor Based on Embedded Acoustic Resonant Structure

In this paper, we demonstrate a flexible leaky hollow core fiber (LHCF) photoacoustic (PA) gas sensor based on an embedded acoustic resonant structure. The sensor employs a part of a gas conduit as the buffer chamber to construct an equivalent T-type half-open PA cell. The LHCF is installed inside of the gas conduit and the LHCF is hence replaceable. Also, the flexibility of the LHCF and the gas conduit make the gas sensor flexible to reduce spatial size. The inner diameter and length of the LHCF are 1.6 mm and 70 mm, respectively. The inner diameter and length of the gas conduit are 4 mm and 210 mm, respectively. The total gas volume of the sensor is only ∼2.6 mL. Trace acetylene (C2H2) is selected as the target gas to evaluate the performance of the PA gas sensor. A near-infrared distributed feedback (DFB) laser is utilized to generate the PA signal, and an electrical micro-electro-mechanical system (MEMS) microphone is employed to extract the PA signal. The experimental results show that the minimum detection limit (MDL) can be as low as 21.1 ppb when the lock-in integration time is 200 s. And the normalized noise equivalent absorption coefficient (NNEA) is calculated to be 5.7 × 10-9·W/cm-1·Hz-1/2.

Compact optical fiber photoacoustic gas sensor with integrated multi-pass cell

Optical fiber acoustic sensors with miniature size and high sensitivity are attractive to develop compact photoacoustic spectroscopy. Here, a compact photoacoustic gas sensor was demonstrated by utilizing a diaphragm-based fiber-optic Fabry-Perot cavity as both the acoustic sensor and the multipass cell. A nanoscale graphite film was used as the flexible diaphragm to increase the acoustic sensitivity of the Fabry-Perot cavity and the cavity inner surface was coated with highly-reflective Au film to form a multipass cell for amplification of the photoacoustic signal. With a laser power of 20 mW at 1532.8 nm, the sensor demonstrated a low detection limit of ∼ 50 ppb for C₂H₂ gas with an integration time of ∼ 100 s. The optical fiber photoacoustic gas sensor with a millimeter-scale diameter and ppb-level detection limit is promising for trace gas sensing in various areas including industrial process and environmental monitoring.

A Miniaturized 3D-Printed Quartz-Enhanced Photoacoustic Spectroscopy Sensor for Methane Detection with a High-Power Diode Laser

In this invited paper, a highly sensitive methane (CH₄) trace gas sensor based on quartz-enhanced photoacoustic spectroscopy (QEPAS) technique using a high-power diode laser and a miniaturized 3D-printed acoustic detection unit (ADU) is demonstrated for the first time. A high-power diode laser emitting at 6057.10 cm^-1 (1650.96 nm), with the optical power up to 38 mW, was selected as the excitation source to provide a strong excitation. A 3D-printed ADU, including the optical and photoacoustic detection elements, had a dimension of 42 mm, 27 mm, and 8 mm in length, width, and height, respectively. The total weight of this 3D-printed ADU, including all elements, was 6 g. A quartz tuning fork (QTF) with a resonant frequency and Q factor of 32.749 kHz and 10,598, respectively, was used as an acoustic transducer. The performance of the high-power diode laser-based CH₄-QEPAS sensor, with 3D-printed ADU, was investigated in detail. The optimum laser wavelength modulation depth was found to be 0.302 cm^-1. The concentration response of this CH₄-QEPAS sensor was researched when the CH₄ gas sample, with different concentration samples, was adopted. The obtained results showed that this CH₄-QEPAS sensor had an outstanding linear concentration response. The minimum detection limit (MDL) was found to be 14.93 ppm. The normalized noise equivalent absorption (NNEA) coefficient was obtained as 2.20 × 10^-7 cm^-1W/Hz^-1/2. A highly sensitive CH₄-QEPAS sensor, with a small volume and light weight of ADU, is advantageous for the real applications. It can be portable and carried on some platforms, such as an unmanned aerial vehicle (UAV) and a balloon.

Highly sensitive photoacoustic acetylene detection based on differential photoacoustic cell with retro-reflection-cavity

In this paper, a highly sensitive photoacoustic spectroscopy (PAS) sensor based on retro-reflection-cavity-enhanced differential photoacoustic cell (DPAC) is demonstrated for the first time. Acetylene (C₂H₂) was selected as the analyte. The DPAC was designed to effectively suppress noise and increase signal level. The retro-reflection-cavity consisted of two right-angle prisms was designed to reflect the incident light to realize four passes. The photoacoustic response of the DPAC was simulated and investigated based on the finite element method. Wavelength modulation and second harmonic demodulation technologies were applied for sensitive trace gas detection. The first-order resonant frequency of the DPAC was found to be 1310 Hz. The differential characteristics were investigated and the 2f signal amplitude for this C₂H₂-PAS sensor based on retro-reflection-cavity-enhanced DPAC had a 3.55 times improvement compared to the system without the retro-reflection-cavity. An Allan deviation analysis was performed to investigate the long-term stability of the system. The minimum detection limit (MDL) was measured to be 15.81 ppb with an integration time of 100 s.

Generalized design of simple, stable and compact nested multipass cells with a reentrant symmetric concentric circle pattern

We present a particular solution of the Herriott design by replacing each spherical mirror with two coaxial nested spherical mirrors with different curvatures. The analytical solution of the nested MPC parameters is derived based on the principle of the Herriott cell and the symmetry of the pattern, which enables the rapid design of nested MPCs with different optical path lengths (OPLs). The nested MPC performance is explored by parameter analysis, the ray tracing method and the transfer matrix method. We further designed and manufactured a miniaturized and long-OPL MPC, which exhibits robustness, high mirror utilization and a good q-parameter of the output beam. The miniaturized nested MPC can achieve a 10 m effective OPL at a volume of 28.4 mL, and the long-OPL MPC can obtain a 100 m effective OPL at a volume of 1.3 L.

Microfabricated sensor device for CW and pulsed laser power measurements

On-line measurement is a trend of development toward laser-based applications. We present a fiber-integrated force sensor device for laser power measurement with both CW mode and pulse mode based on laser radiometric heat and radiation force sensing simultaneously. The sensor device is fabricated using a standard microfabrication process. Laser intensity is determined through the displacement of a movable mirror measured by an integrated Fabry-Perot interferometer. Compared with the performance of the device in the ambient condition, a non-linearity error of 0.02% and measurement uncertainty of 2.06% is observed in the quasi-vacuum condition for CW laser illumination. This device can measure a CW laser power with a 46.4 μW/Hz^1/2 noise floor and a minimum detection limit of 0.125 mW. For a pulsed laser, a non-linearity error of 0.37% and measurement uncertainty of 2.08% is achieved with a noise floor of 1.3 μJ/Hz^1/2 and a minimum detection limit of 3 μJ.

Active noise reduction for a differential Helmholtz photoacoustic sensor excited by an intensity-modulated light source

A highly sensitive differential Helmholtz photoacoustic sensor with active noise reduction was reported. Coupled to one cavity of the photoacoustic cell, an intensity-modulated excitation light would reflect multiple times to produce photoacoustic signal, and meanwhile cause the solid-state photoacoustic effect forming differential mode noise with the frequency same as the photoacoustic signal, which could not be suppressed by conventional differential technology. Wavelength modulation technology is a splendid method to restrain this effect, which is not suitable for light sources with not adjustable wavelength. To suppress this kind of noise, an intensity-modulated compensation light was coupled to another cavity, whose central wavelength was at the non-absorption line of the measured gas. The compensation light was of the same frequency, phase, and power as the excitation light, by which the solid-state photoacoustic effects were produced to form destructive interference called active noise reduction. The experiment results showed that the active noise reduction significantly improved the signal-to-noise ratio and signal-to-background ratio. Compared with the differential, the differential with active noise reduction improved signal-to- noise ratio by about 1.2 times and signal-to-background ratio by about 9.4 times. When low-power near-infrared lasers were employed as the two light sources, the minimum detection limits for acetylene and methane reached 21 and 200 ppb, respectively.

Design of a high-sensitivity differential Helmholtz photoacoustic cell and its application in methane detection

A high-sensitivity differential Helmholtz photoacoustic cell based on multiple reflection was reported, and its performance parameters and gas replacement time were optimized by finite element simulation. To realize the long absorption path of the measured gas, the collimated excitation light was reflected multiple times on the gold-plated wall of the absorption cavity, and the wavelength modulation technology was used to reduce the multiple reflection noise. Additionally, the differential could suppress external co-phase noise and double the photoacoustic signal. When a laser with a central wavelength of 1653 nm was employed as the excitation light source, the minimum detection limit of 177 ppb (signal-to-noise ratio, SNR = 1) for methane was achieved within a detection time of 1 s, and the corresponding normalized noise equivalent absorption coefficient was 4.1×10^-10 cm^-1WHZ^-1/2.

Study on a photoacoustic spectroscopy trichloromethane gas detection method based on an arched photoacoustic cavity

As an important component in photoacoustic spectroscopy gas detection systems, the performance of the photoacoustic cavity directly affects the sensitivity and resolution of the system. Based on a study of photoacoustic cavity performance, a new type of arched photoacoustic cavity is proposed. Finite element simulation software is used for modeling. By comparing the influences of the position and radius of the central sphere, the length and radius of the resonant cavity, and the radius of the buffer chamber on the performance of the photoacoustic cavity, the optimal structural size of the arched photoacoustic cavity is determined. Compared to a traditional cylindrical photoacoustic cavity with the same size, and considering the thermal viscous acoustic loss, a thermal-acoustic coupling multiphysical field simulation of the two models is carried out. The acoustic pressure signal of the arched photoacoustic cavity is 6 times that of the cylindrical photoacoustic cavity, the resonant frequency increases by 300 Hz, and the quality factor is 2.6 times that of the cylindrical photoacoustic cavity. The performance of the arched photoacoustic cavity is significantly improved. A photoacoustic spectroscopy system for the detection of chloroform gas (CHCl₃) is built based on an arched photoacoustic cavity. Detection experiments are carried out with different concentrations of chloroform. At room temperature (25 °C) and atmospheric pressure, the linear coefficient R₂ is 0.9975, and the detection sensitivity is 0.28 ppm. The system has great practical value for the detection of chloroform gas in industrial and agricultural applications.

Application of the Photoacoustic Approach in the Characterization of Nanostructured Materials

A new generation of sensors can be engineered based on the sensing of several markers to satisfy the conditions of the multimodal detection principle. From this point of view, photoacoustic-based sensing approaches are essential. The photoacoustic effect relies on the generation of light-induced deformation (pressure) perturbations in media, which is essential for sensing applications since the photoacoustic response is formed due to a contrast in the optical, thermal, and acoustical properties. It is also particularly important to mention that photoacoustic light-based approaches are flexible enough for the measurement of thermal/elastic parameters. Moreover, the photoacoustic approach can be used for imaging and visualization in material research and biomedical applications. The advantages of photoacoustic devices are their compact sizes and the possibility of on-site measurements, enabling the online monitoring of material parameters. The latter has significance for the development of various sensing applications, including biomedical ones, such as monitoring of the biodistribution of biomolecules. To extend sensing abilities and to find reliable measurement conditions, one needs to clearly understand all the phenomena taking place during energy transformation during photoacoustic signal formation. Therefore, the current paper is devoted to an overview of the main measurement principles used in the photoacoustic setup configurations, with a special focus on the key physical parameters.

Sensitive multi-species photoacoustic gas detection based on mid-infrared supercontinuum source and miniature multipass cell

We report multipass broadband photoacoustic spectroscopy of trace gases in the mid-infrared. The measurement principle of the sensor relies on supercontinuum-based Fourier transform photoacoustic spectroscopy (FT-PAS), in which a scanning...

Non-Local Patch Regression Algorithm-Enhanced Differential Photoacoustic Methodology for Highly Sensitive Trace Gas Detection

A non-local patch regression (NLPR) denoising-enhanced differential broadband photoacoustic (PA) sensor was developed for the high-sensitive detection of multiple trace gases. Using the edge preservation index (EPI) and signal-to-noise ratio (SNR) as a dual-criterion, the fluctuation was dramatically suppressed while the spectral absorption peaks were maintained by the introduction of a NLPR algorithm. The feasibility of the broadband framework was verified by measuring the C2H2 in the background of ambient air. A normalized noise equivalent absorption (NNEA) coefficient of 6.13 × 10−11 cm−1·W·Hz−1/2 was obtained with a 30-mW globar source and a SNR improvement factor of 23. Furthermore, the simultaneous multiple-trace-gas detection capability was determined by measuring C2H2, H2O, and CO2. Following the guidance of single-component processing, the NLPR processed results showed higher EPI and SNR compared to the spectra denoised by the wavelet method and the non-local means algorithm. The experimentally determined SNRs of the C2H2, H2O, and CO2 spectra were improved by a factor of 20. The NNEA coefficient reached a value of 7.02 × 10−11 cm−1·W·Hz−1/2 for C2H2. The NLPR algorithm presented good performance in noise suppression and absorption peak fidelity, which offered a higher dynamic range and was demonstrated to be an effective approach for trace gas analysis.

Quartz tuning fork-based demodulation of an acoustic signal induced by photo-thermo-elastic energy conversion

A gas sensing method based on quartz-enhanced photothermal spectroscopy (QEPTS) demodulated by quartz tuning fork (QTF) sensing acoustic wave is reported for the first time. Different from traditional QEPTS, the method proposed in this paper utilizes the second QTF to sense acoustic wave produced by the first QTF owing to the vibration resulted from photo-thermo-elastic effect. This indirect demodulation by acoustic wave sensing can avoid QTF being irradiated by laser beam and therefore get less noise and realize better detection sensitivity. Four different sensing configurations are designed and verified. Acetylene (C₂H₂) with a volume concentration of 1.95 % is selected as the target gas. A model of sound field produced by the first QTF vibrating is established by finite element method to explain the variation trend of signal and noise in the second QTF. The measured results indicate that this technique had an enhanced signal-to-noise ratio (SNR) of 1.36 times when compared to the traditional QEPTS. Further improvement methods for such technique is proposed.

Trace CH4 Gas Detection Based on an Integrated Spherical Photoacoustic Cell

This paper presents an integrated spherical photoacoustic cell (SPAC) for trace methane (CH4) gas detection. Theoretical analysis and analogue simulations are carried out to analyze the acoustic field distribution of the SPAC at resonant and non-resonant modes. The finite element simulation results based on COMSOL show that the first-order radial resonant frequency and second-order angular resonant frequency are 24,540 Hz and 18,250 Hz, respectively, which show good agreements with the formula analysis results. The integrated SPAC, together with a high-speed spectrometer and a distributed feedback (DFB) laser source, makes up a photoacoustic (PA) spectroscopy (PAS) system, which is employed for CH4 detection. The minimum detection limit (MDL) is measured to be 126.9 parts per billion (ppb) at an average time of 1000 s. The proposed SPAC has an integrated, miniaturized and all-optical structure, which can be used for remote and long-distance trace gas detection.

Ppb-level detection of methane based on an optimized T-type photoacoustic cell and a NIR diode laser

This paper presents an optimized T-type resonant photoacoustic (PA) cell for methane (CH4) gas detection. The noise transmission coefficients and PA field distributions of the T-type resonant PA cell have been evaluated using the finite element method and thermoviscous acoustic theory. The optimized T-type resonant PA cell, together with a near-infrared (NIR) distributed feedback (DFB) laser source, a high-speed spectrometer and a fiber-optic acoustic sensor constitutes a PAS system for CH4 detection. The sensitivity is measured to be 1.8 pm/ppm and a minimum detectable limit (MDL) of 9 parts per billion (ppb) can be achieved with an averaging time of 500 s. The optimized T-type longitudinal resonant PA cell features of high PA cell constant, fast response time and simple manufacturing process.

Multiple reflections enhanced fiber-optic photoacoustic sensor for gas micro-leakage

A multiple reflections-enhanced fiber-optic photoacoustic (PA) gas sensor for gas micro-leakage is introduced. Multiple reflections of the excitation laser occur on the inner surface of a reflective ring to enhance the PA signal. The PA signal is obtained by measuring the deflection of the gold-coated poly (phenylene sulfide) (PPS) diaphragm with a Fabry-Perot interferometer (FPI). The second harmonic wavelength modulation spectrum (2f-WMS) technology can essentially eliminate the fundamental frequency noise generated by the wavelength-independent absorption of the reflective ring. Experimental results show that the PA signal can be effectively enhanced 11.7 times by the multiple reflections optical path compare with the double-pass optical path. The minimum detection limit of the system is achieved to be 23.6 ppb. The designed PA gas sensor is suited for remote detection of gas micro-leakage.

An all-Optical Photoacoustic Sensor for the Detection of Trace Gas

A highly sensitive Fabry–Perot based transduction method is proposed as an all-optical alternative for the detection of trace gas by the photoacoustic spectroscopy technique. A lumped element model is firstly devised to help design the whole system and is successfully compared to finite element method simulations. The fabricated Fabry–Perot microphone consists in a hinged cantilever based diaphragm, processed by laser cutting, and directly assembled at the tip of an optical fiber. We find a high acoustic sensitivity of 630 mV/Pa and a state-of-the-art noise equivalent pressure, as low as ~ 2 μPa/Hz at resonance. For photoacoustic trace gas detection, the Fabry–Perot microphone is further embedded in a cylindrical multipass cell and shows an ultimate detection limit of 15 ppb of NO in nitrogen. The proposed optical trace gas sensor offers the advantages of high sensitivity and easy assembling, as well as the possibility of remote detection.

Simultaneous measurement of acoustic pressure and temperature using a Fabry-Perot interferometric fiber-optic cantilever sensor

A Fabry-Perot (F-P) interferometric fiber-optic cantilever sensor is presented for simultaneous measurement of acoustic pressure and temperature, which are demodulated by a single high-speed spectrometer. The acoustic pressure wave pushes the cantilever to produce periodic deflection, while the temperature deforms the sensor and causes the F-P cavity length to change slowly. The absolute length of the F-P cavity of the fiber-optic cantilever sensor is calculated rapidly by using a spectral demodulation method. The acoustic pressure and temperature are obtained by high-pass filtering and averaging the continuously measured absolute cavity length value, respectively. The experimental results show that the acoustic pressure can be detected with an ultra-high sensitivity of 198.3 nm/Pa at 1 kHz. In addition, an increase in temperature reduces the resonant frequency of the acoustic response and increases the static F-P cavity length. The temperature coefficient of the resonance frequency shift and the temperature response of the sensor are -0.49 Hz/°C and 83 nm/°C, respectively. Furthermore, through temperature compensation, the measurement error of acoustic pressure reaches ± 3%. The proposed dual parameter measurement scheme greatly simplifies the system structure and reduces the system cost.