Simultaneous measurement of acoustic pressure and temperature using a Fabry-Perot interferometric fiber-optic cantilever sensor

Fiber-Optic Photoacoustic Gas Microsensor Dual Enhanced by Helmholtz Resonator and Interferometric Cantilever

A high-sensitivity fiber-optic photoacoustic (PA) gas microsensor is demonstrated with dual enhancement based on acoustics and detection. Due to the characteristic of small size, a Helmholtz resonator is integrated into a miniature PA sensor. The acoustically amplified PA signal is detected by a high-sensitivity fiber Fabry-Perot (F-P) interferometric cantilever. The first-order resonant frequencies of the interferometric cantilever and Helmholtz resonator are matched by subtle adjustments. The weak PA signal is significantly enhanced in a volume of only 0.35 mL, which breaks the volume limitation of the resonance modes in traditional PA sensing systems. To improve the resolution of the microsensor, a white light interferometry (WLI)-based spectral demodulation algorithm is utilized. The experimental results indicate that the minimum detection limit of acetylene (C2H2) drops to about 15 ppb with an averaging time of 100 s, corresponding to the normalized noise equivalent absorption (NNEA) coefficient of 2.7 × 10-9 W·cm-1·Hz-1/2. The dual resonance enhanced fiber-optic PA gas microsensor has the merits of high sensitivity, intrinsic safety, and compact structure.

Differential Cantilever Enhanced Fiber-Optic Photoacoustic Sensor for Diffusion Gas Detection

Aiming at the problem of the fiber-optic photoacoustic (PA) sensor being easily disturbed by external vibration and noise, a differential cantilever enhanced fiber-optic PA sensor is proposed for diffusion gas detection. The sensor comprises two PA tubes with the same structure and a pair of differential interferometric cantilevers. The two PA tubes are symmetrically distributed. The laser is incident on the PA tube as the signal channel to excite the PA pressure wave. Another tube without incident laser is used as the reference channel to suppress external disturbance. The external interference signals and PA signals superimposed with disturbance are detected by the differential cantilevers from the two channels. The signals are simultaneously restored by a single white-light interferometry demodulator, which multiplexed the spectral frequency domain of the superimposed interference spectrum. The experimental results show that the suppression effect of the differential cantilever enhanced PA sensor on ambient noise is improved by 80%, compared to the traditional single-cantilever sensor. The external cofrequency disturbance is suppressed by 20.9 dB. The minimum detection limit to acetylene (C2H2) downs to about 60 ppb with an integration time of 100 s. The sensor has excellent antivibration and electromagnetic interference ability.

Ultrahigh-speed phase demodulation of a Fabry-Perot sensor based on fiber array parallel spectral detection

An ultrahigh-speed phase demodulation system was designed for the Fabry-Perot (F-P) interferometric sensor based on fiber array parallel spectral detection. A high-power amplified spontaneous emission (ASE) source served as the broadband detection light. The spectrum generated by the dispersion of the F-P interference light through an arrayed waveguide grating (AWG) was incident into the fiber array and was detected in parallel by 48 photodiodes. The 48-channel signals were acquired synchronously and processed in real time to achieve a phase demodulation for the F-P cavity at 200 kHz. As a result, a low-resolution spectral detection and demodulation system was constructed with high speed. The length demodulation range of the F-P cavity was 60-700 µm, and the demodulation resolution was as high as 0.22 nm. The designed high-sensitivity demodulator is expected to be used for ultrasonic and high-frequency vibration detection.

Integrated near-infrared fiber-optic photoacoustic sensing demodulator for ultra-high sensitivity gas detection

An integrated near-infrared fiber-optic photoacoustic sensing demodulator was established for ultra-high sensitivity gas detection. The demodulator has capacities of interference spectrum acquisition and calculation, laser modulation control as well as digital lock-in amplification. FPGA was utilized to realize all the control and signal processing functions, which immensely improved the integration and stability of the system. The photoacoustic signal detection based on fiber-optic Fabry-Perot (F-P) acoustic sensor was realized by applying ultra-high resolution spectral demodulation technique. The detectable frequency of photoacoustic signal achieved 10 kHz. The system integrated lock-in amplification technology, which made the noise sound pressure and dynamic response range of sound pressure detection reached 3.7 μPa/√Hz @1 kHz and 142 dB, respectively. The trace C2H2 gas was tested with a multi-pass resonant photoacoustic cell. Ultra-high sensitivity gas detection was accomplished, which was based on high acoustic detection sensitivity and the matching digital lock-in amplification. The system detection limit and normalized noise equivalent absorption (NNEA) coefficient were reached 3.5 ppb and 6.7 × 10-10 cm-1WHz-1/2, respectively. The devised demodulator can be applied for long-distance gas measurement, which depends on the fact that both the near-infrared photoacoustic excitation light and the probe light employ optical fiber as transmission medium.

High sensitivity composite F-P cavity fiber optic sensor based on MEMS for temperature and salinity measurement of seawater

We proposed an optical fiber salinity sensor with a composite Fabry-Perot (F-P) cavity structure for simultaneous measurement of temperature and salinity based on microelectromechanical system (MEMS) technology. The sensor contains two sensing cavities. The silicon cavity is used for temperature sensing, and the seawater cavity processed by the glass microstructure is sensitive to the refractive index of seawater for salinity sensing. At the same time, the influence of the salinity-temperature cross-sensitivity error of the seawater cavity is effectively compensated by using the temperature single parameter sensitivity characteristics of the silicon cavity. The structural design of the sensor seawater cavity includes a cross-shaped groove and a cylindrical fluid cavity. The surface hydrophilicity treatment was performed on the interior of the cavity to solve the effect of no water injection in the cavity caused by the miniaturization of the sensor. The optical path difference (OPD) demodulation method is used to demodulate the two F-P cavities with large dynamic range and high resolution. In the range of 5∼40°C and 5∼ 40 ‰, the temperature and salinity sensitivity of the sensor can reach 110.25 nm/°C and 178.75 nm/‰, respectively, and the resolution can reach 5.02 × 10-3°C and 0.0138‰. It has the advantages of mass production, high stability, and small size, which give it great potential for marine applications.

Optical Fiber Probe Microcantilever Sensor Based on Fabry–Perot Interferometer

Optical fiber Fabry–Perot sensors have long been the focus of researchers in sensing applications because of their unique advantages, including highly effective, simple light path, low cost, compact size, and easy fabrication. Microcantilever-based devices have been extensively explored in chemical and biological fields while the interrogation methods are still a challenge. The optical fiber probe microcantilever sensor is constructed with a microcantilever beam on an optical fiber, which opens the door for highly sensitive, as well as convenient readout. In this review, we summarize a wide variety of optical fiber probe microcantilever sensors based on Fabry–Perot interferometer. The operation principle of the optical fiber probe microcantilever sensor is introduced. The fabrication methods, materials, and sensing applications of an optical fiber probe microcantilever sensor with different structures are discussed in detail. The performances of different kinds of fiber probe microcantilever sensors are compared. We also prospect the possible development direction of optical fiber microcantilever sensors.

Multimode interferometric sensor based on the no-core tellurite optical fiber for cryogenic temperature detection

In this paper, a no-core tellurite optical fiber (NCTOF)-based sensor was proposed for cryogenic temperature detection in refrigeration process. The ultraviolet adhesive (UVA) dual-curing method was operated to stablish a sandwich-like composite structure, in which a section of NCTOF was compactly sandwiched between two segments of silica fiber to form multimode interference. The temperature sensing characteristics in cryogenic range were experimentally investigated by monitoring the transmission spectral movement, where a high sensitivity of 105.6 pm/°C was achieved in the range of -20-0 °C and 51.6 pm/°C in the range of -20-25 °C. The excellent performance was consistent with the simulation analysis. The maximum repeatability standard deviation and stability wavelength error of the sensor are 0.9799 pm/°C and 0.1676 nm, respectively. To the best of our knowledge, this is the first report on using tellurite optical fibers for cryogenic temperature detection, and the UVA dual-curing method provides a reliable solution for the integration and practical application of tellurite optical fiber. The proposed sensor is simple in structure, easy in fabrication, low in cost and excellent in performance. It can be expected to be used in food refrigeration, air-conditioning engineering, medical and health, industrial production, etc.

Research on high-temperature characteristics of a miniature Fabry-Pérot cavity acoustic sensor

The applications of fiber-optic acoustic sensors are expanded to the high-temperature field, but it still faces challenges to realize the wide-band and high-sensitivity acoustic signal detection in high-temperature environments. Here, we propose a miniature membrane-free fiber-optic acoustic sensor based on a rigid Fabry-Pérot (F-P) cavity and construct an acoustic signal detection system. The system can achieve high-sensitivity acoustic detection while maintaining a wide frequency band in temperatures ranging from 20 °C to 200 °C. The prepared F-P cavity based on optical contact technology is the sensitive unit of the sensor, and has a high-quality factor of 8.8×10⁵. Specifically, with the increasing of temperature, the sensitivity gradually increases, and the frequency response range does not change. A maximum sensitivity of 491.2 mV/Pa and a high signal-to-noise ratio of 60.9 dB are achieved at 200 °C. The sensor has an excellent acoustic signal response in the frequency range of 10 Hz-50 kHz with a flatness of ±2 dB. This study is important for the application of the fiber-optic acoustic sensor in high-temperature environments.

Fabry-Perot interferometric sensor demodulation system utilizing multi-peak wavelength tracking and neural network algorithm

For FPI sensor demodulation systems to be used in actual engineering measurement, they must have high performance, low cost, stability, and scalability. Excellent performance, however, necessitates expensive equipment and advanced algorithms. This research provides a new absolute demodulation system for FPI sensors that is high-performance and cost-effective. The reflected light from the sensor was demultiplexed into distinct channels using an array waveguide grating (AWG), with the interference spectrum features change translated as the variation of the transmitted intensity in each AWG channel. This data was fed into an end-to-end neural network model, which was utilized to interrogate multiple interference peaks' absolute peak wavelengths simultaneously. This architecturally simple network model can achieve remarkable generalization capabilities without training large-scale datasets using an appropriate data augmentation strategy. Experiments show that in simultaneous multi-wavelength and cavity length interrogations, the proposed system has the precision of up to ± 14 pm and ± 0.07 µm, respectively. The interrogation resolution can theoretically reach the pm level benefit from the neural network method. Furthermore, the system's outstanding demodulation repeatability and suitability were demonstrated. The system is expected to provide a high-performance and cost-effective, reliable solution for practical engineering applications.

Acoustic Performance Study of Fiber-Optic Acoustic Sensors Based on Fabry–Pérot Etalons with Different Q Factors

The ideal development direction of the fiber-optic acoustic sensor (FOAS) is toward broadband, a high sensitivity and a large dynamic range. In order to further promote the acoustic detection potential of the Fabry–Pérot etalon (FPE)-based FOAS, it is of great significance to study the acoustic performance of the FOAS with the quality (Q) factor of FPE as the research objective. This is because the Q factor represents the storage capability and loss characteristic of the FPE. The three FOASs with different Q factors all achieve a broadband response from 20 Hz to 70 kHz with a flatness of ±2 dB, which is consistent with the theory that the frequency response of the FOAS is not affected by the Q factor. Moreover, the sensitivity of the FOAS is proportional to the Q factor. When the Q factor is 1.04×106, the sensitivity of the FOAS is as high as 526.8 mV/Pa. Meanwhile, the minimum detectable sound pressure of 347.33 μPa/Hz1/2  is achieved. Furthermore, with a Q factor of 0.27×106, the maximum detectable sound pressure and dynamic range are 152.32 dB and 107.2 dB, respectively, which is greatly improved compared with two other FOASs. Separately, the FOASs with different Q factors exhibit an excellent acoustic performance in weak sound detection and high sound pressure detection. Therefore, different acoustic detection requirements can be met by selecting the appropriate Q factor, which further broadens the application range and detection potential of FOASs.

Cantilever deflection optical fiber sensor based on a chirped fiber grating Fabry-Perot cavity

A cantilever deflection fiber-optic sensor based on chirped fiber grating (CFG) Fabry-Perot (FP) cavity had been proposed and experimental demonstrated. Two CFBGs with the same chirped coefficient direction and grating parameters are written in one single-mode fiber by UV mask exposure to form the CFG-FP cavity. The central wavelength of two CFGs is 1549.6072 nm, the 3 dB bandwidth is 2.9897 nm, and the physical cavity length of two CFGs is 1 cm. The grating region of two CFGs are straightness fixed on a cantilever beam, forming a sensor. Then the optical properties of this sensor are tested with different stresses at different positions of the cantilever beam. The experimental results show that this sensor can obtain linear displacement of a cantilever beam, overcoming the abilities of the FBG sensor, which only performed point measurement defect. The wavelength drift sensitivity of the sensor is 2.31 pm/g, and linearity is 0.99916. This sensor has great application value in the precise measurement of cantilever beam type and two-dimensional scale strain.

Research on the Frequency Response and Dynamic Range of the Quadrature Fiber Optic Fabry-Perot Cavity Microphone Based on the Differential Cross Multiplication Demodulation Algorithm

A quadrature fiber optic Fabry–Perot cavity microphone based on a differential cross multiplication algorithm consists of a pair of fibers and a membrane. It has many advantages such as high sensitivity, a simple structure, and resistance to electromagnetic interference. However, there are no systematic studies on its key performance, for example, its frequency response and dynamic range. In this paper, a comprehensive study of these two key parameters is carried out using simulation analysis and experimental verification. The upper limit of the frequency response range and the upper limit of the dynamic range influence each other, and they are both affected by the data sampling rate. At a certain data sampling rate, the higher the upper limit of the frequency response range is the lower the upper limit of the dynamic range. The quantitative relationship between them is revealed. In addition, these two key parameters also are affected by the quadrature phase deviation. The quadrature phase deviation should not exceed 0.25π under the condition that the demodulated signal intensity is not attenuated by more than 3 dB. Subsequently, a short-step quadrature Fabry–Perot cavity method is proposed, which can suppress the quadrature phase deviation of the quadrature fiber optic Fabry–Perot cavity microphone based on the differential cross multiplication algorithm.

Evaluating a Human Ear-Inspired Sound Pressure Amplification Structure with Fabry-Perot Acoustic Sensor Using Graphene Diaphragm

In order to enhance the sensitivity of a Fabry–Perot (F-P) acoustic sensor without the need of fabricating complicated structures of the acoustic-sensitive diaphragm, a mini-type external sound pressure amplification structure (SPAS) with double 10 μm thickness E-shaped diaphragms of different sizes interconnected with a 5 mm length tapered circular rod was developed based on the acoustic sensitive mechanism of the ossicular chain in the human middle ear. The influence of thickness and Young’s modulus of the two diaphragms with the diameters of 15 mm and 3 mm, respectively, on the amplification ratio and frequency response were investigated via COMSOL acoustic field simulation, thereby confirming the dominated effect. Then, three kinds of dual-diaphragm schemes relating to steel and thermoplastic polyurethanes (TPU) materials were introduced to fabricate the corresponding SPASs. The acoustic test showed that the first scheme achieved a high resonant response frequency with lower acoustic amplification due to strong equivalent stiffness; in contrast, the second scheme offered a high acoustic amplification but reduced frequency range. As a result of sensitivity enhancement, adapted with the steel/TPU diaphragm structure, an optical fiber Fabry–Perot sensor using a multilayer graphene diaphragm with a diameter of 125 μm demonstrated a remarkable sensitivity of 565.3 mV/Pa @1.2 kHz due to the amplification ratio of up to ~29.9 in the range of 0.2–2.3 kHz, which can be further improved by miniaturizing structure dimension, along with the use of microstructure packaging technology.

In-Fiber Interferometric-Based Sensors: Overview and Recent Advances

In-fiber interferometric-based sensors are a rapidly growing field, as these sensors exhibit many desirable characteristics compared to their regular fiber-optic counterparts and are being implemented in many promising devices. These sensors have the capability to make extremely accurate measurements on a variety of physical or chemical quantities such as refractive index, temperature, pressure, curvature, concentration, etc. This article is a comprehensive overview of the different types of in-fiber interferometric sensors that presents and discusses recent developments in the field. Basic configurations, a brief approach of the operating principle and recent applications are introduced for each interferometric architecture, making it easy to compare them and select the most appropriate one for the application at hand.

Acoustic Optical Fiber Sensor Based on Graphene Oxide Membrane

A Fabry-Pérot acoustic sensor based on a graphene oxide membrane was developed with the aim to achieve a faster and simpler fabrication procedure when compared to similar graphene-based acoustic sensors. In addition, the proposed sensor was fabricated using methods that reduce chemical hazards and environmental impacts. The developed sensor, with an optical cavity of around 246 µm, showed a constant reflected signal amplitude of 6.8 ± 0.1 dB for 100 nm wavelength range. The sensor attained a wideband operation range between 20 and 100 kHz, with a maximum signal-to-noise ratio (SNR) of 32.7 dB at 25 kHz. The stability and sensitivity to temperatures up to 90 °C was also studied. Moreover, the proposed sensor offers the possibility to be applied as a wideband microphone or to be applied in more complex systems for structural analysis or imaging.

Wideband fiber-optic Fabry-Perot acoustic sensing scheme using high-speed absolute cavity length demodulation

In this paper, we realize a wideband fiber-optic Fabry-Perot (F-P) acoustic sensing (FPAS) scheme by utilizing a high-speed absolute cavity length demodulation with a 70-kHz maximum line rate spectrometer. The wideband FPAS is made of a pre-stress stainless-steel diaphragm based on F-P interferometric structure. The real-time absolute F-P cavity lengths are calculated by a phase demodulation method, which is realized by processing the interference image at a 70-kHz frame rate. Acoustic signal is obtained by extracting the AC component of the demodulated cavity length. The experimental results show that the spectrometer can be running at a 50-kHz line rate, and an acoustic detection wideband of 20 Hz to 20 kHz is obtained. The noise-limited minimum detectable sound pressure level is 18.8 dB, which is sensitive enough for the communication of human voice. The proposed wideband acoustic sensing scheme achieves good robustness, which is promising as a speech-sound microphone for communication during the magnetic resonance imaging procedure.

Ultrasensitive temperature fiber optic sensor based on a HO(Me2SiO)nH (silicone rubber) Fabry-Pérot cavity

An ultra-sensitive fiber optic sensor based on a HO(Me₂SiO)_nH (silicone rubber) Fabry-Pérot (FP) resonant cavity is fabricated through a simple method of dipping, which has high linearity, high sensitivity, and a wide response range to temperature. The silicone rubber can form a smooth sphere without wire drawing, and it has strong heat resistance and aging resistance. Its favorable waterproof performance enables it to work efficiently in different humid environments. A method of synchronizing the detection and wavelength sweeping signal is applied to analyze the wavelength shifts of the interference signal. The sensitivity of the fabricated FP sensor is almost 400 pm/°C in the range of 50-190°C with a linearity of 0.999, and the resolution is 0.002 nm. In addition, the testing results at room temperature can also satisfy the linear relationship, providing the possibility of applications in the biological field.