On-chip silicon photonics based grating assisted vibration sensor

Miniaturization of Laser Doppler Vibrometers-A Review

Laser Doppler vibrometry (LDV) is a non-contact vibration measurement technique based on the Doppler effect of the reflected laser beam. Thanks to its feature of high resolution and flexibility, LDV has been used in many different fields today. The miniaturization of the LDV systems is one important development direction for the current LDV systems that can enable many new applications. In this paper, we will review the state-of-the-art method on LDV miniaturization. Systems based on three miniaturization techniques will be discussed: photonic integrated circuit (PIC), self-mixing, and micro-electrochemical systems (MEMS). We will explain the basics of these techniques and summarize the reported miniaturized LDV systems. The advantages and disadvantages of these techniques will also be compared and discussed.

Modeling a grating coupler-based interferometer for far-field-sensing of nanoscale displacements

Sensing displacements at the nanoscale is the basis for many metrology applications, in particular atomic-force microscopy. Displacement sensing with nano-optomechanical structures provides interesting opportunities for integration, but it typically features a small dynamic range due to the near-field nature of the sensor-sample interaction. Here, a far-field sensing approach based on a grating coupler is considered and an analytical model used to tune its performance is introduced. The proposed model allows exploiting the full range of design parameters and thereby optimizing resolution and dynamic range. The compact size of the sensor and the possibility of integrating it with an on-chip laser and detector make it very promising for fully-integrated optical sensing systems.